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    • 2. 发明授权
    • Resin original pattern plate and method for transferring relieved
pattern thereof to thermoplastic resin material
    • 树脂原版图案及其缓解图案转移到热塑性树脂材料的方法
    • US4297945A
    • 1981-11-03
    • US19143
    • 1979-03-09
    • Takezo SanoTadanori InoueYukikazu Uemura
    • Takezo SanoTadanori InoueYukikazu Uemura
    • B41C3/00G03F7/027B41N1/12
    • B41C3/00G03F7/027Y10S428/908Y10S428/914Y10T428/24612
    • Relieved pattern of a resin original pattern plate, which does not exhibit fluidity at transferring temperature and possesses elastic modulus no smaller than 10 kg/cm.sup.2, preferably no smaller than 100 kg/cm.sup.2, is transferred onto thermoplastic resin material having fluidity at the transferring temperature (ASTM D1238, load 21.6 kg) of at least 0.01 dg/min, preferably at least 0.1 dg/min, by pressing the thermoplastic resin material to the original pattern plate under a pressure condition where elastic deformation of the original pattern plate is kept within 10%. The resin original pattern plate is prepared by controlling the photo-polymerizable resin composition to adjust its crosslink-ability and then photo-polymerizing, whereby the resulting resin original pattern plate possesses an elastic modulus of 10 kg/cm.sup.2 or higher at transferring temperature. The photo-polymerizable resin composition includes, as its major ingredients, either polymer, polyfunctional monomer (10-90% by weight, preferably 30-70% by weight, and having viscosity of at least 10.sup.3 poise at transferring temperature), photo-sensitizer and thermal polymerization inhibitor, or cross-linkable polymer (having at least 1000 molecular weight and double bonds at least one for each 1000 molecular weight), monomer (5-50% by weight, preferably 10-40% by weight), photosensitizer and thermal polymerization inhibitor.
    • 在转印温度下不具有流动性并且不小于10kg / cm 2,优选不小于100kg / cm 2的弹性模量的树脂原版图案的缓冲图案转印到在转印温度下具有流动性的热塑性树脂材料上 (ASTM D1238,负荷21.6kg)为至少0.01dg / min,优选至少0.1dg / min,通过在原始图案板的弹性变形保持在其内的压力条件下将热塑性树脂材料压制到原始图案板上 10%。 通过控制光聚合性树脂组合物调节其交联性,然后进行光聚合,制备树脂原图板,由此得到的树脂原始图案板在转印温度下的弹性模量为10kg / cm 2以上。 可光聚合树脂组合物包括聚合物,多官能单体(10-90重量%,优选30-70重量%,并且在转印温度下具有至少103泊的粘度)作为其主要成分,光敏剂 和热聚合抑制剂或可交联聚合物(每1000分子量具有至少1000个分子量和双键至少一个),单体(5-50重量%,优选10-40重量%),光敏剂和 热聚合抑制剂。
    • 3. 发明授权
    • Novolak resin for positive photoresist
    • 用于正性光致抗蚀剂的酚醛清漆树脂
    • US4812551A
    • 1989-03-14
    • US118041
    • 1987-11-09
    • Fumio OiHaruyoshi OsakiAkihiro FurutaYukikazu UemuraTakao NinomiyaYasunori UetaniMakoto Hanabata
    • Fumio OiHaruyoshi OsakiAkihiro FurutaYukikazu UemuraTakao NinomiyaYasunori UetaniMakoto Hanabata
    • G03C1/72C08G8/00C08G8/08G03F7/023C08G8/04
    • C08G8/00C08G8/08G03F7/0236
    • A novolak resin for a positive photoresist is provided herein, which resin is produced by the addition condensation reaction of a phenol with formaldehyde. This novolak resin has improved heat resistant and sensitivity properties and the thickness retention of the novolak resins are very high. The novolak resins are characterized in that the area ratio of the gel permeation chromatographic pattern (GPC) as measured by the use of a UV(254 nm) detector, is as follows: a range wherein the molecular weight, calculated as polystyrene, is from 150 to less than 500, not including a phenol and the unreacted monomer, is from 8 to 35%, hereinafter referred to as an A region, the range wherein the molecular weight calculated as polystyrene is from 500 to less than 5000 is from 0 to 30%, hereinafter referred to as a B region, and the range wherein the molecular weight calculated as polystyrene exceeds 5000 is from 35 to 92%, hereinafter referred to as the C region, and wherein the ratio of the B region to the A region is 2.50 or less.
