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    • 5. 发明授权
    • Plasma processing method
    • 等离子体处理方法
    • US08404595B2
    • 2013-03-26
    • US11860788
    • 2007-09-25
    • Masanobu HondaManabu SatoYoshiki Igarashi
    • Masanobu HondaManabu SatoYoshiki Igarashi
    • H01L23/302H01L21/461B23P15/00C03C25/00C03C15/00C03C25/68C23F1/00C23F3/00B44C1/22
    • H01L21/467H01J37/32091H01J37/32165H01L21/31116
    • A plasma processing method for processing a target substrate uses a plasma processing apparatus which includes a vacuum evacuable processing vessel for accommodating the target substrate therein, a first electrode disposed in the processing vessel and connected to a first RF power supply for plasma generation and a second electrode disposed to face the first electrode. The method includes exciting a processing gas containing fluorocarbon in the processing vessel to generate a plasma while applying a negative DC voltage having an absolute value ranging from about 100 V to 1500 V or an RF power of a frequency lower than about 4 MHz to the second electrode. The target layer is etched by the plasma, thus forming recesses on the etching target layer based on the pattern of the resist layer.
    • 用于处理目标基板的等离子体处理方法使用等离子体处理装置,该等离子体处理装置包括用于容纳目标基板的真空可排除处理容器,设置在处理容器中的第一电极,并连接到用于等离子体产生的第一RF电源, 设置成面对第一电极的电极。 该方法包括在处理容器中激发含有碳氟化合物的处理气体,以产生等离子体,同时施加绝对值范围从约100V至1500V或低于约4MHz的RF功率的负DC电压至第二 电极。 通过等离子体蚀刻目标层,由此基于抗蚀剂层的图案在蚀刻目标层上形成凹部。
    • 9. 发明授权
    • Laminate type band pass filter and diplexer using the same
    • 层叠型带通滤波器和使用其的双工器
    • US07902941B2
    • 2011-03-08
    • US12111395
    • 2008-04-29
    • Syouji OnoTetsuo SuehiroJyunichi IchikawaKeiji TakagiManabu Sato
    • Syouji OnoTetsuo SuehiroJyunichi IchikawaKeiji TakagiManabu Sato
    • H01P1/203H01P1/213
    • H01P1/20345
    • It is possible to generate an additionally attenuation pole in a laminate type band pass filter without adding an attenuation circuit and improve the attenuation characteristics of the laminate type band pass filter by independently controlling the frequencies of the attenuation poles. A diplexer is realized by using at least such a filter. The laminate type band pass filter includes a plurality of first resonators adapted to resonate in a predetermined pass band and arranged in a laminate, the first resonators being mutually electromagnetic field coupled, each of the first resonators having a first inductor conductor, a second inductor conductor and a conductor to be capacitive-coupled to a grounding conductor, the second inductor conductor and the conductor to be capacitive-coupled to the grounding conductor forming a second serial resonator in each of the first resonators, the notch frequency of the second serial resonator being set in a frequency band higher than the resonance frequency band of the first resonator.
    • 通过独立地控制衰减极的频率,可以在不添加衰减电路的层叠型带通滤波器中产生额外的衰减极,并提高层叠型带通滤波器的衰减特性。 通过使用至少这种滤波器来实现双工器。 层叠型带通滤波器包括多个第一谐振器,其适于以预定通带谐振并且布置在层压体中,第一谐振器是相互电磁场耦合的,每个第一谐振器具有第一电感器导体,第二电感器导体 以及电容耦合到接地导体的导体,所述第二电感器导体和所述导体将被电容耦合到所述接地导体,在所述第一谐振器中的每一个中形成第二串联谐振器,所述第二串联谐振器的陷波频率为 设置在比第一谐振器的谐振频带高的频带中。