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1. 发明专利

JP2012168824A Fluid control device 审中-公开
标题翻译：流体控制装置
公开(公告)号：JP2012168824A
公开(公告)日：2012-09-06
申请号：JP2011030305
申请日：2011-02-15
申请人： Horiba Stec Co Ltd , 株式会社堀場エステック
发明人： TAKIJIRI KOTARO , YONEDA YUTAKA
IPC分类号： G05D7/06 , G05B11/36
摘要： PROBLEM TO BE SOLVED: To provide a fluid control device capable of achieving responsiveness that is similar to the case that a conventional analog control is used even for a valve control mechanism employing a digital control.SOLUTION: A fluid control device 100 comprises: a fluid control valve 2 provided on a flow channel 5 where fluid flows; a fluid measurement part 1 for measuring physical quantities associated with the fluid; and a valve control mechanism 4 for controlling an opening of the fluid control valve 2 so that measurement values of the physical quantities measured in the fluid measurement part becomes predetermined set values. The valve control mechanism 4 includes: an operation amount calculation part 41 for calculating operating amounts of the opening of the fluid control valve 2 by means of a digital control based on deviations between the measurement values and the set values; and a phase compensation part 42 for compensating for phase delay by means of an analog control.
摘要翻译：要解决的问题：提供一种能够实现与使用常规模拟控制的情况相似的响应性的流体控制装置，即使对于采用数字控制的阀控制机构也是如此。流体控制装置100包括：设置在流体流动的流动通道5上的流体控制阀2; 用于测量与流体相关联的物理量的流体测量部分1; 以及用于控制流体控制阀2的开度的阀控制机构4，使得在流体测量部中测量的物理量的测量值变为预定的设定值。阀控制机构4包括：运算量计算部41，用于通过基于测量值与设定值之间的偏差的数字控制来计算流体控制阀2的打开运动量; 以及用于通过模拟控制来补偿相位延迟的相位补偿部分42。版权所有（C）2012，JPO＆INPIT

2. 发明专利

JP2012103812A Mass flow controller 有权
标题翻译：质量流量控制器
公开(公告)号：JP2012103812A
公开(公告)日：2012-05-31
申请号：JP2010250208
申请日：2010-11-08
申请人： Horiba Stec Co Ltd , 株式会社堀場エステック
发明人： YONEDA YUTAKA , TANAKA YUKI
IPC分类号： G05D7/06 , G01F1/00
CPC分类号： G05D7/0635
摘要： PROBLEM TO BE SOLVED: To provide a mass flow controller capable of using a flow rate control valve for a longer period and more accurately controlling an actual flow rate when reducing a flow rate set value.SOLUTION: The mass flow controller comprises: a flow rate sensor part 2; a flow rate control valve 3 provided on an upstream side or a downstream side of the flow rate sensor part 2; a calculation part 6 for subjecting at least a proportional operation to a deviation between a flow rate measurement value and a flow rate set value to calculate a feedback control valve to the flow rate control valve 3; and an opening control signal output part 7 for generating an opening control signal based on the feedback control value to output the opening control signal to the flow rate control valve 3. A gain value which is multiplied by the deviation in the proportional operation is calculated by using such a function that a large value is calculated when an arithmetic value to be substituted, obtained by using a changed portion between a set flow rate value before reduction and a set flow rate value after reduction is reduced in a reduction change period as a prescribed period from a point of time when the flow rate set value is reduced by a prescribed amount or more.
摘要翻译：要解决的问题：提供一种能够使流量控制阀更长时间的质量流量控制器，并且在减少流量设定值时更精确地控制实际流量。解决方案：质量流量控制器包括：流量传感器部分2; 设置在流量传感器部2的上游侧或下游侧的流量控制阀3; 用于对流量测量值和流量设定值之间的偏差进行至少比例运算的计算部6，计算出对流量控制阀3的反馈控制阀; 以及开启控制信号输出部7，用于根据反馈控制值产生开启控制信号，将开启控制信号输出到流量控制阀3.与比例运算中的偏差相乘的增益值由使用这样的功能，当通过使用减少之前的设定流量值和缩减之后的设定流量值之间的改变部分获得的待替换的算术值在缩小改变期间减少为规定时，计算出大值从流量设定值的时间点缩短规定量以上的期间。版权所有（C）2012，JPO＆INPIT

