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    • 1. 发明授权
    • Chip separation device and method
    • 芯片分离装置及方法
    • US6121118A
    • 2000-09-19
    • US369683
    • 1999-08-05
    • Ho Tae JinIn Pyo HongByung Man KimJeong Ho Bang
    • Ho Tae JinIn Pyo HongByung Man KimJeong Ho Bang
    • H01L21/301H01L21/00H01L21/78H01L21/46
    • H01L21/67092H01L21/78
    • A method for separating semiconductor devices formed on a semiconductor wafer includes: inscribing the semiconductor wafer along scribe lines; mounting the inscribed semiconductor wafer on a stage including an elastic structure and vacuum suction holes that can be aligned to respective semiconductor chips; applying a vacuum through the vacuum suction holes to hold the semiconductor wafer on the elastic structure; and applying a mechanical force to the semiconductor wafer to break the wafer along the scribe lines and separate the semiconductor devices. A device for separating semiconductor devices formed on a wafer includes a stage including an elastic structure and vacuum suction holes that can be aligned with respective semiconductor chips of the semiconductor wafer and a press for applying mechanical force to the semiconductor wafer on the elastic structure. Since use of a wafer tape is avoided in cutting a semiconductor wafer, package cracking and delamination caused by wafer tape adhesive stuck to the back surface of a semiconductor chip are avoided.
    • 用于分离形成在半导体晶片上的半导体器件的方法包括:沿着划线刻录半导体晶片; 将内接的半导体晶片安装在包括弹性结构的台上,以及可以对准各自的半导体芯片的真空吸孔; 通过真空吸孔施加真空以将半导体晶片保持在弹性结构上; 以及向所述半导体晶片施加机械力以使所述晶片沿着划线断开并分离所述半导体器件。 用于分离形成在晶片上的半导体器件的器件包括:包括弹性结构的台和可以与半导体晶片的各个半导体芯片对准的真空吸孔以及用于在弹性结构上向半导体晶片施加机械力的压力机。 由于在切割半导体晶片时避免了晶圆带的使用,所以避免了由于贴在半导体芯片的背面上的晶片胶带引起的封装开裂和分层。
    • 3. 发明授权
    • Method for manufacturing semiconductor package of center pad type device
    • 中心垫型装置的半导体封装的制造方法
    • US06207478B1
    • 2001-03-27
    • US09333772
    • 1999-06-15
    • Myung Kee ChungJin Soon LeeHo Tae JinIn Pyo Hong
    • Myung Kee ChungJin Soon LeeHo Tae JinIn Pyo Hong
    • H01L2144
    • H01L21/561H01L21/56H01L23/3114H01L24/11H01L24/12H01L24/86H01L24/97H01L2224/0231H01L2224/0401H01L2224/13099H01L2924/01004H01L2924/01005H01L2924/01006H01L2924/01033H01L2924/01079H01L2924/01082H01L2924/014H01L2924/12044H01L2924/15151
    • In accordance with an embodiment of the present invention, a method for manufacturing a semiconductor package of a center pad type device includes: attaching a semiconductor chip to a tape wiring substrate where the chip has bonding pads along a center line of its active surface and the substrate has multiple beam leads; interposing an elastomer between the semiconductor chip and the tape wiring substrate; bonding the beam leads to the respective bonding pads exposed through an opening of the elastomer; and encapsulating the opening and a perimeter of the semiconductor chip with a liquid encapsulant. The method may use a cover film. When the cover film is used, the encapsulation can be done in two ways. In one way, an encapsulant is dispensed on a portion of tape wiring substrate that is close to one end of the opening of the elastomer. The encapsulant is then dispensed along a perimeter of the semiconductor chip. In the other way, the cover film has a number of air vents, and an encapsulant is dispensed at both ends of the opening as well as along the perimeter of the semiconductor chip. In the both ways, the encapsulation may be performed under vacuum. When the cover film is not used, an encapsulant is dispensed in the opening of the elastomer through an opening of the tape wiring substrate. The tape wiring substrate is then turned upside down, and the encapsulant is dispensed along a perimeter of the semiconductor chip.
    • 根据本发明的实施例,一种用于制造中心焊盘型器件的半导体封装的方法包括:将半导体芯片附接到带状布线基板,其中芯片具有沿其活性表面的中心线的接合焊盘,并且 衬底具有多个光束引线; 在半导体芯片和带状布线基板之间插入弹性体; 将光束接合到通过弹性体的开口暴露的各个焊盘; 并用液体密封剂封装半导体芯片的开口和周边。 该方法可以使用覆盖膜。 当使用覆盖膜时,封装可以通过两种方式完成。 以一种方式,将密封剂分配在接近弹性体开口的一端的胶带布线基板的一部分上。 然后沿着半导体芯片的周边分配密封剂。 另一方面,覆盖膜具有多个通风口,并且在开口的两端以及沿着半导体芯片的周边分配密封剂。 在这两种方式中,封装可以在真空下进行。 当不使用覆盖膜时,通过带状布线基板的开口将密封剂分配在弹性体的开口中。 然后将带状布线基板上下颠倒,并沿着半导体芯片的周边分配密封剂。