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1. 发明专利

GB2235087B Particle beam surface analyzer 未知
公开(公告)号：GB2235087B
公开(公告)日：1994-04-13
申请号：GB9013216
申请日：1990-06-13
申请人： HITACHI LTD
发明人： HAZAKI EIICHI , OTAKA TADASHI , SHIMIZU MINORU
IPC分类号： F16K3/18 , H01J37/18 , H01J3/18
摘要： In a particle beam surface analyzer, having a partition wall separation a vacuum space, an opening that is provided in a partition wall through which the particle beam is taken out, a seal member which is moved along a seal surface of the seal member and seals the opening, a condenser lens which converges the particle beam onto the sample, and detector for detecting a physical quantity from the sample when the particle beam is irradiated on the sample, the surface analyzer further has a movable shift member that pushes one side surface of the seal member along the seal surface of the seal member and a stopping member which the other side surface of the seal member having a predetermined angle being larger than 55 DEG and smaller than 75 DEG to the seal surface is abutted so as to move the seal member along the other side surface till the seal member reaches the openings, whereby resultant forces between the seal member and the seal surface in the side of the one side surface is equal to that in the side of the other side surface. As the predetermined angle is larger than 55 DEG and smaller than 75 DEG to the seal surface, the abrasion and seizure of the seal member are prevented and the contamination of the sample is lessened.

2. 发明专利

DE3712755A1 未知
公开(公告)号：DE3712755A1
公开(公告)日：1988-02-04
申请号：DE3712755
申请日：1987-04-15
申请人： HITACHI LTD
发明人： TOMITA YOSHIKATSU , KIKUCHI KATSUAKI , HAZAKI EIICHI , ARATA TETSUYA , SHIIBAYASHI MASAO , SUEFUJI KAZUTAKA , SENSHU TAKAO , MURAYAMA AKIRA
IPC分类号： F04C18/02 , F01C21/04 , F04C29/02 , F01C1/04

3. 发明专利

DE3345684A1 未知
公开(公告)号：DE3345684A1
公开(公告)日：1984-07-05
申请号：DE3345684
申请日：1983-12-16
申请人： HITACHI LTD
发明人： HAZAKI EIICHI , KUNO HIROAKI , UCHIKAWA NAOSHI , TAMURA TAKAHIRO , MURAYAMA AKIRA , MIZUNO TAKAO
IPC分类号： F04C23/02 , F01C1/02 , F01C21/02 , F04C18/02 , F04C29/02 , F04C18/04
摘要： In a sealed type scroll compressor including an intermediate pressure chamber in which a pressure intermediate in magnitude between a discharge pressure and a suction pressure prevails, a bearing device including a roller bearing and a plain bearing mounted on a frame for supporting a shaft section of a crankshaft. To reduce application of unsymmetrical load to the bearings and prevent an increase in a bearing friction loss, the roller bearing is located in a position close to a crank section of the crankshaft and the plain bearing is located in a position remote from the crank section.

4. 发明专利

DE69123612D1 未知
公开(公告)号：DE69123612D1
公开(公告)日：1997-01-30
申请号：DE69123612
申请日：1991-01-29
申请人： HITACHI LTD
发明人： YAMADA OSAMU , HAZAKI EIICHI , NAKAIZUMI YASUSHI
IPC分类号： G01B7/34 , G01N37/00 , G01Q10/00 , G01Q30/02 , G01Q60/10 , H01J37/28 , G01N27/00
摘要： A sample (1) is mounted on a support table (2,3) adjacent a probe (5) of a scanning tunnelling microscope, the support table (2,3) permitting the sample (1) to move relative to the probe (5). The probe (5) is also movable in a direction generally perpendicular to the sample surface, between a withdrawn position and a scanning separation. A scanning electron microscope (10) is located adjacent the sample (1) and probe (5), and its electron beam (11) scans both the sample (1) and the probe (5) and generates an image on a display (16a) from electrons from the sample detected by a detector (12). In order that that operator can position the probe (5) on a target of a sample (1), for scanning by the probe (5), a marker (18) is generated on the display (16a) by a graphics display unit (17), which marker (18) indicates the probe-to-sample separation (dL) and preferably indicates the probe-to-sample approach point and the direction of movement of the probe (5) towards the sample (1). The graphics display unit (17) may alternatively, or in addition, generate a marker (19) representing the scan area of the probe (5) when it is moved to a scanning separation from the sample (1).

5. 发明专利

GB2235087A PARTICLE BEAM SURFACE ANALYZER 未知
公开(公告)号：GB2235087A
公开(公告)日：1991-02-20
申请号：GB9013216
申请日：1990-06-13
申请人： HITACHI LTD
发明人： HAZAKI EIICHI , OTAKA TADASHI , SHIMIZU MINORU
IPC分类号： F16K3/18 , H01J37/18
摘要： In a particle beam surface analyzer, having a partition wall separation a vacuum space, an opening that is provided in a partition wall through which the particle beam is taken out, a seal member which is moved along a seal surface of the seal member and seals the opening, a condenser lens which converges the particle beam onto the sample, and detector for detecting a physical quantity from the sample when the particle beam is irradiated on the sample, the surface analyzer further has a movable shift member that pushes one side surface of the seal member along the seal surface of the seal member and a stopping member which the other side surface of the seal member having a predetermined angle being larger than 55 DEG and smaller than 75 DEG to the seal surface is abutted so as to move the seal member along the other side surface till the seal member reaches the openings, whereby resultant forces between the seal member and the seal surface in the side of the one side surface is equal to that in the side of the other side surface. As the predetermined angle is larger than 55 DEG and smaller than 75 DEG to the seal surface, the abrasion and seizure of the seal member are prevented and the contamination of the sample is lessened.

