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    • 6. 发明授权
    • Adjustable optical component
    • 可调光学元件
    • US5513031A
    • 1996-04-30
    • US245243
    • 1994-05-17
    • Raymond VuilleumierKarsten KraiczekAxel Wiese
    • Raymond VuilleumierKarsten KraiczekAxel Wiese
    • G01J3/04G02B26/02
    • G01J3/04
    • An adjustable optical component, for example an optical slit having adjustable slit width, comprises a movable member for providing an optical function, for example a slit and/or a shutter, and resilient suspension elements for connecting the movable member to a frame. The essential parts of the movable member, of the resilient suspension elements and of the frame consist of microstructures which are made of a common base material. Preferably, these parts are manufactured from a silicon chip by a micromechanical technique comprising, for example, anisotropic etching. In the case of an optical slit, the movable member comprises a plurality of openings of different widths which constitute a step slit. In order to adjust different slit widths, the member is moved along a line parallel to the center line of the step slit, with the force for moving the member being applied at an opening. When the member is moved by an external force, the resilient silicon beams are bending and the bars are moving. The movable member has an integrated shutter position. A high reproducibility of the adjustment of the center positions of the openings constituting the step slit during repeated movement of the member is ensured.
    • 可调节光学部件,例如具有可调狭缝宽度的光学狭缝,包括用于提供光学功能的可移动部件,例如狭缝和/或快门,以及用于将可移动部件连接到框架的弹性悬挂元件。 弹性悬挂元件和框架的可动构件的主要部件由由共同的基底材料制成的微结构构成。 优选地,这些部件通过包括例如各向异性蚀刻的微机械技术由硅芯片制造。 在光学狭缝的情况下,可移动部件包括构成台阶狭缝的不同宽度的多个开口。 为了调整不同的狭缝宽度,构件沿着平行于台阶狭缝的中心线的线移动,其中用于使构件移动的力被施加在开口处。 当构件通过外力移动时,弹性硅梁弯曲并且杆移动。 可动构件具有一体的快门位置。 确保了在构件的重复移动期间构成台阶狭缝的开口的中心位置的调整的高再现性。