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1. 发明授权

US06761608B2 Plasma display panel suitable for high-quality display and production method 失效
标题翻译：等离子显示面板适用于高品质的显示和制作方法
公开(公告)号：US06761608B2
公开(公告)日：2004-07-13
申请号：US09964837
申请日：2001-09-26
申请人： Hiroyoshi Tanaka , Ryuichi Murai , Hideaki Yasui , Yoshiki Sasaki , Akira Shiokawa , Masatoshi Kudoh , Koichi Kotera , Masaki Aoki , Mitsuhiro Ohtani , Shigeo Suzuki , Kinzou Nonomura
发明人： Hiroyoshi Tanaka , Ryuichi Murai , Hideaki Yasui , Yoshiki Sasaki , Akira Shiokawa , Masatoshi Kudoh , Koichi Kotera , Masaki Aoki , Mitsuhiro Ohtani , Shigeo Suzuki , Kinzou Nonomura
IPC分类号： H01J926
CPC分类号： H01J11/12 , H01J9/02 , H01J11/38
摘要： A PDP does not suffer from dielectric breakdown even though a dielectric layer is thin, with the problems of conventional PDPs, such as cracks appearing in the glass substrates during the production of the PDP being avoided. To do so, the surface of silver electrodes of the PDP is coated with a 0.1-10 &mgr;m layer of a metallic oxide, on whose surface OH groups exist, such as ZnO, ZrO2, MgO, TiO2, Al2O3, and Cr2O3. The metallic oxide layer is then coated with the dielectric layer. It is preferable to form the metallic oxide layer with the CVD method. The surface of a metallic electrode can be coated with a metallic oxide, which is then coated with a dielectric layer. The dielectric layer can be made of a metallic oxide with a vacuum process method or the plasma thermal spraying method. The dielectric layer formed on electrodes with the CVD method is remarkably thin and flawless. When the dielectric layer is formed with the vacuum process method or the plasma spraying method, warping and cracks conventionally caused by baking the dielectric layer are prevented. Here, borosilicate glass including 6.5% or less by weight of alkali can be used as the glass substrate.
摘要翻译：即使电介质层较薄，PDP也不会受到电介质击穿，同时避免了在制造PDP期间在玻璃基板中出现的常规PDP的问题。为了这样做，PDP的银电极的表面涂覆有0.1-10μm的金属氧化物层，其表面上存在OH基团，例如ZnO，ZrO 2，MgO，TiO 2，Al 2 O 3和Cr 2 O 3。然后用电介质层涂覆金属氧化物层。优选用CVD法形成金属氧化物层。金属电极的表面可以涂覆有金属氧化物，然后涂覆有介电层。电介质层可以用真空处理方法或等离子体热喷涂方法由金属氧化物制成。用CVD法形成在电极上的电介质层非常薄且无瑕疵。当使用真空处理方法或等离子喷涂方法形成电介质层时，防止了通常由电介质层烘烤引起的翘曲和裂纹。这里可以使用包含6.5重量％以下的碱的硼硅酸盐玻璃作为玻璃基板。

