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    • 9. 发明授权
    • Spin valve magnetoresistive head and manufacturing method therefor
    • 自旋阀磁阻头及其制造方法
    • US6123780A
    • 2000-09-26
    • US6977
    • 1998-01-14
    • Hitoshi KanaiKenichi AoshimaKenichiro YamadaMitsumasa OkadaEiji ShimizuJunichi Kane
    • Hitoshi KanaiKenichi AoshimaKenichiro YamadaMitsumasa OkadaEiji ShimizuJunichi Kane
    • G11B5/31G11B5/39C21D1/04
    • B82Y25/00B82Y10/00G11B5/3903G11B5/3967G11B2005/3996G11B5/3163
    • A method for manufacturing a spin valve GMR head is describe in which a fixed magnetic layer of the head may maintain magnetization in a desired orientation. In one aspect of the invention, the method comprises steps of: forming a magnetic film including at least a free magnetic layer, a non-magnetic metallic layer, a fixed magnetic layer, and a magnetic domain control layer; subjecting the magnetic film to a first heat treatment under a magnetic field to enhance magnetic anisotropy of the free magnetic layer; and subjecting the magnetic film to a second heat treatment under a magnetic field and at a higher temperature than the maximum temperature applied in the processes that precede the second heat treatment, to fix the magnetization in the fixed magnetic layer. In anther aspect of the invention, the method comprises steps of: forming a magnetic film including a free magnetic layer, a non-magnetic metallic layer, a fixed magnetic layer, and a magnetic domain control layer; subjecting the magnetic film to a first heat treatment under a magnetic field to fix the magnetization in the fixed magnetic layer; subjecting the magnetic film to a second heat treatment under a magnetic field to enhance magnetic anisotropy of the free magnetic layer; and subjecting the magnetic film to a third heat treatment in the absence of an externally applied magnetic field.
    • 描述了用于制造自旋阀GMR头的方法,其中磁头的固定磁性层可以将磁化保持在期望的取向。 在本发明的一个方面,所述方法包括以下步骤:形成至少包括自由磁性层,非磁性金属层,固定磁性层和磁畴控制层的磁性膜; 在磁场下对磁性膜进行第一次热处理以提高自由磁性层的磁各向异性; 并且在磁场和比在第二热处理之前的工序中施加的最高温度更高的温度下对磁性膜进行第二次热处理,以将磁化固定在固定磁性层中。 在本发明的另一方面,该方法包括以下步骤:形成包括自由磁性层,非磁性金属层,固定磁性层和磁畴控制层的磁性膜; 对磁性膜进行磁场的第一次热处理,以固定在固定磁性层中的磁化强度; 在磁场下对磁性膜进行第二次热处理,以提高自由磁性层的磁各向异性; 并且在没有外部施加的磁场的情况下对磁性膜进行第三次热处理。