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1. 发明专利

JP2005150340A Method and device for specifying etching condition 审中-公开
标题翻译：用于指定蚀刻条件的方法和装置
公开(公告)号：JP2005150340A
公开(公告)日：2005-06-09
申请号：JP2003384818
申请日：2003-11-14
申请人： Hitachi Kenki Fine Tech Co Ltd , Hitachi Ltd , 日立建機ファインテック株式会社 , 株式会社日立製作所
发明人： WATANABE MASAHIRO , HIROSE TAKESHI , KENBO YUKIO , NAGANO YOSHIYUKI , MORIMOTO TAKASHI
IPC分类号： H01L21/28 , G01B3/22 , G01B11/06 , G01N13/16 , G12B21/08 , H01L21/3065 , H01L21/66 , H01L21/768 , H01L23/522
CPC分类号： G01Q30/02 , G01B11/0625 , G01Q30/04
摘要： PROBLEM TO BE SOLVED: To enable the amount of overetching to be quantitatively measured in a non-destructive manner in an interconnect line hole process. SOLUTION: An etching pattern is provided on a stopper pattern and a region that is adjacent to and outside the stopper pattern, the depths of the etching patterns provided to the stopper pattern and the region respectively are measured with a probe and compared with each other to measure the amount of overetching, and the etching conditions are specified and monitored by the use of the amount of over etching. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了能够在互连线孔工艺中以非破坏性的方式定量地测量过蚀刻量。解决方案：在止动器图案和与止动器图案相邻并且在其外部的区域上设置蚀刻图案，分别用探针测量提供给止动器图案和区域的蚀刻图案的深度，并与彼此测量过蚀刻的量，并且通过使用过蚀刻的量来指定和监测蚀刻条件。版权所有（C）2005，JPO＆NCIPI

2. 发明专利

JP2005069762A Scanning type surface measuring instrument and measuring method using it 审中-公开
标题翻译：扫描型表面测量仪器和使用它的测量方法
公开(公告)号：JP2005069762A
公开(公告)日：2005-03-17
申请号：JP2003297470
申请日：2003-08-21
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： MURAYAMA TAKESHI , KENBO YUKIO , KUNITOMO YUICHI , HIROKI TAKENORI , NAGANO YOSHIYUKI , MORIMOTO TAKASHI , KURENUMA TORU , YANAGIMOTO HIROAKI , KURODA HIROSHI , MIWA SHIGERU
IPC分类号： G01B21/30 , G01Q30/02 , G01Q30/06 , G01Q60/24 , G01Q90/00 , G01N13/10
摘要： PROBLEM TO BE SOLVED: To provide a scanning type surface measuring instrument capable of enhancing the measuring precision of the flatness over a wide area in the measurement of the surface shape of the wide area on the surface of a substrate or wafer, and a measuring method using it.
SOLUTION: This scanning type surface measuring instrument is equipped with a cantilever 21 having the probe 20 opposed to a sample 12, a measuring part for measuring the atomic force caused between the probe and the sample when the surface of the sample is scanned by the probe, an XY stage 14 for wide area measurement performing scanning operation and a sample fixing chuck mechanism 16A and constituted so that the surface of the sample is scanned by the probe in the XY stage while keeping physical quantity constant in the measuring part to measure the surface of the sample. Further, this apparatus is equipped with a control part for setting almost the same measuring region as that set in the surface measurement of the sample to measure an apparatus error component before the original measurement of the sample and subtracting the measured value related to the apparatus error from the measured value related to the surface of the sample.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种扫描型表面测量装置，其能够在基板或晶片的表面上的广域的表面形状的测量中提高广域的平坦度的测量精度，以及使用它的测量方法。解决方案：该扫描型表面测量仪器配有悬臂21，探头20与样品12相对，测量部件用于测量样品表面扫描时探针与样品之间产生的原子力通过探针，用于进行扫描操作的广域测量的XY平台14和样品固定卡盘机构16A，并且构造成使得在XY台中通过探针扫描样品的表面，同时保持测量部分中的物理量恒定测量样品的表面。此外，该装置配备有用于设置与样本的表面测量中设置的几乎相同的测量区域的控制部分，以在样本的原始测量之前测量装置误差分量，并且减去与装置误差相关的测量值从与样品表面相关的测量值。版权所有（C）2005，JPO＆NCIPI