    • 本文提供了一种用于正性光致抗蚀剂的酚醛清漆树脂,该树脂通过苯酚与甲醛的加成缩合反应制备。 该酚醛清漆树脂具有改善的耐热性和灵敏度性能,并且酚醛清漆树脂的厚度保持率非常高。 酚醛清漆树脂的特征在于通过使用UV(254nm)检测器测量的凝胶渗透色谱图(GPC)的面积比如下:其中以聚苯乙烯计算的分子量来自 150〜小于500,不包括苯酚和未反应单体,为8〜35%,以下称为A区,其中以聚苯乙烯计算的分子量为500〜5000以下的范围为0〜 30%,以下称为B区,其中以聚苯乙烯计算的分子量超过5000的范围为35〜92%,以下称为C区,其中B区与A区的比例 是2.50以下。
    • 4. 发明授权
    • Photosensitive resin composition containing pullulan or esters thereof
    • 含有支链淀粉或其酯的感光性树脂组合物
    • US3960685A
    • 1976-06-01
    • US521151
    • 1974-11-05
    • Takezo SanoYukikazu UemuraAkihiro Furuta
    • Takezo SanoYukikazu UemuraAkihiro Furuta
    • C08F2/50G03F7/032C08L1/00C08L3/00
    • G03F7/0325
    • A photosensitive resin composition comprising pullulan, which is a polymer having repetition units of maltotriose and is represented by the formula, ##SPC1##Wherein n is an integer of 20 to 8,000, and/or a derivative thereof, a photopolymerizable monomer, a photosensitizer and a thermal polymerization inhibitor, or comprising the said pullulan, which has been incorporated with a photoactive reaction group to provide photosensitivity, and a photosensitizer, is a novel composition low in viscosity which can be prepared by use of water and can be formed into a photosensitive plate capable of being developed with water to give a clear image. Since the pullulan in said composition has no toxicity, the waste water formed at the time of development of said photosensitive plate can be treated with ease.
    • 一种感光性树脂组合物,其包含支链淀粉,其是具有麦芽三糖重复单元并由下式表示的聚合物:其中N是20至8,000的整数,和/或其衍生物,可光聚合的单体,光致变色剂和热聚合 抑制剂或包含已经与光敏反应组合并提供光敏性的已知PULLULAN和光敏剂是一种低粘度的新型组合物,可通过使用水制备,并可形成可感知的感光层 用水开发以清除图像。 由于所述组合物中的支链淀粉没有毒性,因此可以容易地处理在所述感光板显影时形成的废水。
    • 5. 发明授权
    • Original pattern plate obtained by use of photo-sensitive resin
composition
    • 通过使用光敏树脂组合物获得的原始图案板
    • US4247621A
    • 1981-01-27
    • US670956
    • 1976-03-26
    • Takezo SanoTadanori InoueYukikazu UemuraAkihiro Furuta
    • Takezo SanoTadanori InoueYukikazu UemuraAkihiro Furuta
    • C08L67/00C08L67/06C08L67/08G03F7/027G03F7/032G03C1/70
    • G03F7/027C08L67/06Y10S430/118Y10S430/121
    • An original pattern plate obtained by the use of a photo-sensitive resin composition comprising:(A) an unsaturated polyester having an acid value of from 10 to 40 and having not less than 50% by mole of unsaturated acids in the acid component,(B) a photo-polymerizable, ethylenically unsaturated compound which essentially contains a compound having a photo-polymerizable, ethylenically unsaturated linkage and at least one hydroxyl group,(C) a melamine compound of the formula:(C.sub.3 H.sub.6-(m+n) N.sub.6)(CH.sub.2 OH).sub.m (CH.sub.2 OR).sub.n wherein R is an alkyl group having 1 to 4 carbon atoms, m is from 0 to 6, n is from 0 to 6 and m+n is from 1.5 to 6, or its condensate having an average condensation degree of not more than 4,(D) a photo-polymerization initiator, and(E) a thermal polymerization inhibitor,the weight proportion of the components (A), (B) and (C) satisfying the relationships of the following equations: 1/5.ltoreq.B/(A+B).ltoreq.3/5 and 1/50.ltoreq.C/(A+B+C).ltoreq.1/5, which is improved in mechanical strength, particularly in resistance to heat and pressure.