2. 发明授权

US06419540B1 Plasma display panel suitable for high-quality display and production method 失效
标题翻译：等离子显示面板适用于高品质的显示和制作方法
公开(公告)号：US06419540B1
公开(公告)日：2002-07-16
申请号：US09965278
申请日：2001-09-26
申请人： Hiroyoshi Tanaka , Ryuichi Murai , Hideaki Yasui , Yoshiki Sasaki , Akira Shiokawa , Masatoshi Kudoh , Koichi Kotera , Masaki Aoki , Mitsuhiro Ohtani , Shigeo Suzuki , Kinzou Nonomura
发明人： Hiroyoshi Tanaka , Ryuichi Murai , Hideaki Yasui , Yoshiki Sasaki , Akira Shiokawa , Masatoshi Kudoh , Koichi Kotera , Masaki Aoki , Mitsuhiro Ohtani , Shigeo Suzuki , Kinzou Nonomura
IPC分类号： H01J902
CPC分类号： H01J11/12 , H01J9/02 , H01J11/38
摘要： A PDP does not suffer from dielectric breakdown though a dielectric layer is thin, with the problems of conventional PDPs, such as cracks appearing in the glass substrates during the production of the PDP being avoided. To do so, the surface of silver electrodes of the PDP is coated with a 0.1-10 &mgr;m layer of a metallic oxide, on whose surface OH groups exist, such as ZnO, ZrO2, MgO, TiO2, Al2O3, and Cr2O3. The metallic oxide layer is then coated with the dielectric layer. It is preferable to form the metallic oxide layer with the CVD method. The surface of a metallic electrode can be coated with a metallic oxide, which is then coated with a dielectric layer. The dielectric layer can be made of a metallic oxide with a vacuum process method or the plasma thermal spraying method. The dielectric layer formed on electrodes with the CVD method is remarkably thin and flawless. When the dielectric layer is formed with the vacuum process method or the plasma spraying method, warping and cracks conventionally caused by baking the dielectric layer are prevented. Here, borosilicate glass including 6.5% or less by weight of alkali can be used as the glass substrate.
摘要翻译：尽管电介质层较薄，PDP不会遭受电介质击穿，而在PDP的制造过程中出现玻璃基板中的裂纹等常规PDP的问题。为了这样做，PDP的银电极的表面涂覆有0.1-10μm的金属氧化物层，其表面上存在OH基团，例如ZnO，ZrO 2，MgO，TiO 2，Al 2 O 3和Cr 2 O 3。然后用电介质层涂覆金属氧化物层。优选用CVD法形成金属氧化物层。金属电极的表面可以涂覆有金属氧化物，然后涂覆有介电层。电介质层可以用真空处理方法或等离子体热喷涂方法由金属氧化物制成。用CVD法形成在电极上的电介质层非常薄且无瑕疵。当使用真空处理方法或等离子喷涂方法形成电介质层时，防止了通常由电介质层烘烤引起的翘曲和裂纹。这里可以使用包含6.5重量％以下的碱的硼硅酸盐玻璃作为玻璃基板。

3. 发明授权

US6160345A Plasma display panel with metal oxide layer on electrode 失效
标题翻译：等离子显示面板，电极上有金属氧化物层
公开(公告)号：US6160345A
公开(公告)日：2000-12-12
申请号：US979752
申请日：1997-11-26
申请人： Hiroyoshi Tanaka , Ryuichi Murai , Hideaki Yasui , Yoshiki Sasaki , Akira Shiokawa , Masatoshi Kudoh , Koichi Kotera , Masaki Aoki , Mitsuhiro Ohtani , Shigeo Suzuki , Kinzou Nonomura
发明人： Hiroyoshi Tanaka , Ryuichi Murai , Hideaki Yasui , Yoshiki Sasaki , Akira Shiokawa , Masatoshi Kudoh , Koichi Kotera , Masaki Aoki , Mitsuhiro Ohtani , Shigeo Suzuki , Kinzou Nonomura
IPC分类号： H01J17/49 , H01J1/90
CPC分类号： H01J11/12 , H01J9/02 , H01J11/38
摘要： A PDP does not suffer from dielectric breakdown even though a dielectric layer is thin, with the problems of conventional PDPs, such as cracks appearing in the glass substrates during the production of the PDP being avoided. To do so, the surface of silver electrodes of the PDP is coated with a 0.1-10 .mu.m layer of a metallic oxide on whose surface OH groups exist, such as ZnO, ZrO.sub.2, MgO, TiO.sub.2, Al.sub.2 O.sub.3, and Cr.sub.2 O.sub.3. The metallic oxide layer is then coated with the dielectric layer. It is preferable to form the metallic oxide layer with the CVD method. The surface of a metallic electrode can be coated with a metallic oxide, which is than coated with a dielectric layer. The dielectric layer can be made of a metallic oxide with a vacuum process method or the plasma thermal spraying method. The dielectric layer formed on electrodes with the CVD method is remarkably thin and flawless. When the dielectric layer is formed with the vacuum process method or the plasma spraying method, warping and cracks conventionally caused by baking the dielectric layer are prevented. Here, borosilicate glass including 6.5% or less by weight of alkali can be used as the glass substrate.
摘要翻译：即使电介质层较薄，PDP也不会受到电介质击穿，同时避免了在制造PDP期间在玻璃基板中出现的常规PDP的问题。为此，PDP的银电极的表面涂覆有其表面存在OH基的金属氧化物如ZnO，ZrO 2，MgO，TiO 2，Al 2 O 3和Cr 2 O 3的0.1-10μm层。然后用电介质层涂覆金属氧化物层。优选用CVD法形成金属氧化物层。金属电极的表面可以涂覆有被涂覆有介电层的金属氧化物。电介质层可以用真空处理方法或等离子体热喷涂方法由金属氧化物制成。用CVD法形成在电极上的电介质层非常薄且无瑕疵。当使用真空处理方法或等离子喷涂方法形成电介质层时，防止了通常由电介质层烘烤引起的翘曲和裂纹。这里可以使用包含6.5重量％以下的碱的硼硅酸盐玻璃作为玻璃基板。

