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    • 1. 发明专利
    • Magnetic sample inspection device
    • 磁性样品检测装置
    • JP2007225363A
    • 2007-09-06
    • JP2006044875
    • 2006-02-22
    • Hitachi Ltd株式会社日立製作所
    • TAKAHASHI TERUOSHIMAKURA TOMOKAZU
    • G01N23/225
    • H01J37/29H01J2237/2067H01J2237/24557H01J2237/24564H01J2237/2538
    • PROBLEM TO BE SOLVED: To provide an inspection technique not developed heretofore, which allows a user to observing the shape of a magnetic domain formed on the surface of a magnetic sample at a high speed with high resolving power.
      SOLUTION: This magnetic sample inspection device has: an SPLEEM observation part 200 equipped with a spin polarential election source, an irradiation optical system for irradiating the magnetic sample having a magnetic domain structure with the spin polarential electron beam emitted from the spin polarential electron source, a stage on which the magnetic sample is placed, and an image forming optical system for forming the electron beam reflected from the magnetic sample into an image to detect the same; cleaning means 208 and 216 for cleaning the surface of the magnetic sample to feed the magnetic sample to the SPLEEM observation part; and an image processing part for analyzing the image data obtained from the image forming optical system. The magnetic sample inspection device is characterized by inspecting the shape of the magnetic domain on the surface of the magnetic sample on the basis of the image data.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:为了提供迄今未开发的检查技术,其允许用户以高分辨率高速观察形成在磁性样品表面上的磁畴的形状。 解决方案:该磁性样品检查装置具有:SPLEEM观察部200,配备有自旋主体选择源,照射光学系统,用于照射具有磁畴结构的磁性样品,其具有从旋转天体发射的自旋辐射电子束 电子源,放置磁性样品的阶段,以及用于形成从磁性样品反射成电子束的图像形成光学系统进行图像检测的图像形成光学系统; 清洁装置208和216,用于清洁磁性样品的表面以将磁性样品供给到SPLEEM观察部分; 以及用于分析从图像形成光学系统获得的图像数据的图像处理部分。 磁性样品检查装置的特征在于基于图像数据检查磁性样品表面上的磁畴的形状。 版权所有(C)2007,JPO&INPIT
    • 2. 发明专利
    • Magnetic recording medium and its manufacturing method, and magnetic recording and reproducing device
    • 磁记录介质及其制造方法和磁记录和再现装置
    • JP2006127681A
    • 2006-05-18
    • JP2004316616
    • 2004-10-29
    • Hitachi Ltd株式会社日立製作所
    • TSUCHIYA HIROKOMOCHIZUKI MASABUMITAKAHASHI TERUOIKEGAME HIROSHI
    • G11B5/667G11B5/64G11B5/65G11B5/738G11B5/84
    • G11B5/855G11B5/667G11B5/7325G11B5/8404
    • PROBLEM TO BE SOLVED: To provide a discrete track type perpendicular magnetic recording medium which is excellent in crystal orientation and perpendicular magnetic anisotropy of a magnetic recording layer, obviates deterioration of the magnetic characteristics of the magnetic recording layer due to processing, is inexpensive in manufacturing cost, and does not require a complicated manufacturing process and to provide its manufacturing method. SOLUTION: The perpendicular magnetic recording medium has rugged pattern structure comprising projecting parts corresponding to the positions of data tracks 55 for recording magnetic information and recessed parts corresponding to the positions between the data tracks on the surface on a medium floating surface side of a soft magnetic backing layer 52 and is laminated with a base layer 53 and the magnetic recording layer 54 for crystal orientation control along the rugged pattern structure on the projecting parts and the recessed parts without omission. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:为了提供磁记录层的晶体取向和垂直磁各向异性优异的离散轨道型垂直磁记录介质,消除了由于处理而导致的磁记录层的磁特性的劣化,是 制造成本低廉,并且不需要复杂的制造工艺并提供其制造方法。 解决方案:垂直磁记录介质具有粗糙的图案结构,其包括对应于用于记录磁信息的数据轨道55的位置的突出部分和对应于在介质浮动表面侧的表面上的数据轨道之间的位置的凹部 柔性磁性背衬层52,并且在突出部分和凹陷部分上沿着凹凸图案结构层叠有基底层53和用于晶体取向控制的磁记录层54,而没有遗漏。 版权所有(C)2006,JPO&NCIPI
    • 3. 发明专利
    • Analyzer
    • 分析仪
    • JP2014127224A
    • 2014-07-07
    • JP2012280491
    • 2012-12-25
    • Hitachi Ltd株式会社日立製作所
    • TAKAHASHI TERUOHARADA KEN
    • H01J37/256H01J37/05H01J37/252H01J37/285
    • PROBLEM TO BE SOLVED: To provide an apparatus for measuring magnetization distribution and composition distribution on the surface of a magnetic material sample, at a time, by the same electron beam scanning.SOLUTION: Two electron deflectors for separating electrons discharged from a sample by the energy thereof are mounted. In the first electron deflector, only the secondary electrons of low energy, out of the electrons discharged from the sample, are separated and transported to a spin detector, and used for magnetization analysis. High energy electrons transmitted through the first electron deflector impinge on the second electron deflector, and are subjected to Auger analysis before being used for composition analysis. Consequently, magnetization and composition can be measured simultaneously by the same electron beam scanning.
