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1. 发明专利

JP2004301847A Defects inspection apparatus and method 有权
公开(公告)号：JP2004301847A
公开(公告)日：2004-10-28
申请号：JP2004146031
申请日：2004-05-17
申请人： Hitachi High-Tech Electronics Engineering Co Ltd , Hitachi Ltd , 日立ハイテク電子エンジニアリング株式会社 , 株式会社日立製作所
发明人： NOGUCHI MINORU , OSHIMA YOSHIMASA , NISHIYAMA HIDETOSHI , MATSUMOTO SHUNICHI , KENBO YUKIO , MATSUNAGA RYOJI , SAKAI SHIGETOSHI , NINOMIYA TAKANORI , WATANABE TETSUYA , NAKAMURA HISATO , JINGU TAKAHIRO , MORISHIGE YOSHIO , CHIKAMATSU SHUICHI
IPC分类号： G01B11/30 , G01N21/956 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide a defects inspection apparatus and a method with an improved detection sensitivity and throughput by realizing a high-efficiency illumination on a straight line from a direction into which diffracted light is not introduced to reduce the diffracted light from a pattern and setting a threshold according to fluctuations in signal by pattern, when detecting defects such as foreign substances which appear in a fabrication process fabricating an object by forming the pattern on a substrate. SOLUTION: Scattered light from the pattern leading to fluctuations in signal is reduced by a high-efficiency illumination optical system which allows illumination from a direction which reduces diffracted light from the pattern. A detection threshold is reduced by a means which sets the threshold based on fluctuations in signal calculated for each region in a chip. An improvement in detection sensitivity and throughput is thereby realized. COPYRIGHT: (C)2005,JPO&NCIPI

2. 发明专利

JP2008102727A Switch-equipped rfid and connecting system using it 审中-公开
标题翻译：使用其开关设备的RFID和连接系统
公开(公告)号：JP2008102727A
公开(公告)日：2008-05-01
申请号：JP2006284487
申请日：2006-10-19
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： YOKOTA TOSHIMI , NINOMIYA TAKANORI , ARAKI KENJI , SHIGEMI RYOSUKE , OTA CHIKARA , ARAI RYOTA , SHOJI HIROSHI
IPC分类号： G06K19/07 , G06K19/00 , H01B7/36
摘要： PROBLEM TO BE SOLVED: To reduce operating errors of pairing wrong subjects by easily specifying subjects to be paired. SOLUTION: An RFID includes a receiving (sending) circuit for receiving a first identifier (ID 1) stored in a memory attached to a subject (e.g., cable); a memory for storing a second identifier (ID 2); a collation circuit for outputting the result of collating the first identifier with the second identifier; an on/off switch corresponding to output from the collation circuit; and an output means (e.g., LED, buzzer) for providing an output responding to turning on or off of the switch. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：通过容易地指定要配对的对象来减少配对错误对象的操作错误。解决方案：RFID包括接收（发送）电路，用于接收存储在附着于对象（例如，电缆）的存储器中的第一标识符（ID 1）; 用于存储第二标识符（ID 2）的存储器; 排序电路，用于输出将第一标识符与第二标识符进行对照的结果; 对应于来自对比电路的输出的开/关开关; 以及用于提供响应于开关的导通或关断的输出的输出装置（例如，LED，蜂鸣器）。版权所有（C）2008，JPO＆INPIT

