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1. 发明专利

JP2014038888A Mini-environment device, and inner atmosphere replacement method of the same 审中-公开
标题翻译：微型环境设备及其内部大气替代方法
公开(公告)号：JP2014038888A
公开(公告)日：2014-02-27
申请号：JP2012178936
申请日：2012-08-10
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： ONO KAZUYUKI , HIRAYAMA FUMIHIKO
IPC分类号： H01L21/677 , B65G49/00
摘要： PROBLEM TO BE SOLVED: To make it possible to rapidly stabilize fluctuation in an atmosphere and suppress a use amount of a substitutional gas, while making it possible to consider a yield of wafers exposed to an atmosphere out of a threshold.SOLUTION: A mini-environment device comprises: a load port for opening/closing a cover of a closed vessel accommodating a wafer to retract the wafer from a conveyance path for the wafer; a conveyance robot for conveying the wafer from the closed vessel to a processing chamber for processing the wafer; a fan filter unit for cleaning a conveyance region for the wafer; a supply port for supplying a gas except the air by which an atmosphere in the device is replaced; and switching means which has a duct for circulating the atmosphere in the device inside the device and an exhaust port for ejecting the atmosphere outside the device, and switches a passage to the duct and the exhaust port.
摘要翻译：要解决的问题：为了使得可以快速稳定大气中的波动并抑制取代气体的使用量，同时可以考虑暴露于大气中的晶片的产量从阈值开始。解决方案：环境装置包括：负载端口，用于打开/关闭容纳晶片的封闭容器的盖子，以从晶片的输送路径缩回晶片; 用于将晶片从密闭容器输送到用于处理晶片的处理室的输送机器人; 用于清洁晶片的输送区域的风扇过滤器单元; 用于供应除了更换设备中的气氛的空气之外的气体的供给口; 以及切换装置，其具有用于使装置内部的装置中的气氛循环的管道和用于在装置外部喷射气氛的排气口，并且将通道切换到管道和排气口。

2. 发明专利

JP2014036284A Printing method of instrumental operator's console and plant monitoring control system 审中-公开
标题翻译：仪器操作员和工厂监控系统的打印方法
公开(公告)号：JP2014036284A
公开(公告)日：2014-02-24
申请号：JP2012175562
申请日：2012-08-08
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： SATO NOBUYUKI
IPC分类号： H04N1/46 , B41J5/30 , G09G5/00 , G09G5/02 , G09G5/36 , H04N1/60
摘要： PROBLEM TO BE SOLVED: To make it possible to perform black-and-white reverse printing with simple and high definition picture quality even if graphic screen is reversed in black-and-white for execution of operation monitoring of a plant, efficiently perform high definition and high picture quality printing, and obtain high reliability and high quality of a product.SOLUTION: In a printing method of an instrumental operator's console according to the invention, in order to solve the above-mentioned problem, an instrumental operator's console is connected with a plant controller comprising a processing device and a process input and output interface via a communication line, and when a screen used for operation monitoring displayed on a graphic screen of the instrumental operator's console for operating and monitoring a control state of the plant controller is printed by a printer according to an application or a purpose, if a background color of the graphic screen is black whereas a display color is white and printing is performed by reversing this black-and-white, the printing is performed after execution of color adjustment to screen correction by anti-aliasing.
摘要翻译：要解决的问题：即使图形画面以黑白方式反转以执行工厂的操作监视，使得可以以简单和高清晰图像质量进行黑白反转打印，有效地执行高清晰度和高画质打印，并获得高可靠性和高质量的产品。解决方案：在根据本发明的仪器操作员控制台的打印方法中，为了解决上述问题，仪器操作员控制台与工厂控制器，其包括经由通信线路的处理装置和过程输入和输出接口，并且当用于操作监视的屏幕被显示在仪表操作员控制台的图形屏幕上以用于操作和监视工厂控制器的控制状态时被打印通过打印机根据应用或目的，如果图形屏幕的背景颜色是黑色而disp 彩色为白色，通过反转该黑白进行打印，在通过抗锯齿进行颜色调整到屏幕校正后进行打印。

