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1. 发明专利

JP2003338493A Method and equipment for inspecting metal film remaining after machining and method for fabricating thin film device using it 有权
标题翻译：用于检查加工后的金属膜的方法和设备以及使用其制造薄膜装置的方法
公开(公告)号：JP2003338493A
公开(公告)日：2003-11-28
申请号：JP2002146372
申请日：2002-05-21
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： BABA SHUICHI , NOMOTO MINEO , HIROSE TAKESHI , SAWA SHINJI
IPC分类号： B24B37/013 , H01L21/02 , H01L21/304 , H01L21/3065 , B24B37/04
CPC分类号： G01N21/55
摘要： PROBLEM TO BE SOLVED: To inspect a patterned thin metal film remaining after planarization automatically and accurately. SOLUTION: A sample mixture of an optically transparent thin film and a thin metal film is irradiated with light, reflected light from the sample is detected and a decision is made whether the metal film remains after CMP or not based on the intensity of the reflected light thus detected or the reflectivity. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：自动准确地检查平坦化后残留的图案化的金属薄膜。解决方案：用光照射光学透明薄膜和薄金属薄膜的样品混合物，检测来自样品的反射光，并且基于CMP的强度确定金属膜是否保持在CMP之后所检测到的反射光或反射率。版权所有（C）2004，JPO

2. 发明专利

JP2958137B2 Fresnel lens and a method of manufacturing the same 失效
公开(公告)号：JP2958137B2
公开(公告)日：1999-10-06
申请号：JP4462291
申请日：1991-03-11
申请人：株式会社日立製作所
发明人： NISHIGUCHI TAKASHI , SAWA SHINJI
IPC分类号： G02B3/08 , G03B21/62

3. 发明专利

JPH11197996A WORKING METHOD AND DEVICE FOR PART IN PROCESS OF MACHINING 失效
公开(公告)号：JPH11197996A
公开(公告)日：1999-07-27
申请号：JP364398
申请日：1998-01-12
申请人： HITACHI LTD
发明人： SEKIYAMA SHINYA , SAWA SHINJI
IPC分类号： B23Q15/00 , B23Q15/12 , B23Q17/09 , G05B15/02 , G05B19/18 , G05B19/404
摘要： PROBLEM TO BE SOLVED: To avoid the generation of abnormality in a multi-form less-quantity production working to improve the yield of a product, by adequately changing a working condition in accordance with the comparing effect between a working situation predicted from a set working condition and a measured working situation. SOLUTION: The initial value of a working condition is set by a working condition deciding means 1 from the difference between the material and dimension of a raw material given as design information 9 and a desired product dimension. A working situation is predicted by a working situation predicting means 6 based on the working condition, and an actual working situation is measured by a working situation measuring means 3. This working situation measuring result and the working situation predicting result by the predicting means 6 are compared by a working situation comparing means 4, and working is made while charging the working condition by a working situation changing means 5 so as to eliminate the difference between a working situation measured result and a working situation predicted result. Consequently the optimum working can be continued because thus the work condition is adequately changed in accordance with requirement at every working process from the initial working condition.

4. 发明专利

JPH1110408A THROW-AWAY CUTTING TOOL AND CUTTING METHOD THEREOF 失效
公开(公告)号：JPH1110408A
公开(公告)日：1999-01-19
申请号：JP16373497
申请日：1997-06-20
申请人： HITACHI LTD
发明人： SEKIYAMA SHINYA , SAWA SHINJI
IPC分类号： B23Q17/09 , B23B27/00
摘要： PROBLEM TO BE SOLVED: To measure the cutting temperature with good sensitivity and stably by arranging a thermocouple type temperature sensor formed by joining metals of different kinds to each other in a cutting face of a tool. SOLUTION: A tool is formed by molding a cemented carbide of base metal 2-g in a desired shape, then forming the same into a film with a thickness of 1 μ with an electrode film 2-d of iron and an electrode film 2-e of constantan brought into contact with each other, taking the center line of the tool as a boundary on a cutting face 2-c by sputtering, and further forming a protective film 2-h of titanium nitride with a thickness of 4 μ thereon by CVD method. An insulated wiring 2-f is installed in each of the electrode films. The wirings are connected to a temperature measuring device 3 to measure the temperature of a cutting point. The same will be done in the case where the material quality of the tool is used as a first electrode of the thermocouple, and the protective film is used for the second electrode.