4. 发明授权

US5993543A Method of producing plasma display panel with protective layer of an alkaline earth oxide 失效
公开(公告)号：US5993543A
公开(公告)日：1999-11-30
申请号：US890577
申请日：1997-07-09
申请人： Masaki Aoki , Hideo Torii , Eiji Fujii , Mitsuhiro Ohtani , Takashi Inami , Hiroyuki Kawamura , Hiroyoshi Tanaka , Ryuichi Murai , Yasuhisa Ishikura , Yutaka Nishimura , Katsuyoshi Yamashita
发明人： Masaki Aoki , Hideo Torii , Eiji Fujii , Mitsuhiro Ohtani , Takashi Inami , Hiroyuki Kawamura , Hiroyoshi Tanaka , Ryuichi Murai , Yasuhisa Ishikura , Yutaka Nishimura , Katsuyoshi Yamashita
IPC分类号： C23C16/40 , C30B23/00 , C30B29/16 , H01J9/02 , H01J9/20 , H01J9/24 , H01J9/38 , H01J11/12 , H01J11/14 , H01J11/22 , H01J11/24 , H01J11/26 , H01J11/28 , H01J11/34 , H01J11/36 , H01J11/38 , H01J11/40 , H01J11/42 , H01J11/44 , H01J11/48 , H01J11/50
CPC分类号： C23C16/404 , C23C16/403 , H01J11/12 , H01J11/38 , H01J11/40 , H01J11/50 , H01J9/02 , H01J2211/38 , H01J2211/40 , H01J2211/50 , Y10T117/1004 , Y10T117/1008
摘要： The first object of the present invention is to provide a PDP with improved panel brightness which is achieved by improving the efficiency in conversion from discharge energy to visible rays. The second object of the present invention is to provide a PDP with improved panel life which is achieved by improving the protecting layer protecting the dielectrics glass layer. To achieve the first object, the present invention sets the amount of xenon in the discharge gas to the range of 10% by volume to less than 100% by volume, and sets the charging pressure for the discharge gas to the range of 500 to 760 Torr which is higher than conventional charging pressures. With such construction, the panel brightness increases. Also, to achieve the second object, the present invention has, on the surface of the dielectric glass layer, a protecting layer consisting of an alkaline earth oxide with (100)-face or (110)-face orientation. The protecting layer, which may be formed by using thermal Chemical Vapor Deposition (CVD) method, plasma enhanced CVD method, or a vapor deposition method with irradiation of ion or electron beam, will have a high sputtering resistance and effectively protect the dielectrics glass layer. Such a protecting layer contributes to the improvement of the panel life.

