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1. 发明专利

JP2010140933A Correcting method for line sensor, alignment device, and substrate transport device 审中-公开
标题翻译：线传感器，对准装置和基板传输装置的校正方法
公开(公告)号：JP2010140933A
公开(公告)日：2010-06-24
申请号：JP2008312981
申请日：2008-12-09
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： KUBOTA KAZUO , SUGANO WATARU , ITO TAKANORI
IPC分类号： H01L21/68 , G03F7/20 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a correcting method for a line sensor in which the line sensor can be corrected at any time, an alignment device capable of precisely detecting the position of a substrate through the connection and having stable performance which is not influenced by a use environment, and a substrate transport device equipped with the same. SOLUTION: Positioning reference is provided for the aligner origin of the alignment device, teaching of the aligner origin of the alignment device is provided for a teaching operation of a substrate transport robot, and an output of the sensor is measured while the line sensor of the alignment device is shielded by the substrate transport device from light by a unit amount at each time to measure output characteristics of the line sensor, thereby computing linearity and calculating a correction value. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种可以随时校正线传感器的线传感器的校正方法，能够通过连接精确地检测衬底的位置并且具有稳定的性能的对准装置不受使用环境的影响，以及配备有使用环境的基板输送装置。
解决方案：为对准装置的对准器原点提供定位参考，提供对准装置的对准器原点的教导用于衬底传送机器人的示教操作，并且测量传感器的输出，同时线对准装置的传感器在每一时间被基板传送装置从光屏蔽单位量，以测量线传感器的输出特性，从而计算线性并计算校正值。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2008160937A Carrying mechanism with brake 审中-公开
标题翻译：携带制动机构
公开(公告)号：JP2008160937A
公开(公告)日：2008-07-10
申请号：JP2006344718
申请日：2006-12-21
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： ITO TAKANORI , SHIBUKAWA SHIGERU
IPC分类号： H02K41/02 , F16D63/00 , F16D65/18 , H02K41/03
摘要： PROBLEM TO BE SOLVED: To provide a carrying mechanism with brake which can obtain a large braking force with less number of part items and small structure without installing an independent external brake mechanism. SOLUTION: The carrying mechanism with brake includes: a guide rail arranged at a pedestal; a moving guide member which is mounted to the guide rail, and travels and moves along the guide rail; a base arranged at the moving guide member; a fixed magnet rail arranged at the pedestal; a large number of travel thrusting magnets which are arranged on both front and rear surfaces of the fixed magnet rail, and aligned at intervals in the longitudinal direction of the fixed magnet rail; a motor coil which is arranged at the base, and creates a traveling thrust by a magnetic action with the travel thrusting magnets; and a brake means which holds the fixed magnet rail. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种具有制动器的承载机构，其可以在没有安装独立的外部制动机构的情况下获得具有较少数量的零件和小结构的大的制动力。解决方案：具有制动器的承载机构包括：布置在基座处的导轨; 移动引导构件，其安装在导轨上，并沿导轨移动并移动; 布置在所述移动引导构件上的基座; 固定磁铁轨布置在基座上; 多个行进推进磁铁，其布置在固定磁铁轨道的前表面和后表面上，并且沿着固定磁轨的纵向间隔排列; 电动机线圈，其布置在基座处，并且通过与行进推进磁体的磁作用产生行进推力; 以及保持固定磁铁轨的制动装置。版权所有（C）2008，JPO＆INPIT

3. 发明专利

JP2011088219A Operation diagnosis method of robot, control device of robot, control device of mini-environment system, robot, and mini-environment system 审中-公开
标题翻译：机器人的操作诊断方法，机器人的控制装置，微型环境系统的控制装置，机器人和微型环境系统
公开(公告)号：JP2011088219A
公开(公告)日：2011-05-06
申请号：JP2009241056
申请日：2009-10-20
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： SADA TARO , ISHIJIMA YASUO , ONO KOJI , ITO TAKANORI , SEKI TOSHINORI
IPC分类号： B25J19/06 , G05B19/18
摘要： PROBLEM TO BE SOLVED: To provide an operation diagnosis method of a robot capable of avoiding failure by diagnosing robot operation and of reducing maintenance time by a detail display of an abnormal portion and the reproduction of the robot operation on a panel. SOLUTION: In the operation diagnosis method of the robot having a plurality of motors for respectively driving a plurality of drive shafts, manipulators, and sensors and moving the manipulators by the drive shafts, an operation pattern made to be the object for diagnosis of the robot is set to at least one drive shaft. In the operation pattern in the initial state of the robot, a plurality of input/output signals of a control device for controlling the plurality of the motors measured at a plurality of times and a plurality of input/output signals of an equipment for controlling the sensors and manipulators are made to be determination data, and newly measured determination data is made to be diagnosis data. It is determined whether the robot operation is normal or not when newly measured by determining whether or not the diagnosis data is included in the determination data through a statistical pattern recognition method. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供通过诊断机器人操作并且通过异常部分的细节显示和面板上的机器人操作的再现来减少维护时间来避免故障的机器人的操作诊断方法。解决方案：在具有用于分别驱动多个驱动轴，操纵器和传感器以及通过驱动轴移动操纵器的多个电动机的机器人的操作诊断方法中，形成作为诊断对象的操作模式机器人的至少一个设置在至少一个驱动轴上。在机器人的初始状态下的操作模式中，多个用于控制多个电动机的控制装置的多个输入/输出信号，以及用于控制多个电机的多个输入/输出信号将传感器和操纵器作为确定数据，并将新测量的确定数据作为诊断数据。通过通过统计模式识别方法确定诊断数据是否包含在确定数据中，来确定新近测量的机器人操作是否正常。版权所有（C）2011，JPO＆INPIT

