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1. 发明专利

JP2013209697A Film deposition apparatus and film deposition method 审中-公开
标题翻译：膜沉积装置和膜沉积方法
公开(公告)号：JP2013209697A
公开(公告)日：2013-10-10
申请号：JP2012079800
申请日：2012-03-30
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ , Samsung Display Co Ltd , 三星ディスプレイ株式会社
发明人： KOIKAWA KENTARO , YANAGISAWA KOICHI , KOJIMA HIDEAKI , NIRASAWA NOBUHIRO , YUMIBA KENJI , JUNG JAE HOON , LEE SANG-WOO
IPC分类号： C23C14/24 , H01L51/50 , H05B33/10
摘要： PROBLEM TO BE SOLVED: To bring a mask into close contact with a substrate by eliminating a gap between the mask and the substrate so as to prevent occurrence of an unnecessary bevel-like film when the vapor deposition film of an organic EL device is formed.SOLUTION: A film deposition apparatus deposits the film of a vapor-deposition substance which is injected from a vapor deposition source through a mask, on a substrate for an organic EL device carried into a vacuum chamber. A surface opposing to the substrate of a substrate supporting means supporting the substrate perpendicularly is constituted of a curved surface projected toward the substrate side.
摘要翻译：要解决的问题：通过消除掩模和基板之间的间隙来使掩模与基板紧密接触，以便当形成有机EL器件的气相沉积膜时，防止出现不必要的斜面状膜。解决方案：一种成膜装置将通过掩模从气相沉积源注入的气相沉积物质的膜沉积在携带到真空室中的有机EL器件的基板上。与支撑基板的基板的基板垂直地支撑的表面由朝向基板侧突出的弯曲表面构成。

2. 发明专利

JP2009036898A Optical film sticking apparatus and method for producing display panel 审中-公开
标题翻译：光学薄膜贴装装置及其制造方法
公开(公告)号：JP2009036898A
公开(公告)日：2009-02-19
申请号：JP2007199720
申请日：2007-07-31
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： OCHIAI YUKIO , YUMIBA KENJI , SATO KIMIHARU , KOJIMA HIDEAKI , YASUTOME TAKESHI , MATSUZAKI TETSUO
IPC分类号： G09F9/00 , G02B5/30 , G02F1/13 , G02F1/1335
摘要： PROBLEM TO BE SOLVED: To remarkably reduce a defect occurring by inclusion of a foreign matter upon the sticking treatment of an optical film to a display panel. SOLUTION: Among a display panel feeding means, a display panel alignment means, an optical film standing/feeding means, an optical film mounting/feeding means, an optical film sticking means, a peeling means, a protective film exhausting means, an optical film-fitted display panel conveying means and a display panel exhausting means composing an optical film sticking device, the display panel alignment means, first and second optical film standing/feeding means, the optical film sticking means, first and second peeling means and the optical film-fitted display panel conveying means are arranged at an another area having the highest cleanliness, and the exchange of the display panel and the optical film between the constituent means and the other constituent means is performed via slit parts with the minimum area provided at the side parts of a casing. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了显着地减少在将光学膜粘附到显示面板上时将包含异物所引起的缺陷减少。解决方案：在显示面板供给装置中，显示面板对准装置，光学膜放置/进给装置，光学膜安装/进给装置，光学膜粘贴装置，剥离装置，保护膜排出装置，显示面板对准装置，第一和第二光学胶片放置/进给装置，光学胶片粘贴装置，第一和第二剥离装置和配置在具有最高清洁度的另一区域的光学胶片显示面板传送装置，并且通过设置有最小面积的狭缝部分来进行构成装置和其它构成装置之间的显示面板和光学薄膜的更换在壳体的侧部。版权所有（C）2009，JPO＆INPIT