3. 发明专利

JP2010216807A Mass flow meter, mass flow controller, mass flow meter system including these, and mass flow controller system 有权
标题翻译：质量流量计，质量流量控制器，包括这些流量计系统和大流量控制系统
公开(公告)号：JP2010216807A
公开(公告)日：2010-09-30
申请号：JP2009060319
申请日：2009-03-12
申请人： Horiba Stec Co Ltd , 株式会社堀場エステック
发明人： KAJIMA TOSHIHIRO , YONEDA YUTAKA , ISOBE YASUHIRO
IPC分类号： G01F1/00 , G01F1/68 , G01F15/04 , G05D7/06
CPC分类号： G01F1/6847 , G01F5/00 , G01F25/0007 , G05D7/0635 , Y10T137/7722 , Y10T137/7759 , Y10T137/7761
摘要： PROBLEM TO BE SOLVED: To provide an excellent mass flow meter etc. capable of flexibly coping with a change in the kind of gas etc. of a specimen fluid without necessitating special labor, and moreover accurately measuring a flow.
SOLUTION: The mass flow meter includes: a sensor 2 for detecting the flow rate of the specimen fluid G flowing through a flow path 1; a setter 4c for setting a flow rate characteristic function K which is specified to each designated specimen fluid, and determines a flow rate based on an output value from the sensor 2, and an instrumental error correction parameter α which is independent of the low rate characteristic function, common to a plurality of the specimen fluids, and corrects an instrument error at each mass flow meter; and a flow calculator 4d for calculating the flow rate of the specimen fluid G based on the characteristic function K and the correction parameter α.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够灵活应对样品流体的气体等的种类变化的优质的质量流量计等，而不需要特别的劳动，而且精确地测量流量。质量流量计包括：用于检测流过流路1的检体流体G的流量的传感器2; 用于设定为每个指定样本流体指定的流量特征函数K的设定器4c，并且基于来自传感器2的输出值确定流量，以及独立于低速率特性的仪器误差校正参数α 功能，对多个样本流体共同，并校正每个质量流量计的仪器误差; 以及流量计算器4d，用于基于特征函数K和校正参数α计算样本流体G的流量。版权所有（C）2010，JPO＆INPIT

4. 发明专利

JP2010079827A Mass flow controller 有权
标题翻译：质量流量控制器
公开(公告)号：JP2010079827A
公开(公告)日：2010-04-08
申请号：JP2008250349
申请日：2008-09-29
申请人： Horiba Stec Co Ltd , 株式会社堀場エステック
发明人： YASUDA TADAHIRO , YONEDA YUTAKA
IPC分类号： G05D7/06 , G01F1/00 , G05D16/00
摘要： PROBLEM TO BE SOLVED: To provide a mass flow controller, with which flow rate of a secondary side is less liable to be readily influenced, even if the pressure on the primary side changes rapidly.
SOLUTION: The mass flow controller includes: a flow rate sensor which measures flow rate of fluid flowing inside of a flow channel and outputs a flow-rate measurement signal which shows a measured value; a flow rate control valve prepared upstream or downstream in the flow rate sensor; and a calculation section which calculates a control value to the flow rate control valve. There are a change period which is a period when a primary side pressure measurement value which is a measured value of the pressure of the fluid in the upstream of the mass flow controller has changed more than a predetermined amount, and a stable period which is a period other than the change period. The calculation section calculates a stable time control value, by performing a predetermined arithmetic operation to the deviation of a flow measurement value indicated by a flow-rate measurement signal and a flow-rate setting value which is a target value in the stable period; and calculates a change time control value, by performing a predetermined arithmetic operation to a deviation of the primary side-pressure measurement value and the change amount of the primary side-pressure measurement value in the change period.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：即使初级侧的压力快速变化，提供二次侧流量较少容易受到影响的质量流量控制器。质量流量控制器包括：流量传感器，其测量在流路内流动的流体的流量，并输出显示测量值的流量测量信号; 流量控制阀，其设置在所述流量传感器的上游或下游; 以及计算部分，其计算对流量控制阀的控制值。存在作为质量流量控制器的上游侧的流体的压力的测量值的初级侧压力测量值变化超过规定量的期间的变化期间，作为期间除变更期外。计算部通过对由流量测量信号表示的流量测量值和作为稳定期间中的目标值的流量设定值的偏差进行规定的算术运算来计算稳定的时间控制值; 并且通过对所述一次侧压力测量值和所述一次侧压力测量值在所述变化周期中的变化量的偏差执行预定的算术运算来计算变化时间控制值。版权所有（C）2010，JPO＆INPIT

