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1. 发明申请

US20050150280A1 Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes 有权
标题翻译：微机械和纳米机械装置中的金属薄膜压阻转换及其在自感SPM探针中的应用
公开(公告)号：US20050150280A1
公开(公告)日：2005-07-14
申请号：US11010578
申请日：2004-12-14
申请人： Hongxing Tang , Mo Li , Michael Roukes
发明人： Hongxing Tang , Mo Li , Michael Roukes
IPC分类号： G01L1/18 , G01L1/20 , G01B5/28
CPC分类号： G01L1/18 , G01L1/20 , G01N33/54346 , G01N33/54373 , G01Q20/04 , G01Q60/38
摘要： Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.
摘要翻译：薄金属膜用作微机电和纳米机电系统中的压阻自感元件。演示了AFM探针的具体应用。

2. 发明申请

US20060204699A1 Parylene coated microfluidic components and methods for fabrication thereof 审中-公开
标题翻译：聚对二甲苯涂布的微流体组分及其制造方法
公开(公告)号：US20060204699A1
公开(公告)日：2006-09-14
申请号：US11297124
申请日：2005-12-07
申请人： George Maltezos , Hongxing Tang , Michael Roukes , Axel Scherer
发明人： George Maltezos , Hongxing Tang , Michael Roukes , Axel Scherer
IPC分类号： B29C33/40 , B29C33/76 , B28B7/38 , F16L11/04
CPC分类号： B29C33/0016 , B01L3/502707 , B01L3/502738 , B01L2200/12 , B29K2891/00 , B29L2031/7506 , B29L2031/756 , B33Y80/00 , B81B2201/054 , B81C1/00119 , B81C99/009 , B81C2201/0109 , F16K27/003 , F16K99/0001 , F16K99/0026 , F16K99/0059 , F16K2099/0074 , F16K2099/0078 , F16K2099/008 , F16K2099/0084 , F16K2099/0088 , Y10T428/1393
摘要： A method for fabricating parylene coated microfluidic valves is disclosed. A three-dimensional mold made of a first wax is formed. A sacrificial material made of a second wax is provided as a temporary support and then dissolved. A parylene coating is deposited onto the mold. A component material is poured onto the mold and cured, and the first wax is melted away. Further, a method for parylene coating of two-dimensional microfluidic components comprises: forming a lithographic mold of a microfluidic component, the mold made of a photoresist material; coating the lithographic mold with parylene; and removing the lithographic mold.
摘要翻译：公开了一种制造聚对二甲苯涂布的微流体阀的方法。形成由第一蜡制成的三维模具。提供由第二蜡制成的牺牲材料作为临时载体，然后溶解。聚对二甲苯涂层沉积在模具上。将组分材料倒在模具上并固化，并将第一蜡熔化掉。此外，二维微流体组分的聚对二甲苯涂布方法包括：形成微流体组分的光刻模具，由光致抗蚀剂材料制成的模具; 用聚对二甲苯涂布平版印模; 并去除平版印刷模具。

3. 发明授权

US07959873B1 Biological detection based on differentially coupled nanomechanical systems using self-sensing cantilevers with attonewton force resolution 有权
标题翻译：基于差分耦合纳米机械系统的生物检测，使用自感悬臂与分子力分解
公开(公告)号：US07959873B1
公开(公告)日：2011-06-14
申请号：US11491394
申请日：2006-07-20
申请人： Michael Roukes , Hongxing Tang , Jessica Arlett , James Maloney , Benjamin Gudlewski
发明人： Michael Roukes , Hongxing Tang , Jessica Arlett , James Maloney , Benjamin Gudlewski
IPC分类号： G01N33/00
CPC分类号： B81B3/0021 , B81B2201/0214 , B82Y15/00 , B82Y30/00 , G01N29/036 , G01N33/54366 , G01N2291/0257
摘要： A biosensor is comprised of a free and a biofunctionalized recognition self-sensing nanocantilever, a dock adjacent to the ends of the nanocantilevers, and a gap between the nanocantilevers and dock. The self-sensing cantilevers each include a semiconductor piezoresistor defined in a pair of legs about which the cantilevers flex. A bias power or current is applied to the piezoresistor. The sensitivity of the cantilevers is optimized for a given ambient temperature and geometry of the cantilevers and dock by minimizing the force spectral density, SF, of the cantilevers to determine the optimum bias power, Pin. A sub-aN/√Hz force sensitivity is obtained by scaling down the dimensions of the cantilevers and supplying an optimum bias power as a function of temperature and geometry.
摘要翻译：生物传感器由免费的和生物功能化的识别自感纳米聚合物，邻近纳米聚合物末端的码头以及纳米悬臂与码头之间的间隙组成。自感悬臂各自包括限定在一对腿部的半导体压敏电阻，悬臂弯曲在该支脚周围。偏压电源或电流施加到压敏电阻。通过最小化悬臂的力谱密度（SF）来确定最佳偏置功率Pin，悬臂梁的灵敏度对给定的环境温度和悬臂和基座的几何形状进行了优化。通过缩小悬臂的尺寸并提供作为温度和几何形状的函数的最佳偏置功率，可以获得sub-aN /√Hz力灵敏度。

