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    • 4. 发明授权
    • Magnetoresistive element, method for manufacturing the same, and method for forming a compound magnetic thin film
    • 磁阻元件及其制造方法以及复合磁性薄膜的形成方法
    • US06680831B2
    • 2004-01-20
    • US09948175
    • 2001-09-06
    • Masayoshi HiramotoHiroshi SakakimaHideaki AdachiNozomu MatukawaKenji IijimaMitsuo Satomi
    • Masayoshi HiramotoHiroshi SakakimaHideaki AdachiNozomu MatukawaKenji IijimaMitsuo Satomi
    • G11B539
    • H01L43/08H01L43/10H01L43/12Y10T29/49034Y10T428/1107
    • The invention provides a magnetoresistive element in which the pinned magnetic layer includes at least one non-magnetic film and magnetic films sandwiching that non-magnetic film, and the magnetic films are coupled with one another by magnetostatic coupling via the non-magnetic film. This element has an improved thermal resistance. Furthermore, the invention provides a magnetoresistive element in which the pinned magnetic layer is as described above. The magnetic films can be coupled with one another by magnetostatic coupling or antiferromagnetic coupling generating negative magnetic coupling. In this element, the magnetic field shift is reduced. Furthermore, the invention provides a magnetoresistive element in which at least one of the magnetic layers sandwiching the intermediate layer includes an oxide ferrite having a plane orientation with a (100), (110) or (111) plane. A magnetic field is introduced in a direction of the axis of easy magnetization in the plane. This oxide can be formed by sputtering with an oxide target while applying a bias voltage to a substrate including a plane on which the oxide ferrite is to be formed so as to adjust the amount of oxygen supplied to the oxide ferrite from the target.
    • 本发明提供了一种磁阻元件,其中被钉扎的磁性层包括至少一个非磁性膜和夹在该非磁性膜上的磁性膜,并且磁性膜通过非磁性膜的静磁耦合彼此耦合。 该元件具有改善的热阻。 此外,本发明提供一种磁阻元件,其中钉扎磁性层如上所述。 磁性膜可以通过产生负磁耦合的静磁耦合或反铁磁耦合彼此耦合。 在该元件中,磁场偏移被减小。 此外,本发明提供一种磁阻元件,其中夹持中间层的至少一个磁性层包括具有(100),(110)或(111)面的平面取向的氧化物铁氧体。 在平面中的易磁化轴的方向上引入磁场。 该氧化物可以通过用氧化物靶溅射形成,同时向包括要在其上形成氧化物铁氧体的平面的衬底施加偏置电压,以调节从目标物供给到氧化物铁氧体的氧的量。
    • 6. 发明授权
    • Magnetic head comprising a multilayer magnetoresistive device and a yoke for introducing magnetic flux from a medium to the magnetoresistive device
    • 磁头包括多层磁阻器件和用于将磁通从介质引入到磁阻器件的磁轭
    • US06785100B2
    • 2004-08-31
    • US09829400
    • 2001-04-09
    • Masayoshi HiramotoNozomu MatsukawaAkihiro OdagawaKenji IijimaHiroshi Sakakima
    • Masayoshi HiramotoNozomu MatsukawaAkihiro OdagawaKenji IijimaHiroshi Sakakima
    • G11B539
    • B82Y25/00B82Y10/00G11B5/012G11B5/11G11B5/3903G11B5/3909G11B5/3916G11B5/3925G11B5/398G11B5/40G11B2005/3996
    • The present invention provides a magnetic head having improved characteristics, using a magnetoresistive device in which current flows across the film plane such as a TMR device. In a first magnetic head of the present invention, when the area of a non-magnetic layer is defined as a device cross-section area, and the area of a yoke is defined as a yoke area, viewed along the direction perpendicular to the surface of the substrate over which the yoke and the magnetoresistive device are formed, then the device cross-section area is not less than 30% of the yoke area, so that a resistance increase of the device cross-section area is suppressed. In a second magnetic head of the present invention, a magnetoresistive device is formed on a substrate, and a yoke is provided above a non-magnetic layer constituting the device. In a third magnetic head of the present invention, the free layer of the magnetoresistive device includes at least two magnetic films and at least one non-magnetic film that are laminated alternately, and the thickness of the non-magnetic layer is not less than 2 nm and not more than 10 nm, and magnetostatic coupling is dominant. In a fourth magnetic head of the present invention, a magnetic gap is provided adjacent to the magnetoresistive device and the magnetic films are coupled antiferromagnetically.