    • 通过使用感光性树脂组合物获得的原始图案板,其包含:(A)酸成分中不饱和酸的酸值为10〜40,不少于50摩尔%的不饱和聚酯( B)可光聚合的烯属不饱和化合物,其基本上含有具有可光聚合的烯属不饱和键和至少一个羟基的化合物,(C)下式的三聚氰胺化合物:(C 3 H 6 - (m + n)N 6 )(CH 2 OH)m(CH 2 OR)n,其中R为具有1至4个碳原子的烷基,m为0至6,n为0至6,m + n为1.5至6,或其缩合物具有 平均缩合度不大于4,(D)光聚合引发剂和(E)热聚合抑制剂,满足以下关系的组分(A),(B)和(C)的重量比例 方程式:1/5
    • 6. 发明授权
    • Resin original pattern plate and method for transferring relieved
pattern thereof to thermoplastic resin material
    • 树脂原版图案及其缓解图案转移到热塑性树脂材料的方法
    • US4156389A
    • 1979-05-29
    • US682724
    • 1976-05-03
    • Takezo SanoTadanori InoueYukikazu Uemura
    • Takezo SanoTadanori InoueYukikazu Uemura
    • B41C3/00G03F7/027B41C3/06B29F5/00B41D7/00
    • G03F7/027B41C3/00
    • Relieved pattern of a resin original pattern plate, which does not exhibit fluidity at transferring temperature and possesses elastic modulus no smaller than 10 kg/cm.sup.2, preferably no smaller than 100 kg/cm.sup.2, is transferred onto thermoplastic resin material having fluidity at the transferring temperature (ASTM D1238, load 21.6 kg) of at least 0.01 dg/min, preferably at least 0.1 dg/min, by pressing the thermoplastic resin material to the original pattern plate under a pressure condition where elastic deformation of the original pattern plate is kept within 10%. The resin original pattern plate is prepared by controlling the photopolymerizable resin composition to adjust its cross-linkability and then photo-polymerizing, whereby the resulting resin original pattern plate possesses an elastic modulus of 10 kg/cm.sup.2 or higher at transferring temperature. The photo-polymerizable resin composition includes, as its major ingredients, either polymer, polyfunctional monomer (10- 90% by weight, preferably 30- 70% by weight, and having viscosity of at least 10.sup.3 poise at transferring temperature), photo-sensitizer and thermal polymerization inhibitor, or cross-linkable polymer (having at least 1000 molecular weight and double bonds at least one for each 1000 molecular weight), monomer (5- 50% by weight, preferably 10- 40% by weight), photosensitizer and thermal polymerization inhibitor.
    • 在转印温度下不具有流动性并且不小于10kg / cm 2,优选不小于100kg / cm 2的弹性模量的树脂原版图案的缓冲图案转印到在转印温度下具有流动性的热塑性树脂材料上 (ASTM D1238,负荷21.6kg)为至少0.01dg / min,优选至少0.1dg / min,通过在原始图案板的弹性变形保持在其内的压力条件下将热塑性树脂材料压制到原始图案板上 10%。 通过控制可光聚合的树脂组合物来调节其交联性,然后进行光聚合,制备树脂原始图案板,由此得到的树脂原始图案板在转印温度下的弹性模量为10kg / cm 2以上。 可光聚合树脂组合物包括聚合物,多官能单体(10-90重量%,优选30-70重量%,转印温度下粘度至少为103泊)的主要成分,光敏剂 和热聚合抑制剂或可交联聚合物(每1000个分子量具有至少1000个分子量和双键至少一个),单体(5-50重量%,优选10-40重量%),光敏剂和 热聚合抑制剂。