5. 发明专利

JPH06162498A PRODUCTION OF MAGNETIC DISK 失效
公开(公告)号：JPH06162498A
公开(公告)日：1994-06-10
申请号：JP31165792
申请日：1992-11-20
申请人： HITACHI LTD
发明人： MAEDA YUKIO , SAWA SHINJI
IPC分类号： G11B5/82 , G11B5/64 , G11B5/73 , G11B5/738 , G11B5/84
摘要： PURPOSE:To provide the magnetic disk having decreased magnetic defects by forming the film of a magnetic recording medium on a plastic disk substrate which is injection-molded by using molds formed with curvilinear gratings, thereby uniformalizing the groove shape and groove pitch of the texturing on the surface of the disk substrate. CONSTITUTION:The plastic disk substrate 7 is injection-molded by subjecting the surfaces of the molds 12, 13 to texturing of the curvilinear gratings of several nm groove depth and groove pitch. A ground surface film (Cr, 50nm thickness) is thereafter formed on the surface of this disk substrate 7 and a magnetic film (Co, 200nm thickness) and a protective film (C, 50nm) are successively formed thereon by sputtering. Finally, a lubricating film is deposited thereon, to obtain the magnetic disk.

6. 发明专利

JPH0295540A FIXING BASE FOR NOZZLE OF CUTTING OIL 失效
公开(公告)号：JPH0295540A
公开(公告)日：1990-04-06
申请号：JP24104488
申请日：1988-09-28
申请人： HITACHI LTD
发明人： MAEDA YUKIO , SAWA SHINJI , ITO RITSU
IPC分类号： B23Q11/10
摘要： PURPOSE:To position the cutting oil discharging nozzle at the accuracy of + or -1mm for a bite and to enable the stabilized removal of chips at cutting time by enabling the positional adjustment of a nozzle and tool, moving a nozzle holding part at tool changing time and, after changing, making the relative positioning of the tool and nozzle returnable with good accuracy. CONSTITUTION:A nozzle 5 is fixed at an appropriate position for a bite 2 by an adjusting shaft 11, upper and lower slides 12 so that no bite may not be caught in the chip at cutting time. Since these adjusting shaft 11 and upper and lower slides 12 are fastened by bolts to a fixing base 15, the movement of the nozzle 5 by the reaction of the discharging and stopping times of the cutting oil can be prevented. Also at the bite 2 changing time the bolt fixing a rotary base 13 to the fixing base 15 is loosened, rotated in the rotary base revolving direction and the bite 2 can be changed without its contact with the nozzle 5.

7. 发明专利

JPH01153246A CHIP RECOVERING DUCT 失效
公开(公告)号：JPH01153246A
公开(公告)日：1989-06-15
申请号：JP30751387
申请日：1987-12-07
申请人： HITACHI LTD
发明人： MAEDA YUKIO , SAWA SHINJI , ITO RITSU
IPC分类号： B23Q11/00
摘要： PURPOSE:To protect a finished mirror surface from flows by disposing an intake port of a movable duct fixed on a table near a cutting tool and a nozzle for discharging cutting liquid to the opposite side to the cutting tool. CONSTITUTION:A slide duct 6 is fixed to a cutting feed table 5 and a fixed duct 7 in which the slide duct 6 is inserted through a gap is bolted to a fixed bed 8. The slide duct 6 and a spray nozzle 9 are arranged to place a cutting tool 2 therbetween, and the nozzle 9 discharge cutting liquid in the cutting feed direction to recover chips 10 with the slide duct 6. Thus, the chips 10 in cutting can be recovered with identical intake capacity from the inner peripheral portion to the outer one. Hence, since the chips 10 in cutting can be recovered right close to the cutting tool 2, the chips 10 can be protected from clinging to the cutting tool 2 so that a workpiece can be mirror finished over a wide range of area.