4. 发明申请

US20070286254A1 Microscale Calorimeter 有权
标题翻译：微尺度量热计
公开(公告)号：US20070286254A1
公开(公告)日：2007-12-13
申请号：US11578675
申请日：2005-04-20
申请人： Chung-Wah Fon , Michael Roukes , Wonhee Lee , Hongxing Tang
发明人： Chung-Wah Fon , Michael Roukes , Wonhee Lee , Hongxing Tang
IPC分类号： G01N25/20 , B01J19/00 , G01K17/00
CPC分类号： G01K17/006 , B01L3/5027
摘要： Microcalorimeters having low addendum heat capacities and attojoule/Kscale resolutions are provided. These microcalorimeters make use of very small calorimeter bodies composed of materials with very low heat capacities. Also provided are polymer-based microcalorimeters with thermally isolated reagent chambers. These microcalorimeters use a multi-layered polymer membrane structure to provide improved thermal isolation of a reagent chamber.
摘要翻译：提供了具有低附加热容量和attojoule / Kscale分辨率的微量热计。这些微量热计使用非常小的由热容量非常低的材料组成的量热仪。还提供了具有热分离的试剂室的基于聚合物的微量热计。这些微量热计使用多层聚合物膜结构来提供试剂室的改进的热隔离。

5. 发明申请

US20050126299A1 Sensors based on giant planar hall effect in dilute magnetic semiconductors 有权
标题翻译：基于稀薄磁性半导体中巨大平面霍尔效应的传感器
公开(公告)号：US20050126299A1
公开(公告)日：2005-06-16
申请号：US11049104
申请日：2005-02-03
申请人： Hongxing Tang , Michael Roukes
发明人： Hongxing Tang , Michael Roukes
IPC分类号： G01L9/00 , G01L9/16 , G11B5/127
CPC分类号： G01L9/0042 , G01L9/16
摘要： Ferromagnetic semiconductor-based sensor devices, including sensors for detecting pressure changes and sensors for detecting magnetic fields, such as switching events in a magnetic recording medium. The pressure sensors of the present invention detect pressure changes using magnetoresistive measurement techniques, and in particular GPHE techniques. Magnetic field detection sensors such as magnetic switching detection sensors include ferromagnetic semiconductor-based materials that provide enhanced sensitivity relative to known materials and techniques. Such magnetic switching detection sensors according to the present invention are particularly useful as a read head sensor for HDD and other magnetic storage technologies.
摘要翻译：基于铁磁性半导体的传感器装置，包括用于检测压力变化的传感器和用于检测磁场的传感器，例如磁记录介质中的切换事件。本发明的压力传感器使用磁阻测量技术，特别是GPHE技术检测压力变化。诸如磁性开关检测传感器的磁场检测传感器包括相对于已知材料和技术提供增强灵敏度的基于铁磁性半导体的材料。根据本发明的这种磁切换检测传感器作为用于HDD和其他磁存储技术的读头传感器是特别有用的。

6. 发明申请

US20050034529A1 Strain sensors based on nanowire piezoresistor wires and arrays 有权
标题翻译：基于纳米线压敏电阻电线和阵列的应变传感器
公开(公告)号：US20050034529A1
公开(公告)日：2005-02-17
申请号：US10826007
申请日：2004-04-16
申请人： Hongxing Tang , Michael Roukes
发明人： Hongxing Tang , Michael Roukes
IPC分类号： G01B5/28 , G01L1/00 , G01L1/18 , G01L1/20 , G01L19/04 , G01N13/16 , G12B21/08
CPC分类号： G01L1/18 , G01L1/20 , G01N33/54346 , G01N33/54373
摘要： A highly sensitive and ultra-high density array of electromechanical nanowires is fabricated. Nanowires are extremely sensitive to the strain induced by the attachment of biological and chemical species. Real-time detection is realized through piezoresistive transduction from the specially designed materials that form the nanowires. These specially designed materials include doped silicon or germanium, doped III-V semiconductors such as GaAs, GaN and InAs systems, and ultra-thin metal films.
摘要翻译：制造了高灵敏度和超高密度的机电纳米线阵列。纳米线对由生物和化学物质的附着引起的菌株非常敏感。通过形成纳米线的专门设计的材料的压阻传导实现实时检测。这些特殊设计的材料包括掺杂的硅或锗，掺杂的III-V半导体，例如GaAs，GaN和InAs系统，以及超薄金属膜。

