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1. 发明申请

WO2008109875A1 PULSED LASER ATOM PROBE AND ASSOCIATED METHODS 审中-公开
标题翻译：脉冲激光原子探针和相关方法
公开(公告)号：WO2008109875A1
公开(公告)日：2008-09-12
申请号：PCT/US2008/056326
申请日：2008-03-07
申请人： IMAGO SCIENTIFIC INSTRUMENTS CORPORATION , BUNTON, Joseph, Hale
发明人： BUNTON, Joseph, Hale
IPC分类号： G01N23/00
CPC分类号： H01J49/0004 , B82Y15/00 , H01J49/164
摘要： The present invention is directed generally toward atom probe specimen shape, atom probe control, data and associated systems and methods. Aspects of the invention are directed toward improving mass resolution by utilizing a pulsed laser system configured to reduce the laser spot size to 5 microns or less.
摘要翻译：本发明通常涉及原子探针样品形状，原子探针控制，数据和相关系统和方法。本发明的方面旨在通过利用被配置为将激光光斑尺寸减小到5微米或更小的脉冲激光系统来改善质量分辨率。

2. 发明申请

WO2007053721A2 ATOM PROBE PULSE ENERGY 审中-公开
标题翻译： ATOM探头脉冲能量
公开(公告)号：WO2007053721A2
公开(公告)日：2007-05-10
申请号：PCT/US2006042742
申请日：2006-10-31
申请人： IMAGO SCIENT INSTR CORP , BUNTON JOSEPH HALE
发明人： BUNTON JOSEPH HALE
IPC分类号： G01N23/00
CPC分类号： H01J37/285 , B82Y15/00 , H01J2237/2852 , H01J2237/2855
摘要： The present invention relates to atom probe pulse energy. One aspect of the invention is directed toward a method that includes establishing a data relationship between pulse energy and bias energy for a target evaporation rate. In selected embodiments, establishing a data relationship can include determining an equivalent pulse fraction for a selected pulse energy and bias energy combination based on a local change in bias energy compared to a local change in pulse energy associated with the selected pulse energy and bias energy combination. Another aspect of the invention is directed toward a method that includes determining an equivalent pulse fraction for a first bias energy and pulse energy combination and/or a second bias energy and pulse energy combination based on the difference between the first bias energy and the second bias energy compared to the difference between the first pulse energy and the second pulse energy.
摘要翻译：本发明涉及原子探针脉冲能量。本发明的一个方面涉及一种方法，其包括针对目标蒸发速率建立脉冲能量和偏压能量之间的数据关系。在选择的实施例中，建立数据关系可以包括基于与所选择的脉冲能量和偏置能量组合相关联的脉冲能量的局部变化，基于偏置能量的局部变化来确定所选择的脉冲能量和偏置能量组合的等效脉冲分数。本发明的另一方面涉及一种方法，其包括基于第一偏置能量和第二偏压之间的差异来确定第一偏置能量和脉冲能量组合的等效脉冲分数和/或第二偏置能量和脉冲能量组合与第一脉冲能量和第二脉冲能量之间的差相比。

3. 发明申请

WO2007022265A3 ATOM PROBES, ATOM PROBE SPECIMENS, AND ASSOCIATED METHODS 审中-公开
标题翻译：原子探针，原子探针样品和相关方法
公开(公告)号：WO2007022265A3
公开(公告)日：2007-05-10
申请号：PCT/US2006031982
申请日：2006-08-15
申请人： IMAGO SCIENT INSTR CORP , KELLY THOMAS F , BUNTON JOSEPH HALE , WIENER SCOTT ALBERT
发明人： KELLY THOMAS F , BUNTON JOSEPH HALE , WIENER SCOTT ALBERT
IPC分类号： G01N23/00
CPC分类号： G01N23/22
摘要： The present invention relates generally to atom probes, atom probe specimens, and associated methods. For example, certain aspects are directed toward methods for analyzing a portion of a specimen that includes selecting a region of interest and moving a portion of material in a border region proximate to the region of interest so that at least a portion of the region of interest protrudes relative to at least a portion of the border region. The method further includes analyzing a portion of the region of interest. Other aspects of the invention are directed toward a method for applying photonic energy in an atom probe process by passing photonic energy through a lens system separated from a photonic device and spaced apart from the photonic device. Yet other aspects of the invention are directed toward a method for reflecting photonic energy off an outer surface of an electrode onto a specimen.
摘要翻译：本发明一般涉及原子探针，原子探针试样和相关方法。例如，某些方面涉及用于分析样本的一部分的方法，所述方法包括选择感兴趣区域并移动邻近感兴趣区域的边界区域中的材料的一部分，使得感兴趣区域的至少一部分相对于边界区域的至少一部分突出。该方法还包括分析感兴趣区域的一部分。本发明的其它方面涉及一种通过将光子能量通过与光子器件分离并与光子器件间隔开的透镜系统来在原子探测过程中施加光子能量的方法。本发明的其它方面涉及将光子能量从电极的外表面反射到样本上的方法。

