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    • 1. 发明专利
    • Carbon nanotube producing apparatus
    • 碳纳米管生产设备
    • JP2014065618A
    • 2014-04-17
    • JP2012210248
    • 2012-09-25
    • Hitachi Zosen Corp日立造船株式会社
    • SUGIMOTO ITSUO
    • C01B31/02C23C16/26
    • PROBLEM TO BE SOLVED: To provide a carbon nanotube producing apparatus for which no catalyst patterning step is necessary, in forming carbon nanotubes on a substrate surface.SOLUTION: A carbon nanotube producing apparatus comprises: a heating apparatus 32 for heating the lower side of a substrate K installed in a heating chamber 13; a gas guiding body 21 having a raw material gas supply region 21a capable of guiding the raw material gas G to a substrate surface installed on the lower position of the substrate; and an inert gas supply tube 46 capable of supplying an inert gas F installed on the periphery of the raw material gas supply region. Additionally, in conducting thermal CVD, surface temperature of the substrate is adjusted to be in the temperature range in which carbon nanotubes are generated by heating the substrate with the heating apparatus, and at the same time, surface temperature of the substrate on the periphery of the raw material gas supply region is adjusted to be outside the temperature range in which carbon nanotubes are generated by supplying the inert gas from an inert gas supply nozzle.
    • 要解决的问题:提供一种在基板表面上形成碳纳米管时不需要催化剂图案化步骤的碳纳米管制造装置。解决方案:一种碳纳米管制造装置,包括:加热装置32,用于加热 安装在加热室13内的基板K; 气体引导体21,其具有能够将原料气体G引导到安装在基板的下部位置的基板面的原料气体供给区域21a; 以及能够供给安装在原料气体供给区域周围的惰性气体F的惰性气体供给管46。 此外,在进行热CVD时,将基板的表面温度调整为在通过加热装置加热基板而产生碳纳米管的温度范围内,同时基板周边的表面温度 通过从惰性气体供给喷嘴供给惰性气体,将原料气体供给区域调整为在生成碳纳米管的温度范围之外。
    • 2. 发明专利
    • Thermal cvd method and thermal cvd apparatus, and method and apparatus for manufacturing carbon nanotube
    • 热CVD法和热CVD装置,以及制造碳纳米管的方法和装置
    • JP2011174097A
    • 2011-09-08
    • JP2010036742
    • 2010-02-23
    • Hitachi Zosen Corp日立造船株式会社
    • HIRAOKA KAZUYUKISUGIMOTO ITSUOTAKITANI TOSHIOTAKANABE KOJIKIRA KOJIHARADA MAKI
    • C23C16/46C01B31/02C23C16/26
    • PROBLEM TO BE SOLVED: To provide a thermal CVD method and a thermal CVD apparatus, for adequately heating a conductive substrate even when the conductive substrate is covered with an insulating member, and to provide a method and apparatus for manufacturing carbon nanotubes.
      SOLUTION: In the method for manufacturing carbon nanotubes, the carbon nanotubes are formed on a conductive substrate K by the thermal CVD method by heating the conductive substrate K which is arranged in a heating chamber 13 in which carbon raw material gas G is introduced and has an insulating member Z provided on at least one surface thereof. A pair of electrodes 22 arranged at predetermined intervals are opposed to each other in contact with a surface of the insulating member Z or with a space therebetween, and the conductive substrate K is locally heated by applying the AC voltage between the electrodes 22 of an electric circuit constituted of the electrodes 22, the conductive substrate K corresponding thereto, the pair of capacitors constituted of the insulating member Z or the insulating member Z and the space, and a resistor formed of the conductive substrate K between the capacitors.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:为了提供热CVD方法和热CVD装置,即使当导电基板被绝缘构件覆盖时,也可以适当地加热导电基板,并提供用于制造碳纳米管的方法和装置。 解决方案:在制造碳纳米管的方法中,通过加热布置在碳原料气体G为的加热室13中的导电性基板K,通过热CVD法在导电性基板K上形成碳纳米管 引入并具有设置在其至少一个表面上的绝缘构件Z。 以预定间隔排列的一对电极22彼此相对地与绝缘构件Z的表面或其间具有空间相接触,并且通过在电极22的电极22之间施加交流电压来局部加热导电基板K. 由电极22,与其对应的导电基板K,由绝缘构件Z或绝缘构件Z构成的一对电容器和空间构成的电路,以及由电容器之间的导电基板K形成的电阻。 版权所有(C)2011,JPO&INPIT
    • 3. 发明专利
    • Cvd apparatus for forming carbon nanotube
    • 形成碳纳米管的CVD装置
    • JP2011148659A
    • 2011-08-04
    • JP2010011513
    • 2010-01-22
