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1. 发明申请

US20040213975A1 DISCONTINUOUS HIGH-MODULUS FIBER METAL MATRIX COMPOSITE FOR THERMAL MANAGEMENT APPLICATIONS 失效
标题翻译：用于热管理应用的不连续的高模量光纤金属基复合材料
公开(公告)号：US20040213975A1
公开(公告)日：2004-10-28
申请号：US10405863
申请日：2003-04-01
申请人： Honeywell International Inc.
发明人： Tim Scott , Tamara White , Jianxing Li
IPC分类号： B32B001/00
CPC分类号： H01J37/3435 , C22C47/00 , C23C14/3414 , H01L23/06 , H01L23/3733 , H01L23/3736 , H01L2224/16 , H01L2224/73253 , H01L2924/01057 , H01L2924/01079 , H01L2924/04941 , H01L2924/16152 , Y10T428/12007 , Y10T428/12465 , Y10T428/12486 , Y10T428/12528 , Y10T428/249924
摘要： The invention includes the use of a high-modulus fiber metal matrix composite material as a backing plate for physical vapor deposition targets, as a lid for microelectronics packages, as a heat spreader, and as a heat sink. In one implementation, copper-coated carbon fibers are mixed with copper powder. In another implementation, the mixture is consolidated to a carbon fiber metal matrix composite by using a vacuum hot press. The resultant backing plate has a coefficient of thermal expansion of 4.9null10null6/C, thermal conductivity of at least 300 W/mK, density of greater than 99% of theoretical, and the composite material of the backing plate is 30% lighter than Cu while also having higher stiffness than Cu. The high-modulus fiber metal matrix composite backing plate can be used for high power W, Ta, and ceramic PVD targets.
摘要翻译：本发明包括使用高模量纤维金属基复合材料作为物理气相沉积靶的背板，作为微电子封装的盖子，作为散热器，以及作为散热器。在一个实施方案中，将铜包覆的碳纤维与铜粉末混合。在另一个实施方案中，通过使用真空热压机将混合物固结成碳纤维金属基质复合材料。所得的背板的热膨胀系数为4.9×10 -6 /℃，导热率为至少300W / mK，密度大于理论值的99％，背板的复合材料为30％比Cu轻，同时具有比Cu更高的刚度。高模量纤维金属基复合背板可用于大功率W，Ta和陶瓷PVD靶。

2. 发明申请

US20020132721A1 Ferroelectric composition, ferroelectric vapor deposition target and method of making a ferroelectric vapor deposition target 失效
标题翻译：铁电成分，铁电体气相沉积靶和制造铁电性气相沉积靶的方法
公开(公告)号：US20020132721A1
公开(公告)日：2002-09-19
申请号：US10143318
申请日：2002-05-08
申请人： Honeywell International Inc.
发明人： Jianxing Li , Tim Scott , Tamara White
IPC分类号： C04B035/468 , C04B035/472 , C04B035/495
CPC分类号： C23C14/3414 , C04B35/462 , C23C14/08 , Y10S977/775 , Y10S977/777 , Y10S977/838 , Y10S977/891
摘要： The invention comprises ferroelectric vapor deposition targets and to methods of making ferroelectric vapor deposition targets. In one implementation, a ferroelectric physical vapor deposition target has a predominate grain size of less than or equal to 1.0 micron, and has a density of at least 95% of maximum theoretical density. In one implementation, a method of making a ferroelectric physical vapor deposition target includes positioning a prereacted ferroelectric powder within a hot press cavity. The prereacted ferroelectric powder predominately includes individual prereacted ferroelectric particles having a maximum straight linear dimension of less than or equal to about 100 nanometers. The prereacted ferroelectric powder is hot pressed within the cavity into a physical vapor deposition target of desired shape having a density of at least about 95% of maximum theoretical density and a predominate maximum grain size which is less than or equal to 1.0 micron. In one implementation, the prereacted ferroelectric powder is hot pressed within the cavity into a physical vapor deposition target of desired shape at a maximum pressing temperature which is at least 200null C. lower than would be required to produce a target of a first density of at least 85% of maximum theoretical density in hot pressing the same powder but having a predominate particle size maximum straight linear dimension of at least 1.0 micron at the same pressure and for the same amount of time, and a target density greater than the first density at the lower pressing temperature is achieved.
摘要翻译：本发明包括铁电气相沉积靶和制备铁电沉积靶的方法。在一个实施方案中，铁电物理气相沉积靶具有小于或等于1.0微米的主要晶粒尺寸，并且具有至少95％的最大理论密度的密度。在一个实施方案中，制造铁电物理气相沉积靶的方法包括将预反应的铁电粉末定位在热压腔内。预反应的铁电粉末主要包括具有小于或等于约100纳米的最大直线尺寸的单个预反应的铁电颗粒。将预反应的铁电粉末在空腔内热压成所需形状的物理气相沉积靶，其具有至少约95％的最大理论密度和最大粒度小于或等于1.0微米的最大粒度。在一个实施方案中，将预反应的铁电粉末在空腔内热压成所需形状的物理气相沉积靶，其最大压制温度比产生第一密度的靶的要求低至少200℃ 在相同的压力和相同的时间量下热压相同的粉末但具有至少1.0微米的主要粒度最大直线尺寸的至少85％的最大理论密度，并且目标密度大于第一密度在较低的压制温度下实现。

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