3. 发明专利

JP2012231355A Interface module 审中-公开
标题翻译：接口模块
公开(公告)号：JP2012231355A
公开(公告)日：2012-11-22
申请号：JP2011099011
申请日：2011-04-27
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： YOKOSE YOSHIKUNI
IPC分类号： H04L12/46
摘要： PROBLEM TO BE SOLVED: To prevent one sequence control network from performing sequence control on the basis of incorrect data even when a communication error occurs between the other sequence control network and an interface module, in the interface module which connects the two sequence control networks having different data management methods, respectively.SOLUTION: In the interface module, transmission data for the time of a communication error which is transmitted to sequence control networks and a data transmission sequence for transmitting the transmission data to the sequence control networks are provided (S1, S2); it is determined whether or not a communication error occurs between the interface module and the sequence control networks (S3); and the transmission data to be transmitted to one sequence control network is transmitted to the one sequence control network according to the data transmission sequence to the one sequence control network when a communication error occurs between the interface module and the other sequence control network (S6).
摘要翻译：要解决的问题：为了防止一个序列控制网络即使在其他序列控制网络和接口模块之间发生通信错误的情况下也基于不正确的数据执行序列控制，在连接两个序列的接口模块中控制网络分别具有不同的数据管理方法。解决方案：在接口模块中，提供发送到顺序控制网络的通信错误时间的发送数据和用于将发送数据发送到顺序控制网络的数据发送序列（S1，S2）。确定接口模块和顺序控制网络之间是否发生通信错误（S3）; 并且当在接口模块和其它顺序控制网络之间发生通信错误时，要发送到一个序列控制网络的传输数据被传送到一个序列控制网络，该序列控制网络根据到一个序列控制网络的数据传输序列（S6）。版权所有（C）2013，JPO＆INPIT

4. 发明专利

JP2012231041A Substrate carrier 审中-公开
标题翻译：基板载体
公开(公告)号：JP2012231041A
公开(公告)日：2012-11-22
申请号：JP2011099000
申请日：2011-04-27
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： ITO TAKANORI
IPC分类号： H01L21/68 , B25J13/08
摘要： PROBLEM TO BE SOLVED: To provide a substrate carrier capable of detecting an angular error when a θ axis of a carrier robot rotates, with a function of correcting angle of the θ axis based on the detected angular error being provided.SOLUTION: The substrate carrier includes a carrier robot 2 which has an arm 13 to carry a substrate 7, and an opening 8 for carrying the substrate 7 to the outside. The carrier robot 2 rotates the arm 13 using a θ axis motor and expands/contracts the arm 13 using an R axis motor 110. The frame of the opening 8 is provided with detection sensors 4 and 4' which project sensor light to a photodetector from a projector. During the process in which the carrier robot 2 expands/contracts the arm 13 for carrying the substrate 7 through the opening 8, rotational angles of the R axis motor 110 at the time when the substrate 7 starts shielding the sensor light of the detection sensors 4 and 4' and at the time when the detection sensors 4 and 4' restart receiving light after completion of shielding of sensor light are used to acquire an angular error α which is a difference between the rotational angle of the θ axis motor and that of the arm 13.
摘要翻译：要解决的问题：提供一种能够检测载体机器人的θ轴旋转时的角度误差的基板载体，具有基于检测到的角度误差来校正θ轴的角度的功能。解决方案：衬底载体包括具有用于承载衬底7的臂13和用于将衬底7承载到外部的开口8的载体机器人2。托架机器人2使用θ轴马达使臂13旋转，并且使用R轴马达110使臂13伸展/收缩。开口8的框架设置有检测传感器4,4'，其将传感器光投射到光电检测器一台投影机在载体机器人2通过开口8膨胀/收缩用于承载基板7的臂13的过程中，当基板7开始屏蔽检测传感器4的传感器光时，R轴马达110的旋转角度和4'，并且当检测传感器4和4'重新开始传感器光的屏蔽完成后的接收光被用于获取作为θ轴电动机的旋转角度与θ轴电机的旋转角度之间的差的角度误差α （C）2013，JPO＆INPIT

