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1. 发明专利

JP2009281754A Nanotube probe for scanning probe microscope, its manufacturing method and scanning probe microscope 审中-公开
标题翻译：用于扫描探针显微镜的纳米探针，其制造方法和扫描探针显微镜
公开(公告)号：JP2009281754A
公开(公告)日：2009-12-03
申请号：JP2008131470
申请日：2008-05-20
申请人： Hitachi Kenki Fine Tech Co Ltd , Hitachi Kyowa Engineering Co Ltd , 日立協和エンジニアリング株式会社 , 日立建機ファインテック株式会社
发明人： HIROOKA MASAYUKI , OKAI MAKOTO , MORIMOTO TAKASHI , SEKINO SATOSHI , TANAKA HIROKI , TAKASHINA MASATO , UOZUMI YUKI
IPC分类号： B82Y15/00 , G01Q70/10 , G01Q70/12
摘要： PROBLEM TO BE SOLVED: To solve the problem that the bending of a nanotube probe is not restored because a coating film is plastically deformed by the bleeding of the coating film caused by the accumulation of electron beams in a structure that a probe holder and the nanotube probe are fixed by forming the coating film and the problem that the incapacity of the boundary of the bleeding part not confirmed by a scanning electron microscope makes it difficult to prescribe the length of the nanotube probe, not to decide the length and rigidity of the nanotube probe, and to cause the individual difference of the probe, thus deteriorating reliability.
SOLUTION: When the nanotube probe is fixed to the probe holder by the coating film, the coating film is formed to the nanotube probe at the tip of the probe holder. Furthermore, a cut surface is formed at the probe side terminal surface of the coating film.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题为了解决由于电子束的积聚引起的涂膜渗出而使涂膜发生塑性变形而导致纳米管探针的弯曲不能恢复的问题，其结构是探针架并且通过形成涂膜来固定纳米管探针，并且没有通过扫描电子显微镜确认出血部分的边界的无能力难以规定纳米管探针的长度，而不是决定长度和刚度的问题并导致探针的个体差异，从而使可靠性恶化。解决方案：当通过涂膜将纳米管探针固定到探针支架上时，在探针支架的尖端处将纳米管探针形成涂膜。此外，在涂膜的探针侧端面上形成切割面。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2009168518A Ultrasonic imaging equipment 审中-公开
标题翻译：超声波成像设备
公开(公告)号：JP2009168518A
公开(公告)日：2009-07-30
申请号：JP2008004816
申请日：2008-01-11
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： MARUYAMA TAKAHISA
IPC分类号： G01N29/44 , G01N29/04
摘要： PROBLEM TO BE SOLVED: To provide an ultrasonic imaging equipment for accurately extracting a phase component without depending on a level variation of echo intensity of a reflective signal, and of always accurately and stably detecting with improved reproducibility a defect in an object to be inspected.
SOLUTION: The ultrasonic imaging equipment includes a signal processing section 16 processing data of digital waveform according to a reflective signal. The signal processing section includes an orthogonal wave-detecting section 21 performing an orthogonal processing of data of the digital waveform by using a central frequency of an ultrasonic probe output an inphase component and an orthogonal component; low pass filters 221, 222; phase processing sections 33, 34 calculating a phase of a frequency component contained in the digital waveform based on the inphase component and the orthogonal component; and a phase-contrast calculating section 35 calculating a phase-contrast. Based on the phase-contrast output by the phase-contrast calculating section, an image is displayed on a screen of a displaying apparatus 17.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于在不依赖于反射信号的回波强度的电平变化的情况下精确地提取相位分量的超声波成像设备，并且总是以改进的再现性准确且稳定地检测物体中的缺陷被检查。解决方案：超声波成像设备包括根据反射信号处理数字波形的数据的信号处理部分16。信号处理部分包括正交波检测部分21，通过使用超声波探头输出同相分量和正交分量的中心频率来执行数字波形数据的正交处理; 低通滤波器221,222; 相位处理部分33,34基于同相分量和正交分量计算包含在数字波形中的频率分量的相位; 以及计算相位差的相位对比度计算部35。基于相位对比度计算部的相位对比度输出，在显示装置17的画面上显示图像。（C）2009年，JPO＆INPIT