3. 发明专利

JP2005156237A Scanning probe microscope 有权
标题翻译：扫描探针显微镜
公开(公告)号：JP2005156237A
公开(公告)日：2005-06-16
申请号：JP2003392289
申请日：2003-11-21
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： KURODA HIROSHI , KURENUMA TORU , YANAGIMOTO HIROAKI , MINOMOTO YASUSHI , MIWA SHIGERU , MURAYAMA TAKESHI , KENBO YUKIO , KUNITOMO YUICHI , HIROKI TAKENORI , NAGANO YOSHIYUKI , MORIMOTO TAKASHI
IPC分类号： G01Q10/02 , G01Q10/04 , G01Q60/24 , G01Q60/26 , G01Q90/00 , G01N13/10 , G01N13/16
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope which has realized a needle tip state of monitoring at the of retraction of a probe, in a step-in type scanning probe microscope.
SOLUTION: This scanning probe microscope is constituted so that a cantilever 21, having the probe 20 provided to the leading end thereof is provided and the probe 20, is allowed to approach or to retreat with respect to a specimen 12, by moving the cantilever 21 to obtain the surface data of the specimen 12 and equipped with a probe retreat state confirming means 60 for confirming whether the retreating operation of the probe 20 is normal or abnormal. A displacement detector, for detecting the displacement quantity of the cantilever 21, is provided, and the probe retreat state confirming means 60 is composed of a monitor means 49 for monitoring the detection signal outputted from the displacement detector, after the retreat operation of the probe 20 has been completed and a decision means 61 for deciding whether the retreat operation of the probe 20 is normal or abnormal, on the basis of the detection signal monitored by the monitor means 49.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种扫描探针显微镜，其在阶梯式扫描探针显微镜中实现了在探针回缩时的针尖状态监测。解决方案：该扫描探针显微镜被构造成使得设置有其前端的探针20的悬臂21，并且通过移动允许探针20相对于样本12接近或退避悬臂21，以获得样本12的表面数据，并配备有用于确认探针20的后退操作是正常还是异常的探针后退状态确认装置60。提供了用于检测悬臂21的位移量的位移检测器，并且探针退避状态确认装置60包括监视装置49，用于在探头的后退操作之后监视从位移检测器输出的检测信号根据由监视装置49监视的检测信号，判定装置61是否正常或异常判定装置61。（C）2005，JPO＆NCIPI

4. 发明专利

JP2006308312A Probe tip evaluation method for scan type probe microscope 审中-公开
标题翻译：用于扫描型探针显微镜的探针提示评估方法
公开(公告)号：JP2006308312A
公开(公告)日：2006-11-09
申请号：JP2005128138
申请日：2005-04-26
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： MORIMOTO TAKASHI , SHINAKI TORU , NAGANO YOSHIYUKI
IPC分类号： G01B21/10 , G01Q40/02 , G01Q60/24 , G01Q60/38 , G01Q90/00
摘要： PROBLEM TO BE SOLVED: To provide a probe tip evaluation method for scan type probe microscope capable of evaluating the degradation of sharpness of the probe tip with a simple procedure, when the tip of the probe under use is worn.
SOLUTION: The probe tip evaluation method for scan type microscope is constituted of a step S13 for measuring the groove A1 with the probe 12A and 12B regarding the reference specimen 11 on which the V-shape groove A1 is formed, the size of which is known, and a step S15 for estimating the sharpness of the tip of the probe, based on the measurement data obtained at the measurement step.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种扫描型探针显微镜的探针尖端评价方法，其能够以简单的程序评价探针尖端的锐度的劣化，当使用中的探针的末端被磨损时。＆lt; P＆gt;解决方案：扫描型显微镜的探针尖端评价方法由用于测量与形成有V形槽A1的基准样品11相关的探针12A和12B的槽A1的步骤S13，尺寸以及基于在测量步骤中获得的测量数据来估计探头的尖端的锐度的步骤S15。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2005308406A Scanning probe microscope 审中-公开
标题翻译：扫描探针显微镜
公开(公告)号：JP2005308406A
公开(公告)日：2005-11-04
申请号：JP2004121819
申请日：2004-04-16
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： HIROKI TAKENORI , KUNITOMO YUICHI , INANOBE YOSHIHITO , KENBO YUKIO , MURAYAMA TAKESHI , KURENUMA TORU , YANAGIMOTO HIROAKI , KURODA HIROSHI , MINOMOTO YASUSHI , MIWA SHIGERU , NAGANO YOSHIYUKI , MORIMOTO TAKASHI , SHINAKI TORU
IPC分类号： G01B11/24 , G01B21/30 , G01Q10/04 , G01Q20/02 , G01Q30/06 , G01Q60/16 , G01Q60/24 , G01Q60/38 , G01N13/10 , G01N13/12 , G01N13/16
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of automatically rationalizing various parameters in a measuring instrument corresponding to a cantilever and planned so as to enhance not only the efficiency of measuring work but also the stabilization and reliability of a measuring result.
SOLUTION: The scanning probe microscope is equipped with a detection means provided with measuring instrument, which is so constituted that the cantilever 2 equipped with a probe 1 is fitted to an attaching part 4 in a freely detachable manner and the probe is allowed to approach a sample to obtain the surface data of the probe, and constituted so as to alter the cantilever corresponding to a measuring condition to detect the kind or irregularity of the cantilever with respect to the altered cantilever, a parameter determining means for determining the value of the parameter set to the measuring instrument on the basis of the detection data obtained by the detection means and a parameter altering means for altering the parameter set value of the measuring instrument on the basis of the determined parameter value.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种扫描探针显微镜，其能够对与悬臂对应的计量仪器中的各种参数进行自动合理化，不仅可以提高测量工作的效率，而且可以提高测量的稳定性和可靠性结果。
解决方案：扫描探针显微镜配备有设置有测量仪器的检测装置，该检测装置的结构使得装备有探针1的悬臂2以可自由拆卸的方式装配到安装部分4，并且允许探针接近样本以获得探针的表面数据，并且被构造成改变对应于测量条件的悬臂以检测相对于改变的悬臂的悬臂的种类或不规则性;参数确定装置，用于确定值基于由检测装置获得的检测数据设置到测量仪器的参数;以及参数改变装置，用于根据确定的参数值改变测量仪器的参数设定值。版权所有（C）2006，JPO＆NCIPI