3. 发明专利

JP2006330007A Defect inspection device and its method 有权
标题翻译：缺陷检查装置及其方法
公开(公告)号：JP2006330007A
公开(公告)日：2006-12-07
申请号：JP2006238838
申请日：2006-09-04
申请人： Hitachi High-Technologies Corp , Hitachi Ltd , 株式会社日立ハイテクノロジーズ , 株式会社日立製作所
发明人： NOGUCHI MINORU , OSHIMA YOSHIMASA , NISHIYAMA HIDETOSHI , MATSUMOTO SHUNICHI , KENBO YUKIO , MATSUNAGA RYOJI , SAKAI SHIGETOSHI , NINOMIYA TAKANORI , WATANABE TETSUYA , NAKAMURA HISATO , JINGU TAKAHIRO , MORISHIGE YOSHIO , CHIKAMATSU SHUICHI
IPC分类号： G01N21/956 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide a defect inspection device and its method capable of improving detection sensitivity and throughput by setting a threshold value corresponding to the dispersion of signal depending on a pattern by realizing highly effective illumination on a straight line from a direction where no diffracted light enters at the time of detecting the defect such as foreign matter etc., generated in the manufacturing process of an object while forming a pattern on the substrate. SOLUTION: By a highly effective illumination system illuminating from the direction of reducing the diffraction light from the pattern, the dispersed light from the pattern being the cause of the dispersion of the signal is reduced. Further, the threshold value is reduced by a threshold setting means from the calculated dispersion of signal for every region in the chip. Consequently, the detection threshold value is reduced and the detection sensitivity is improved and the improvement of the throughput is realized. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：解决问题：提供一种缺陷检查装置及其方法，该缺陷检查装置及其方法能够通过根据图案设置与信号的色散相对应的阈值，从而通过在直线上实现高效照明来提高检测灵敏度和吞吐量在检测在物体的制造过程中产生的缺陷（例如异物等）的同时在衍射光线入射的方向，同时在基板上形成图案。解决方案：通过从减少来自图案的衍射光的方向照明的高效照明系统，来自图案的分散光是信号分散的原因。此外，根据芯片中每个区域的计算的信号色散，阈值设置装置减小阈值。因此，检测阈值降低，检测灵敏度提高，吞吐量提高。版权所有（C）2007，JPO＆INPIT

4. 发明专利

JP2005195607A Defect inspection method and defect inspection system 有权
标题翻译：缺陷检查方法和缺陷检查系统
公开(公告)号：JP2005195607A
公开(公告)日：2005-07-21
申请号：JP2005058321
申请日：2005-03-03
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： NINOMIYA TAKANORI , ISOGAI SHIZUSHI , MATSUI SHIGERU , KUROSAKI TOSHISHIGE
IPC分类号： G01N21/956
摘要： PROBLEM TO BE SOLVED: To perform a defect observation work, a defect image collecting work and a defect analyzing work with an increased efficiency and a shortened time by detecting a defect of a substrate such as a semiconductor wafer in an inspection device and precisely performing the positioning of the defect in an observation device.
SOLUTION: Based on position coordinates and attributes of a plurality of defects detected by the inspection device, a defect easily detectable by the observation device is selected, this defect is detected and observed as an index by the observation device, and a coordinate conversion equation showing the correlation of the position coordinate of the defect between both the devices is generated. The position coordinate of the defect is converted in the observation device to observe the defect.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：通过检测检查装置中的半导体晶片等基板的缺陷，进行缺陷观察工作，缺陷图像采集作业和缺陷分析工作，其效率提高和时间缩短，以及精确地执行在观察装置中的缺陷的定位。解决方案：根据由检查装置检测到的多个缺陷的位置坐标和属性，选择由观察装置容易检测到的缺陷，该缺陷被检测并被观察作为观察装置的索引，并且坐标生成表示两个装置之间的缺陷的位置坐标的相关性的转换方程式。在观察装置中转换缺陷的位置坐标以观察缺陷。版权所有（C）2005，JPO＆NCIPI