    • 本发明提供一种具有改进特性的磁头,其使用磁阻装置,其中电流流过诸如TMR装置的膜平面。 在本发明的第一磁头中,当非磁性层的面积被定义为器件横截面积,并且将磁轭的面积定义为磁轭面积时,沿垂直于表面的方向观察 在形成磁轭和磁阻装置的基板上,器件截面积不小于磁轭面积的30%,从而可以抑制器件截面积的电阻增加。 在本发明的第二磁头中,在基板上形成磁阻装置,在构成装置的非磁性层的上方设置磁轭。 在本发明的第三磁头中,磁阻装置的自由层包括至少两个磁性膜和交替层叠的至少一个非磁性膜,非磁性层的厚度不小于2 nm,不大于10nm,静磁耦合为主。 在本发明的第四磁头中,与磁阻装置相邻设置有磁隙,并且磁膜与反铁磁耦合。
    • 9. 发明授权
    • Magnetic head with yoke and multiple magnetic layers
    • 磁头与磁轭和多个磁性层
    • US07012790B2
    • 2006-03-14
    • US10896795
    • 2004-07-22
    • Masayoshi HiramotoNozomu MatsukawaAkihiro OdagawaKenji IijimaHiroshi Sakakima
    • Masayoshi HiramotoNozomu MatsukawaAkihiro OdagawaKenji IijimaHiroshi Sakakima
    • G11B5/39
    • B82Y25/00B82Y10/00G11B5/012G11B5/11G11B5/3903G11B5/3909G11B5/3916G11B5/3925G11B5/398G11B5/40G11B2005/3996
    • The present invention provides a magnetic head having improved characteristics, using a magnetoresistive device in which current flows across the film plane such as a TMR device. In a first magnetic head of the present invention, when the area of a non-magnetic layer is defined as a device cross-section area, and the area of a yoke is defined as a yoke area, viewed along the direction perpendicular to the surface of the substrate over which the yoke and the magnetoresistive device are formed, then the device cross-section area is not less than 30% of the yoke area, so that a resistance increase of the device cross-section area is suppressed. In a second magnetic head of the present invention, a magnetoresistive device is formed on a substrate, and a yoke is provided above a non-magnetic layer constituting the device. In a third magnetic head of the present invention, the free layer of the magnetoresistive device includes at least two magnetic films and at least one non-magnetic film that are laminated alternately, and the thickness of the non-magnetic layer is not less than 2 nm and not more than 10 nm, and magnetostatic coupling is dominant. In a fourth magnetic head of the present invention, a magnetic gap is provided adjacent to the magnetoresistive device and the magnetic films are coupled antiferromagnetically.
    • 本发明提供一种具有改进特性的磁头,其使用磁阻装置,其中电流流过诸如TMR装置的膜平面。 在本发明的第一磁头中,当非磁性层的面积被定义为器件横截面积,并且将磁轭的面积定义为磁轭面积时,沿垂直于表面的方向观察 在形成磁轭和磁阻装置的基板上,器件截面积不小于磁轭面积的30%,从而可以抑制器件截面积的电阻增加。 在本发明的第二磁头中,在基板上形成磁阻装置,在构成装置的非磁性层的上方设置磁轭。 在本发明的第三磁头中,磁阻装置的自由层包括至少两个磁性膜和交替层叠的至少一个非磁性膜,非磁性层的厚度不小于2 nm,不大于10nm,静磁耦合为主。 在本发明的第四磁头中,与磁阻装置相邻设置有磁隙,并且磁膜与反铁磁耦合。