3. 发明专利

JP2009036897A Method and apparatus for sticking optical film and method for producing display panel 审中-公开
标题翻译：用于粘贴光学膜的方法和装置以及用于生产显示面板的方法
公开(公告)号：JP2009036897A
公开(公告)日：2009-02-19
申请号：JP2007199719
申请日：2007-07-31
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： OCHIAI YUKIO , YUMIBA KENJI , SATO KIMIHARU , KOJIMA HIDEAKI , YASUTOME TAKESHI , MATSUZAKI TETSUO
IPC分类号： G02F1/13 , G02B5/30
摘要： PROBLEM TO BE SOLVED: To achieve a high speed and a low cost, and to suppress enlargement of the footprint of the whole apparatus, even when a liquid crystal display which is a display panel is enlarged.
SOLUTION: A mechanism with which the posture of a display panel can be changed between a substantially horizontal state and a substantially vertical state while transporting the display panel is attached to a display panel feed section and a discharge section. With a transport direction for the display device as a center, optical film placed in a substantially horizontal state in two positions on both sides of the transport direction therefor are raised to a substantially vertical state and held by adsorption on two cylindrical adsorption drum means, respectively, arranged parallel to each other in two positions on both sides of the display panel to be transported likewise. The adsorption drum means are moved under rotation while pressing the optical films held by adsorption against both faces of the display panel passing between the adsorption drum means, so that the optical films is stuck on both faces of the display panel substantially at the same time.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：即使当作为显示面板的液晶显示器被放大时，为了实现高速度和低成本，并且抑制整个设备的占地面积的扩大。解决方案：在显示面板供给部和排出部安装有在显示面板供给部和排出部的同时，显示面板的姿势能够在基本上水平状态和基本上垂直状态之间改变的机构。以显示装置的输送方向为中心，在输送方向的两侧的两个位置上放置在大致水平状态的光学膜分别升高到基本垂直的状态，并分别通过吸附在两个圆筒形吸附鼓装置在显示面板的两侧的两个位置上彼此平行地布置以被类似地传送。吸附鼓装置在旋转的同时移动，同时将通过吸附保持的光学薄膜按压在通过吸附滚筒装置之间的显示面板的两个面上，使得光学薄膜基本上同时粘贴在显示面板的两个面上。版权所有（C）2009，JPO＆INPIT

4. 发明专利

JP2009036895A Apparatus for sticking optical film and method for producing display panel 审中-公开
标题翻译：用于粘贴光学膜的装置和用于制造显示面板的方法
公开(公告)号：JP2009036895A
公开(公告)日：2009-02-19
申请号：JP2007199716
申请日：2007-07-31
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： OCHIAI YUKIO , YUMIBA KENJI , SATO KIMIHARU , KOJIMA HIDEAKI , YASUTOME TAKESHI , MATSUZAKI TETSUO
IPC分类号： G02F1/13 , G02B5/30 , G02F1/1335 , G02F1/13363
摘要： PROBLEM TO BE SOLVED: To provide an apparatus for sticking an optical film, which even when the optical film to be stuck on a display panel is made larger, is lightweight, operates at a high speed, becomes structurally low-cost and compact, and can smoothly and safely change the posture of the optical film. SOLUTION: The posture of an optical film is changed from a substantially horizontal state to a substantially vertical state while transporting the optical film by an optical film supply means. The optical film placed in the substantially horizontal state is transported as it is in a transverse direction. During this transport, the optical film is bent from the substantially horizontal state to the substantially vertical state using a bending means, and the optical film in the substantially vertical state is drawn upward as it is using a side transport means. When the whole optical film becomes in a substantially vertical state, the optical film is transported while remained in the substantially vertical state to a sticking means using a lower transport means. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：解决问题的方案为了提供一种粘贴光学膜的装置，即使被卡在显示面板上的光学膜较大，重量轻，高速运转，结构上低成本，紧凑，可以平滑，安全地改变光学薄膜的姿势。解决方案：在通过光学膜供给装置输送光学膜的同时，光学膜的姿势从大致水平状态变化到大致垂直状态。放置在大致水平状态的光学薄膜原样沿横向传送。在该运送过程中，使用弯曲装置将光学薄膜从基本上水平状态弯曲到基本垂直的状态，并且使用侧面传送装置将基本上垂直状态的光学薄膜原样向上拉。当整个光学膜变得处于基本垂直的状态时，使用较低的传送装置将光学膜保持在基本垂直的状态下运送到粘附装置。版权所有（C）2009，JPO＆INPIT