3. 发明专利

JP2007218676A Positioning method of measuring position of scanning probe microscope 审中-公开
标题翻译：测量探针微阵列位置的定位方法
公开(公告)号：JP2007218676A
公开(公告)日：2007-08-30
申请号：JP2006038163
申请日：2006-02-15
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： MINOMOTO YASUSHI , YANAGIMOTO HIROAKI , MIWA SHIGERU
IPC分类号： G01Q10/04 , G01Q10/06 , G01Q30/02 , G01Q60/24 , G01Q60/38
摘要： PROBLEM TO BE SOLVED: To provide a positioning method of the measuring position of a scanning probe microscope, capable of performing positioning at a high speed with high precision, by eliminating the positional shift caused by the coarse operation of a Z-coarse adjustment part, at positioning of the probe at the measuring position in the scanning probe microscope.
SOLUTION: The positioning method of the measuring position of the scanning probe microscope includes a step S1 for deciding the measuring position set to the measuring surface of a sample 12 by the movement due to XYZ sample stages (11, 14 and 15) and the photographing operation of a TV camera 19 or the like; a step S2 for separating a probe 20 from the sample by the moving operation of the Z fine adjustment mechanism 23 of XYZ fine adjustment mechanisms (23 and 29); a step S3 for moving the probe to the measuring position on the measuring surface of the sample by the moving operation of an XY stage mechanism 14; and a step S4 for allowing the probe to approach the sample by the moving operation of the Z fine adjustment mechanism.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供扫描探针显微镜的测量位置的定位方法，能够以高精度高速定位，通过消除由Z粗糙度的粗略操作引起的位置偏移在扫描探针显微镜中将探头定位在测量位置时调节部分。解决方案：扫描探针显微镜的测量位置的定位方法包括步骤S1，用于通过XYZ样品台（11,14和15）的移动来确定对样品12的测量表面设置的测量位置的步骤S1，以及TV摄像机19等的拍摄操作; 通过XYZ微调机构（23,29）的Z微调机构23的移动动作，将探头20与样品分离的步骤S2; 步骤S3，用于通过XY台机构14的移动操作将探头移动到样品的测量表面上的测量位置; 以及通过Z精细调节机构的移动操作使探针接近样品的步骤S4。版权所有（C）2007，JPO＆INPIT

4. 发明专利

JP2006308312A Probe tip evaluation method for scan type probe microscope 审中-公开
标题翻译：用于扫描型探针显微镜的探针提示评估方法
公开(公告)号：JP2006308312A
公开(公告)日：2006-11-09
申请号：JP2005128138
申请日：2005-04-26
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： MORIMOTO TAKASHI , SHINAKI TORU , NAGANO YOSHIYUKI
IPC分类号： G01B21/10 , G01Q40/02 , G01Q60/24 , G01Q60/38 , G01Q90/00
摘要： PROBLEM TO BE SOLVED: To provide a probe tip evaluation method for scan type probe microscope capable of evaluating the degradation of sharpness of the probe tip with a simple procedure, when the tip of the probe under use is worn.
SOLUTION: The probe tip evaluation method for scan type microscope is constituted of a step S13 for measuring the groove A1 with the probe 12A and 12B regarding the reference specimen 11 on which the V-shape groove A1 is formed, the size of which is known, and a step S15 for estimating the sharpness of the tip of the probe, based on the measurement data obtained at the measurement step.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种扫描型探针显微镜的探针尖端评价方法，其能够以简单的程序评价探针尖端的锐度的劣化，当使用中的探针的末端被磨损时。＆lt; P＆gt;解决方案：扫描型显微镜的探针尖端评价方法由用于测量与形成有V形槽A1的基准样品11相关的探针12A和12B的槽A1的步骤S13，尺寸以及基于在测量步骤中获得的测量数据来估计探头的尖端的锐度的步骤S15。版权所有（C）2007，JPO＆INPIT