4. 发明申请

WO2006101558A3 LASER ATOM PROBES 审中-公开
标题翻译：激光原子探针
公开(公告)号：WO2006101558A3
公开(公告)日：2007-05-03
申请号：PCT/US2005046842
申请日：2005-12-20
申请人： IMAGO SCIENT INSTR CORP , BUNTON JOSEPH HALE , KELLY THOMAS F , LENZ DANIEL R , WIENER SCOTT ALBERT
发明人： BUNTON JOSEPH HALE , KELLY THOMAS F , LENZ DANIEL R , WIENER SCOTT ALBERT
IPC分类号： H01J37/285 , H01S3/10
CPC分类号： H01J49/164 , B82Y35/00 , H01J37/285 , H01J49/0004 , H01J2237/2812 , H01J2237/2813
摘要： An atom probe includes a specimen mount that holds a specimen to be analyzed. A detector is spaced apart from the specimen mount. A local electrode with an aperture is located between the detector and the specimen mount. A laser is oriented to emit a laser beam toward the specimen mount at a nonzero angle with respect to the aperture plane, the aperture plane being oriented perpendicular to an ion travel path defined through the aperture between the specimen mount and the detector.
摘要翻译：原子探针包括保持要分析的样品的样品座。检测器与样品支架间隔开。具有孔径的局部电极位于检测器和样品座之间。激光器被定向成相对于孔径平面以非零角度向激光束发射激光束，孔径平面垂直于通过样品支架和检测器之间的孔限定的离子行进路径取向。

5. 发明申请

WO2007022265A2 ATOM PROBES, ATOM PROBE SPECIMENS, AND ASSOCIATED METHODS 审中-公开
标题翻译：原子探针，原子探针样本和相关方法
公开(公告)号：WO2007022265A2
公开(公告)日：2007-02-22
申请号：PCT/US2006/031982
申请日：2006-08-15
申请人： IMAGO SCIENTIFIC INSTRUMENTS CORPORATION , KELLY, Thomas, F. , BUNTON, Joseph, Hale , WIENER, Scott, Albert
发明人： KELLY, Thomas, F. , BUNTON, Joseph, Hale , WIENER, Scott, Albert
IPC分类号： G01N23/00
CPC分类号： G01N23/22
摘要： The present invention relates generally to atom probes, atom probe specimens, and associated methods. For example, certain aspects are directed toward methods for analyzing a portion of a specimen that includes selecting a region of interest and moving a portion of material in a border region proximate to the region of interest so that at least a portion of the region of interest protrudes relative to at least a portion of the border region. The method further includes analyzing a portion of the region of interest. Other aspects of the invention are directed toward a method for applying photonic energy in an atom probe process by passing photonic energy through a lens system separated from a photonic device and spaced apart from the photonic device. Yet other aspects of the invention are directed toward a method for reflecting photonic energy off an outer surface of an electrode onto a specimen.
摘要翻译：本发明一般涉及原子探针，原子探针样本和相关方法。例如，某些方面针对用于分析样本的一部分的方法，该方法包括选择感兴趣区域并移动靠近感兴趣区域的边界区域中的材料的一部分，使得感兴趣区域的至少一部分相对于边界区域的至少一部分突出。该方法还包括分析感兴趣区域的一部分。本发明的其它方面涉及一种用于通过使光子能量穿过从光子器件分离并与光子器件间隔开的透镜系统而在原子探针过程中施加光子能量的方法。本发明的其他方面涉及用于将光子能量从电极外表面反射到样品上的方法。

6. 发明申请

WO2006101558A2 LASER ATOM PROBES 审中-公开
标题翻译：激光原子探针
公开(公告)号：WO2006101558A2
公开(公告)日：2006-09-28
申请号：PCT/US2005/046842
申请日：2005-12-20
申请人： IMAGO SCIENTIFIC INSTRUMENTS CORPORATION , BUNTON, Joseph, Hale , KELLY, Thomas, F. , LENZ, Daniel, R. , WIENER, Scott, Albert
发明人： BUNTON, Joseph, Hale , KELLY, Thomas, F. , LENZ, Daniel, R. , WIENER, Scott, Albert
IPC分类号： H01S3/10
CPC分类号： H01J49/164 , B82Y35/00 , H01J37/285 , H01J49/0004 , H01J2237/2812 , H01J2237/2813
摘要： An atom probe includes a specimen mount that can hold a specimen to be analyzed. A detector is spaced apart from the specimen mount. Between the detector and specimen mount Is a local electrode with an aperture. A laser is oriented to emit a laser beam toward the specimen mount at a nonzero angle with respect to the aperture plane, the aperture plane being oriented perpendicular to an ion travel path defined through the aperture between the specimen mount and detector.
摘要翻译：原子探针包括可容纳要分析的样品的样品座。检测器与试样支架间隔开。检测器和样品座之间是具有孔径的局部电极。激光器被定向成相对于孔径平面以非零角度向激光束发射激光束，孔径平面垂直于通过样品支架和检测器之间的孔限定的离子行进路径定向。