6. 发明专利

JP2005106598A Anisotropic friction data acquisition method of scanning probe microscope 审中-公开
标题翻译：扫描探针显微镜的各向异性数据采集方法
公开(公告)号：JP2005106598A
公开(公告)日：2005-04-21
申请号：JP2003339805
申请日：2003-09-30
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： YANAGIMOTO HIROAKI , KURENUMA TORU , KURODA HIROSHI , MINOMOTO YASUSHI , MIWA SHIGERU , MURAYAMA TAKESHI , KENBO YUKIO , KUNITOMO YUICHI , HIROKI TAKENORI , NAGANO YOSHIYUKI , MORIMOTO TAKASHI
IPC分类号： G01Q60/26 , H01L21/66 , G01N13/16
摘要： PROBLEM TO BE SOLVED: To provide an anisotropic friction data acquisition method of a scanning probe microscope capable of acquiring anisotropic friction data in a minute region on the sample surface, when measuring various characteristics on the surface of a wafer or the like.
SOLUTION: This scanning probe microscope is equipped with a cantilever 21 having a probe 20, measuring parts 24, 32 for measuring physical quantities generated between the probe and the sample 12, and moving mechanisms 14, 15, 29 for allowing to perform scanning operation by changing relatively positions of the probe and the sample. In the scanning probe microscope, while keeping the physical quantities constant at the measuring parts, the sample surface is scanned by the probe by the moving mechanisms, to thereby measure the sample surface. In the scanning probe microscope, a method is performed, wherein a relative fine displacement in the lateral direction is applied independently in the orthogonal biaxial directions in the state where a friction is generated between the sample and the probe, and each data related to the friction in the biaxial directions are acquired.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供能够在测量晶片表面上的各种特性时在样品表面上微小区域获取各向异性摩擦数据的扫描探针显微镜的各向异性摩擦数据采集方法。解决方案：该扫描探针显微镜配备有具有探针20的悬臂21，用于测量在探针和样品12之间产生的物理量的测量部分24,32以及用于允许执行的移动机构14,15,29 通过改变探针和样品的相对位置进行扫描操作。在扫描探针显微镜中，在将物理量保持在测量部分的同时，通过移动机构由探针扫描样品表面，从而测量样品表面。在扫描探针显微镜中，进行这样的方法，其中在样品和探针之间产生摩擦的状态下，在垂直双轴方向上独立地施加横向上的相对精细位移，并且与摩擦相关的每个数据在双轴方向获得。版权所有（C）2005，JPO＆NCIPI

