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    • 1. 发明授权
    • Pulse width modulation system and image forming apparatus having the pulse width modulation system
    • 脉宽调制系统和具有脉宽调制系统的图像形成装置
    • US06326993B1
    • 2001-12-04
    • US09526289
    • 2000-03-15
    • Hiroki SatohMakoto NakajimaKoji Tanimoto
    • Hiroki SatohMakoto NakajimaKoji Tanimoto
    • B41J247
    • G06K15/00G06K2215/0002G06K2215/0011G06K2215/0082
    • When a CPU begins to monitor whether delay variation characteristics of a pulse width variation circuit have varied, it selects a basic delay setting value in a basic delay value setting block from a smallest one. The CPU sets a division number in a phase select block from a given minimum desired division number for pulse width modulation. The CPU senses the level of a phase comparison result signal (PHASE) from the pulse width modulation circuit. If the phase comparison result signal is stable at “1”, the CPU 1 fixes the division number. If the phase comparison result signal is “0” and the division number is not maximum, the CPU increases the division number and goes back to the setting of the division number. If the division number is maximum, the CPU increases the basic delay and goes back to the basic delay setting.
    • 当CPU开始监视脉宽变化电路的延迟变化特性是否变化时,从最小的基本延迟值设定块中选择基本的延迟设定值。 CPU根据脉冲宽度调制的给定最小期望分频数设置相位选择块中的分频数。 CPU检测来自脉宽调制电路的相位比较结果信号(PHASE)的电平。 如果相位比较结果信号稳定在“1”,则CPU 1固定分割号。 如果相位比较结果信号为“0”且分频数不是最大值,则CPU增加分频数,并返回到分频数的设置。 如果分频数是最大值,则CPU会增加基本延时并返回到基本延时设置。
    • 3. 发明授权
    • Silicon-containing composition for formation of resist underlayer film, which contains organic group containing protected aliphatic alcohol
    • 用于形成抗蚀剂下层膜的含硅组合物,其含有含有保护的脂族醇的有机基团
    • US09196484B2
    • 2015-11-24
    • US13825158
    • 2011-09-14
    • Satoshi TakedaMakoto NakajimaYuta Kanno
    • Satoshi TakedaMakoto NakajimaYuta Kanno
    • H01L21/311H01L21/033G03F7/075G03F7/09C09D183/04C08G77/14C08G77/16
    • H01L21/0332C08G77/14C08G77/16C09D183/04G03F7/0752G03F7/091G03F7/094
    • Described herein are compositions for forming an underlayer film for a solvent-developable resist. These compositions can include a hydrolyzable organosilane having a silicon atom bonded to an organic group containing a protected aliphatic alcohol group, a hydrolysate of the hydrolyzable organosilane, a hydrolysis-condensation product of the hydrolyzable organosilane, or a combination thereof and a solvent. The composition can form a resist underlayer film including, a hydrolyzable organosilane, a hydrolysate of the hydrolyzable organosilane, a hydrolysis-condensation product of the hydrolyzable organosilane, or a combination thereof, the silicon atom in the silane compound having a silicon atom bonded to an organic group containing a protected aliphatic alcohol group in a ratio of 0.1 to 40% by mol based on the total amount of silicon atoms. Also described is a method for applying the composition onto a semiconductor substrate and baking the composition to form a resist underlayer film.
    • 本文描述了用于形成用于溶剂可显影抗蚀剂的下层膜的组合物。 这些组合物可以包括具有与含有保护的脂族醇基的有机基团键合的硅原子的水解性有机硅烷,可水解的有机硅烷的水解产物,可水解的有机硅烷的水解缩合产物,或其组合和溶剂。 该组合物可以形成抗蚀剂下层膜,该抗蚀剂下层膜包括可水解的有机硅烷,可水解的有机硅烷的水解产物,可水解的有机硅烷的水解缩合产物或其组合,硅烷化合物中硅原子与硅原子键合的硅原子 相对于硅原子总量,含有保护的脂族醇基的有机基团的比例为0.1〜40摩尔%。 还描述了将组合物施加到半导体衬底上并烘烤该组合物以形成抗蚀剂下层膜的方法。