7. 发明申请

US20110103733A1 NANOMECHANICAL PHOTONIC DEVICES 有权
标题翻译：南方光电器件
公开(公告)号：US20110103733A1
公开(公告)日：2011-05-05
申请号：US12920631
申请日：2009-04-09
申请人： Hongxing Tang , Mo Li , Wolfram Pernice , Chi Xiong
发明人： Hongxing Tang , Mo Li , Wolfram Pernice , Chi Xiong
IPC分类号： G02F1/01 , G02B6/35 , G02B6/26 , G01N21/84
CPC分类号： G02B6/26 , B82Y20/00 , G02B6/12007 , G02B6/122 , G02B6/283 , G02B6/3504 , G02B6/3548 , G02B6/3552 , G02B6/356 , G02B6/3568 , G02B6/3594 , G02B6/3596 , G02B2006/12038 , G02B2006/12061
摘要： The present invention relates to devices which operate on gradient optical forces, in particular, nanoscale mechanical devices which are actuable by gradient optical forces. Such a device comprises a waveguide and a dielectric body, with at least a portion of the waveguide separated from the dielectric body at a distance which permits evanescent coupling of an optical mode within the waveguide to the dielectric body. This results in an optical force which acts on the waveguide and which can be exploited in a variety of devices on a nano scale, including all-optical switches, photonic transistors, tuneable couplers, optical attenuators and tuneable phase shifters. The waveguide can also comprise a gap such that two cantilever bridges are formed.
摘要翻译：本发明涉及对梯度光学力进行操作的装置，特别是可由梯度光学力驱动的纳米级机械装置。这种器件包括波导和介电体，其中波导的至少一部分与电介质本体隔开一定距离，允许波导内的光学模式与电介质体的渐逝耦合。这导致作用在波导上并且可以在纳米尺度上的各种器件中使用的光学力，包括全光开关，光子晶体管，可调谐耦合器，光衰减器和可调谐移相器。波导还可以包括形成两个悬臂的间隙。

8. 发明授权

US08639074B2 Nanomechanical photonic devices 有权
标题翻译：纳米机械光子器件
公开(公告)号：US08639074B2
公开(公告)日：2014-01-28
申请号：US12920631
申请日：2009-04-09
申请人： Hongxing Tang , Mo Li , Wolfram Pernice , Chi Xiong
发明人： Hongxing Tang , Mo Li , Wolfram Pernice , Chi Xiong
IPC分类号： G02B6/26
CPC分类号： G02B6/26 , B82Y20/00 , G02B6/12007 , G02B6/122 , G02B6/283 , G02B6/3504 , G02B6/3548 , G02B6/3552 , G02B6/356 , G02B6/3568 , G02B6/3594 , G02B6/3596 , G02B2006/12038 , G02B2006/12061
摘要： The present invention relates to devices which operate on gradient optical forces, in particular, nanoscale mechanical devices which are actuable by gradient optical forces. Such a device comprises a waveguide and a dielectric body, with at least a portion of the waveguide separated from the dielectric body at a distance which permits evanescent coupling of an optical mode within the waveguide to the dielectric body. This results in an optical force which acts on the waveguide and which can be exploited in a variety of devices on a nano scale, including all-optical switches, photonic transistors, tuneable couplers, optical attenuators and tuneable phase shifters. The waveguide can also comprise a gap such that two cantilever bridges are formed.
摘要翻译：本发明涉及对梯度光学力进行操作的装置，特别是可由梯度光学力驱动的纳米级机械装置。这种器件包括波导和介电体，其中波导的至少一部分与电介质本体隔开一定距离，允许波导内的光学模式与电介质体的渐逝耦合。这导致作用在波导上并且可以在纳米尺度上的各种器件中使用的光学力，包括全光开关，光子晶体管，可调谐耦合器，光衰减器和可调谐移相器。波导还可以包括形成两个悬臂的间隙。

9. 发明授权

US07434476B2 Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes 有权
标题翻译：微机械和纳米机械装置中的金属薄膜压阻转换及其在自感SPM探针中的应用
公开(公告)号：US07434476B2
公开(公告)日：2008-10-14
申请号：US11010578
申请日：2004-12-14
申请人： Hongxing Tang , Mo Li , Michael L. Roukes
发明人： Hongxing Tang , Mo Li , Michael L. Roukes
IPC分类号： G01B7/16
CPC分类号： G01L1/18 , G01L1/20 , G01N33/54346 , G01N33/54373 , G01Q20/04 , G01Q60/38
摘要： Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.
摘要翻译：薄金属膜用作微机电和纳米机电系统中的压阻自感元件。演示了AFM探针的具体应用。

10. 发明授权

US07617736B2 Metallic thin film piezoresistive transduction in micromechanical and nanomechanical devices and its application in self-sensing SPM probes 有权
标题翻译：微机械和纳米机械装置中的金属薄膜压阻转换及其在自感SPM探针中的应用
公开(公告)号：US07617736B2
公开(公告)日：2009-11-17
申请号：US12164620
申请日：2008-06-30
申请人： Hongxing Tang , Mo Li , Michael L. Roukes
发明人： Hongxing Tang , Mo Li , Michael L. Roukes
IPC分类号： G01B7/16
CPC分类号： G01L1/18 , G01L1/20 , G01N33/54346 , G01N33/54373 , G01Q20/04 , G01Q60/38
摘要： Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.
摘要翻译：薄金属膜用作微机电和纳米机电系统中的压阻自感元件。演示了AFM探针的具体应用。

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