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    • 1. 发明申请
    • A METHOD OF MANUFACTURING A THIN FILM PIEZOELECTRIC ELEMENT
    • 制造薄膜压电元件的方法
    • US20050029907A1
    • 2005-02-10
    • US10933879
    • 2004-09-02
    • Hirokazu UchiyamaYuko OgawaHiroyuki Kita
    • Hirokazu UchiyamaYuko OgawaHiroyuki Kita
    • G11B5/596G11B21/10G11B21/21H01L41/09H01L41/18H01L41/22H01L41/23H01L41/313H01L41/08
    • H01L41/332H01L41/314Y10S29/001Y10S29/016Y10T29/42Y10T29/49128Y10T29/49155Y10T29/4981
    • A thin film piezoelectric element including a first structure having a sequential stack of layers, a first main electrode layer, a first opposed electrode layer and a first piezoelectric thin film having a first polarizing direction located between the first electrode layers, a second structure having as a sequential stack of layers, a second main electrode layer, a second opposed electrode layer and a second piezoelectric thin film having a second polarizing direction located between the second electrode layers, an insulating resin layer covering peripheral portions of the first and second structures, and at least one connecting electrode pad located at a side of one of the first and second structures, for connecting the main electrode layer and the opposed electrode layer of the structures to external equipment, wherein each first and second structures has a cross-sectional shape such that the piezoelectric thin film is tapered, diminishing in width, from a portion near the main electrode layer to a portion near the opposed electrode layer, and the first and second opposed electrode layers of adjacent structures are bonded to each other, and each polarizing direction of the piezoelectric thin films is identical to the direction of each opposed electrode layer.
    • 一种薄膜压电元件,包括具有顺序叠层的第一结构,第一主电极层,第一相对电极层和具有位于第一电极层之间的第一偏振方向的第一压电薄膜,第二结构具有如 层叠顺序堆叠,第二主电极层,第二相对电极层和具有位于第二电极层之间的第二偏振方向的第二压电薄膜,覆盖第一和第二结构的周边部分的绝缘树脂层,以及 至少一个连接电极焊盘,位于所述第一和第二结构之一的一侧,用于将所述主电极层和所述结构的相对电极层连接到外部设备,其中每个第一和第二结构具有如下的横截面形状: 压电薄膜与主电极附近的部分呈锥形,宽度减小 并且相邻结构的第一和第二相对电极层彼此接合,并且压电薄膜的每个偏振方向与每个相对电极层的方向相同。
    • 2. 发明授权
    • Thin film piezoelectric element
    • 薄膜压电元件
    • US06903497B2
    • 2005-06-07
    • US10933879
    • 2004-09-02
    • Hirokazu UchiyamaYuko OgawaHiroyuki Kita
    • Hirokazu UchiyamaYuko OgawaHiroyuki Kita
    • G11B5/596G11B21/10G11B21/21H01L41/09H01L41/18H01L41/22H01L41/23H01L41/313H01L41/08
    • H01L41/332H01L41/314Y10S29/001Y10S29/016Y10T29/42Y10T29/49128Y10T29/49155Y10T29/4981
    • A thin film piezoelectric element including a first structure having a sequential stack of layers, a first main electrode layer, a first opposed electrode layer and a first piezoelectric thin film having a first polarizing direction located between the first electrode layers, a second structure having as a sequential stack of layers, a second main electrode layer, a second opposed electrode layer and a second piezoelectric thin film having a second polarizing direction located between the second electrode layers, an insulating resin layer covering peripheral portions of the first and second structures, and at least one connecting electrode pad located at a side of one of the first and second structures, for connecting the main electrode layer and the opposed electrode layer of the structures to external equipment, wherein each first and second structures has a cross-sectional shape such that the piezoelectric thin film is tapered, diminishing in width, from a portion near the main electrode layer to a portion near the opposed electrode layer, and the first and second opposed electrode layers of adjacent structures are bonded to each other, and each polarizing direction of the piezoelectric thin films is identical to the direction of each opposed electrode layer.