    • 要解决的问题:提供一种用于测量磁性材料样品的表面上的磁化分布和组成分布的装置,同时通过相同的电子束扫描。解决方案:用于分离由样品排出的电子的两个电子偏转器 安装能量。 在第一电子偏转器中,只有从样品排出的电子中的低能量的二次电子被分离并传送到自旋检测器,并用于磁化分析。 通过第一电子偏转器传输的高能电子撞击第二电子偏转器,并在用于组成分析之前进行俄歇分析。 因此,可以通过相同的电子束扫描同时测量磁化和组成。
    • 4. 发明专利
    • Charged particle spin polarimeter, microscope, and photoelectron spectroscopy device
    • 充电颗粒旋转极化子,微结构和光电子光谱仪
    • JP2008251525A
    • 2008-10-16
    • JP2008002093
    • 2008-01-09
    • Hitachi Ltd株式会社日立製作所
    • TAKAHASHI TERUO
    • H01J37/244H01J37/28
    • PROBLEM TO BE SOLVED: To provide a charged particle spin polarimeter capable of resolving the magnetic moment of charged particles with high efficiency.
      SOLUTION: The charged particle spin polarimeter has a pair of convex and concave magnetic poles for applying a magnetic field with gradient to an incident charged particle and a pair of flat plate electrodes to apply an electric field to a charged particle to cancel the Lorentz force that the charged particle receives from the magnetic field. The magnetic moment of a charged particle in the direction of the magnetic field is resolved by the interaction between the gradient of the magnetic field and the magnetic moment of the charged particle.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 解决的问题:提供能够高效率地分解带电粒子的磁矩的带电粒子旋转偏振计。 解决方案:带电粒子旋转偏振计具有一对用于向入射带电粒子和一对平板电极施加具有梯度的磁场的凸极和磁极,以对带电粒子施加电场以抵消 带电粒子从磁场接收的洛伦兹力。 带电粒子在磁场方向上的磁矩通过磁场梯度与带电粒子的磁矩之间的相互作用来解决。 版权所有(C)2009,JPO&INPIT
    • 6. 发明专利
    • Spin polarized scanning electron microscope
    • 旋转极化扫描电子显微镜
    • JP2008243486A
    • 2008-10-09
    • JP2007080181
    • 2007-03-26
    • Hitachi Ltd株式会社日立製作所
    • TAKAHASHI TERUO
    • H01J37/28G01N23/225H01J37/20
    • PROBLEM TO BE SOLVED: To provide a device capable of executing measurement while keeping secondary electron collection efficiency and the degree of spin polarization, and applying a high magnetic field having a level not smaller than 1 kOe to a sample, in a spin polarized scanning electron microscope.
      SOLUTION: This spin polarized scanning electron microscope includes: an irradiation optical system irradiating a magnetic material sample 202 with a primary electron beam emitted from an electron gun; a sample mounting means for mounting the sample thereon; a transport optical system transporting secondary electrons emitted from the sample by the irradiation of the primary electron beam; and a spin detector detecting the degree of spin polarization of the transported secondary electrons as a signal; and used for observing a magnetic domain image of the sample based on the signal related to the degree of spin polarization. The spin polarized scanning electron microscope is characterized in that the sample mounting means has magnetic field application mechanisms 203, 206 and 207 each applying a magnetic field to the sample; the magnetic application mechanisms have a magnetic shield member 203 having an opening through which the primary electron beam and the secondary electrons 210 pass; and the magnetic shield member is arranged on an electron gun-side surface of the sample to shield a stray magnetic field on the sample surface.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:为了提供能够在保持二次电子收集效率和自旋极化程度的同时执行测量并且在旋转中施加具有不小于1kOe的高电平的高磁场的装置 偏振扫描电子显微镜。 该自旋极化扫描电子显微镜包括:照射光学系统,用从电子枪发射的一次电子束照射磁性材料样品202; 用于将样品安装在其上的样品安装装置; 通过一次电子束的照射传送从样品发射的二次电子的传输光学系统; 以及检测所传输的二次电子的自旋极化程度作为信号的自旋检测器; 并用于基于与自旋极化度相关的信号观察样品的磁畴图像。 自旋偏振扫描电子显微镜的特征在于,样品安装装置具有各自向样品施加磁场的磁场施加机构203,206和207; 磁性施加机构具有一个具有一个电子束和二次电子210通过的开口的磁屏蔽件203; 并且磁屏蔽构件布置在样品的电子枪侧表面上以屏蔽样品表面上的杂散磁场。 版权所有(C)2009,JPO&INPIT
    • 10. 发明专利
    • Scanning electron microscope
    • 扫描电子显微镜
    • JP2010003450A
    • 2010-01-07
    • JP2008159251
    • 2008-06-18
    • Hitachi Ltd株式会社日立製作所
    • TAKAHASHI TERUOOSHIMA TAKU
    • H01J37/28G01N23/203H01J37/073H01J37/244
    • PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of performing a chirality distribution in a polymer structure of protein and an analysis of a magnetic domain structure at high resolution.
      SOLUTION: Upon using a scanning electron microscope which is loaded with a spin-polarized electron source having a laser 201 and a semiconductor 202, a chirality structure and magnetized vector of polymer inside a testpiece 208 can be visualized by measuring intensity and the degree of spin-polarization of reflected electrons 209 from the testpiece 208 which is irradiated by a spin-polarized electron beam 203 by using a reflected electron detector 210.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供能够在蛋白质的聚合物结构中进行手性分布的扫描电子显微镜和高分辨率的磁畴结构的分析。 解决方案:在使用装载有具有激光201和半导体202的自旋极化电子源的扫描电子显微镜的情况下,通过测量强度可以观察到在试件208内的聚合物的手性结构和磁化载体, 通过使用反射电子检测器210由自旋极化电子束203照射的来自测试件208的反射电子209的自旋极化程度。(C)2010,JPO&INPIT