5. 再颁专利

USRE41503E1 Method of producing plasma display panel with protective layer of an alkaline earth oxide 有权
标题翻译：制造具有碱土金属氧化物保护层的等离子体显示面板的方法
公开(公告)号：USRE41503E1
公开(公告)日：2010-08-17
申请号：US11437004
申请日：2006-05-18
申请人： Masaki Aoki , Hideo Torii , Eiji Fujii , Mitsuhiro Ohtani , Takashi Inami , Hiroyuki Kawamura , Hiroyoshi Tanaka , Ryuichi Murai , Yasuhisa Ishikura , Yutaka Nishimura , Katsuyoshi Yamashita , Yasuko Nishimura , Syunsuke Nishimura , Emi Kawahara
发明人： Masaki Aoki , Hideo Torii , Eiji Fujii , Mitsuhiro Ohtani , Takashi Inami , Hiroyuki Kawamura , Hiroyoshi Tanaka , Ryuichi Murai , Yasuhisa Ishikura , Yutaka Nishimura , Katsuyoshi Yamashita , Yasuko Nishimura , Syunsuke Nishimura , Emi Kawahara
IPC分类号： C30B29/16 , C30B23/00
CPC分类号： C23C16/404 , C23C16/403 , H01J9/02 , H01J11/12 , H01J11/38 , H01J11/40 , H01J11/50 , H01J2211/38 , H01J2211/40 , H01J2211/50 , Y10T117/1004 , Y10T117/1008
摘要： The first object of the present invention is to provide a PDP with improved panel brightness which is achieved by improving the efficiency in conversion from discharge energy to visible rays. The second object of the present invention is to provide a PDP with improved panel life which is achieved by improving the protecting layer protecting the dielectrics glass layer. To achieve the first object, the present invention sets the amount of xenon in the discharge gas to the range of 10% by volume to less than 100% by volume, and sets the charging pressure for the discharge gas to the range of 500 to 760 Torr which is higher than conventional charging pressures. With such construction, the panel brightness increases. Also, to achieve the second object, the present invention has, on the surface of the dielectric glass layer, a protecting layer consisting of an alkaline earth oxide with (100)-face or (110)-face orientation. The protecting layer, which may be formed by using thermal Chemical Vapor Deposition (CVD) method, plasma enhanced CVD method, or a vapor deposition method with irradiation of ion or electron beam, will have a high sputtering resistance and effectively protect the dielectrics glass layer. Such a protecting layer contributes to the improvement of the panel life.
摘要翻译：本发明的第一个目的是提供一种具有改进的面板亮度的PDP，其通过提高从放电能量到可见光的转换的效率来实现。本发明的第二个目的是提供一种具有改善面板寿命的PDP，其通过改进保护电介质玻璃层的保护层来实现。为了实现第一个目的，本发明将放电气体中的氙的量设定为10体积％至小于100体积％的范围，并将放电气体的充电压力设定在500至760的范围内高于常规充气压力的Torr。通过这样的结构，面板亮度增加。此外，为了实现第二个目的，本发明在电介质玻璃层的表面上具有由具有（100）面或（110）面取向的碱土金属氧化物构成的保护层。可以通过使用热化学气相沉积（CVD）法，等离子体增强CVD法或通过离子或电子束照射的气相沉积法形成的保护层将具有高溅射电阻并且有效地保护电介质玻璃层。这样的保护层有助于提高面板寿命。