8. 发明专利

JPH01103204A CUTTING DEVICE 失效
公开(公告)号：JPH01103204A
公开(公告)日：1989-04-20
申请号：JP25715787
申请日：1987-10-14
申请人： HITACHI LTD
发明人： SAWA SHINJI , MAEDA YUKIO , SATO KAZUYUKI
IPC分类号： B23B25/02 , B23Q11/00
摘要： PURPOSE:To perfectly remove the chips and suppress the defect generated on a workpiece and the damage of a tool cutting edge by cutting the chips adhering on a cutting tool by a chip cutting means installed onto a cutting tool holder. CONSTITUTION:A chip cutter 1 held on a tool holder 8 side is turned by 90 deg. by a motor 9, and shifted towards a tool cutting edge 4 in parallel to a Z-axis by an air cylinder 2, and stopped at a position before a chip tool 3. Then, the chip cutter 1 is turned by 90 deg., and introduced into a cutter guide groove 5, and since the width of the groove 5 increases on the tool cutting edge 4 side, the chip cutter 1 is introduced into the cutter guide groove 5, even if the revolution angle precision is deteriorated. Then, the chip cutter 1 is attracted to the tool holder 8 side along the cutter guide groove 5, and when the cutter 1 passes through a chip cutting part 7, the chips adhering to the cutting tool 3 are cut and removed.

9. 发明专利

JPS6254602A MIRRORLIKE CUTTING DEVICE 失效
公开(公告)号：JPS6254602A
公开(公告)日：1987-03-10
申请号：JP19214185
申请日：1985-09-02
申请人： HITACHI LTD
发明人： MAEDA YUKIO , MASUDA MASAMI , SAWA SHINJI , ITO RITSU
IPC分类号： B23B5/00
摘要： PURPOSE:To set the width of a device to anout one half as well as to reduce the number of constituent parts items, by making a tool rest arm perform both reciprocating and rocking motions, and moving a cutting tool for reciprocation in a right-angled direction with a turning center line of a spindle. CONSTITUTION:When a spindle motor 21 rotates, a work 1 also rotates. And, when a swivel driving motor 7 rotates clockwise or counterclockwise, a tool rest arm 3 performs both reciprocating and rocking motions whereby a cutting tool 2 reciprocates in a circular path. In addition, when a motor for traveling a cross slide 14 is rotated, the cutting tool 2 is fed to an infeed direction. Therefore, a surface of the work 1 is cut for mirror finishing by the cutting tool 2.

10. 发明专利

JP2002047024A LIQUID CRYSTAL DISPLAY AND METHOD OF MANUFACTURING THE SAME 失效
公开(公告)号：JP2002047024A
公开(公告)日：2002-02-12
申请号：JP2000349308
申请日：2000-11-10
申请人： HITACHI LTD
发明人： TATEMURA MAKOTO , SAWA SHINJI , OBARA KATSUMI
IPC分类号： C03B33/09 , G02F1/1333
摘要： PROBLEM TO BE SOLVED: To provide a method of parting a glass pane, which makes scribed groove progress without giving deformation or impact to the glass pane or a plate of brittle material such as ceramics, and generating little chip or crack. SOLUTION: Peculiar micro bending deformation is made around the scribed groove using the linear or narrow band heating elements heated to >=100 deg.C by heating the part around both the sides of the scribed groove 15 on the glass pane, as a result, vertical crack from the forefront of the scribed groove is made to progress to the back of the sheet by generating tensile stress in the vicinity of crack point of the scribed groove. Thereby, the sheet is parted.

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