5. 发明专利

JP2012168823A Fluid control device 审中-公开
标题翻译：流体控制装置
公开(公告)号：JP2012168823A
公开(公告)日：2012-09-06
申请号：JP2011030304
申请日：2011-02-15
申请人： Horiba Stec Co Ltd , 株式会社堀場エステック
发明人： TAKIJIRI KOTARO , YONEDA YUTAKA
IPC分类号： G05D16/20 , G05B11/36
摘要： PROBLEM TO BE SOLVED: To provide a pressure control device capable of achieving responsiveness that is similar to the case that a conventional analog control is used even for a valve controller employing a digital control.SOLUTION: A pressure control device comprises: a fluid control valve 2 provided on a flow channel 5 where fluid flows; a pressure sensor 3 for measuring pressure of the fluid; and a valve controller 4 for controlling an opening of the fluid control valve 2 so that a measurement value of the pressure measured by the pressure sensor 3 becomes a predetermined set value. The valve controller 4 includes: an operation amount calculation part 41 for applying a predetermined calculation to values which are input to calculate values associated with operating amounts of the opening of the fluid control valve 2; and a phase compensation part 42 for outputting values in which phase shift has been compensated for the input values by a digital control.
摘要翻译：要解决的问题：提供一种即使对于采用数字控制的阀门控制器也能够实现类似于常规模拟控制的情况的响应性的压力控制装置。解决方案：压力控制装置包括：设置在流体流动的流动通道5上的流体控制阀2; 用于测量流体压力的压力传感器3; 以及阀控制器4，用于控制流体控制阀2的开度，使得由压力传感器3测量的压力的测量值变为预定的设定值。阀控制器4包括：操作量计算部41，用于对输入的值进行预定计算，以计算与流体控制阀2的开度的操作量相关的值; 以及相位补偿部分42，用于通过数字控制输出已经针对输入值补偿相移的值。版权所有（C）2012，JPO＆INPIT

6. 发明专利

JP2012168822A Fluid control device 审中-公开
标题翻译：流体控制装置
公开(公告)号：JP2012168822A
公开(公告)日：2012-09-06
申请号：JP2011030302
申请日：2011-02-15
申请人： Horiba Stec Co Ltd , 株式会社堀場エステック
发明人： TAKIJIRI KOTARO , YONEDA YUTAKA
IPC分类号： G05D7/06
摘要： PROBLEM TO BE SOLVED: To provide a fluid control device capable of achieving responsiveness that is similar to the case that a conventional analog control is used even for a valve controller employing a digital control.SOLUTION: A fluid control device 100 comprises: a fluid control valve 2 provided on a flow channel 5 where fluid flows; fluid measurement parts 1, 3 for measuring physical quantities associated with the fluid; and a valve controller 4 for controlling an opening of the fluid control valve 2 by means of a digital control based on deviations between measurement values of the physical quantities measured in the fluid measurement part 1 and predetermined set values. The valve controller 4 includes; an operation amount calculation part 41 for applying a predetermined calculation to values which are input to output values associated with operating amounts of the opening of the fluid control valve 2; and a phase compensation part 42 for outputting values in which phase delay has been compensated for the input values by a speed-type digital calculation.
摘要翻译：要解决的问题：提供一种即使对于采用数字控制的阀门控制器也可以实现类似于常规模拟控制的情况的响应性的流体控制装置。流体控制装置100包括：设置在流体流动的流动通道5上的流体控制阀2; 用于测量与流体相关的物理量的流体测量部分1,3; 以及阀控制器4，用于通过基于在流体测量部件1中测量的物理量的测量值与预定设定值之间的偏差的数字控制来控制流体控制阀2的打开。阀控制器4包括：操作量计算部41，用于对输入到与流体控制阀2的开度的操作量相关联的输出值的值进行预定的计算; 以及相位补偿部分42，用于通过速度型数字计算输出已经针对输入值补偿了相位延迟的值。版权所有（C）2012，JPO＆INPIT