5. 发明专利

JP2012220252A Fluid level measuring device of solenoid coil type 审中-公开
标题翻译：电磁线圈类型的流体液位测量装置
公开(公告)号：JP2012220252A
公开(公告)日：2012-11-12
申请号：JP2011083745
申请日：2011-04-05
申请人： Hitachi Ltd , Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ , 株式会社日立製作所
发明人： TAKASAKI TATSURO , YATABE KOJI , HARA ISAO , AKAHIRA TOSHIRO
IPC分类号： G01F23/62
CPC分类号： G01F23/72 , G01F23/0038 , G01F25/0061
摘要： PROBLEM TO BE SOLVED: To provide a fluid level measuring device requiring no take-out pipe, capable of accurately measuring the level of fluid accommodated in a tank for a long time without use of a take-out pipe for taking a fluid out from the tank.SOLUTION: A balance pipe 41 have no take-out pipe. The outside of the balance pipe 41 is wound with a solenoid coil 45. A float 46 internally including a magnetic material 47 is disposed inside the solenoid coil 45. The surface of the float 46 is shrouded with a cover 59 of metal or the like for preventing the fluid or hydrogen from invading from outside. The float 46 moves in response to the level of fluid accommodated in the balance pipe 41, so that the inductance of the solenoid coil 45 changes at the same time. The measurement of the inductance of the solenoid coil 45 allows the level of fluid in the balance pipe 41 to be measured without use of a take-out pipe.
摘要翻译：要解决的问题：提供一种不需要取出管的液位测量装置，其能够在不使用用于吸取流体的取出管的情况下长时间地精确地测量容纳在罐中的流体的水平从坦克出来
解决方案：平衡管41没有取出管。平衡管41的外侧用螺线管线圈45卷绕。螺线管线圈45的内部配置有内部包括磁性材料47的浮子46.浮子46的表面覆盖着金属等的盖59，防止流体或氢气从外部侵入。浮子46响应于容纳在平衡管41中的流体的水平而移动，使得螺线管线圈45的电感同时变化。螺线管线圈45的电感的测量允许在不使用取出管的情况下测量平衡管41中的流体的水平。版权所有（C）2013，JPO＆INPIT

6. 发明专利

JP2012116647A Local cleaning transfer device 审中-公开
标题翻译：本地清洁传送装置
公开(公告)号：JP2012116647A
公开(公告)日：2012-06-21
申请号：JP2010269967
申请日：2010-12-03
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： OTSUKI TAKAYUKI
IPC分类号： B65G49/00 , F24F7/06 , H01L21/677
摘要： PROBLEM TO BE SOLVED: To provide a local cleaning transfer device capable of maintaining a flow of a down flow without increasing an air capacity of a fan filter unit and exhibiting the performance of high local cleanness, suppressing the swirl-up of a foreign matter etc.SOLUTION: A substrate conveying robot 103 can move in a reciprocating manner. When moved to the position of a solid line 202, an opening amount adjusting plate 402 of an opening amount adjusting mechanism A provided on the side surface of the local cleaning transfer device 101 is operated to open an opening 402 so that air pushed by the substrate conveying robot 103 does not hit the side surface and is not swirled up, but discharged to the outside as shown by arrows 403, 404, 405, and 406. When the substrate conveying robot 103 moves away, the opening 401 is closed and the inflow of the air from the outside is prevented.
摘要翻译：要解决的问题：提供一种能够在不增加风扇过滤器单元的空气容量的同时保持下流的流动并且表现出高的局部清洁度的局部清洁转移装置，从而抑制了异物等。解决方案：基板输送机械手103可以往复运动。当移动到实线202的位置时，设置在局部清洁转印装置101的侧表面上的开口量调节机构A的开口量调节板402被操作以打开开口402，使得被基板推动的空气传送机器人103不会碰到侧面并且不会旋转，而是如箭头403,404,405和406所示排出到外部。当基板输送机器人103移开时，开口401被关闭并且流入防止外面的空气流出。版权所有（C）2012，JPO＆INPIT

