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    • 5. 发明申请
    • SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
    • 基板传输装置和基板传输方法
    • US20100034624A1
    • 2010-02-11
    • US12536912
    • 2009-08-06
    • Katsushi KISHIMOTOYusuke FUKUOKANoriyoshi KOHAMAYusuke OZAKI
    • Katsushi KISHIMOTOYusuke FUKUOKANoriyoshi KOHAMAYusuke OZAKI
    • H01L21/673
    • H01L21/67784H01L21/67748
    • A substrate transfer apparatus comprising: a plurality of floating-transfer guide plates adjacent to each other, each of guide plates having a plurality of floating gas ejecting holes; a gas supplying source; a tray to mount a substrate to be transferred, and that is floated by the floating gas; and a transfer arm for transferring the floated tray from the guide plate to the adjacent other guide plate, wherein the tray includes both side edges, and a contact/engagement portion formed at the respective both side edges for the transfer arm, each of the transfer arms including a base portion that can horizontally reciprocate along a rail provided so as to be parallel to the transfer direction, a guide portion provided to the base portion, that can horizontally reciprocate in a direction orthogonal to the transfer direction, and an arm portion provided to the guide portion, that can horizontally reciprocate in the direction parallel to the transfer direction.
    • 一种基板传送装置,包括:彼此相邻的多个浮动传送导向板,每个导板具有多个浮动气体喷射孔; 气体供应源; 用于安装待转移的基板并由浮动气体浮动的托盘; 以及用于将浮托盘从引导板传送到相邻的另一个引导板的传送臂,其中托盘包括两个侧边缘,以及形成在传送臂的相应两个侧边缘处的接触/接合部分,每个传送 包括可沿着设置成平行于传送方向的轨道水平往复运动的基部的臂,设置在基部上的引导部,该引导部能够沿与传送方向正交的方向水平往复运动;以及臂部, 导向部分能够沿平行于传送方向的方向水平往复运动。