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    • 10. 发明授权
    • Method and apparatus for breaking semiconductor substrate, method for breaking solar cell and method for fabrication of solar cell module
    • 用于破坏半导体衬底的方法和装置,用于破坏太阳能电池的方法和太阳能电池模块的制造方法
    • US08034653B2
    • 2011-10-11
    • US11964405
    • 2007-12-26
    • Hiroyuki Kannou
    • Hiroyuki Kannou
    • H01L21/00B26F3/00B65H35/00
    • H01L31/18B26F3/002H01L21/67092Y10T225/325Y10T225/371
    • A method and apparatus for breaking a semiconductor substrate along a predetermined area over which a split groove is formed. The breaking apparatus includes a table for placing a portion of the semiconductor substrate inside the predetermined area and a breaking blade being operable to move downward from a position above the semiconductor substrate placed on the table to thereby compress a portion of the semiconductor substrate outside the predetermined area so that the semiconductor substrate is broken along the split groove. The predetermined area of the semiconductor substrate has at least a neighboring pair of sides intersecting at an angle of less than 180 degrees, and the breaking blade has a projection which, when the semiconductor substrate is broken, compresses a portion of the semiconductor substrate outside the one side so that the one side is compressed ahead of the other side.
    • 一种用于沿着形成有分裂槽的预定区域断开半导体衬底的方法和装置。 断开装置包括用于将半导体衬底的一部分放置在预定区域内的工作台,并且破坏刀片可操作以从放置在工作台上的半导体衬底上方的位置向下移动,从而将半导体衬底的一部分压缩在预定的 使得半导体衬底沿着分割槽断开。 半导体衬底的预定区域至少具有与小于180度的角度相交的相邻的一对侧面,并且所述断裂刀片具有突起,当所述半导体衬底断裂时,将所述半导体衬底的一部分压缩在所述半导体衬底的外部 一侧使得一侧在另一侧之前被压缩。