7. 发明申请

WO2007053721A3 ATOM PROBE PULSE ENERGY 审中-公开
公开(公告)号：WO2007053721A3
公开(公告)日：2007-05-10
申请号：PCT/US2006/042742
申请日：2006-10-31
申请人： IMAGO SCIENTIFIC INSTRUMENTS CORPORATION , BUNTON, Joseph, Hale
发明人： BUNTON, Joseph, Hale
IPC分类号： H01J21/00 , H01J21/24
摘要： The present invention relates to atom probe pulse energy. One aspect of the invention is directed toward a method that includes establishing a data relationship between pulse energy and bias energy for a target evaporation rate. In selected embodiments, establishing a data relationship can include determining an equivalent pulse fraction for a selected pulse energy and bias energy combination based on a local change in bias energy compared to a local change in pulse energy associated with the selected pulse energy and bias energy combination. Another aspect of the invention is directed toward a method that includes determining an equivalent pulse fraction for a first bias energy and pulse energy combination and/or a second bias energy and pulse energy combination based on the difference between the first bias energy and the second bias energy compared to the difference between the first pulse energy and the second pulse energy.

8. 发明申请

WO2007001321A8 ATOM PROBE ELECTRODE TREATMENTS 审中-公开
标题翻译：原子探针电极处理
公开(公告)号：WO2007001321A8
公开(公告)日：2007-02-08
申请号：PCT/US2005025740
申请日：2005-07-21
申请人： IMAGO SCIENT INSTR CORP , ULFIG ROBERT MATTHEW , BUNTON JOSEPH HALE , KELLY THOMAS F , LARSON DAVID JAMES , MARTENS RICHARD LAWRENCE , THOMPSON KEITH JOSEPH , WIENER SCOTT ALBERT
发明人： ULFIG ROBERT MATTHEW , BUNTON JOSEPH HALE , KELLY THOMAS F , LARSON DAVID JAMES , MARTENS RICHARD LAWRENCE , THOMPSON KEITH JOSEPH , WIENER SCOTT ALBERT
IPC分类号： H01J37/00
CPC分类号： G01Q60/00 , B82Y35/00
摘要： A method for treating an atom probe electrode (120), which comprises the steps of providing an atom electrode (120) having a surface (123) and an aperture (122); and removing material (604) from the surface (123) to reduce a potential of the atom probe electrode creating a non-uniformity in an electric field (502) when the atom probe electrode is used in a atom probe device during specimen analysis.
摘要翻译：一种用于处理原子探针电极（120）的方法，其包括提供具有表面（123）和孔径（122）的原子电极（120）的步骤; 以及当在样本分析期间在原子探针装置中使用原子探针电极时，从表面（123）去除材料（604）以减小原子探针电极在电场（502）中产生不均匀性的电位。

9. 发明申请

WO2007001321A1 ATOM PROBE ELECTRODE TREATMENTS 审中-公开
标题翻译：原子探针电极处理
公开(公告)号：WO2007001321A1
公开(公告)日：2007-01-04
申请号：PCT/US2005/025740
申请日：2005-07-21
申请人： IMAGO SCIENTIFIC INSTRUMENTS CORPORATION , ULFIG, Robert, Matthew , BUNTON, Joseph, Hale , KELLY, Thomas, F. , LARSON, David, James , MARTENS, Richard, Lawrence , THOMPSON, Keith, Joseph , WIENER, Scott, Albert
发明人： ULFIG, Robert, Matthew , BUNTON, Joseph, Hale , KELLY, Thomas, F. , LARSON, David, James , MARTENS, Richard, Lawrence , THOMPSON, Keith, Joseph , WIENER, Scott, Albert
IPC分类号： H01J37/00
CPC分类号： H01J37/285
摘要： The present invention relates to treatments for atom probe electrodes, including treatments for atom probe electrodes used in atom probe devices (e.g., atom probe microscopes). For example, certain embodiments are directed toward processes for treating an atom probe electrode to reduce a potential of the atom probe electrode creating a field emission or a thermionic emission when the atom probe electrode is used in an atom probe device during specimen analysis. Some of the treatments can include processes that make a surface of the atom probe electrode smoother and/or increase a consistency of material in the surface of the atom probe electrode. For example, in certain embodiments the treating processes can include depositing material on the surface of the atom probe electrode, removing material from the surface, heating the surface, cooling the surface, impacting the surface with ionized gas atoms, and/or applying laser energy to the surface.
摘要翻译：本发明涉及原子探针电极的处理，包括在原子探针装置（例如原子探针显微镜）中使用的原子探针电极的处理。例如，当在样品分析期间当原子探针电极用于原子探针装置时，某些实施方案涉及用于处理原子探针电极以减少原子探针电极的电位而产生场发射或热离子发射的方法。一些处理可以包括使原子探针电极的表面更平滑和/或增加原子探针电极表面的材料的稠度的方法。例如，在某些实施例中，处理过程可以包括在原子探针电极的表面上沉积材料，从表面去除材料，加热表面，冷却表面，用电离气体原子冲击表面和/或施加激光能量到表面。

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