5. 发明专利

JP2012120288A Impedance matching method of non-contact power supply device, and non-contact power supply device using same 有权
标题翻译：非接触式电源装置的阻抗匹配方法和使用相同方式的非接触式电源装置
公开(公告)号：JP2012120288A
公开(公告)日：2012-06-21
申请号：JP2010266470
申请日：2010-11-30
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： PARK MINSEOK , NINOMIYA TAKANORI
IPC分类号： H02J17/00 , B60L5/00 , B60L11/18 , B60M7/00
CPC分类号： B60L11/1861 , B60L11/182 , B60L11/1833 , B60L2210/30 , Y02T10/7005 , Y02T10/7044 , Y02T10/705 , Y02T10/7072 , Y02T10/7241 , Y02T90/12 , Y02T90/121 , Y02T90/122 , Y02T90/125 , Y02T90/127 , Y02T90/14
摘要： PROBLEM TO BE SOLVED: To provide a general-purpose method for efficient impedance matching of a resonance type non-contact power supply device.SOLUTION: A non-contact power supply device transfers electric power from an AC power source to a load. In the impedance matching method for a non-contact power supply device of electromagnetic field resonance method, the resonance frequency of a power transmitting resonance coil and a power receiving resonance coil is allowed to almost agree with an output frequency fo of the AC power source, so that an electromagnetic field resonance is generated by the electromagnetic field coupling between the power transmitting resonance coil and the power receiving resonance coil. The AC power which the AC power source has inputted into a power transmission matching circuit is transferred to the power receiving resonance coil by the electromagnetic field resonance between coils, which is then outputted to a load. Further, two elements are adjusted among three elements, namely, an input resistance Rti which a power transmission part has under non-resonance state, an input resistance Rri which a power reception part has under non-resonance state, and a mutual inductance M caused by coupling between the power transmission part and the reception part, so that the impedance of the non-contact power supply device under a resonance state is adjusted.
摘要翻译：要解决的问题：提供一种用于谐振型非接触式电源装置的有效阻抗匹配的通用方法。
解决方案：非接触式电源设备将电力从交流电源传输到负载。在电磁场谐振法的非接触供电装置的阻抗匹配方法中，允许电力传输谐振线圈和受电谐振线圈的谐振频率几乎与AC电源的输出频率fo一致，从而通过电力传输谐振线圈和受电共振线圈之间的电磁场耦合产生电磁场谐振。 AC电源已经输入到电力传输匹配电路中的AC电力通过线圈之间的电磁场谐振传送到电力接收谐振线圈，然后输出到负载。此外，在三个元件之间调节两个元件，即功率传输部分处于非共振状态的输入电阻Rti，受电部分处于非谐振状态的输入电阻Rri和引起的互感M 通过耦合在电力传输部分和接收部分之间，使得调节在共振状态下的非接触供电装置的阻抗。版权所有（C）2012，JPO＆INPIT

6. 发明专利

JP2008122141A Probe for nmr measurement and nmr device using the same 有权
标题翻译：使用NMR测量的NMR和NMR装置的探针
公开(公告)号：JP2008122141A
公开(公告)日：2008-05-29
申请号：JP2006304000
申请日：2006-11-09
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： YAMAMOTO HIROYUKI , NINOMIYA TAKANORI , SAITO KAZUO
IPC分类号： G01R33/32 , G01R33/34 , G01R33/36
CPC分类号： G01R33/30 , G01R33/34023 , G01R33/34046 , G01R33/34053 , G01R33/34069 , G01R33/34092 , G01R33/3628 , G01R33/3635
摘要： PROBLEM TO BE SOLVED: To materialize tuning adjustment of resonance characteristics without lowering a high Q-value essentially possessed by an antenna coil of small resistance loss, and to provide a circuit structure for a probe antenna with the number of turns increased and its mounting method, as to a nuclear magnetic resonance (NMR) measuring instrument.
SOLUTION: A signal wire is led out of a substantially middle point of an antenna coil while trimmer capacitors of variable capacitance are connected to both sides of the antenna coil. A circuit is thereby formed wherein a series resonance circuit 1 on one side and a series resonance circuit 2 on the other side are parallel connected, with the substantially middle point of the antenna coil connected to the signal wire taken as a boundary point, the resonance circuit 1 comprising an antenna coil L
1 and a trimmer capacitor C
1 while the resonance circuit 2 comprising an antenna coil L
2 and a trimmer capacitor C
2 . By controlling resonance frequencies F
1 and F
2 of the resonance circuits 1 and 2, resonance characteristics are obtained wherein the parallel resonance frequency F
0 of the whole of an antenna circuit is tuned to a desired frequency and its impedance is adjusted to a specific value, e.g. 50 Ω.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了实现谐振特性的调谐调整而不降低具有小电阻损耗的天线线圈基本上具有的高Q值，并且提供具有匝数增加的探针天线的电路结构，关于核磁共振（NMR）测量仪器的安装方法。解决方案：信号线从天线线圈的大致中点引出，而可变电容的微调电容连接到天线线圈的两侧。由此形成一个电路，其中一侧的串联谐振电路1和另一侧的串联谐振电路2并联连接，天线线圈的大致中点连接到作为边界点的信号线，共振电路1包括天线线圈L 和微调电容器C 1，而谐振电路2包括天线线圈L 2 和微调电容器 ç 2 。通过控制谐振电路1和2的谐振频率F 1 和F 2 ，获得谐振特性，其中并联谐振频率F 0 整个天线电路被调谐到期望的频率，并且其阻抗被调整到特定的值，例如 50Ω。版权所有（C）2008，JPO＆INPIT