7. 发明专利

JP2005037205A Scanning probe microscope and measuring method of the same 审中-公开
标题翻译：扫描探针显微镜及其测量方法
公开(公告)号：JP2005037205A
公开(公告)日：2005-02-10
申请号：JP2003199097
申请日：2003-07-18
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： MURAYAMA TAKESHI , KENBO YUKIO , KUNITOMO YUICHI , HIROKI TAKENORI , NAGANO YOSHIYUKI , MORIMOTO TAKASHI , KURENUMA TORU , YANAGIMOTO HIROAKI , KURODA HIROSHI , MIWA SHIGERU
IPC分类号： G01B21/30 , G01B11/24 , G01B11/30 , G01Q10/04 , G01Q20/02 , G01Q30/02 , G01Q30/04 , G01Q30/20 , G01Q60/24 , H01L21/66 , G01N13/10
CPC分类号： G01Q20/02 , G01Q30/06 , G01Q70/04
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope and its measuring method for utilizing a gradient method and automatically measuring a sidewall. SOLUTION: The scanning probe microscope is provided with a cantilever 21 having a probe 20 directed to a sample 12 and a measuring part for measuring the physical quantity generated between the probe and the sample while the probe scans a surface of the sample, regularly maintains the physical quantity in the measuring part, scans and measures the surface of the sample. The scanning probe microscope is also provided with a probe inclining mechanism 30, optical microscopes 18, 19, 43 for detecting a location of the probe when the probe is inclined, and controllers 33, 34 for detecting the location of the probe in at least a second inclined position by using the optical microscopes, measuring and matching measured points in the first and second inclined positions when the surface of the sample is measured in each inclined position while the probe is in the first and second inclined positions. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种扫描探针显微镜及其利用梯度方法并自动测量侧壁的测量方法。解决方案：扫描探针显微镜设置有具有针对样品12的探针20的悬臂21和用于测量探针和样品之间产生的物理量的测量部分，同时探针扫描样品的表面，定期维护测量部件的物理量，扫描并测量样品表面。扫描探针显微镜还设置有探针倾斜机构30，用于在探针倾斜时检测探针的位置的光学显微镜18,19,43，以及用于检测探针位于至少一个通过使用光学显微镜的第二倾斜位置，当在探针处于第一和第二倾斜位置时在每个倾斜位置测量样品的表面时测量和匹配第一和第二倾斜位置中的测量点。版权所有（C）2005，JPO＆NCIPI

8. 发明专利

JP2006053028A Probe scanning method of scanning probe microscope 审中-公开
标题翻译：扫描探针显微镜探测扫描方法
公开(公告)号：JP2006053028A
公开(公告)日：2006-02-23
申请号：JP2004234499
申请日：2004-08-11
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： MORIMOTO TAKASHI , MURAYAMA TAKESHI , NAGANO YOSHIYUKI , KENBO YUKIO , SHINAKI TORU , KURODA HIROSHI , KUNITOMO YUICHI , KURENUMA TORU
IPC分类号： G01B21/30 , G01Q10/04 , G01Q10/06 , G01Q60/24
摘要： PROBLEM TO BE SOLVED: To provide a probe scanning method of a scanning probe microscope constituted so as to restrict the height of the difference in level due to the unevenness formed on the surface of a sample by the positional control in the height direction of a probe to shorten a scanning time and acquiring the data of the shape, size, dimension, position and the like of the hole or the like in the surface of the sample.
SOLUTION: In the prove scanning method of the scanning probe microscope for scanning the probe 15 along the surface 11a of the sample 11 and acquiring the data such as the uneven shape or the like of the surface of the sample, the lowest position of the probe is restricted to an arbitrary lower limit position not higher than the highest position on the basis of the highest position by controlling the height position of the probe within the scanning range of the probe on the surface of the probe.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供扫描探针显微镜的探针扫描方法，其构造为通过在高度方向上的位置控制来限制由于形成在样品表面上的不平坦度引起的水平差的高度的探针以缩短扫描时间并获取样品表面中的孔等的形状，尺寸，尺寸，位置等的数据。解决方案：在扫描探针显微镜的证明扫描方法中，沿着样品11的表面11a扫描探针15并获取样品表面的不均匀形状等数据，最低位置通过将探头的高度位置控制在探头表面的扫描范围内，将探头限制在不高于基于最高位置的最高位置的任意下限位置。版权所有（C）2006，JPO＆NCIPI