    • Hitachi Zosen Corp日立造船株式会社
    • SUGIMOTO ITSUOTAKITANI TOSHIOTAKANABE KOJIHIRAOKA KAZUYUKIKIRA KOJIHARADA MAKIOKAMOTO KENJI
    • C01B31/02
    • PROBLEM TO BE SOLVED: To provide a CVD apparatus for forming carbon nanotube formation efficiently formable of carbon nanotubes on a substrate surface. SOLUTION: An unwinding roll 16 on which a thin stainless steel sheet, that is a substrate K on which carbon nanotubes are formed, has been wound is disposed at one end in a furnace body 2; a winding roll 17 that winds the steel sheet is disposed at the other end; a heating chamber 13 is formed between both the rolls with partition walls 3 having an opening 3a passing the substrate; heating units 21 are arranged above the substrate in the heating chamber; a gas supply port 5 supplying a carbon-containing raw material gas G is disposed at the bottom of the heating chamber; a gas exhaust port 6 discharging the residual raw material gas is disposed at the upper part of the heating chamber; and an exhauster that keeps the interior of the heating chamber under predetermined reduced pressure is provided. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供一种在衬底表面上形成可有效形成碳纳米管的碳纳米管形成用CVD装置。 解决方案:在其上缠绕有作为其上形成有碳纳米管的基板K的薄不锈钢板的退卷辊16设置在炉体2的一端; 卷绕钢板的卷绕辊17设置在另一端; 在具有通过基板的开口3a的分隔壁3的两个辊之间形成加热室13; 加热单元21布置在加热室中的基板的上方; 供给含碳原料气体G的气体供给口5配置在加热室的底部, 排出残留原料气体的排气口6设置在加热室的上部; 并且提供将加热室的内部保持在预定减压下的排气装置。 版权所有(C)2011,JPO&INPIT
    • 4. 发明专利
    • Holder of substrate for forming carbon nanotube
    • 用于形成碳纳米管的基板夹持器
    • JP2011068508A
    • 2011-04-07
    • JP2009219833
    • 2009-09-25
    • Hitachi Zosen Corp日立造船株式会社
    • TATSUMI HIROSHISUGIMOTO ITSUO
    • C01B31/02H01L21/683
    • PROBLEM TO BE SOLVED: To provide the holder of a substrate for forming carbon nanotubes where thermal strain on the substrate is not caused when forming the carbon nanotubes.
      SOLUTION: The holder 2 of the substrate 1 for forming the vertically aligned carbon nanotubes on the surface of the substrate 1 and having a rectangular shape in plane view is constituted by a supporting member 3 having a middle flat part 3a which supports the substrate and edge parts 3b whose heights are lower than that of the flat part and which exist at both sides and a rectangular frame member 4 having a guiding space 4a to guide the flat part of the supporting member and holding the substrate by pressing both edge parts 1a of the substrate 1 placed on the flat part to both edge parts 3b of the supporting member. Further, the substrate, the supporting member and the frame member are constituted of a metal material and materials having larger linear expansion coefficient than that of the substrate are used for the supporting member and the frame member.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供用于形成碳纳米管的基板的保持器,其中当形成碳纳米管时不引起基板上的热应变。 解决方案:用于在基板1的表面上形成垂直取向的碳纳米管的基板1的保持件2由平面图形成矩形形状,由具有中间平坦部分3a的支撑件3构成,该中间平坦部分3a支撑 基板和边缘部分3b,其高度低于平坦部分并且存在于两侧的边缘部分3b以及具有引导空间4a的矩形框架构件4,以引导支撑构件的平坦部分并且通过按压两个边缘部分来保持基板 1a的基板1放置在平坦部分上,支撑部件的两个边缘部分3b。 此外,基板,支撑构件和框架构件由金属材料构成,并且具有比基板的线膨胀系数大的线材膨胀系数的材料用于支撑构件和框架构件。 版权所有(C)2011,JPO&INPIT
    • 5. 发明专利
    • Solar cell and method of manufacturing the same, and solar cell device
    • 太阳能电池及其制造方法和太阳能电池装置
    • JP2011044511A
    • 2011-03-03
    • JP2009190559
    • 2009-08-20
    • Hitachi Zosen Corp日立造船株式会社
    • HIRAOKA KAZUYUKISUGIMOTO ITSUOTAKITANI TOSHIOTAKANABE KOJI
    • H01L31/04
    • H01L31/035281H01L31/0352H01L31/035227H01L31/0543H01L31/0549Y02E10/52