5. 发明专利

JP2008191438A Method of sticking optical film, apparatus of sticking optical film and method of manufacturing display panel 审中-公开
标题翻译：遮盖光膜的方法，遮盖光膜的制造方法及制作显示面板的方法
公开(公告)号：JP2008191438A
公开(公告)日：2008-08-21
申请号：JP2007026332
申请日：2007-02-06
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： YUMIBA KENJI , SATO KIMIHARU , OCHIAI YUKIO , KOJIMA HIDEAKI , ISHII HARUYUKI , MATSUZAKI TETSUO
IPC分类号： G02B5/30 , G02F1/1335
摘要： PROBLEM TO BE SOLVED: To stick optical films on both faces of a display panel substantially simultaneously even when the sizes of the optical films stuck on both faces of the display panel are different from each other. SOLUTION: When the optical films are stuck on the display panel, a first optical film is stuck on a first main surface of the display panel moving in a first direction, thereafter a second optical film is stuck on a second main surface of the display panel moving in a second direction which is a reverse direction of the first direction. By reversing the moving direction of the display panel, the optical films having different sizes are stuck substantially simultaneously on the both faces of the display panel in a same working area. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：即使当粘附在显示面板的两个面上的光学膜的尺寸彼此不同时，也可以基本同时将光学膜粘附在显示面板的两个面上。解决方案：当光学膜粘贴在显示面板上时，第一光学膜粘附在显示面板的沿第一方向移动的第一主表面上，然后将第二光学膜粘贴在第二主表面上显示面板沿与第一方向相反的第二方向移动。通过反转显示面板的移动方向，具有不同尺寸的光学膜在相同的工作区域中基本上同时被粘贴在显示面板的两个面上。版权所有（C）2008，JPO＆INPIT

6. 发明专利

JP2014055335A Vacuum film deposition apparatus, and temperature control method and apparatus for evaporation source therefor 审中-公开
标题翻译：真空膜沉积装置及其蒸发源的温度控制方法及装置
公开(公告)号：JP2014055335A
公开(公告)日：2014-03-27
申请号：JP2012201703
申请日：2012-09-13
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： KOJIMA HIDEAKI , YANAGISAWA KOICHI , KOIKAWA KENTARO
IPC分类号： C23C14/24 , H01L51/50 , H05B33/10
摘要： PROBLEM TO BE SOLVED: To provide a vacuum film deposition apparatus which can provide stable vapor deposition while crystal sensors are being switched and a temperature control method and apparatus for its evaporation source.SOLUTION: A vacuum film deposition apparatus which vapor-deposits vapor deposition materials from a vapor deposition source onto a substrate surface in vacuum includes a crucible housing the vapor deposition sources therewithin, a heater for heating the crucible, a power supply unit for supplying heating power to the heater, and a control unit for controlling output power form the power supply unit, A crystal sensor is disposed close to the vapor deposition source, the crystal sensor generating rate signals showing the evaporation rate of the vapor deposition material. During a predetermined period after the crystal sensor is switched, the power supply unit is controlled so that the power which was supplied from the power supply unit to the heater during a predetermined period immediately before the crystal sensor was switched is maintained. In other periods, power to be supplied from the power supply unit to the heater is controlled based on the rate signal from the crystal sensor showing the evaporation rate of the vapor deposition material.
摘要翻译：要解决的问题：提供一种能够在切换晶体传感器的同时提供稳定的气相沉积的真空成膜装置及其蒸发源的温度控制方法和装置。解决方案：一种真空沉积装置，其将气相沉积材料在真空中从气相沉积源到基板表面上包括容纳其中的气相沉积源的坩埚，用于加热坩埚的加热器，用于向加热器供应加热功率的电源单元，以及用于控制输出功率的控制单元，电源单元，晶体传感器设置在蒸镀源附近，晶体传感器产生速率信号表示蒸镀材料的蒸发速度。在晶体传感器切换之后的预定时间段期间，控制电源单元，使得在紧接晶体传感器切换之前的预定时间段期间保持从电源单元供应到加热器的电力。在其他时期，基于来自晶体传感器的速率信号来控制从电源单元供应到加热器的功率，显示蒸镀材料的蒸发速率。