7. 发明专利

JP2011253476A Drive operation history collection system 审中-公开
标题翻译：驱动操作历史采集系统
公开(公告)号：JP2011253476A
公开(公告)日：2011-12-15
申请号：JP2010128433
申请日：2010-06-04
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： KAWAMURA YUKIO
IPC分类号： G05B23/02
摘要： PROBLEM TO BE SOLVED: To provide a drive operation history collection system for allowing process data, alarm event data, and monitoring/operation history of an operator to be time serially stored in association with one another to a distributed computer control system (DCS) and to be displayed.SOLUTION: A drive operation history collection system 108 connected to a distributed computer control system 109 for controlling a plant includes an information collection part and an information storage part for collecting and storing the process data and alarm event data, display picture information and video information of a monitor 102 of the distributed computer control system time serially and synchronized. It also includes an operation processing part for inputting all or a part of arbitrary data or information among the process data, alarm event data, display picture information, video information, and operation information stored to the information storage part, extracting data or information on the basis of an extraction condition, and displaying it to the display device synchronized with the display device.
摘要翻译：要解决的问题：提供一种驱动操作历史收集系统，用于允许操作者的过程数据，警报事件数据和监视/操作历史被相继地被时间序列地存储到分布式计算机控制系统（ DCS）并显示。解决方案：连接到用于控制设备的分布式计算机控制系统109的驱动器操作历史收集系统108包括：信息收集部分和用于收集和存储过程数据和报警事件数据的信息收集部分和显示图像信息; 分布式计算机控制系统的监视器102的视频信息被连续和同步。它还包括一个操作处理部分，用于输入处理数据，报警事件数据，显示图像信息，视频信息和存储在信息存储部分中的操作信息之间的任意数据或信息的全部或部分，提取关于提取条件的基础，并将其显示到与显示装置同步的显示装置。版权所有（C）2012，JPO＆INPIT

8. 发明专利

JP2011125967A Hand for wafer conveying robot, wafer conveying robot, and wafer conveying device 审中-公开
标题翻译：手机输送机器，输送机器，输送装置
公开(公告)号：JP2011125967A
公开(公告)日：2011-06-30
申请号：JP2009287180
申请日：2009-12-18
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： KOBAYASHI TOMOKAZU , MATSUMURA YASUHIDE , ONO KOJI , OKI YOSUKE , SHIBAYAMA KEI
IPC分类号： B25J15/06 , H01L21/677
摘要： PROBLEM TO BE SOLVED: To provide a hand for conveying a wafer, reduced in size and weight, selecting the optimum sucking position free from causing a deflection and displacement of the wafer, and holding the wafer with different diameters so as to convey the wafer to a destination position, even with one hand.
SOLUTION: The hand for a wafer conveying robot is attached to an arm of the wafer conveying robot that conveys the wafers, and equipped with forks provided with vacuum sucking holes for sucking and holding the wafer. The forks are provided spinnably about the longitudinal direction of the forks. The upper surfaces constitute holding surfaces holding the wafer. Each holding surface is provided with the at least one vacuum sucking hole at a different position.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了提供用于输送晶片的手，减小尺寸和重量，选择最佳吸取位置不会导致晶片的偏转和位移，并且保持具有不同直径的晶片以便传送晶圆到目标位置，即使用一只手。解决方案：用于晶片输送机器人的手安装在输送晶片的晶片输送机器人的臂上，并配备有设置有用于吸取和保持晶片的真空吸孔的叉。叉子围绕叉子的纵向方向可旋转地设置。上表面构成保持晶片的保持表面。每个保持表面在不同位置处设置有至少一个真空吸孔。版权所有（C）2011，JPO＆INPIT

