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    • 3. 发明申请
    • ROUTING SYSTEM AND METHOD FOR DOUBLE PATTERNING TECHNOLOGY
    • 双文件技术的路由系统和方法
    • US20110119648A1
    • 2011-05-19
    • US12649979
    • 2009-12-30
    • Huang-Yu ChenYuan-Te HouGwan Sin ChangWen-Ju YangZhe-Wei JiangYi-Kan ChengLee-Chung Lu
    • Huang-Yu ChenYuan-Te HouGwan Sin ChangWen-Ju YangZhe-Wei JiangYi-Kan ChengLee-Chung Lu
    • G06F17/50
    • G06F17/5077
    • A method includes receiving an identification of a plurality of circuit components to be included in an IC layout. Data are generated representing a first pattern to connect two of the circuit components. The first pattern has a plurality of segments. At least two of the segments have lengthwise directions perpendicular to each other. At least one pattern-free region is reserved adjacent to at least one of the at least two segments. Data are generated representing one or more additional patterns near the first pattern. None of the additional patterns is formed in the pattern-free region. The first pattern and the additional patterns form a double-patterning compliant set of patterns. The double-patterning compliant set of patterns are output to a machine readable storage medium to be read by a system for controlling a process to fabricate a pair of masks for patterning a semiconductor substrate using double patterning technology.
    • 一种方法包括接收要包括在IC布局中的多个电路部件的标识。 生成表示连接两个电路部件的第一图案的数据。 第一图案具有多个片段。 至少两个片段具有彼此垂直的纵向方向。 保留与至少两个段中的至少一个相邻的至少一个无图案区域。 生成表示在第一图案附近的一个或多个附加图案的数据。 在无模式区域中没有形成附加图案。 第一种图案和附加图案形成双重图案化顺应的图案集合。 将双图案化顺应的图案集合输出到机器可读存储介质,以由用于控制制造用于使用双重图案化技术图案化半导体衬底的一对掩模的工艺的系统读取。
    • 4. 发明授权
    • Routing system and method for double patterning technology
    • 双重图案化技术的路由系统和方法
    • US08239806B2
    • 2012-08-07
    • US12649979
    • 2009-12-30
    • Huang-Yu ChenYuan-Te HouGwan Sin ChangWen-Ju YangZhe-Wei JiangYi-Kan ChengLee-Chung Lu
    • Huang-Yu ChenYuan-Te HouGwan Sin ChangWen-Ju YangZhe-Wei JiangYi-Kan ChengLee-Chung Lu
    • G06F17/50
    • G06F17/5077
    • A method includes receiving an identification of a plurality of circuit components to be included in an IC layout. Data are generated representing a first pattern to connect two of the circuit components. The first pattern has a plurality of segments. At least two of the segments have lengthwise directions perpendicular to each other. At least one pattern-free region is reserved adjacent to at least one of the at least two segments. Data are generated representing one or more additional patterns near the first pattern. None of the additional patterns is formed in the pattern-free region. The first pattern and the additional patterns form a double-patterning compliant set of patterns. The double-patterning compliant set of patterns are output to a machine readable storage medium to be read by a system for controlling a process to fabricate a pair of masks for patterning a semiconductor substrate using double patterning technology.
    • 一种方法包括接收要包括在IC布局中的多个电路部件的标识。 生成表示连接两个电路部件的第一图案的数据。 第一图案具有多个片段。 至少两个片段具有彼此垂直的纵向方向。 保留与至少两个段中的至少一个相邻的至少一个无图案区域。 生成表示在第一图案附近的一个或多个附加图案的数据。 在无模式区域中没有形成附加图案。 第一种图案和附加图案形成双重图案化顺应的图案集合。 将双图案化顺应的图案集合输出到机器可读存储介质,以由用于控制制造用于使用双重图案化技术图案化半导体衬底的一对掩模的工艺的系统读取。
    • 6. 发明申请
    • Methods for Cell Boundary Isolation in Double Patterning Design
    • 双重图案设计中细胞边界隔离的方法
    • US20100196803A1
    • 2010-08-05
    • US12616970
    • 2009-11-12
    • Lee-Chung LuYi-Kan ChengYuan-Te HouYung-Chin HouLi-Chun Tien
    • Lee-Chung LuYi-Kan ChengYuan-Te HouYung-Chin HouLi-Chun Tien
    • G03F1/00G06F17/50
    • G03F1/70G03F1/00
    • A method of designing a double patterning mask set for a layout of a chip includes designing standard cells. In each of the standard cells, all left-boundary patterns are assigned with one of a first indicator and a second indicator, and all right-boundary patterns are assigned with an additional one of the first indicator and the second indicator. The method further includes placing the standard cells in a row of the layout of the chip. Starting from one of the standard cells in the row, indicator changes to the standard cells are propagated throughout the row. All patterns in the standard cells having the first indicator are transferred to a first mask of the double patterning mask set. All patterns in the standard cells having the second indicator are transferred to a second mask of the double patterning mask set.