7. 发明专利

JP2007034550A Mass flow controller 有权
标题翻译：质量流量控制器
公开(公告)号：JP2007034550A
公开(公告)日：2007-02-08
申请号：JP2005215284
申请日：2005-07-26
申请人： Horiba Stec Co Ltd , 株式会社堀場エステック
发明人： TAKAHASHI AKITO , YONEDA YUTAKA
IPC分类号： G05D7/06
CPC分类号： G05D7/0635
摘要： PROBLEM TO BE SOLVED: To provide a mass flow controller adaptable to a system which can cause crosstalk, in which flow rate fluctuation can be suppressed even in case of pressure fluctuation without sacrificing a follow-up rate to change of flow set value. SOLUTION: The mass flow controller comprises: a flow sensor part 2 measuring a flow rate of fluid and outputting a flow rate measurement signal showing the measured value; a flow control valve 3 provided on the upstream side or downstream side of the flow sensor part 2; a calculation part 6 performing at least proportional operation to the deviation between a flow rate measured value obtained from the flow rate measurement signal and a flow set value that is a target value to calculate a feedback control value to the valve 3; and an opening control signal output part 7 generating an opening control signal based on the feedback control value and outputting it to the valve 3. In this controller, a function for calculating a gain value in the proportional operation is varied between a change period that is a predetermined period from the time when the flow set value is changed by a predetermined amount or more and a stable period except this period. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够引起串扰的系统的质量流量控制器，即使在压力波动的情况下也能够抑制流量波动，而不会牺牲流量设定值的变化的追随率。质量流量控制器包括：流量传感器部分2，其测量流体的流量并输出示出测量值的流量测量信号; 设置在流量传感器部2的上游侧或下游侧的流量控制阀3; 对从流量测量信号获得的流量测量值与作为目标值的流量设定值之间的偏差进行至少比例运算的计算部6，计算出对阀3的反馈控制值; 以及开启控制信号输出部分7，根据反馈控制值产生打开控制信号并将其输出到阀3.在该控制器中，用于计算比例运算中的增益值的功能在变化期间从流量设定值改变规定量以上的规定期间和该期间以外的稳定期间。版权所有（C）2007，JPO＆INPIT

8. 发明公开

EP2518581A4 MASS FLOW CONTROLLER SYSTEM 有权
标题翻译： MASSENFLUSSSTEUERUNGSSYSTEM
公开(公告)号：EP2518581A4
公开(公告)日：2016-06-15
申请号：EP10839472
申请日：2010-12-22
申请人： HORIBA STEC CO LTD
发明人： TAKEUCHI HIROYUKI , YONEDA YUTAKA , ISOBE YASUHIRO
IPC分类号： G05D7/06
CPC分类号： G05D7/0652 , Y10T137/7784
摘要： This invention is to make it possible to control a flow rate output by a mass flow controller with high accuracy, and a relation data that indicates a corresponding relation between a flow rate of a reference gas and a CF value of a sample gas is stored, a target flow rate is converted into a reference gas flow rate by the use of a predetermined CF value, a sample gas flow rate is calculated from the converted reference gas flow rate and a CF value corresponding to the reference gas flow rate, the sample gas flow rate is compared with the target flow rate, and the CF value that is used for conversion of the reference gas flow rate or calculation of the sample gas flow rate is updated by the use of the corresponding relation based on the error between the sample gas flow rate and the target flow rate.

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