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    • 9. 发明授权
    • Acceleration sensor
    • 加速度传感器
    • US08497672B2
    • 2013-07-30
    • US12881765
    • 2010-09-14
    • Takashi KawakuboToshihiko NaganoMichihiko NishigakiHiroshi Ono
    • Takashi KawakuboToshihiko NaganoMichihiko NishigakiHiroshi Ono
    • G01P15/00
    • G01P15/097G01P15/0888G01P15/18G01P2015/0817G01P2015/0845
    • The present embodiments provide an acceleration sensor, which enables highly accurate detection and has an extremely compact size. The acceleration sensor of the present embodiments is provided with a substrate, a anchor portion formed on the substrate, a support beam, which has one end connected to the anchor portion and extends across a space from the substrate, and a proof mass which is connected to the other end of the support beam and held across a space from the substrate. The acceleration sensor is further provided with first and second piezoelectric bending resonators, a comparison unit, and a calculation unit. The first and second piezoelectric bending resonators have one end connected to the anchor portion and the other end connected to the proof mass or the support beam and have a stack of a first electrode, a first piezoelectric film, and a second electrode. The first and second piezoelectric bending resonators extend on the both sides of the support beam and perform bending resonance motion in a direction perpendicular to the piezoelectric film. The comparison unit measures a difference of a resonance frequency between the first and second piezoelectric bending resonators. The calculation unit calculates an acceleration in a direction perpendicular to the extending direction of the support beam in the substrate surface from the difference of the resonance frequency.
    • 本实施例提供加速度传感器,其能够进行高精度的检测并具有非常紧凑的尺寸。 本实施例的加速度传感器设置有基板,形成在基板上的锚固部分,支撑梁,其一端连接到锚定部分并且延伸穿过基板的空间,以及连接的检测质量块 到支撑梁的另一端并且保持在与基板的空间上。 加速度传感器还设置有第一和第二压电弯曲谐振器,比较单元和计算单元。 第一和第二压电弯曲谐振器的一端连接到锚定部分,另一端连接到检测质量块或支撑梁,并且具有第一电极,第一压电膜和第二电极的堆叠。 第一和第二压电弯曲谐振器在支撑梁的两侧延伸,并在垂直于压电薄膜的方向上进行弯曲共振运动。 比较单元测量第一和第二压电弯曲谐振器之间的谐振频率的差。 计算单元从谐振频率的差计算与基板表面中的支撑梁的延伸方向垂直的方向的加速度。