9. 发明专利

JP2011042002A Wafer conveying robot and wafer conveying device using wafer conveying robot 审中-公开
标题翻译：使用传送机器的波浪输送机器人和波浪输送装置
公开(公告)号：JP2011042002A
公开(公告)日：2011-03-03
申请号：JP2009190987
申请日：2009-08-20
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： KAMEZAWA RIKIYA , TANABE OSAMU
IPC分类号： B25J19/00 , H01L21/677
摘要： PROBLEM TO BE SOLVED: To provide a wafer conveying robot which is strong to noise influence at a wiring position where a wiring work is difficult in the wafer conveying robot and can improve a wiring work efficiency, and to provide a wafer-conveying device which uses the robot.
SOLUTION: In the wafer-conveying robot including an arm for gripping a wafer, the robot body having a turning and driving motor for supporting the arm to turn and drive the arm therein and an expanding and driving motor for expanding and driving the arm, and a traveling means for moving the robot body, a turning wiring part which passes and is wired in the periphery of the turning and driving motor in the robot body for transmitting a signal used for driving the arm is provided with a flexible printed circuit board to which a shield processing is applied.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种晶片输送机器人，其在晶片输送机器人中难以进行布线工作的布线位置处具有强的噪声影响，并且可以提高布线工作效率，并且提供晶片输送使用机器人的设备。解决方案：在包括用于夹持晶片的臂的晶片输送机器人中，机器人主体具有用于支撑臂以转动并驱动臂的转动和驱动电机，以及用于扩展和驱动臂和用于移动机器人主体的移动装置设置有柔性印刷电路，该转动布线部通过并布线在机器人主体中的转动和驱动马达的周围，用于传送用于驱动臂的信号应用屏蔽处理的板。版权所有（C）2011，JPO＆INPIT

10. 发明专利

JP2011023562A Substrate id reading mechanism, substrate carrier using the same and substrate id reading method 审中-公开
标题翻译：基板ID读取机构，使用其的基板载体和基板ID读取方法
公开(公告)号：JP2011023562A
公开(公告)日：2011-02-03
申请号：JP2009167515
申请日：2009-07-16
申请人： Hitachi High-Tech Control Systems Corp , 株式会社日立ハイテクコントロールシステムズ
发明人： SUZUKI RYUICHI , KOMATSU KENICHI , TAUCHI KAZUHIRO
IPC分类号： H01L21/02 , H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide an aligner apparatus which can read a substrate ID quickly and accurately and is not dependent on the position of a substrate and the state of the substrate surface.
SOLUTION: A substrate ID reading device which reads the substrate ID, provided on the surface of the substrate and an aligner which measures the eccentricity of the substrate at the substrate transfer and performs the alignment of the substrate are equipped. When the alignment, measuring the eccentricity of the substrate, in the substrate ID reading mechanism which reads the substrate ID, the substrate ID reading device is configured, so that it calculates the position of the substrate ID based on the eccentricity of the substrate; extracts a readable condition of the substrate ID among a plurality of ID readable conditions established beforehand, based on the calculated position of the substrate ID; and reads the substrate ID using the extracted readable condition of the substrate ID.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种可以快速且准确地读取衬底ID并且不依赖于衬底的位置和衬底表面的状态的对准器装置。解决方案：设置读取设置在基板表面上的基板ID的基板ID读取装置和测量基板转印时的基板的偏心并执行基板的对准的对准器。当测量衬底的偏心度的对准时，在读取衬底ID的衬底ID读取机构中，配置衬底ID读取装置，使得其基于衬底的偏心度计算衬底ID的位置; 基于计算出的基板ID的位置，提取事先建立的多个ID可读条件中的基板ID的可读条件; 并使用提取的衬底ID的可读条件读取衬底ID。版权所有（C）2011，JPO＆INPIT

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