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1. 发明专利

GB2121110A TURBOMOLECULAR PUMP 未知
公开(公告)号：GB2121110A
公开(公告)日：1983-12-14
申请号：GB8310531
申请日：1983-04-19
申请人： HITACHI LTD
发明人： TSUMAKI NOBUO , UEDA SHINJIRO , NODA KOUSUKE , IZUMI HIDEKI , MATSUSHITA OSAMI , OKAWADA TAKESHI
IPC分类号： F04D19/04 , F04D29/04 , F04D29/058
摘要： A turbomolecular pump including a casing stationary blades arranged in a plurality of stages in the casing axially thereof, rotating blades arranged between the stationary blades and located on an outer periphery of a rotor located in a central portion of the casing, and a bearing device journaling the rotor at its high vacuum and end a low vacuum end. A first permanent magnet of the fixed side having a high Curie point and a second permanent magnet of the rotor side located in juxtaposed relation to the first permanent magnet constitute a magnetic bearing of an attraction type for journaling the rotor at its high vacuum end. A pivot type hydrodynamic bearing or active magnetic bearings journal the rotor at its low vacuum end.

2. 发明专利

FR2525698B1 未知
公开(公告)号：FR2525698B1
公开(公告)日：1986-04-11
申请号：FR8306490
申请日：1983-04-20
申请人： HITACHI LTD
发明人： TSUMAKI NOBUO , UEDA SHINJIRO , NODA KOUSUKE , IZUMI HIDEKI , MATSUSHITA OSAMI , OKAWADA TAKESHI
IPC分类号： F04D19/04 , F04D29/04 , F04D29/058
摘要： A turbomolecular pump including a casing stationary blades arranged in a plurality of stages in the casing axially thereof, rotating blades arranged between the stationary blades and located on an outer periphery of a rotor located in a central portion of the casing, and a bearing device journaling the rotor at its high vacuum and end a low vacuum end. A first permanent magnet of the fixed side having a high Curie point and a second permanent magnet of the rotor side located in juxtaposed relation to the first permanent magnet constitute a magnetic bearing of an attraction type for journaling the rotor at its high vacuum end. A pivot type hydrodynamic bearing or active magnetic bearings journal the rotor at its low vacuum end.

3. 发明专利

DE3414092A1 未知
公开(公告)号：DE3414092A1
公开(公告)日：1985-01-17
申请号：DE3414092
申请日：1984-04-13
申请人： HITACHI LTD
发明人： YOSHIOKA MASAHIRO , IZUMI HIDEKI , INOUYE HIROSHI , HAZAKI EIICHI , NAKADAIRA SHIRO
IPC分类号： F16C17/06 , F16C27/00 , F16C27/02

4. 发明专利

GB2121110B TURBOMOLECULAR PUMP 未知
公开(公告)号：GB2121110B
公开(公告)日：1985-11-13
申请号：GB8310531
申请日：1983-04-19
申请人： HITACHI LTD
发明人： TSUMAKI NOBUO , UEDA SHINJIRO , NODA KOUSUKE , IZUMI HIDEKI , MATSUSHITA OSAMI , OKAWADA TAKESHI
IPC分类号： F04D19/04 , F04D29/04 , F04D29/058
摘要： A turbomolecular pump including a casing stationary blades arranged in a plurality of stages in the casing axially thereof, rotating blades arranged between the stationary blades and located on an outer periphery of a rotor located in a central portion of the casing, and a bearing device journaling the rotor at its high vacuum and end a low vacuum end. A first permanent magnet of the fixed side having a high Curie point and a second permanent magnet of the rotor side located in juxtaposed relation to the first permanent magnet constitute a magnetic bearing of an attraction type for journaling the rotor at its high vacuum end. A pivot type hydrodynamic bearing or active magnetic bearings journal the rotor at its low vacuum end.

5. 发明专利

DE3314001A1 未知
公开(公告)号：DE3314001A1
公开(公告)日：1983-11-03
申请号：DE3314001
申请日：1983-04-18
申请人： HITACHI LTD
发明人： TSUMAKI NUBUO , UEDA SHINJIRO , NODA KOUSUKE , IZUMI HIDEKI , MATSUSHITA OSAMI , OKAWADA TAKESHI
IPC分类号： F04D19/04 , F04D29/04 , F04D29/058
摘要： A turbomolecular pump including a casing stationary blades arranged in a plurality of stages in the casing axially thereof, rotating blades arranged between the stationary blades and located on an outer periphery of a rotor located in a central portion of the casing, and a bearing device journaling the rotor at its high vacuum and end a low vacuum end. A first permanent magnet of the fixed side having a high Curie point and a second permanent magnet of the rotor side located in juxtaposed relation to the first permanent magnet constitute a magnetic bearing of an attraction type for journaling the rotor at its high vacuum end. A pivot type hydrodynamic bearing or active magnetic bearings journal the rotor at its low vacuum end.

6. 发明专利

FR2525698A1 未知
公开(公告)号：FR2525698A1
公开(公告)日：1983-10-28
申请号：FR8306490
申请日：1983-04-20
申请人： HITACHI LTD
发明人： TSUMAKI NOBUO , UEDA SHINJIRO , NODA KOUSUKE , IZUMI HIDEKI , MATSUSHITA OSAMI , OKAWADA TAKESHI
IPC分类号： F04D19/04 , F04D29/04 , F04D29/058
摘要： A turbomolecular pump including a casing stationary blades arranged in a plurality of stages in the casing axially thereof, rotating blades arranged between the stationary blades and located on an outer periphery of a rotor located in a central portion of the casing, and a bearing device journaling the rotor at its high vacuum and end a low vacuum end. A first permanent magnet of the fixed side having a high Curie point and a second permanent magnet of the rotor side located in juxtaposed relation to the first permanent magnet constitute a magnetic bearing of an attraction type for journaling the rotor at its high vacuum end. A pivot type hydrodynamic bearing or active magnetic bearings journal the rotor at its low vacuum end.