5. 发明专利

JP2006118867A Scanning probe microscope and measuring method using it 审中-公开
标题翻译：扫描探针显微镜和使用它的测量方法
公开(公告)号：JP2006118867A
公开(公告)日：2006-05-11
申请号：JP2004303991
申请日：2004-10-19
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： MARUYAMA SHIGENOBU , NOMOTO MINEO , KURENUMA TORU , KUNITOMO YUICHI , KENBO YUKIO
IPC分类号： G01B21/30 , G01Q10/04 , G01Q30/02
CPC分类号： G01Q10/04
摘要： PROBLEM TO BE SOLVED: To enhance the measuring precision of a scanning probe microscope by enhancing the positioning precision of a probe by reducing the straight error of the drive shaft of a probe scanning mechanism. SOLUTION: The scanning probe microscope is constituted so as to measure the surface shape of a sample by allowing a probe to approach the surface of the sample or bringing the same into contact with the surface of the sample to scan the surface of the sample and equipped with a sample stage receiving the sample to be moved at least in a uniaxial direction, the probe allowed to approach or brought into contact with the surface of the sample placed on the sample stage, a probe driving means for driving the probe in a three-dimensional direction, bending detecting means for detecting the bending of the probe and an observation means having an objective lens and observing the probe and the sample arranged on the almost optical axis of the objective lens. The probe driving means is equipped with three sets of the drive sources forming pairs arranged symmetrically with respect to the optical axis of the objective lens. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了通过降低探针扫描机构的驱动轴的直线误差来提高探针的定位精度，提高扫描探针显微镜的测量精度。解决方案：扫描探针显微镜构成为通过使探针接近样品的表面或使其与样品的表面接触来测量样品的表面形状，以扫描样品的表面样品并配备有至少在单轴方向上接收要移动的样品的样品台，使探针接近或与放置在样品台上的样品的表面接触，用于驱动探针的探针驱动装置三维方向，用于检测探头的弯曲的弯曲检测装置和具有物镜的观察装置，并观察设置在物镜的几乎光轴上的探针和样品。探针驱动装置配备有三组驱动源，其形成相对于物镜的光轴对称布置的对。版权所有（C）2006，JPO＆NCIPI

6. 发明专利

JP2005308406A Scanning probe microscope 审中-公开
标题翻译：扫描探针显微镜
公开(公告)号：JP2005308406A
公开(公告)日：2005-11-04
申请号：JP2004121819
申请日：2004-04-16
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： HIROKI TAKENORI , KUNITOMO YUICHI , INANOBE YOSHIHITO , KENBO YUKIO , MURAYAMA TAKESHI , KURENUMA TORU , YANAGIMOTO HIROAKI , KURODA HIROSHI , MINOMOTO YASUSHI , MIWA SHIGERU , NAGANO YOSHIYUKI , MORIMOTO TAKASHI , SHINAKI TORU
IPC分类号： G01B11/24 , G01B21/30 , G01Q10/04 , G01Q20/02 , G01Q30/06 , G01Q60/16 , G01Q60/24 , G01Q60/38 , G01N13/10 , G01N13/12 , G01N13/16
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of automatically rationalizing various parameters in a measuring instrument corresponding to a cantilever and planned so as to enhance not only the efficiency of measuring work but also the stabilization and reliability of a measuring result.
SOLUTION: The scanning probe microscope is equipped with a detection means provided with measuring instrument, which is so constituted that the cantilever 2 equipped with a probe 1 is fitted to an attaching part 4 in a freely detachable manner and the probe is allowed to approach a sample to obtain the surface data of the probe, and constituted so as to alter the cantilever corresponding to a measuring condition to detect the kind or irregularity of the cantilever with respect to the altered cantilever, a parameter determining means for determining the value of the parameter set to the measuring instrument on the basis of the detection data obtained by the detection means and a parameter altering means for altering the parameter set value of the measuring instrument on the basis of the determined parameter value.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种扫描探针显微镜，其能够对与悬臂对应的计量仪器中的各种参数进行自动合理化，不仅可以提高测量工作的效率，而且可以提高测量的稳定性和可靠性结果。
解决方案：扫描探针显微镜配备有设置有测量仪器的检测装置，该检测装置的结构使得装备有探针1的悬臂2以可自由拆卸的方式装配到安装部分4，并且允许探针接近样本以获得探针的表面数据，并且被构造成改变对应于测量条件的悬臂以检测相对于改变的悬臂的悬臂的种类或不规则性;参数确定装置，用于确定值基于由检测装置获得的检测数据设置到测量仪器的参数;以及参数改变装置，用于根据确定的参数值改变测量仪器的参数设定值。版权所有（C）2006，JPO＆NCIPI