6. 发明专利

DE4019385A1 未知
公开(公告)号：DE4019385A1
公开(公告)日：1990-12-20
申请号：DE4019385
申请日：1990-06-18
申请人： HITACHI LTD
发明人： HAZAKI EIICHI , OTAKA TADASHI , SHIMIZU MINORU
IPC分类号： F16K3/18 , H01J37/18
摘要： In a particle beam surface analyzer, having a partition wall separation a vacuum space, an opening that is provided in a partition wall through which the particle beam is taken out, a seal member which is moved along a seal surface of the seal member and seals the opening, a condenser lens which converges the particle beam onto the sample, and detector for detecting a physical quantity from the sample when the particle beam is irradiated on the sample, the surface analyzer further has a movable shift member that pushes one side surface of the seal member along the seal surface of the seal member and a stopping member which the other side surface of the seal member having a predetermined angle being larger than 55 DEG and smaller than 75 DEG to the seal surface is abutted so as to move the seal member along the other side surface till the seal member reaches the openings, whereby resultant forces between the seal member and the seal surface in the side of the one side surface is equal to that in the side of the other side surface. As the predetermined angle is larger than 55 DEG and smaller than 75 DEG to the seal surface, the abrasion and seizure of the seal member are prevented and the contamination of the sample is lessened.

7. 发明专利

DE69123612T2 未知
公开(公告)号：DE69123612T2
公开(公告)日：1997-06-12
申请号：DE69123612
申请日：1991-01-29
申请人： HITACHI LTD
发明人： YAMADA OSAMU , HAZAKI EIICHI , NAKAIZUMI YASUSHI
IPC分类号： G01B7/34 , G01N37/00 , G01Q10/00 , G01Q30/02 , G01Q60/10 , H01J37/28 , G01N27/00
摘要： A sample (1) is mounted on a support table (2,3) adjacent a probe (5) of a scanning tunnelling microscope, the support table (2,3) permitting the sample (1) to move relative to the probe (5). The probe (5) is also movable in a direction generally perpendicular to the sample surface, between a withdrawn position and a scanning separation. A scanning electron microscope (10) is located adjacent the sample (1) and probe (5), and its electron beam (11) scans both the sample (1) and the probe (5) and generates an image on a display (16a) from electrons from the sample detected by a detector (12). In order that that operator can position the probe (5) on a target of a sample (1), for scanning by the probe (5), a marker (18) is generated on the display (16a) by a graphics display unit (17), which marker (18) indicates the probe-to-sample separation (dL) and preferably indicates the probe-to-sample approach point and the direction of movement of the probe (5) towards the sample (1). The graphics display unit (17) may alternatively, or in addition, generate a marker (19) representing the scan area of the probe (5) when it is moved to a scanning separation from the sample (1).

8. 发明专利

DE69117215D1 未知
公开(公告)号：DE69117215D1
公开(公告)日：1996-03-28
申请号：DE69117215
申请日：1991-05-08
申请人： HITACHI LTD , HITACHI CONSTRUCTION MACHINERY
发明人： HAZAKI EIICHI , YAMADA OSAMU , NAKAIZUMI YASUSHI , HOSOKI SHIGEYUKI , HOSAKA SUMIO , HASHIMOTO AKIRA
IPC分类号： G01B7/34 , G01N27/00 , G01N37/00 , G01Q10/02 , G01Q10/04 , G01Q30/02 , G01Q60/10 , H01J37/20 , H01J37/28

9. 发明专利

AT27341T 未知
公开(公告)号：AT27341T
公开(公告)日：1987-06-15
申请号：AT84101200
申请日：1984-02-06
申请人： HITACHI LTD
发明人： YOSHIOKA MASAHIRO , INOUE HIROSHI , HAZAKI EIICHI , NAKADAIRA SHIRO , OKADA AKIHISA
IPC分类号： F04D15/00 , F04D7/08 , F04D29/04

10. 发明专利

DE69313517D1 未知
公开(公告)号：DE69313517D1
公开(公告)日：1997-10-09
申请号：DE69313517
申请日：1993-06-02
申请人： HITACHI LTD
发明人： OKURA AKIMITSU , SATO MITSUGU , YAMADA OSAMU , NAKAIZUMI YASUSHI , HAZAKI EIICHI
IPC分类号： H01J37/22 , G01Q30/02 , G01Q30/04 , G01Q60/10 , H01J37/252 , H01J37/26 , H01J37/28
摘要： A specimen is scanned with an electron beam so as to generate a signal characteristic of the specimen to thereby produce an image thereof on the basis of the generated signal. A memory (102) is provided for storing operating conditions of a scanning electron microscope (107) which are associated with identification information for specifying the specimen. The identification information is designated so that at least one operating condition corresponding to the designated identification information is read out from the memory (102), and the read out operating condition is automatically set so that the scanning electron microscope (107) is operated under the set operating condition.

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