7. 发明专利

JPH0210287B2 失效
公开(公告)号：JPH0210287B2
公开(公告)日：1990-03-07
申请号：JP19371585
申请日：1985-09-04
申请人： HITACHI LTD
发明人： YOSHIOKA MASAHIRO , IZUMI HIDEKI , HIBINO YOZO , NAKAHIRA SHIRO , OKADA AKIHISA
IPC分类号： G01M13/04 , F16C17/24 , G01H1/00 , G01H17/00

8. 发明专利

JPS59162396A Molecular turbopump 失效
标题翻译：分子涡流
公开(公告)号：JPS59162396A
公开(公告)日：1984-09-13
申请号：JP3580283
申请日：1983-03-07
申请人： Hitachi Ltd
发明人： TSUMAKI NOBUO , UEDA SHINJIROU , NODA KOUSUKE , IZUMI HIDEKI , MATSUSHITA OSAMI , OKAWADA TAKESHI
IPC分类号： F04D19/04 , F04D29/04 , F04D29/058
CPC分类号： F04D29/058 , F04D19/048
摘要： PURPOSE:To heighten the degree of vacuum attainable by a molecular turbopump, by providing an attraction-type magnetic bearing comprising permanent magnets made of a rare-earth-element material, at the high vacuum side of the rotor of the pump. CONSTITUTION:A rotor 6 with moving vanes 5 is supported by a permanent magnet unit 9 comprising an annular permanent magnet 9A provided on the rotor 6 in an annular space S and another annular permanent magnet 9B located in the annular space and facing the former magnet. These permanent magnets 9A, 9B are made of a rare-earth-element material of high Curie point, whose magnetic characteristics do not deteriorate in a process of baking at 300 deg.C. Therefore, the baking can be effected at a high temperature to heighten the attainable degree of vacuum.
摘要翻译：目的：通过在泵的转子的高真空侧设置由包括由稀土元素材料制成的永久磁铁的吸引型磁性轴承来提高分子涡轮泵可获得的真空度。构成：具有移动叶片5的转子6由永磁体单元9支撑，该永磁体单元9包括设置在转子6上的环形空间S中的环形永磁体9A和位于环形空间中并面向前磁体的另一环形永磁体9B。这些永磁体9A，9B由高居里点的稀土元素材料制成，其磁特性在300℃的烘烤过程中不劣化。因此，可以在高温下进行烘烤以提高可获得的真空度。

9. 发明专利

JPS58166121A THRUST BEARING 失效
公开(公告)号：JPS58166121A
公开(公告)日：1983-10-01
申请号：JP4909982
申请日：1982-03-29
申请人： HITACHI LTD
发明人： YOSHIOKA MASAHIRO , IZUMI HIDEKI , NAKAHIRA SHIROU
IPC分类号： F16C17/06
摘要： PURPOSE:To accommodate a variation in size of the bearing caused by its bulging action and to prevent a bad effect caused by the variaion in size by a method wherein a cylinder formed at a back surface of the bearing and the back plate are combined with a gap left therebetween. CONSTITUTION:At a back surface of the bearing 2 made of bulged sliding material is formed a cylindrical part 2A. This cylindrical part 2A is connected to the back plate 3 by coupling means 4. An increased size of the bearing 2 caused by its bulging action is accommodated by a gap g1 between the cylindrical part 2A and the back plate 3 and the gaps g2 and g3 between the coupling means 4 and the cylindrical part 2A. Between the back plate 3 and the pivot 5 is fixed member 6 having a wall thickness (t) which is flexible. The pivot 5 is set to the member 6 by screw with the spacer 7 being held between the member and the pivot.

10. 发明专利

JPS58131427A JOURNAL BEARING 失效
公开(公告)号：JPS58131427A
公开(公告)日：1983-08-05
申请号：JP1161882
申请日：1982-01-29
申请人： HITACHI LTD
发明人： YOSHIOKA MASAHIRO , IZUMI HIDEKI , NAKAHIRA SHIROU , OKADA AKIHISA
IPC分类号： F16C33/00 , F16C33/10
摘要： PURPOSE:To provide a journal bearing which can show an enough load supporting ability, even if load is applied along the axial groove by peripherally disposing a plurality of axial grooves extended from the central part of a bearing surface to one end of the bearing and to the other end thereof. CONSTITUTION:In a journal bearing, a plurality of axial grooves 2 mounted on the inner peripheral bearing surface 1 of the bearing 1 are cut at the central part of the bearing surface 1a, and the same number of axial grooves 2 are respectively disposed on the upper and lower half surface of the bearing surface 1a in such a manner as to be in disaccord with each other. Discharge holes 3 for a lubricant are disposed in such a manner as to connect the central part of each axial groove 2 to the end surface of the bearing. Thus, even if load is applied along the axial grooves 2, a satisfactory wedge film is formed on a portion on the bearing surface 1a outside of the groove 2, so that a load supporting ability is maintained on a high level so as to prevent burning and abrasion of the bearing. Dust and the like can be smoothly discharged by the discharge holes 3.

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