7. 发明专利

JP2005106598A Anisotropic friction data acquisition method of scanning probe microscope 审中-公开
标题翻译：扫描探针显微镜的各向异性数据采集方法
公开(公告)号：JP2005106598A
公开(公告)日：2005-04-21
申请号：JP2003339805
申请日：2003-09-30
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： YANAGIMOTO HIROAKI , KURENUMA TORU , KURODA HIROSHI , MINOMOTO YASUSHI , MIWA SHIGERU , MURAYAMA TAKESHI , KENBO YUKIO , KUNITOMO YUICHI , HIROKI TAKENORI , NAGANO YOSHIYUKI , MORIMOTO TAKASHI
IPC分类号： G01Q60/26 , H01L21/66 , G01N13/16
摘要： PROBLEM TO BE SOLVED: To provide an anisotropic friction data acquisition method of a scanning probe microscope capable of acquiring anisotropic friction data in a minute region on the sample surface, when measuring various characteristics on the surface of a wafer or the like.
SOLUTION: This scanning probe microscope is equipped with a cantilever 21 having a probe 20, measuring parts 24, 32 for measuring physical quantities generated between the probe and the sample 12, and moving mechanisms 14, 15, 29 for allowing to perform scanning operation by changing relatively positions of the probe and the sample. In the scanning probe microscope, while keeping the physical quantities constant at the measuring parts, the sample surface is scanned by the probe by the moving mechanisms, to thereby measure the sample surface. In the scanning probe microscope, a method is performed, wherein a relative fine displacement in the lateral direction is applied independently in the orthogonal biaxial directions in the state where a friction is generated between the sample and the probe, and each data related to the friction in the biaxial directions are acquired.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供能够在测量晶片表面上的各种特性时在样品表面上微小区域获取各向异性摩擦数据的扫描探针显微镜的各向异性摩擦数据采集方法。解决方案：该扫描探针显微镜配备有具有探针20的悬臂21，用于测量在探针和样品12之间产生的物理量的测量部分24,32以及用于允许执行的移动机构14,15,29 通过改变探针和样品的相对位置进行扫描操作。在扫描探针显微镜中，在将物理量保持在测量部分的同时，通过移动机构由探针扫描样品表面，从而测量样品表面。在扫描探针显微镜中，进行这样的方法，其中在样品和探针之间产生摩擦的状态下，在垂直双轴方向上独立地施加横向上的相对精细位移，并且与摩擦相关的每个数据在双轴方向获得。版权所有（C）2005，JPO＆NCIPI

