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    • 2. 发明授权
    • Trench gate type transistor
    • 沟槽型晶体管
    • US08242557B2
    • 2012-08-14
    • US12447820
    • 2008-09-26
    • Satoru ShimadaYoshikazu YamaokaKazunori FujitaTomonori Tabe
    • Satoru ShimadaYoshikazu YamaokaKazunori FujitaTomonori Tabe
    • H01L29/76
    • H01L29/7813H01L29/0653H01L29/0696H01L29/41741H01L29/41766H01L29/4236H01L29/42368H01L29/4238H01L29/66734H01L29/7809
    • The invention provides a trench gate type transistor in which the gate capacitance is reduced, the crystal defect is prevented and the gate breakdown voltage is enhanced. Trenches are formed in an N− type semiconductor layer. A uniformly thick silicon oxide film is formed on the bottom of each of the trenches and near the bottom, being round at corner portions. A silicon oxide film is formed on the upper portion of the sidewall of each of the trenches, which is thinner than the silicon oxide film and round at corner portions. Gate electrodes are formed from inside the trenches onto the outside thereof. The thick silicon oxide film reduces the gate capacitance, and the thin silicon oxide film on the upper portion provides good transistor characteristics. Furthermore, with the round corner portions, the crystal defect does not easily occur, and the gate electric field is dispersed to enhance the gate breakdown voltage.
    • 本发明提供一种沟槽栅型晶体管,其栅极电容减小,防止了晶体缺陷,提高了栅极击穿电压。 沟槽形成在N-型半导体层中。 在每个沟槽的底部和底部附近形成均匀厚的氧化硅膜,在角部处是圆形的。 在每个沟槽的侧壁的上部形成氧化硅膜,其比氧化硅膜薄并且在角部处圆形。 栅极电极从沟槽内部形成到其外部。 厚的氧化硅膜减小栅极电容,并且上部的薄氧化硅膜提供良好的晶体管特性。 此外,由于圆角部分不容易发生晶体缺陷,并且栅极电场被分散以提高栅极击穿电压。
    • 3. 发明授权
    • Manufacture method for photovoltaic module including inspection and repair
    • 光伏组件的制造方法包括检修
    • US07998760B2
    • 2011-08-16
    • US12728831
    • 2010-03-22
    • Tomonori Tabe
    • Tomonori Tabe
    • H01L21/66H01L21/00
    • H01L31/188H01L31/0512Y02E10/50Y10S136/29
    • After overlaying a conductive adhesive film and the wiring material on an electrode of a solar cell and temporarily fixing the wiring material to the solar cell by pressure bonding under first temperature/pressurizing condition, the quality of the temporarily fixed solar cell is inspected, a solar cell determined to be defective in the inspection step is removed and the defective solar cell is replaced with a non-defective solar cell. Then, the wiring material is temporarily fixed to the non-defective solar cell by pressure bonding the wiring material with the conductive adhesive film interposed therebetween, under the first temperature/pressurizing condition and the wiring materials are fixed to the solar cell by thermally setting the conductive adhesive film under second temperature condition to apply heat higher than the first temperature condition.
    • 在将导电性粘合膜和布线材料覆盖在太阳能电池的电极上并在第一温度/加压条件下通过压力接合将布线材料临时固定到太阳能电池上的情况下,检查暂时固定的太阳能电池的质量, 在检查步骤中确定为有缺陷的单元被去除,并且用无缺陷的太阳能电池替换有缺陷的太阳能电池。 然后,在第一温度/加压条件下,通过将布线材料与导电性粘合膜压接在一起而将布线材料暂时固定到无缺陷的太阳能电池,并且通过热定形来将布线材料固定到太阳能电池 导电胶膜在第二温度条件下施加高于第一温度条件的热量。