4. 发明专利

JP2012231041A Substrate carrier 审中-公开
标题翻译：基板载体
公开(公告)号：JP2012231041A
公开(公告)日：2012-11-22
申请号：JP2011099000
申请日：2011-04-27
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： ITO TAKANORI
IPC分类号： H01L21/68 , B25J13/08
摘要： PROBLEM TO BE SOLVED: To provide a substrate carrier capable of detecting an angular error when a θ axis of a carrier robot rotates, with a function of correcting angle of the θ axis based on the detected angular error being provided.SOLUTION: The substrate carrier includes a carrier robot 2 which has an arm 13 to carry a substrate 7, and an opening 8 for carrying the substrate 7 to the outside. The carrier robot 2 rotates the arm 13 using a θ axis motor and expands/contracts the arm 13 using an R axis motor 110. The frame of the opening 8 is provided with detection sensors 4 and 4' which project sensor light to a photodetector from a projector. During the process in which the carrier robot 2 expands/contracts the arm 13 for carrying the substrate 7 through the opening 8, rotational angles of the R axis motor 110 at the time when the substrate 7 starts shielding the sensor light of the detection sensors 4 and 4' and at the time when the detection sensors 4 and 4' restart receiving light after completion of shielding of sensor light are used to acquire an angular error α which is a difference between the rotational angle of the θ axis motor and that of the arm 13.
摘要翻译：要解决的问题：提供一种能够检测载体机器人的θ轴旋转时的角度误差的基板载体，具有基于检测到的角度误差来校正θ轴的角度的功能。解决方案：衬底载体包括具有用于承载衬底7的臂13和用于将衬底7承载到外部的开口8的载体机器人2。托架机器人2使用θ轴马达使臂13旋转，并且使用R轴马达110使臂13伸展/收缩。开口8的框架设置有检测传感器4,4'，其将传感器光投射到光电检测器一台投影机在载体机器人2通过开口8膨胀/收缩用于承载基板7的臂13的过程中，当基板7开始屏蔽检测传感器4的传感器光时，R轴马达110的旋转角度和4'，并且当检测传感器4和4'重新开始传感器光的屏蔽完成后的接收光被用于获取作为θ轴电动机的旋转角度与θ轴电机的旋转角度之间的差的角度误差α （C）2013，JPO＆INPIT

5. 发明专利

JP2009016743A Wafer transporting device, and method of monitoring air flow in wafer transporting device 审中-公开
标题翻译： WAFER运输装置，以及在WAFER运输装置中监测空气流动的方法
公开(公告)号：JP2009016743A
公开(公告)日：2009-01-22
申请号：JP2007179826
申请日：2007-07-09
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： KASHIWABARA NAKA , KUSHIDA MINORU , ONO KOJI , ITO TAKANORI , OKI YOSUKE
IPC分类号： H01L21/677
摘要： PROBLEM TO BE SOLVED: To provide a wafer transporting device capable of accurately monitoring the situation of the air flow in the whole transporting room in the normal working condition of the transporting device.
SOLUTION: The wafer transporting device includes a wafer transport robot furnished with a wafer handling mechanism movable to the desired position in the transporting room formed in a mini-environmental casing which is to form internally a wafer transporting room, a wind quantity measuring apparatus installed in the wafer handling mechanism for measuring the air flow flowing in the transporting room inside the mini-environmental casing at a plurality of positions as desired in the transporting room, and a controller to calculate and display the situation of the air flow flowing in the transporting room inside the mini-environmental casing on the basis of the wind quantity data of the air flow at the plurality of desired positions measured by the wind quantity measuring apparatus.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够在传送装置的正常工作状态下精确地监视整个运送室内的气流的状况的晶片传送装置。解决方案：晶片输送装置包括晶片运送机器人，其具有可移动到形成在内部形成晶片运送室的微型环境壳体中的运送室中的期望位置的晶片处理机构，风量测量设置在所述晶片处理机构中的装置，用于测量在所述运送室中根据需要在所述多个位置处在所述迷你环境箱内的运送室内流动的空气流;以及控制器，用于计算和显示流入所述空气流的状态基于由风量测量装置测量的多个期望位置处的空气流量的风量数据，微型环保外壳内的运送室。版权所有（C）2009，JPO＆INPIT