8. 发明专利

JP2005037205A Scanning probe microscope and measuring method of the same 审中-公开
标题翻译：扫描探针显微镜及其测量方法
公开(公告)号：JP2005037205A
公开(公告)日：2005-02-10
申请号：JP2003199097
申请日：2003-07-18
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： MURAYAMA TAKESHI , KENBO YUKIO , KUNITOMO YUICHI , HIROKI TAKENORI , NAGANO YOSHIYUKI , MORIMOTO TAKASHI , KURENUMA TORU , YANAGIMOTO HIROAKI , KURODA HIROSHI , MIWA SHIGERU
IPC分类号： G01B21/30 , G01B11/24 , G01B11/30 , G01Q10/04 , G01Q20/02 , G01Q30/02 , G01Q30/04 , G01Q30/20 , G01Q60/24 , H01L21/66 , G01N13/10
CPC分类号： G01Q20/02 , G01Q30/06 , G01Q70/04
摘要： PROBLEM TO BE SOLVED: To provide a scanning probe microscope and its measuring method for utilizing a gradient method and automatically measuring a sidewall. SOLUTION: The scanning probe microscope is provided with a cantilever 21 having a probe 20 directed to a sample 12 and a measuring part for measuring the physical quantity generated between the probe and the sample while the probe scans a surface of the sample, regularly maintains the physical quantity in the measuring part, scans and measures the surface of the sample. The scanning probe microscope is also provided with a probe inclining mechanism 30, optical microscopes 18, 19, 43 for detecting a location of the probe when the probe is inclined, and controllers 33, 34 for detecting the location of the probe in at least a second inclined position by using the optical microscopes, measuring and matching measured points in the first and second inclined positions when the surface of the sample is measured in each inclined position while the probe is in the first and second inclined positions. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种扫描探针显微镜及其利用梯度方法并自动测量侧壁的测量方法。解决方案：扫描探针显微镜设置有具有针对样品12的探针20的悬臂21和用于测量探针和样品之间产生的物理量的测量部分，同时探针扫描样品的表面，定期维护测量部件的物理量，扫描并测量样品表面。扫描探针显微镜还设置有探针倾斜机构30，用于在探针倾斜时检测探针的位置的光学显微镜18,19,43，以及用于检测探针位于至少一个通过使用光学显微镜的第二倾斜位置，当在探针处于第一和第二倾斜位置时在每个倾斜位置测量样品的表面时测量和匹配第一和第二倾斜位置中的测量点。版权所有（C）2005，JPO＆NCIPI

9. 发明专利

JP2004074210A Laser marking device and laser marking method 有权
公开(公告)号：JP2004074210A
公开(公告)日：2004-03-11
申请号：JP2002236807
申请日：2002-08-15
申请人： Hitachi Constr Mach Co Ltd , Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社 , 日立建機株式会社
发明人： SAKURAI SHIGEYUKI , NAGANO YOSHIYA
IPC分类号： G02F1/13 , B23K26/00 , B23K26/06 , B23K101/40 , H01L21/02
摘要： PROBLEM TO BE SOLVED: To provide a laser marking device and a laser marking method, by which patterns can be marked in a short time. SOLUTION: A main controller 16 forms, according to the size of a chip, printing matrix data in a batch-printable range and transmits the data to a liquid crystal controller 15. The liquid crystal controller 15 forms printing data in the batch-printable range on a liquid crystal mask 8 based on the printing matrix data and the printing pattern data for one chip which is formed by a printing pattern forming unit 14. The surface of the liquid crystal mask 8, on which the printing data are displayed, is scanned with a laser beam 2 emitted from a YAG (yttrium aluminum garnet) laser oscillator 5, so that the same printing patterns are batch-printed on a plurality of silicon wafer chips placed on a table 13. COPYRIGHT: (C)2004,JPO

10. 发明专利

JP2004069657A Method of focusing scanning type probe microscope 有权
公开(公告)号：JP2004069657A
公开(公告)日：2004-03-04
申请号：JP2002233191
申请日：2002-08-09
申请人： Hitachi Kenki Fine Tech Co Ltd , 日立建機ファインテック株式会社
发明人： MURAYAMA TAKESHI , KURODA HIROSHI , MORIMOTO TAKASHI , KUNITOMO YUICHI
IPC分类号： G01Q10/00 , G01Q10/04 , G01Q30/02 , G01Q60/24 , G02B21/00 , G01N13/10
CPC分类号： G01Q30/025 , B82Y35/00
摘要： PROBLEM TO BE SOLVED: To facilitate a focusing operation for an optical microscope or the like onto a sample surface or a backface of a cantilever, to allow automatic focusing by a simple method, and to make a focusing method suitable for automatic measurement, in a scanning type probe microscope compounded with the optical microscope.
SOLUTION: This method is applied for the scanning type probe microscope provided with a measuring part for measuring atomic force or the like as to the sample surface by scanning a sample 12 using a probe 25, a fine motion mechanism 24 for moving the probe finely, a prove approaching mechanism 11 for changing a space between the probe and the sample, the optical microscope 22, and a focusing driving mechanism 21. A focal point of the optical microscope is converged on the sample surface under the condition where the probe is approached to the sample by the prove approaching mechanism, positional information of the driving mechanism is stored at this time, the focusing for the optical microscope in the automatic measurement is carried out using the positional information as a reference.
COPYRIGHT: (C)2004,JPO

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