    • 一种薄膜压电元件,包括具有顺序叠层的第一结构,第一主电极层,第一相对电极层和具有位于第一电极层之间的第一偏振方向的第一压电薄膜,第二结构具有如 层叠顺序堆叠,第二主电极层,第二相对电极层和具有位于第二电极层之间的第二偏振方向的第二压电薄膜,覆盖第一和第二结构的周边部分的绝缘树脂层,以及 至少一个连接电极焊盘,位于所述第一和第二结构之一的一侧,用于将所述主电极层和所述结构的相对电极层连接到外部设备,其中每个第一和第二结构具有如下的横截面形状: 压电薄膜与主电极附近的部分呈锥形,宽度减小 并且相邻结构的第一和第二相对电极层彼此接合,并且压电薄膜的每个偏振方向与每个相对电极层的方向相同。
    • 3. 发明授权
    • Method of manufacturing a thin film piezoelectric element
    • 制造薄膜压电元件的方法
    • US06817073B2
    • 2004-11-16
    • US10287797
    • 2002-11-05
    • Hirokazu UchiyamaYuko OgawaHiroyuki Kita
    • Hirokazu UchiyamaYuko OgawaHiroyuki Kita
    • H04R1700
    • H01L41/332H01L41/314Y10S29/001Y10S29/016Y10T29/42Y10T29/49128Y10T29/49155Y10T29/4981
    • A method of manufacturing a thin film piezoelectric element, wherein main electrode layer, piezoelectric thin film, and opposed electrode layer respectively having specified shapes are first formed on first substrate and second substrate, and after that, the opposed electrodes are opposed and bonded to each other, and insulating resin layer is formed over the peripheral portion thereof, and then the second substrate is removed, the insulating resin layer is etched, and connecting electrode pad is formed, and finally, the first substrate is removed to obtain a completely separated thin film piezoelectric element. By this method, it is possible to improve the reproducibility of shapes and to prevent trouble such as shorting between the electrodes which hold the piezoelectric thin film, thereby making it possible to provide a thin film piezoelectric element that may assure high yield without variation in piezoelectric characteristics, and its manufacturing method.
    • 首先,在第一基板和第二基板上首先形成分别具有特定形状的主电极层,压电薄膜和相对电极层的薄膜压电元件的制造方法,然后将相对的电极相对并贴合 其它绝缘树脂层形成在其周边部分上,然后除去第二基板,蚀刻绝缘树脂层,形成连接电极焊盘,最后移除第一基板以获得完全分离的薄片 薄膜压电元件。 通过这种方法,可以提高形状的再现性,并且可以防止保持压电薄膜的电极之间的短路等故障,从而可以提供可以保证高产率而不会在压电变化的情况下提供的薄膜压电元件 特点及其制造方法。
    • 10. 发明授权
    • Vehicular transmission
    • 车辆传动
    • US06189412B1
    • 2001-02-20
    • US09359132
    • 1999-07-23
    • Yoshimichi TsubataShuji KurodaEiji OhyamaEiji SuzukiHiroyuki KitaTomoaki Ishikawa
    • Yoshimichi TsubataShuji KurodaEiji OhyamaEiji SuzukiHiroyuki KitaTomoaki Ishikawa
    • F16H5704
    • F16H61/0009F16H57/0404F16H57/0428F16H57/0441F16H57/0452F16H57/0453F16H57/0489Y10T74/2186
    • A housing 2 for a vehicular transmission comprises a first room R1 which accommodates a continuous speed change mechanism and a second room R2 which accommodates a driving force transmission mechanism including a starting mechanism, a reduction train, a differential mechanism, a power supply mechanism for an oil pump, etc. In each room, inlet openings 72 through 74 for oil discharge passages are provided near and above both the sides of an oil pan 26 in the horizontal direction perpendicular to the input and output shafts of the continuous speed change mechanism, to return lubrication oil to the oil pan 26. Also, walls 61 through 65 are provided in the rooms to lead the lubrication oil into the respective inlet openings. In this construction, the lubrication oil returning from each room to the oil pan 26 is stabilized at each room and discharged to the oil pan 26, and thereby the lubrication oil achieves homogeneity in the oil pan 26.
    • 用于车辆变速器的壳体2包括容纳连续变速机构的第一室R1和容纳驱动力传递机构的第二室R2,驱动力传递机构包括起动机构,减速机构,差速机构,用于 油泵等。在每个房间中,在垂直于连续变速机构的输入和输出轴的水平方向上在油底壳26的两侧附近和上方设置用于排油通道的入口开口72至74,至 将润滑油返回到油底壳26.此外,在室内设置壁61至65,以将润滑油引导到相应的入口。 在这种结构中,从每个房间返回到油底壳26的润滑油在每个房间稳定并排出到油盘26,从而润滑油在油盘26中达到均匀。