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1. 发明授权

US5512156A Sputtering electrode 失效
标题翻译：溅射电极
公开(公告)号：US5512156A
公开(公告)日：1996-04-30
申请号：US265019
申请日：1994-06-24
申请人： Hitoshi Yamanishi , Isamu Aokura , Toshiyuki Suemitsu , Takahiro Takisawa
发明人： Hitoshi Yamanishi , Isamu Aokura , Toshiyuki Suemitsu , Takahiro Takisawa
IPC分类号： C23C14/35 , H01J37/34
CPC分类号： H01J37/3455 , C23C14/35 , H01J37/3408
摘要： A magnetron sputtering electrode assembly which is used in a sputtering system having a rectangular flat-plate target, includes permanent magnets arranged along the longitudinal edges of the target to pass lines of magnetic forces in parallel to the surface of the rectangular flat-plate target, and a driving device for reversing polarity of the magnets to change by 180 degrees the direction of the lines of magnetic force caused by the permanent magnets passing in parallel to the surface of the rectangular flat-plate target.
摘要翻译：在具有矩形平板靶的溅射系统中使用的磁控溅射电极组件包括沿着靶的纵向边缘布置的永磁体，以平行于矩形平板靶的表面传递磁力线，以及驱动装置，用于使磁铁的极性反转，使永磁体平行于矩形平板靶的表面产生的磁力线的方向变化180度。

2. 发明授权

US5626727A Sputtering apparatus and method 失效
标题翻译：溅射装置和方法
公开(公告)号：US5626727A
公开(公告)日：1997-05-06
申请号：US504516
申请日：1995-07-20
申请人： Hitoshi Yamanishi , Isamu Aokura , Masahide Yokoyama , Takahiro Takisawa
发明人： Hitoshi Yamanishi , Isamu Aokura , Masahide Yokoyama , Takahiro Takisawa
IPC分类号： C23C14/34 , C23C14/35 , H01J37/34 , H01L21/203
CPC分类号： H01J37/347 , H01J37/3405
摘要： A sputtering apparatus uses a plurality of rectangular targets to form a thin film on a substrate, and includes a plurality of magnets disposed along both side edges of each target in such a manner that the polarities of adjacent magnets along the side edges of the targets are opposite, and polarities of the magnets confronting each other across the targets are opposite. The surfaces of at least two targets are inclined to a surface of the substrate at an angle not smaller than 30.degree. and not larger than 60.degree..
摘要翻译：溅射装置使用多个矩形目标在基板上形成薄膜，并且包括沿着目标的两个侧边缘设置的多个磁体，使得沿着靶的侧边缘的相邻磁体的极性为相反的，并且彼此面对的磁体的极性相反。至少两个靶的表面以不小于30°并且不大于60°的角度倾斜到基底的表面。

3. 发明授权

US5766364A Plasma processing apparatus 失效
标题翻译：等离子体处理装置
公开(公告)号：US5766364A
公开(公告)日：1998-06-16
申请号：US893940
申请日：1997-07-15
申请人： Toshimichi Ishida , Yuichiro Yamada , Takahiro Takisawa , Hiroshi Tanabe
发明人： Toshimichi Ishida , Yuichiro Yamada , Takahiro Takisawa , Hiroshi Tanabe
IPC分类号： H05H1/46 , C23C16/44 , C23C16/455 , C23C16/50 , C23C16/505 , C23C16/509 , H01J37/32 , H01L21/205 , H01L21/31 , C23C16/00
CPC分类号： C23C16/45565 , C23C16/45572 , C23C16/5096 , H01J37/3244 , H01J37/32522
摘要： Generated heat is effectively dissipated to prevent thermal deformation of a gas ejector plate in a plasma processing apparatus which is capable of processing a substrate of large scale. A temperature controlling plate 106 and heat conductor 109 are fixedly disposed on the upper electrode-cum-gas ejector plate 105 which is provided with a multiplicity of gas ejecting apertures 105a disposed at regular intervals. The heat conductor 109 is constructed to be a latticed member for effectively conducting heat from the gas ejector plate 105 to the temperature controlling plate 106, and has a plurality of gas pressure equalizing spaces 109a defined between crossing bars of the lattice for pressuring process gas to be evenly ejected through the gas ejecting apertures 105a.
摘要翻译：产生的热量被有效地消散，以防止能够处理大规模基板的等离子体处理装置中的气体喷射板的热变形。温度控制板106和导热体109被固定地设置在上部电极 - 气体顶出器板105上，该喷射板105设置有以规则间隔设置的多个气体喷射孔105a。热导体109被构造为用于将热量从气体喷射板105有效地传导到温度控制板106的格子构件，并且具有限定在格子的交叉条之间的多个气体平衡空间109a，用于将工作气体加压到均匀地喷射通过气体喷射孔105a。