    • 设计用于芯片布局的双重图案掩模组的方法包括设计标准单元。 在每个标准单元中,所有左边界图案被分配有第一指示符和第二指示符中的一个,并且所有右边图案都被分配有第一指示符和第二指示符中的另外一个。 该方法还包括将标准单元放置在芯片布局的一行中。 从行中的一个标准单元开始,标记单元的指示符更改在整行中传播。 具有第一指示符的标准单元中的所有图案被转移到双图案掩模组的第一掩模。 具有第二指示器的标准单元中的所有图案被转移到双重图案掩模组的第二掩模。
    • 8. 发明授权
    • Methods for cell boundary isolation in double patterning design
    • 双图案设计中单元边界隔离的方法
    • US08255837B2
    • 2012-08-28
    • US12616970
    • 2009-11-12
    • Lee-Chung LuYi-Kan ChengYuan-Te HouYung-Chin HouLi-Chun Tien
    • Lee-Chung LuYi-Kan ChengYuan-Te HouYung-Chin HouLi-Chun Tien
    • G06F17/50
    • G03F1/70G03F1/00
    • A method of designing a double patterning mask set for a layout of a chip includes designing standard cells. In each of the standard cells, all left-boundary patterns are assigned with one of a first indicator and a second indicator, and all right-boundary patterns are assigned with an additional one of the first indicator and the second indicator. The method further includes placing the standard cells in a row of the layout of the chip. Starting from one of the standard cells in the row, indicator changes to the standard cells are propagated throughout the row. All patterns in the standard cells having the first indicator are transferred to a first mask of the double patterning mask set. All patterns in the standard cells having the second indicator are transferred to a second mask of the double patterning mask set.
    • 设计用于芯片布局的双重图案掩模组的方法包括设计标准单元。 在每个标准单元中,所有左边界图案被分配有第一指示符和第二指示符中的一个,并且所有右边图案都被分配有第一指示符和第二指示符中的另外一个。 该方法还包括将标准单元放置在芯片布局的一行中。 从行中的一个标准单元开始,标记单元的指示符更改在整行中传播。 具有第一指示符的标准单元中的所有图案被转移到双图案掩模组的第一掩模。 具有第二指示器的标准单元中的所有图案被转移到双重图案掩模组的第二掩模。
    • 10. 发明申请
    • METHOD AND APPARATUS FOR ACHIEVING MULTIPLE PATTERNING TECHNOLOGY COMPLIANT DESIGN LAYOUT
    • 实现多种图案技术的方法和装置合规设计布局
    • US20120131528A1
    • 2012-05-24
    • US12953661
    • 2010-11-24
    • Huang-Yu ChenFang-Yu FanYuan-Te HouLee-Chung LuRu-Gun LiuKen-Hsien HsiehLee Fung SongWen-Chun HuangLi-Chun Tien
    • Huang-Yu ChenFang-Yu FanYuan-Te HouLee-Chung LuRu-Gun LiuKen-Hsien HsiehLee Fung SongWen-Chun HuangLi-Chun Tien
    • G06F17/50
    • G06F17/5077G03F7/70433G03F7/70466
    • A method and apparatus for achieving multiple patterning compliant technology design layouts is provided. An exemplary method includes providing a routing grid having routing tracks; designating each of the routing tracks one of at least two colors; applying a pattern layout having a plurality of features to the routing grid, wherein each of the plurality of features corresponds with at least one routing track; and applying a feature splitting constraint to determine whether the pattern layout is a multiple patterning compliant layout. If the pattern layout is not a multiple patterning compliant layout, the pattern layout may be modified until a multiple patterning compliant layout is achieved. If the pattern layout is a multiple patterning compliant layout, the method includes coloring each of the plurality of features based on the color of each feature's corresponding at least one routing track, thereby forming a colored pattern layout, and generating at least two masks with the features of the colored pattern layout. Each mask includes features of a single color.
    • 提供了一种用于实现多个图案化兼容技术设计布局的方法和装置。 示例性方法包括提供具有路由轨迹的路由网格; 指定每个路线轨道至少两种颜色之一; 将具有多个特征的图案布局应用于所述路由网格,其中所述多个特征中的每一个对应于至少一个路由轨道; 以及应用特征分解约束来确定所述图案布局是否是符合多重图案化的布局。 如果图案布局不是符合多重图案化的布局,则可以修改图案布局,直到实现多重图案化兼容布局。 如果图案布局是符合多重图案化的布局,则该方法包括基于每个特征对应的至少一个路线轨迹的颜色来着色多个特征中的每一个,从而形成彩色图案布局,并且生成至少两个具有 彩色图案布局的特点。 每个面具都包含单一颜色的特征。