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    • 6. 发明授权
    • Process for producing a large number of semiconductor chips from a semiconductor wafer
    • 用于从半导体晶片制造大量半导体芯片的工艺
    • US06448151B2
    • 2002-09-10
    • US09817248
    • 2001-03-27
    • Toshiyuki Tateishi
    • Toshiyuki Tateishi
    • H01L2130
    • H01L21/78B28D5/022Y10S438/977
    • A process for producing a large number of semiconductor chips from a semiconductor wafer having a large number of rectangular areas defined by streets arranged on the front surface in a lattice form, semiconductor circuits being formed in the respective rectangular areas. This process comprises the steps of forming a plurality of grooves having a predetermined depth in the back surface of the semiconductor wafer, grinding the back surface of the semiconductor wafer to reduce the thickness of the semiconductor wafer to a predetermined value and thereafter, cutting the semiconductor wafer along the streets to separate the rectangular areas from one another to obtain semiconductor chips.
    • 一种用于从具有大量矩形区域的半导体晶片制造大量半导体芯片的方法,该矩形区域以格子形式布置在前表面上的街道,半导体电路形成在各个矩形区域中。 该方法包括以下步骤:在半导体晶片的背表面中形成具有预定深度的多个凹槽,研磨半导体晶片的背面以将半导体晶片的厚度减小到预定值,之后切割半导体 晶片沿着街道将矩形区域彼此分离以获得半导体芯片。