6. 再颁专利

USRE40647E1 Method of producing plasma display panel with protective layer of an alkaline earth oxide 有权
公开(公告)号：USRE40647E1
公开(公告)日：2009-03-10
申请号：US09997988
申请日：2001-11-29
申请人： Masaki Aoki , Hideo Torii , Eiji Fujii , Mitsuhiro Ohtani , Takashi Inami , Hiroyuki Kawamura , Hiroyoshi Tanaka , Ryuichi Murai , Yasuhisa Ishikura , Yutaka Nishimura , Katsuyoshi Yamashita
发明人： Masaki Aoki , Hideo Torii , Eiji Fujii , Mitsuhiro Ohtani , Takashi Inami , Hiroyuki Kawamura , Hiroyoshi Tanaka , Ryuichi Murai , Yasuhisa Ishikura , Yutaka Nishimura , Katsuyoshi Yamashita
IPC分类号： C30B29/16 , C30B23/00
CPC分类号： C23C16/404 , C23C16/403 , H01J9/02 , H01J11/12 , H01J11/38 , H01J11/40 , H01J11/50 , H01J2211/38 , H01J2211/40 , H01J2211/50 , Y10T117/1004 , Y10T117/1008
摘要： The first object of the present invention is to provide a PDP with improved panel brightness which is achieved by improving the efficiency in conversion from discharge energy to visible rays. The second object of the present invention is to provide a PDP with improved panel life which is achieved by improving the protecting layer protecting the dielectrics glass layer. To achieve the first object, the present invention sets the amount of xenon in the discharge gas to the range of 10% by volume to less than 100% by volume, and sets the charging pressure for the discharge gas to the range of 500 to 760 Torr which is higher than conventional charging pressures. With such construction, the panel brightness increases. Also, to achieve the second object, the present invention has, on the surface of the dielectric glass layer, a protecting layer consisting of an alkaline earth oxide with (100)-face or (110)-face orientation. The protecting layer, which may be formed by using thermal Chemical Vapor Deposition (CVD) method, plasma enhanced CVD method, or a vapor deposition method with irradiation of ion or electron beam, will have a high sputtering resistance and effectively protect the dielectrics glass layer. Such a protecting layer contributes to the improvement of the panel life.

7. 发明授权

US5770921A Plasma display panel with protective layer of an alkaline earth oxide 失效
标题翻译：带有碱土金属氧化物保护层的等离子显示面板
公开(公告)号：US5770921A
公开(公告)日：1998-06-23
申请号：US766030
申请日：1996-12-16
申请人： Masaki Aoki , Hideo Torii , Eiji Fujii , Mitsuhiro Ohtani , Takashi Inami , Hiroyuki Kawamura , Hiroyoshi Tanaka , Ryuichi Murai , Yasuhisa Ishikura , Yutaka Nishimura , Katsuyoshi Yamashita
发明人： Masaki Aoki , Hideo Torii , Eiji Fujii , Mitsuhiro Ohtani , Takashi Inami , Hiroyuki Kawamura , Hiroyoshi Tanaka , Ryuichi Murai , Yasuhisa Ishikura , Yutaka Nishimura , Katsuyoshi Yamashita
IPC分类号： C23C16/40 , C30B23/00 , C30B29/16 , H01J9/02 , H01J9/20 , H01J9/24 , H01J9/38 , H01J11/12 , H01J11/14 , H01J11/22 , H01J11/24 , H01J11/26 , H01J11/28 , H01J11/34 , H01J11/36 , H01J11/38 , H01J11/40 , H01J11/42 , H01J11/44 , H01J11/48 , H01J11/50 , H01J17/00 , H01J61/00
CPC分类号： C23C16/404 , C23C16/403 , H01J11/12 , H01J11/38 , H01J11/40 , H01J11/50 , H01J9/02 , H01J2211/38 , H01J2211/40 , H01J2211/50 , Y10T117/1004 , Y10T117/1008
摘要： The first object of the present invention is to provide a PDP with improved panel brightness which is achieved by improving the efficiency in conversion from discharge energy to visible rays. The second object of the present invention is to provide a PDP with improved panel life which is achieved by improving the protecting layer protecting the dielectrics glass layer. To achieve the first object, the present invention sets the amount of xenon in the discharge gas to the range of 10% by volume to less than 100% by volume, and sets the charging pressure for the discharge gas to the range of 500 to 760Torr which is higher than conventional charging pressures. With such construction, the panel brightness increases. Also, to achieve the second object, the present invention has, on the surface of the dielectrics glass layer, a protecting layer consisting of an alkaline earth oxide with (100)-face or (110)-face orientation. The protecting layer, which may be formed by using thermal Chemical Vapor Deposition (CVD) method, plasma enhanced CVD method, or a vapor deposition method with irradiation of ion or electron beam, will have a high sputtering resistance and effectively protect the dielectrics glass layer. Such a protecting layer contributes to the improvement of the panel life.
摘要翻译：本发明的第一个目的是提供一种具有改进的面板亮度的PDP，其通过提高从放电能量到可见光的转换的效率来实现。本发明的第二个目的是提供一种具有改善面板寿命的PDP，其通过改进保护电介质玻璃层的保护层来实现。为了实现第一个目的，本发明将放电气体中的氙的量设定为10体积％至小于100体积％的范围，并将放电气体的充电压力设定在500〜760Torr的范围内这高于常规的充气压力。通过这样的结构，面板亮度增加。此外，为了实现第二目的，本发明在电介质玻璃层的表面上具有由具有（100）面或（110）面取向的碱土金属氧化物构成的保护层。可以通过使用热化学气相沉积（CVD）法，等离子体增强CVD法或通过离子或电子束照射的气相沉积法形成的保护层将具有高溅射电阻并且有效地保护电介质玻璃层。这样的保护层有助于提高面板寿命。