7. 发明专利

JP2012079480A Organic el device manufacturing apparatus and organic el device manufacturing method 审中-公开
标题翻译：有机EL器件制造设备和有机EL器件制造方法
公开(公告)号：JP2012079480A
公开(公告)日：2012-04-19
申请号：JP2010221858
申请日：2010-09-30
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： YANAGISAWA KOICHI , KOJIMA HIDEAKI , KOIKAWA KENTARO
IPC分类号： H05B33/10 , C23C14/24 , H01L51/50
摘要： PROBLEM TO BE SOLVED: To provide an organic EL device manufacturing apparatus and method which reduces breakage of a substrate or the like to have a high operating ratio.SOLUTION: The organic EL device manufacturing apparatus and method comprises the steps of: relatively moving a vapor deposition stage having a substrate mounted thereon and a mask; bringing the substrate and the mask into close contact with each other; and vapor-depositing a vapor deposition material on the substrate in a vacuum atmosphere. With respect to the close contact, a load on a driving source is monitored as a state quantity, and the movement is controlled on the basis of changes in the state quantity.
摘要翻译：解决的问题：提供一种有机EL装置制造装置和方法，其减少了具有高运行率的基板等的破损。解决方案：有机EL器件制造设备和方法包括以下步骤：相对移动其上安装有衬底的气相沉积工艺台和掩模; 使基板和面罩彼此紧密接触; 并在真空气氛中将气相沉积材料气相沉积在衬底上。关于紧密接触，将驱动源上的负载作为状态量进行监视，并且基于状态量的变化来控制移动。版权所有（C）2012，JPO＆INPIT

8. 发明专利

JP2009036899A Apparatus for sticking optical film and method for producing display panel 审中-公开
标题翻译：用于粘贴光学膜的装置和用于制造显示面板的方法
公开(公告)号：JP2009036899A
公开(公告)日：2009-02-19
申请号：JP2007199721
申请日：2007-07-31
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： OCHIAI YUKIO , YUMIBA KENJI , SATO KIMIHARU , KOJIMA HIDEAKI , YASUTOME TAKESHI , MATSUZAKI TETSUO
IPC分类号： G02F1/1335 , G02B5/30 , G02F1/13
摘要： PROBLEM TO BE SOLVED: To easily and safely take out a large display panel during transport, even if line stops or defects occur on the display panel when the large display panel is held by guide rollers from both sides thereof and vertically transported. SOLUTION: There are arranged a display panel supply means, a display panel discharge means, a display panel alignment means and display panel transport means with an optical film, each composed of side transport means and a lower transport means, wherein side transport means on one side are made integrally movable, so that a display panel or the display panel with the optical film can be taken out by moving the side transport means. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：即使在大型显示面板由两侧的引导辊保持并垂直运输时，即使在显示面板上出现线路停止或缺陷，也能够在运输过程中轻松安全地取出大型显示面板。解决方案：布置有由侧面传送装置和下部传送装置组成的显示面板供应装置，显示面板排出装置，显示面板对准装置和具有光学薄膜的显示面板传送装置，其中侧面传送一方面的装置整体可移动，从而可以通过移动侧面传送装置来取出显示面板或具有光学薄膜的显示面板。版权所有（C）2009，JPO＆INPIT

