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热词
    • 3. 发明授权
    • Semiconductor device and method for manufacturing the same
    • 半导体装置及其制造方法
    • US08258582B2
    • 2012-09-04
    • US13182993
    • 2011-07-14
    • Hisashi OgawaYoshihiro Mori
    • Hisashi OgawaYoshihiro Mori
    • H01L29/76H01L29/94
    • H01L21/28088H01L21/823842H01L21/82385H01L29/4966H01L29/517H01L29/665H01L29/6659H01L29/7833
    • A semiconductor device including a first transistor of a first conductivity type provided on a first active region of a semiconductor region, and a second transistor of a second conductivity type provided on a second active region of the semiconductor region. The first transistor includes a first gate insulating film and a first gate electrode, the first gate insulating film contains a high-k material and a first metal, and the first gate electrode includes a lower conductive film, a first conductive film and a first silicon film. The second transistor includes a second gate insulating film and a second gate electrode, the second gate insulating film contains a high-k material and a second metal, and the second gate electrode includes a second conductive film made of the same material as the first conductive film, and a second silicon film.
    • 一种半导体器件,包括设置在半导体区域的第一有源区上的第一导电类型的第一晶体管和设置在半导体区域的第二有源区上的第二导电类型的第二晶体管。 第一晶体管包括第一栅极绝缘膜和第一栅电极,第一栅极绝缘膜包含高k材料和第一金属,并且第一栅电极包括下导电膜,第一导电膜和第一硅 电影。 第二晶体管包括第二栅极绝缘膜和第二栅电极,第二栅极绝缘膜包含高k材料和第二金属,第二栅极包括由与第一导电性材料相同的材料制成的第二导电膜 膜和第二硅膜。