7. 发明专利

JP2009099635A Current-limiting device having superconductive thin film, and its manufacturing method 审中-公开
标题翻译：具有超薄膜的电流限制器件及其制造方法
公开(公告)号：JP2009099635A
公开(公告)日：2009-05-07
申请号：JP2007267343
申请日：2007-10-15
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： HASEGAWA HARUHIRO , YAMAMOTO TSUTOMU , WADAYAMA YOSHIHIDE , SAITO KAZUO , OKADA MICHIYA , NINOMIYA TAKANORI
IPC分类号： H01L39/16
摘要： PROBLEM TO BE SOLVED: To provide a structure of a current-limiting device having a superconductive thin film, which can firmly connect an input/output part to a superconductive thin film thin wire with high repeatability.
SOLUTION: A metal tape is interposed between the input/output part and the superconductive thin film thin wire, and the metal tape and the superconductive thin film thin wire are connected to each other by ultrasonic bonding.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供具有超导薄膜的限流装置的结构，其可以将输入/输出部分牢固地连接到具有高重复性的超导薄膜细线。解决方案：金属带插入在输入/输出部分和超导薄膜细线之间，并且金属带和超导薄膜细线通过超声波接合彼此连接。版权所有（C）2009，JPO＆INPIT

8. 发明专利

JP2005300553A Defect inspection device and method 有权
标题翻译：缺陷检查装置和方法
公开(公告)号：JP2005300553A
公开(公告)日：2005-10-27
申请号：JP2005172304
申请日：2005-06-13
申请人： Hitachi High-Technologies Corp , Hitachi Ltd , 株式会社日立ハイテクノロジーズ , 株式会社日立製作所
发明人： NOGUCHI MINORU , OSHIMA YOSHIMASA , NISHIYAMA HIDETOSHI , MATSUMOTO SHUNICHI , KENBO YUKIO , MATSUNAGA RYOJI , SAKAI SHIGETOSHI , NINOMIYA TAKANORI , WATANABE TETSUYA , NAKAMURA HISATO , JINGU TAKAHIRO , MORISHIGE YOSHIO , CHIKAMATSU SHUICHI
IPC分类号： G01N21/956 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To provide a defect inspection device and method, capable of improving detection sensitivity and throughput by realizing, at the detecting of defects, such as a foreign matter generated in a manufacturing process for forming a pattern on a substrate to produce an object, a linear high-efficiency lighting from a direction on which no diffracted light from the pattern is incident in order to reduce the diffracted light, and setting a threshold according to the dispersion of signals by patterns. SOLUTION: Scattered light, from the pattern that causes dispersion of signals, is reduced by a high-efficiency lighting optical system, lighting from a direction reducing the scattered light from the pattern, and the detection threshold is reduced by a means which sets the threshold, based on the dispersion of signals calculated each area within a chip, whereby improvement in the detection sensitivity and improvement in throughput are realized. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种缺陷检查装置和方法，其能够通过在检测诸如在用于在基板上形成图案的制造工艺中产生的异物等缺陷的检测来提高检测灵敏度和生产率为了产生物体，从不存在来自图案的衍射光入射的方向的线性高效照明，以便减少衍射光，并根据图案的信号色散设置阈值。解决方案：通过高效率照明光学系统减少来自引起信号色散的图案的散射光，从减少来自图案的散射光的方向进行照明，并且通过以下方式减少检测阈值：基于芯片内每个区域计算的信号的色散设置阈值，从而实现检测灵敏度的提高和吞吐量的提高。版权所有（C）2006，JPO＆NCIPI