9. 发明专利

JP2012012627A Vacuum chamber device 审中-公开
标题翻译：真空室设备
公开(公告)号：JP2012012627A
公开(公告)日：2012-01-19
申请号：JP2010147455
申请日：2010-06-29
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： KOJIMA HIDEAKI , KOIKAWA KENTARO
IPC分类号： C23C14/54
摘要： PROBLEM TO BE SOLVED: To provide a vacuum chamber device suitable for teaching work of a transfer robot for transferring and positioning a glass substrate by observation from the outside of the device.SOLUTION: The vacuum chamber device forms a vacuum environment in the inner part thereof, the circumference of which is surrounded by a wall member 11, and stores in the vacuum environment, at least, a vapor deposition stage 30 for performing deposition treatment on the surface of a glass substrate 100 and a transfer robot 20 for transferring the glass substrate to the vapor deposition stage. A part of the wall member is provided with a view port 40, and the view port is provided with a window member 41 having a generally hemispherical shape and a uniform wall thickness, wherein the hemispherical part projects to the vacuum environment side.
摘要翻译：解决的问题：提供一种真空室装置，适用于通过从装置的外部观察来传送和定位玻璃基板的传送机器人的教学工作。解决方案：真空室装置在其内部形成真空环境，其外周围被壁构件11包围，并且在真空环境中至少存储用于进行沉积处理的气相沉积阶段30 在玻璃基板100的表面和用于将玻璃基板转印到气相沉积台的传送机器人20。壁构件的一部分设置有视口40，并且视口具有大致半球形和均匀壁厚的窗构件41，其中半球形部分突出到真空环境侧。版权所有（C）2012，JPO＆INPIT

10. 发明专利

JP2009109980A Device for bonding optical film and method of manufacturing display panel 审中-公开
标题翻译：用于粘合光学膜的装置和制造显示面板的方法
公开(公告)号：JP2009109980A
公开(公告)日：2009-05-21
申请号：JP2008191429
申请日：2008-07-24
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： OCHIAI YUKIO , YUMIBA KENJI , SATO KIMIHARU , KOJIMA HIDEAKI , YASUTOME TAKESHI , MATSUZAKI TETSUO , FUKUDA HIROSHI , TOGAMI KAZUYUKI
IPC分类号： G02F1/13 , G02B5/30 , G02F1/1335 , G09F9/00
摘要： PROBLEM TO BE SOLVED: To easily change kinds at low costs, when a suction drum provided with many suction holes is used. SOLUTION: A tip part and a rear end part of an optical film are sucked and held by forming the suction drum using a cylindrical drum (a drum formed by winding a thin plate-shaped panel in a cylindrical shape), providing linear hollow parts nearly parallel to a rotational axis at its thick part in positions corresponding to the tip part and the rear end part of the optical film and providing the suction holes in an outer circumferential surface of the drum along the hollow parts, and thus optical film is bonded. The kinds can be easily changed at low costs by providing in advance the hollow parts and the suction holes in association with the tip part and the rear end part of the different kinds of optical films. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了容易地以低成本改变种类，当使用设有许多吸孔的吸盘时。解决方案：通过使用圆柱形鼓（通过将薄板状面板卷成圆柱形形成的滚筒）形成吸引滚筒来吸引和保持光学薄膜的顶端部分和后端部分，提供线性在对应于光学薄膜的前端部分和后端部分的位置的较厚部分处于大致平行于旋转轴线的中空部分，并沿着中空部分在滚筒的外圆周表面中提供吸孔，因此光学薄膜被绑定。通过提供与不同种类的光学膜的末端部分和后端部分相关联的中空部分和抽吸孔，可以以低成本容易地改变种类。版权所有（C）2009，JPO＆INPIT

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