    • PROBLEM TO BE SOLVED: To provide a solar cell device that can achieve improvement in conversion efficiency of energy. SOLUTION: A solar cell includes: a transparent electrode 2 made into an n-type semiconductor; a plurality of carbon nanotubes 3 disposed side by side on a lower surface of the transparent electrode 2 and perpendicularly to the lower surface; and metal electrodes 4 arranged on lower surfaces of the respective carbon nanotubes 3 on the opposite side from the transparent electrode 2; wherein the diameters of the carbon nanotubes 3, which are disposed side by side, are varied stepwise from one side to the other side, and the respective carbon nanotubes 3 are doped with atoms of a third group of a periodic table of the elements to make p-type semiconductors. In a solar cell device, a spectroscope 12 which disperse a solar light beam is further disposed on a surface of the transparent electrode 2 of a solar cell 1, and the solar cell device includes a voltage adjuster 14 which adjusts electricity, obtained by the respective carbon nanotubes 3 of the solar cell 1, to a predetermined voltage. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供能够实现能量转换效率的提高的太阳能电池装置。 解决方案:太阳能电池包括:制成n型半导体的透明电极2; 多个碳纳米管3并排设置在透明电极2的下表面上并垂直于下表面; 以及配置在与透明电极2相反一侧的各碳纳米管3的下表面的金属电极4; 其中并排设置的碳纳米管3的直径从一侧逐渐变化到另一侧,并且各个碳纳米管3被掺杂有第三组元素周期表的原子以使 p型半导体。 在太阳能电池装置中,在太阳能电池1的透明电极2的表面上进一步配置分散有太阳光的分光镜12,太阳能电池装置包括调整电力的电压调节器14, 太阳能电池1的碳纳米管3达到预定电压。 版权所有(C)2011,JPO&INPIT
    • 6. 发明专利
    • Target for x-ray generation and its manufacturing method
    • X射线产生的目标及其制造方法
    • JP2007188732A
    • 2007-07-26
    • JP2006005452
    • 2006-01-13
    • Hitachi Zosen Corp日立造船株式会社
    • SUGIMOTO ITSUOOKAZAKI SHIGEKI
    • H01J35/08H01J9/14
    • PROBLEM TO BE SOLVED: To provide a target for X-ray generation that is capable of generating longer-lasting and high-output X-rays, by improving a heat dissipation property on a target face against which electrons are collided even when a rare earth metal having a small thermal conductivity is used.
      SOLUTION: The target for X-ray generation is composed of a target body 2 in which lanthanum boride being a rare earth metal is used, and which is formed into a cylindrical shape with a prescribed outer diameter d
      1 and a prescribed thickness t
      1 , and a covering member 3 in which a material having a thermal conductivity larger than that of a material of the target body 2, that is, the lanthanum boride is used and which covers the entire face of the target body 2. At least a thickness at a surface part 3a into which electrons are made incident is set within a range of 1-3 μm.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:为了提供能够产生更持久和高输出X射线的X射线产生的目标,通过提高即使当电子碰撞时电子碰撞的目标面上的散热特性 使用具有小导热性的稀土金属。 解决方案:X射线产生的目标由使用稀土金属硼化镧的目标体2构成,并且形成具有规定外径d 1的圆筒形状, / SB>和规定厚度t SB <1>,以及其中使用导热率大于靶体2的材料,即硼化镧的材料的覆盖部件3 并覆盖目标体2的整个表面。电子入射的表面部分3a的至少厚度设定在1-3μm的范围内。 版权所有(C)2007,JPO&INPIT
    • 8. 发明专利
    • Substrate for generating carbon nanotube, and method for generating carbon nanotube using the same
    • 用于生成碳纳米管的基板,以及使用该碳纳米管生成碳纳米管的方法
    • JP2013155067A
    • 2013-08-15
    • JP2012016025
    • 2012-01-30
    • Hitachi Zosen Corp日立造船株式会社
    • MIZUTA KENJITATSUMI HIROSHISUGIMOTO ITSUO
    • C01B31/02B82Y40/00
    • PROBLEM TO BE SOLVED: To provide: a substrate for generating carbon nanotubes which can be produced in a short time at low cost, and can generate carbon nanotubes with high adhesiveness; and a method for generating carbon nanotubes using the same.SOLUTION: There is provided a substrate 1 for generating carbon nanotubes by a thermal CVD method on the surface side of a buffer layer 3 formed on the substrate body 2 via a catalyst metal 4, where the buffer layer 3 is composed of a surface layer part 3U with predetermined hardness on which a membrane comprising the catalyst metal 4 is formed, and a deep layer 3L with lower hardness than that of the surface layer 3U. The buffer layer is configured that the deep layer 3L is cured by heat of the thermal CVD method and makes the catalyst metal 4 subduct in the surface layer 3U to be laid down.