9. 发明专利

JP2005069972A Method for controlling travel in probe in scanning probe microscope 审中-公开
标题翻译：用于扫描扫描显微镜中探测探测的方法
公开(公告)号：JP2005069972A
公开(公告)日：2005-03-17
申请号：JP2003302991
申请日：2003-08-27
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： KURENUMA TORU , YANAGIMOTO HIROAKI , KURODA HIROSHI , MINOMOTO YASUSHI , MIWA SHIGERU , MURAYAMA TAKESHI , KENBO YUKIO , KUNITOMO YUICHI , HIROKI TAKENORI , NAGANO YOSHIYUKI , MORIMOTO TAKASHI
IPC分类号： G01B21/30 , G01Q10/04 , G01Q10/06 , G01Q30/02 , G01Q60/24 , G01N13/16 , G01N13/10
CPC分类号： G01Q10/06 , G01Q30/06 , Y10T29/49828
摘要： PROBLEM TO BE SOLVED: To provide a method for controlling the travel of a probe in a scanning probe microscope for easily controlling the scanning travel of the probe on a sample surface, while maintaining high measurement precision, when measuring a part, or the like, having an inclination when measuring irregularities on the sample surface. SOLUTION: The method for controlling the travel of the probe in the scanning probe microscope comprises respective slight movement mechanisms 23, 29, 30 of X, Y, Z for relatively changing the positions of the probe and the sample, such as a cantilever 21 having the probe 20 that faces the sample 12, and an optical lever type optical detector for measuring atomic force, or the like generated between the probe and the sample, when the probe scans the surface of the sample. The method is applied to the scanning type probe microscope for measuring the sample surface by scanning the sample surface by the slight movement mechanism; while physical quantities are maintained constant by a measurement section, and has a feature for changing the approach direction of the probe, when the traveling direction for bringing the probe closer to the sample surface differs from a reaction direction, when the probe comes into contact with the sample surface at least by a set value. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种用于在扫描探针显微镜中控制探针的行程的方法，用于容易地控制探针在样品表面上的扫描行程，同时保持高测量精度，当测量零件时，或在测量样品表面上的不规则性时具有倾斜度。解决方案：用于控制探针在扫描探针显微镜中的移动的方法包括用于相对地改变探针和样品的位置的X，Y，Z的各个轻微移动机构23,29,30，例如当探头扫描样品表面时，探头20面向样品12的悬臂21和用于测量探针与样品之间产生的原子力的光学杆式光学检测器。该方法应用于扫描型探针显微镜，用于通过轻微移动机构扫描样品表面来测量样品表面; 而当物理量由测量部保持恒定时，当探头更靠近样品表面的行进方向与反作用方向不同时，具有用于改变探针的接近方向的特征，当探针接触时样品表面至少设定值。版权所有（C）2005，JPO＆NCIPI

10. 发明专利

JP2005043108A Specific pattern detecting method of scanning probe microscope 审中-公开
标题翻译：扫描探针显微镜的特定图案检测方法
公开(公告)号：JP2005043108A
公开(公告)日：2005-02-17
申请号：JP2003200678
申请日：2003-07-23
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： NAGANO YOSHIYUKI , MORIMOTO TAKASHI , SHINAKI TORU , KENBO YUKIO , KUNITOMO YUICHI , HIROKI TAKENORI , KURENUMA TORU , YANAGIMOTO HIROAKI , KURODA HIROSHI , MIWA SHIGERU , MURAYAMA TAKESHI
IPC分类号： G01B21/30 , G01Q10/02 , G01Q10/04 , G01Q10/06 , G01Q30/04 , H01L21/66 , G01N13/10
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of detecting a specific pattern even in a case that a plurality of the same patterns are arranged on a sample and corresponding even to the detection of a specific pattern of a shape not having two orthogonal edges, for example, the shape of a round bottom hole or the like.
SOLUTION: The specific pattern formed on the surface of the sample is detected by the scanning probe microscope equipped with a probe part, a fine adjustment mechanism for finely adjusting the position of a probe, a coarse adjustment mechanism for allowing the probe to move, approach and retreat with respect to the sample and a measuring part for measuring the physical quantity produced between the probe and the sample. When the region, wherein patterns are arranged cyclically, of the surface of the sample is measured by the measuring part by allowing the probe to scan by the fine adjustment mechanism or the coarse adjustment mechanism, scanning is performed at a first pitch until the patterns are found out or scanning is performed at a second pitch after the patterns are found out to measure the region of the patterns and the specific pattern is detected from a plurality of the patterns in the region.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：即使在多个相同的图案被布置在样本上的情况下也能够提供能够检测特定图案的扫描探针显微镜，甚至对于甚至不检测形状的特定图案的图案也是如此具有两个正交边缘，例如圆底孔等的形状。解决方案：通过配有探针部分的扫描探针显微镜，用于精细调节探针位置的微调机构，用于使探头接近的微调机构，检测在样品表面形成的特定图案相对于样品移动，接近和退避，以及用于测量探针和样品之间产生的物理量的测量部件。当通过允许探针通过微调机构或粗调机构扫描测量部分来测量样品表面的图案周期性区域时，以第一间距进行扫描，直到图案为在发现图案以测量图案的区域并且从该区域中的多个图案检测到特定图案之后，以第二间距执行发现或扫描。版权所有（C）2005，JPO＆NCIPI

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