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    • 1. 发明授权
    • Process for preparing a hydrogen sensor
    • 氢传感器的制备方法
    • US06800499B2
    • 2004-10-05
    • US10157251
    • 2002-05-28
    • Huey-Ing ChenWen-Chau LiuYen-I ChouChin-Yi ChuHsi-Jen Pan
    • Huey-Ing ChenWen-Chau LiuYen-I ChouChin-Yi ChuHsi-Jen Pan
    • H01L2100
    • G01N33/005H01L21/28581
    • A high-sensitivity Pd/InP hydrogen sensor was made by a) forming an n-type or p-type semiconductor film on a semiconductor substrate; b) forming a patterned first metal electrode on the semiconductor film, wherein the first metal electrode forms an Ohmic contact with the semiconductor film; and c) forming a second metal electrode on the semiconductor film, the second metal electrode being isolated from the first metal electrode, wherein the second metal electrode forms a Schottky contact with the semiconductor film, wherein a thickness of the second metal electrode and a material of which the second metal electrode is made enable a Schottky barrier height of the Schottky contact to decrease when hydrogen contacts the second metal electrode. The second metal electrode can be physical vapor deposited or electroless plated.
    • 通过a)在半导体衬底上形成n型或p型半导体膜来制造高灵敏度Pd / InP氢传感器; b)在所述半导体膜上形成图案化的第一金属电极,其中所述第一金属电极与所述半导体膜形成欧姆接触; 以及c)在所述半导体膜上形成第二金属电极,所述第二金属电极与所述第一金属电极隔离,其中所述第二金属电极与所述半导体膜形成肖特基接触,其中所述第二金属电极和材料的厚度 其中第二金属电极被制成使得当氢接触第二金属电极时,肖特基接触的肖特基势垒高度降低。 第二金属电极可以物理气相沉积或化学镀。
    • 3. 发明授权
    • Orthomode transducer having improved cross-polarization suppression and method of manufacture
    • 具有改进的交叉偏振抑制的方形传感器和制造方法
    • US06842085B2
    • 2005-01-11
    • US10248777
    • 2003-02-18
    • Ming H. ChenChin-Yi Chu
    • Ming H. ChenChin-Yi Chu
    • H01P1/161H01P5/12
    • H01P1/161
    • An orthomode transducer includes a first waveguide section, a second waveguide section coupled to the first waveguide section, and a third waveguide section coupled to the first and second waveguide sections. The first waveguide section is configured to support the propagation of a signal having a first polarization, and includes a first waveguide aperture sized to communicate the signal having the first polarization therethrough. The second waveguide is configured to support the propagation of a signal having a second polarization which is orthogonal to the first polarization, the second waveguide section having a single internal septum and a second waveguide aperture sized to communicate the signal having the second polarization therethrough. The third waveguide is configured to support the propagation of either a signal having the first polarization or the second polarization, and includes a third waveguide aperture sized to communicate the signals having either the first or second polarization therethrough.
    • 正射模换能器包括第一波导部分,耦合到第一波导部分的第二波导部分和耦合到第一和第二波导部分的第三波导部分。 第一波导部分被配置为支持具有第一偏振的信号的传播,并且包括第一波导孔,其尺寸设置成传递具有第一偏振的信号。 第二波导被配置为支持具有与第一偏振正交的第二偏振的信号的传播,第二波导部分具有单个内部隔膜和第二波导孔径,其尺寸设置成传递具有第二偏振的信号。 第三波导被配置为支持具有第一偏振或第二偏振的信号的传播,并且包括尺寸设计成传递具有第一或第二偏振的信号的第三波导孔。