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1. 发明专利

JP2010216807A Mass flow meter, mass flow controller, mass flow meter system including these, and mass flow controller system 有权
标题翻译：质量流量计，质量流量控制器，包括这些流量计系统和大流量控制系统
公开(公告)号：JP2010216807A
公开(公告)日：2010-09-30
申请号：JP2009060319
申请日：2009-03-12
申请人： Horiba Stec Co Ltd , 株式会社堀場エステック
发明人： KAJIMA TOSHIHIRO , YONEDA YUTAKA , ISOBE YASUHIRO
IPC分类号： G01F1/00 , G01F1/68 , G01F15/04 , G05D7/06
CPC分类号： G01F1/6847 , G01F5/00 , G01F25/0007 , G05D7/0635 , Y10T137/7722 , Y10T137/7759 , Y10T137/7761
摘要： PROBLEM TO BE SOLVED: To provide an excellent mass flow meter etc. capable of flexibly coping with a change in the kind of gas etc. of a specimen fluid without necessitating special labor, and moreover accurately measuring a flow.
SOLUTION: The mass flow meter includes: a sensor 2 for detecting the flow rate of the specimen fluid G flowing through a flow path 1; a setter 4c for setting a flow rate characteristic function K which is specified to each designated specimen fluid, and determines a flow rate based on an output value from the sensor 2, and an instrumental error correction parameter α which is independent of the low rate characteristic function, common to a plurality of the specimen fluids, and corrects an instrument error at each mass flow meter; and a flow calculator 4d for calculating the flow rate of the specimen fluid G based on the characteristic function K and the correction parameter α.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够灵活应对样品流体的气体等的种类变化的优质的质量流量计等，而不需要特别的劳动，而且精确地测量流量。质量流量计包括：用于检测流过流路1的检体流体G的流量的传感器2; 用于设定为每个指定样本流体指定的流量特征函数K的设定器4c，并且基于来自传感器2的输出值确定流量，以及独立于低速率特性的仪器误差校正参数α 功能，对多个样本流体共同，并校正每个质量流量计的仪器误差; 以及流量计算器4d，用于基于特征函数K和校正参数α计算样本流体G的流量。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2010169657A Mass flow meter and mass flow controller 审中-公开
标题翻译：质量流量计和质量流量控制器
公开(公告)号：JP2010169657A
公开(公告)日：2010-08-05
申请号：JP2009264271
申请日：2009-11-19
申请人： Horiba Stec Co Ltd , 株式会社堀場エステック
发明人： ISOBE YASUHIRO , HORINOUCHI OSAMU
IPC分类号： G01F1/68 , G01F1/00 , G05D7/06
CPC分类号： G01F1/6842 , G01F1/6847 , G01F5/00 , G05D7/0635 , Y10T137/7759 , Y10T137/7761
摘要： PROBLEM TO BE SOLVED: To improve the measurement accuracy of a mass flow meter. SOLUTION: The mass flow meter includes a flow rate calculating section 42 that obtains an output signal from sensor sections 411 and 412 having thermosensitive resistive elements 41a and 41b arranged in a flow channel where a sample gas G flows and calculates a flow rate Q raw of the sample gas G, a pressure measuring section 43 that measures a primary side pressure P in in the flow channel 2, and a flow rate correcting section 44 that corrects the measured flow rate Q raw obtained by the flow rate calculating section 42 by the use of the primary side pressure P in obtained by the pressure measuring section 43 and a gas coefficient α determined by an isobaric specific heat C P of the sample gas G. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提高质量流量计的测量精度。解决方案：质量流量计包括流量计算部分42，该流量计算部分42从传感器部分411和412获得输出信号，该传感器部分411和412具有布置在样本气体G流动的流动通道中的热敏电阻元件41a和41b，并计算流量 Q气体G的原料，测量流路2中中的一次侧压力P 的压力测量部43，以及校正流量校正部44 由流量计算部42通过使用由压力测量部43获得的中的初级侧压力P 原始和气体系数α 由样品气体G的等压比热C P 确定。版权所有（C）2010，JPO＆INPIT

3. 发明公开

KR20180068877A 유체 특성 측정 시스템, 유체 특성 측정 시스템용 프로그램이 기억된 프로그램 기억 매체, 및 유체 특성 측정 방법 审中-公开
公开(公告)号：KR20180068877A
公开(公告)日：2018-06-22
申请号：KR20170171136
申请日：2017-12-13
申请人： HORIBA STEC CO LTD
发明人： ISOBE YASUHIRO
IPC分类号： G01F25/00 , G01F1/76 , G01L7/00 , G01N1/10
CPC分类号： G01F1/56 , G01F1/76 , G01F25/00 , G01L7/00 , G01N1/10 , G01N7/00 , G05D7/06 , G05D16/20
摘要： 유체의특성인압축계수를용이하게구할수 있도록하고, ROR 시스템등에의한유량측정정밀도를비약적으로향상시킨다. 일정용량을가지는용기(1)와, 상기용기(1)에일정유량으로유체를도입가능하게접속된유량제어기(2)와, 상기용기(1) 내의압력이다른 2개의상황하에서, 상기유량제어기(2)에의해서서로동일한유량으로상기용기(1)에유체를도입했을때의, 상기용기(1) 내의압력의각 시간변화에근거하여상기유체의압력에따른압축계수를산출하는정보처리장치(5)를구비하도록했다.

4. 发明公开

EP2518581A4 MASS FLOW CONTROLLER SYSTEM 有权
标题翻译： MASSENFLUSSSTEUERUNGSSYSTEM
公开(公告)号：EP2518581A4
公开(公告)日：2016-06-15
申请号：EP10839472
申请日：2010-12-22
申请人： HORIBA STEC CO LTD
发明人： TAKEUCHI HIROYUKI , YONEDA YUTAKA , ISOBE YASUHIRO
IPC分类号： G05D7/06
CPC分类号： G05D7/0652 , Y10T137/7784
摘要： This invention is to make it possible to control a flow rate output by a mass flow controller with high accuracy, and a relation data that indicates a corresponding relation between a flow rate of a reference gas and a CF value of a sample gas is stored, a target flow rate is converted into a reference gas flow rate by the use of a predetermined CF value, a sample gas flow rate is calculated from the converted reference gas flow rate and a CF value corresponding to the reference gas flow rate, the sample gas flow rate is compared with the target flow rate, and the CF value that is used for conversion of the reference gas flow rate or calculation of the sample gas flow rate is updated by the use of the corresponding relation based on the error between the sample gas flow rate and the target flow rate.

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