9. 发明专利

JP2005055447A Method and apparatus for inspecting defects 有权
标题翻译：检查缺陷的方法和装置
公开(公告)号：JP2005055447A
公开(公告)日：2005-03-03
申请号：JP2004249426
申请日：2004-08-30
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： SHIBATA YUKIHIRO , MAEDA SHUNJI , YAMAGUCHI KAZUO , YOSHIDA MINORU , YOSHIDA ATSUSHI , NINOMIYA TAKANORI , MATSUI SHIGERU , OKA KENJI , WATANABE KENJI
IPC分类号： G01B11/24 , G01N21/88 , G01N21/956 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To detect defects in a minute wiring pattern formed on a sample with high sensitivity, by improving the contrast of an optical image of the sample formed by the interference between the 0-th and higher-order diffracted lights of reflected light, arising from illuminating light reflected by the sample surface, in a defects detection optical system which detects defects in a pattern formed on the sample surface.
SOLUTION: A high resolution optical system is constructed by an illumination optical system which illuminates the sample with a polarized light, a polarization optical component which transmits higher-order diffracted lights, after being subjected to polarization rotation by the sample more efficiently than the 0-th order light, and a detection optical system which forms an image of the sample onto a photoelectric conversion device with the light which is transmitted through or is reflected by the polarization optical component.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：通过改善由第0级和高级衍射光之间的干扰形成的样品的光学图像的对比度，来检测在高灵敏度下形成在样品上的微小布线图案中的缺陷在检测在样品表面上形成的图案中的缺陷的缺陷检测光学系统中产生的由样品表面反射的照明光产生的反射光。解决方案：高分辨率光学系统由照射光学系统构成，该照明光学系统利用偏振光照射样品，透射高阶衍射光的偏振光学部件在受到样品的极化旋转之后更有效地比以及检测光学系统，其通过透射或被偏振光学部件反射的光将样品的图像形成到光电转换装置上。版权所有（C）2005，JPO＆NCIPI

10. 发明专利

JP2004157139A Circuit pattern inspection device and circuit pattern inspection method 审中-公开
公开(公告)号：JP2004157139A
公开(公告)日：2004-06-03
申请号：JP2004029137
申请日：2004-02-05
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： SHINADA HIROYUKI , TAKATO ATSUKO , NINOMIYA TAKANORI , SASAKI HIROKO , NOZOE MARI , MURAKOSHI HISAYA , NINOMIYA HIROSHI , KASAI YUJI
IPC分类号： G01N23/225 , H01L21/66
摘要： PROBLEM TO BE SOLVED: To make a condition set efficiently, to shorten an inspection time, and to enhance reliability of inspection, in a circuit pattern inspection device for inspecting a defect, a foreign matter, a residue or the like in the same design pattern of a semiconductor device on a wafer under a production process for the semiconductor device, by an electron beam. SOLUTION: This device is provided independently with a detection signal processing circuit for forming a large current high-speed image for detecting the existence of the defect, and a detection signal processing circuit for forming an image of a specified narrow portion detected by the defect detecting inspection hereinbefore. Alternatively, the device stores the first electronic optical system for the defect detecting inspection and the second electronic optical system exclusive for a review for observing the specified narrow portion detected by the defect detecting inspection, in the same vacuum container. Alternatively, the device is provided with the first detector for the defect detecting inspection and the second detector exclusive for a review for observing the specified narrow portion detected by the defect detecting inspection. COPYRIGHT: (C)2004,JPO

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