4. 发明授权

US08113899B2 Method for producing plasma display panel 失效
标题翻译：等离子体显示面板的制造方法
公开(公告)号：US08113899B2
公开(公告)日：2012-02-14
申请号：US12502369
申请日：2009-07-14
申请人： Tomohiro Okumura , Ryuichi Murai , Takahiro Takisawa , Hiroyoshi Sekiguchi , Takayuki Ashida , Yoshihiro Sakaguchi
发明人： Tomohiro Okumura , Ryuichi Murai , Takahiro Takisawa , Hiroyoshi Sekiguchi , Takayuki Ashida , Yoshihiro Sakaguchi
IPC分类号： H01J9/24
CPC分类号： H01J11/12 , H01J9/261
摘要： A method for producing a plasma display panel, the method comprising the steps of: (i) preparing a front panel and a rear panel, the front panel being a panel wherein an electrode A, a dielectric layer A and a protective layer are formed on a substrate A, and the rear panel being a panel wherein an electrode B, a dielectric layer B, a partition wall and a phosphor layer are formed on a substrate B; (ii) applying a glass frit material onto a peripheral region of the substrate A or B, and then opposing the front and rear panels with each other such that the glass frit material is interposed therebetween; (iii) supplying a gas into a space formed between the opposed front and rear panels from a direction lateral to the opposed front and rear panels, under such a condition that the front and rear panels are heated; and (iv) melting the glass frit material to cause the front and rear panels to be sealed.
摘要翻译：一种等离子体显示面板的制造方法，其特征在于，包括以下步骤：（i）前面板和后面板的制作，前面板为面板，其中，电极A，电介质层A和保护层形成在基板A，后面板是在基板B上形成电极B，电介质层B，分隔壁和荧光体层的面板; （ii）将玻璃料材料施加到基板A或B的周边区域上，然后使前后板彼此相对，使得玻璃料材料插入其间; （iii）在前后板被加热的条件下，从相对的前板和后板的横向方向将气体供给到形成在相对的前板和后板之间的空间中; 和（iv）熔化玻璃料材料以使前面板和后面板被密封。

5. 发明申请

US20100015877A1 METHOD FOR PRODUCING PLASMA DISPLAY PANEL 失效
标题翻译：生产等离子显示面板的方法
公开(公告)号：US20100015877A1
公开(公告)日：2010-01-21
申请号：US12502369
申请日：2009-07-14
申请人： Tomohiro Okumura , Ryuichi Murai , Takahiro Takisawa , Hiroyoshi Sekiguchi , Takayuki Ashida , Yoshihiro Sakaguchi
发明人： Tomohiro Okumura , Ryuichi Murai , Takahiro Takisawa , Hiroyoshi Sekiguchi , Takayuki Ashida , Yoshihiro Sakaguchi
IPC分类号： H01J9/26
CPC分类号： H01J11/12 , H01J9/261
摘要： A method for producing a plasma display panel, the method comprising the steps of: (i) preparing a front panel and a rear panel, the front panel being a panel wherein an electrode A, a dielectric layer A and a protective layer are formed on a substrate A, and the rear panel being a panel wherein an electrode B, a dielectric layer B, a partition wall and a phosphor layer are formed on a substrate B; (ii) applying a glass frit material onto a peripheral region of the substrate A or B, and then opposing the front and rear panels with each other such that the glass frit material is interposed therebetween; (iii) supplying a gas into a space formed between the opposed front and rear panels from a direction lateral to the opposed front and rear panels, under such a condition that the front and rear panels are heated; and (iv) melting the glass frit material to cause the front and rear panels to be sealed.
摘要翻译：一种等离子体显示面板的制造方法，其特征在于，包括以下步骤：（i）前面板和后面板的制作，前面板为面板，其中，电极A，电介质层A和保护层形成在基板A，后面板是在基板B上形成电极B，电介质层B，分隔壁和荧光体层的面板; （ii）将玻璃料材料施加到基板A或B的周边区域上，然后使前后板彼此相对，使得玻璃料材料插入其间; （iii）在前后板被加热的条件下，从相对的前板和后板的横向方向将气体供给到形成在相对的前板和后板之间的空间中; 和（iv）熔化玻璃料材料以使前面板和后面板被密封。

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