8. 再颁专利

USRE40871E1 Method of producing plasma display panel with protective layer of an alkaline earth oxide 有权
标题翻译：制造具有碱土金属氧化物保护层的等离子体显示面板的方法
公开(公告)号：USRE40871E1
公开(公告)日：2009-08-18
申请号：US09997536
申请日：2001-11-29
申请人： Masaki Aoki , Hideo Torii , Eiji Fujii , Mitsuhiro Ohtani , Takashi Inami , Hiroyuki Kawamura , Hiroyoshi Tanaka , Ryuichi Murai , Yasuhisa Ishikura , Yutaka Nishimura , Katsuyoshi Yamashita
发明人： Masaki Aoki , Hideo Torii , Eiji Fujii , Mitsuhiro Ohtani , Takashi Inami , Hiroyuki Kawamura , Hiroyoshi Tanaka , Ryuichi Murai , Yasuhisa Ishikura , Yutaka Nishimura , Katsuyoshi Yamashita
IPC分类号： C30B29/16
CPC分类号： C23C16/404 , C23C16/403 , H01J9/02 , H01J11/12 , H01J11/38 , H01J11/40 , H01J11/50 , H01J2211/38 , H01J2211/40 , H01J2211/50 , Y10T117/1004 , Y10T117/1008
摘要： The first object of the present invention is to provide a PDP with improved panel brightness which is achieved by improving the efficiency in conversion from discharge energy to visible rays. The second object of the present invention is to provide a PDP with improved panel life which is achieved by improving the protecting layer protecting the dielectrics glass layer. To achieve the first object, the present invention sets the amount of xenon in the discharge gas to the range of 10% by volume to less than 100% by volume, and sets the charging pressure for the discharge gas to the range of 500 to 760 Torr which is higher than conventional charging pressures. With such construction, the panel brightness increases. Also, to achieve the second object, the present invention has, on the surface of the dielectric glass layer, a protecting layer consisting of an alkaline earth oxide with (100)-face or (110)-face orientation. The protecting layer, which may be formed by using thermal Chemical Vapor Deposition (CVD) method, plasma enhanced CVD method, or a vapor deposition method with irradiation of ion or electron beam, will have a high sputtering resistance and effectively protect the dielectrics glass layer. Such a protecting layer contributes to the improvement of the panel life.
摘要翻译：本发明的第一个目的是提供一种具有改进的面板亮度的PDP，其通过提高从放电能量到可见光的转换的效率来实现。本发明的第二个目的是提供一种具有改善面板寿命的PDP，其通过改进保护电介质玻璃层的保护层来实现。为了实现第一个目的，本发明将放电气体中的氙的量设定为10体积％至小于100体积％的范围，并将放电气体的充电压力设定在500至760的范围内高于常规充气压力的Torr。通过这样的结构，面板亮度增加。此外，为了实现第二个目的，本发明在电介质玻璃层的表面上具有由具有（100）面或（110）面取向的碱土金属氧化物构成的保护层。可以通过使用热化学气相沉积（CVD）法，等离子体增强CVD法或通过离子或电子束照射的气相沉积法形成的保护层将具有高溅射电阻并且有效地保护电介质玻璃层。这样的保护层有助于提高面板寿命。