    • 要解决的问题:提供:可以以低成本在短时间内制造碳纳米管的基板,能够生成粘合性高的碳纳米管; 以及使用其制造碳纳米管的方法。本发明提供了一种用于通过催化剂金属4在形成于基体2上的缓冲层3的表面侧上通过热CVD法生成碳纳米管的基板1,其中, 缓冲层3由具有预定硬度的表面层3U组成,其上形成有包含催化剂金属4的膜和比表面层3U低的硬度的深层3L。 缓冲层被配置为通过热CVD法的热量使深层3L固化,并使表面层3U中的催化剂金属4的下端被放置。
    • 9. 发明专利
    • Cvd apparatus for carbon nanotube formation
    • 碳纳米管形成的CVD装置
    • JP2013032248A
    • 2013-02-14
    • JP2011169695
    • 2011-08-03
    • Hitachi Zosen Corp日立造船株式会社
    • SUGIMOTO ITSUOTAKANABE KOJI
    • C01B31/02
    • PROBLEM TO BE SOLVED: To provide a thermal CVD apparatus in which carbon nanotubes can be continuously formed on the surface of a substrate, and a material gas can be uniformly supplied on the surface of the substrate.SOLUTION: The CVD apparatus for carbon nanotube formation is characterized as follows. A winding out roll 16 in which a sheet that composes a substrate K is wound around at one end side in a furnace body 2 of a heating furnace 1, a winding roll 17 that winds up the substrate K at the other end side are arranged respectively, a heating chamber 13 of a rectangular shape viewed from above having a prescribed size is formed by a partition wall 3 that has an opening 3a for communication that can insert the substrate K between the both rolls 16 and 17, a heating device 41 is disposed at the upper position of the substrate K in the heating chamber 13, a gas feed port 5 that can supply a material gas G is provided at the lower part of the heating chamber 13, a gas dispersion member 21 consisting of a porous material in which the middle part is columnar and the upper end part is hemispherical is disposed at the gas feed port 5, and an exhaust device 23 that can decompress the inside of the heating chamber 13 to a given vacuum is included.
    • 解决的问题:提供一种能够在基板的表面上连续地形成碳纳米管的热CVD装置,并且可以在基板的表面上均匀地供给材料气体。 解决方案:用于碳纳米管形成的CVD装置的特征如下。 在加热炉1的炉体2的一端侧卷绕有构成基板K的片的卷取卷16,在另一端侧卷绕基板K的卷绕辊17 由具有规定尺寸的上方观察的矩形加热室13由具有用于连通的开口3a的分隔壁3形成,该开口3a能够将基板K插入在两个辊16和17之间,设置加热装置41 在加热室13中的基板K的上部位置,在加热室13的下部设置有能够供给原料气体G的气体供给口5,由多孔质材料构成的气体分散构件21, 中间部分是柱状的,并且上端部是半球形的设置在气体供给口5处,并且包括能够将加热室13的内部减压到给定真空的排气装置23。 版权所有(C)2013,JPO&INPIT
    • 10. 发明专利
    • Thermal cvd apparatus
    • 热CVD装置
    • JP2012017477A
    • 2012-01-26
    • JP2010153513
    • 2010-07-06
    • Hitachi Zosen Corp日立造船株式会社
    • HIRAOKA KAZUYUKISUGIMOTO ITSUOTAKANABE KOJITAKITANI TOSHIOKIRA KOJIHARADA MAKI
    • C23C16/455
    • PROBLEM TO BE SOLVED: To provide a thermal CVD apparatus that can stably form a film on a substrate by heating raw material gas fed into a vacuum chamber and by appropriately heating the substrate without separately arranging a heating means.SOLUTION: The thermal CVD apparatus with a substrate K arranged therein, which has a heating chamber 13 capable of keeping a predetermined vacuum level and supplies the raw material gas G to the substrate K to grow a carbon nanotube by a thermal chemical vapor deposition method. The apparatus includes: a heating device 21 arranged above the substrate K in the heating chamber 13, which heats the substrate K; a spiral part to be heated 33 arranged above the heating device 21 and heated by the heating device 21; and a gas supply pipe 31 for supplying the raw material gas G from below the substrate K.
    • 解决问题:提供一种热CVD装置,其可以通过加热供给到真空室中的原料气体并且通过适当地加热基板而不分开设置加热装置,在基板上稳定地形成膜。 解决方案:具有布置在其中的基板K的热CVD装置,其具有能够保持预定真空度的加热室13,并且将原料气体G供应到基板K以通过热化学蒸气生长碳纳米管 沉积法。 该装置包括:加热装置21,其布置在加热室13中的基板K的上方,加热基板K; 被加热的螺旋部33,配置在加热装置21的上方,被加热装置21加热; 以及用于从基板K的下方供给原料气体G的气体供给管31.权利要求(C)2012,JPO&INPIT