6. 发明专利

JP2011238423A Signal switching circuit and control method of signal switching 审中-公开
标题翻译：信号切换电路及信号切换控制方法
公开(公告)号：JP2011238423A
公开(公告)日：2011-11-24
申请号：JP2010107927
申请日：2010-05-10
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： OKI YOSUKE , ONO KOJI , ITO TAKANORI
IPC分类号： H01H9/54 , H01H47/00
摘要： PROBLEM TO BE SOLVED: To provide a signal switching circuit and a control method of signal switching capable of surely removing non-conducting membrane on a relay contact in the signal switching circuit kept in an immobile state for a long time.SOLUTION: In the signal switching circuit kept in the immobile state for a long time, the method of removing non-conducting membrane on the relay contact is provided by the circuit configured so that current is allowed to flow on the relay contact by switching the relay contact without changing the signal path.
摘要翻译：要解决的问题：提供信号切换电路和信号切换控制方法，其能够可靠地去除长时间保持在不动状态的信号切换电路中的继电器触点上的非导电膜。解决方案：在长时间保持不动状态的信号切换电路中，由继电器触点上除去非导电膜的方法由电路构成，使得允许电流在继电器触点上流动切换继电器触点而不改变信号路径。版权所有（C）2012，JPO＆INPIT

7. 发明专利

JP2010123824A Alignment unit and wafer transfer device 审中-公开
标题翻译：对准单元和转移传输设备
公开(公告)号：JP2010123824A
公开(公告)日：2010-06-03
申请号：JP2008297512
申请日：2008-11-21
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： SEKI TOSHINORI , ITO TAKANORI
IPC分类号： H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide an alignment unit which can detect that a notch is registered in a notch registered position after alignment of a wafer to perform stable transference to an upper device, and a wafer transfer device using the alignment unit. SOLUTION: A wafer alignment unit includes: a rotating mechanism holding and rotating a wafer; and a line sensor irradiating light on the circumference of the wafer to detect the light reception amount of the irradiated light, and detects the amount of eccentricity of the wafer and a notch position formed on the circumference of the wafer from the light reception amount of the line sensor to correct the position of the wafer. The wafer alignment has a notch misregistration detecting sensor which detects misregistration of the notch after termination of the alignment. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种对准单元，其可以在对晶片进行对准以对上部装置进行稳定的转移之后检测到凹口被登记在凹口注册位置，以及使用该对准单元的晶片传送装置。晶片对准单元包括：保持并旋转晶片的旋转机构; 以及线传感器，其在所述晶片的周围照射光，以检测所述照射光的光接收量，并且从所述晶片的光接收量检测所述晶片的偏心量和形成在所述晶片的圆周上的切口位置线传感器来校正晶片的位置。晶片对准具有一个缺口对准检测传感器，该传感器检测对准结束后凹口的不对准。版权所有（C）2010，JPO＆INPIT

8. 发明专利

JP2010016069A Wafer alignment unit, and method of correcting output value of line sensor of wafer alignment unit 审中-公开
标题翻译：波形校准单元和校正波形校准单元线传感器输出值的方法
公开(公告)号：JP2010016069A
公开(公告)日：2010-01-21
申请号：JP2008172897
申请日：2008-07-02
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： ITO TAKANORI , SADA TARO
IPC分类号： H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide a wafer alignment unit that precisely detects the position of a wafer while correcting by itself a decentration amount and a shift in notch position due to variations in light quantity and detected amount of a line sensor at any time, and holds stable performance which is not influenced by a use environment. SOLUTION: The wafer alignment unit including a wafer rotating mechanism 1 which is mounted with a wafer 9 and makes it rotate, optical line sensors 4 and 5 which project light toward the edge of the rotating wafer 9 and detect the quantities of projected light which is not cut off by the wafer 9, and an arithmetic unit 7 which detects the decentration amount and notch position of the wafer from output values of the line sensors includes a light shield plate 3 which is provided between the wafer rotating mechanism 1 and line sensors to simulate the wafer 9, and used to detect and correct variations in light detection quantity of the line sensors, and a moving mechanism 6 which straightly moves the line sensors relatively to the light shield plate 3. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种晶片对准单元，其精确地检测晶片的位置，同时自身校正由于光量的变化引起的偏移量和切口位置的偏移以及任何线传感器的检测量时间，并保持不受使用环境影响的稳定性能。解决方案：晶片对准单元包括安装有晶片9并使其旋转的晶片旋转机构1，光线传感器4和5，其朝向旋转晶片9的边缘投射光并检测投影的数量未被晶片9切断的光和从线传感器的输出值检测晶片的偏心量和切口位置的运算单元7包括设置在晶片旋转机构1与晶片9之间的遮光板3，线传感器来模拟晶片9，并且用于检测和校正线传感器的光检测量的变化;以及移动机构6，其相对于遮光板3直线地移动线传感器。版权所有（C））2010，JPO＆INPIT

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