9. 发明授权

US06328621B2 Electron gun, CRT with electron gun 失效
标题翻译：电子枪，CRT电子枪
公开(公告)号：US06328621B2
公开(公告)日：2001-12-11
申请号：US09845302
申请日：2001-05-01
申请人： Masatoshi Kudoh , Ryuichi Murai , Mitsuhiro Ohtani , Katuyoshi Yamashita , Hideharu Ohmae , Masahiko Konda
发明人： Masatoshi Kudoh , Ryuichi Murai , Mitsuhiro Ohtani , Katuyoshi Yamashita , Hideharu Ohmae , Masahiko Konda
IPC分类号： H01J2962
CPC分类号： H01J9/02 , H01J9/42 , H01J2229/48
摘要： Method and apparatus for manufacturing an electron gun. A beam spot coefficient is obtained from an electrostatic lens magnification and a spherical aberration coefficient of a set resistance distribution. Then, a first process loop is executed to select another resistance distribution that provides an approximate minimum value of the beam spot coefficient. It is then determined whether the beam spot coefficient is an approximate minimum value. The first process loop is repeatedly executed until the beam spot coefficient is determined to be equal to the approximate minimum value. At this point, a second process loop is executed to confirm the minimum value of the beam spot coefficient using an aberration-independent function that is dependent upon the electrostatic lens magnification and is not dependent upon the spherical aberration coefficient. Processing returns to the first process loop using still another resistance distribution as a selected resistance distribution when the beam spot coefficient is not the approximate minimum value.
摘要翻译：电子枪制造方法及装置。从静电透镜放大率和设定的电阻分布的球面像差系数获得束斑系数。然后，执行第一处理循环以选择提供束斑系数的近似最小值的另一电阻分布。然后确定束斑系数是否是近似最小值。重复执行第一处理循环，直到确定束斑系数等于近似最小值。此时，执行第二处理循环，以使用取决于静电透镜倍率的像差独立函数来确认束斑系数的最小值，并且不依赖于球面像差系数。当光斑系数不是近似最小值时，处理返回到第一处理循环，使用另一个电阻分布作为选择的电阻分布。

10. 发明授权

US06270390B1 Method for making electron gun 失效
标题翻译：电子枪制作方法
公开(公告)号：US06270390B1
公开(公告)日：2001-08-07
申请号：US09593137
申请日：2000-06-14
申请人： Masatoshi Kudoh , Ryuichi Murai , Mitsuhiro Ohtani , Katuyoshi Yamashita , Hideharu Ohmae , Masahiko Konda
发明人： Masatoshi Kudoh , Ryuichi Murai , Mitsuhiro Ohtani , Katuyoshi Yamashita , Hideharu Ohmae , Masahiko Konda
IPC分类号： H01J902
CPC分类号： H01J9/02 , H01J9/42 , H01J2229/48
摘要： Method and apparatus for manufacturing an electron gun. A beam spot coefficient is obtained from an electrostatic lens magnification and a spherical aberration coefficient of a set resistance distribution. Then, a first process loop is executed to select another resistance distribution that provides an approximate minimum value of the beam spot coefficient. It is then determined whether the beam spot coefficient is an approximate minimum value. The first process loop is repeatedly executed until the beam spot coefficient is determined to be equal to the approximate minimum value. At this point, a second process loop is executed to confirm the minimum value of the beam spot coefficient using an aberration-independent function that is dependent upon the electrostatic lens magnification and is not dependent upon the spherical aberration coefficient. Processing returns to the first process loop using still another resistance distribution as a selected resistance distribution when the beam spot coefficient is not the approximate minimum value.
摘要翻译：电子枪制造方法及装置。从静电透镜放大率和设定的电阻分布的球面像差系数获得束斑系数。然后，执行第一处理循环以选择提供束斑系数的近似最小值的另一电阻分布。然后确定束斑系数是否是近似最小值。重复执行第一处理循环，直到确定束斑系数等于近似最小值。此时，执行第二处理循环，以使用取决于静电透镜倍率的像差独立函数来确认束斑系数的最小值，并且不依赖于球面像差系数。当光斑系数不是近似最小值时，处理返回到第一处理循环，使用另一个电阻分布作为选择的电阻分布。

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