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1. 发明授权

US08173727B2 Crosslinkable elastomer composition and molded article using the same 有权
标题翻译：可交联弹性体组合物和使用其的成型制品
公开(公告)号：US08173727B2
公开(公告)日：2012-05-08
申请号：US12264089
申请日：2008-11-03
申请人： Hirofumi Nishibayashi , Takafumi Yamato , Katsuhiko Higashino , Hiroyuki Tanaka , Tsuyoshi Noguchi
发明人： Hirofumi Nishibayashi , Takafumi Yamato , Katsuhiko Higashino , Hiroyuki Tanaka , Tsuyoshi Noguchi
IPC分类号： C08L1/00
CPC分类号： C08L27/18 , C08G73/101 , C08L79/08 , C08L101/00 , C08L2666/14 , C08L2666/02
摘要： The present invention provides a crosslinkable elastomer composition, in which generation of HF under high temperature conditions is reduced, the decrease in weight to both NF3 plasma treatment and O3 treatment in the semiconductor manufacturing process is small and generation of foreign substances (particles) in these treatments is suppressed significantly. Specifically, the present invention relates to a crosslinkable elastomer composition comprising a crosslinkable elastomer and a filler having a specific surface area of at least 0.5 m2/g and containing a synthetic polymer having a thermally and chemically stable aromatic ring in the main chain, a crosslinkable elastomer composition comprising a crosslinkable elastomer and nonoxide ceramics and a crosslinkable elastomer composition wherein the decrease in weight by NF3 plasma irradiation is at most 0.20%.
摘要翻译：本发明提供了一种可交联弹性体组合物，其中在高温条件下产生HF，在半导体制造过程中，NF3等离子体处理和O 3处理两者的重量减少很小，并且在这些中产生异物（颗粒）治疗显着抑制。具体地说，本发明涉及可交联弹性体组合物，其包含可交联弹性体和比表面积至少为0.5m 2 / g的填料，并且含有在主链中具有热和化学稳定的芳环的合成聚合物，可交联的包含可交联弹性体和非氧化物陶瓷的弹性体组合物和可交联弹性体组合物，其中NF 3等离子体照射的重量减少至多0.20％。

2. 发明授权

US07495046B2 Crosslinkable elastomer composition and formed product comprising the same 有权
标题翻译：可交联弹性体组合物和包含其的成型体
公开(公告)号：US07495046B2
公开(公告)日：2009-02-24
申请号：US10498939
申请日：2002-12-13
申请人： Hirofumi Nishibayashi , Takafumi Yamato , Katsuhiko Higashino , Hiroyuki Tanaka , Tsuyoshi Noguchi
发明人： Hirofumi Nishibayashi , Takafumi Yamato , Katsuhiko Higashino , Hiroyuki Tanaka , Tsuyoshi Noguchi
IPC分类号： C08L1/00
CPC分类号： C08L27/18 , C08G73/101 , C08L79/08 , C08L101/00 , C08L2666/14 , C08L2666/02
摘要： The present invention provides a crosslinkable elastomer composition, in which generation of HF under high temperature conditions is reduced, the decrease in weight to both NF3 plasma treatment and O3 treatment in the semiconductor manufacturing process is small and generation of foreign substances (particles) in these treatments is suppressed significantly. Specifically, the present invention relates to a crosslinkable elastomer composition comprising a crosslinkable elastomer and a filler having a specific surface area of at least 0.5 m2/g and containing a synthetic polymer having a thermally and chemically stable aromatic ring in the main chain, a crosslinkable elastomer composition comprising a crosslinkable elastomer and nonoxide ceramics and a crosslinkable elastomer composition wherein the decrease in weight by NF3 plasma irradiation is at most 0.20%.
摘要翻译：本发明提供了一种可交联弹性体组合物，其中在高温条件下产生HF，在半导体制造过程中，NF3等离子体处理和O 3处理两者的重量减少很小，并且在这些中产生异物（颗粒）治疗显着抑制。具体地说，本发明涉及可交联弹性体组合物，其包含可交联弹性体和比表面积至少为0.5m 2 / g的填料，并且含有在主链中具有热和化学稳定的芳环的合成聚合物，可交联的包含可交联弹性体和非氧化物陶瓷的弹性体组合物和可交联弹性体组合物，其中NF 3等离子体照射的重量减少至多0.20％。

3. 发明申请

US20090076197A1 Crosslinkable Elastomer Composition and Molded Article Using the Same 有权
标题翻译：可交联弹性体组合物和使用它的成型品
公开(公告)号：US20090076197A1
公开(公告)日：2009-03-19
申请号：US12264089
申请日：2008-11-03
申请人： Hirofumi Nishibayashi , Takafumi Yamato , Katsuhiko Higashino , Hiroyuki Tanaka , Tsuyoshi Noguchi
发明人： Hirofumi Nishibayashi , Takafumi Yamato , Katsuhiko Higashino , Hiroyuki Tanaka , Tsuyoshi Noguchi
IPC分类号： C08K3/00
CPC分类号： C08L27/18 , C08G73/101 , C08L79/08 , C08L101/00 , C08L2666/14 , C08L2666/02
摘要： The present invention provides a crosslinkable elastomer composition, in which generation of HF under high temperature conditions is reduced, the decrease in weight to both NF3 plasma treatment and O3 treatment in the semiconductor manufacturing process is small and generation of foreign substances (particles) in these treatments is suppressed significantly. Specifically, the present invention relates to a crosslinkable elastomer composition comprising a crosslinkable elastomer and a filler having a specific surface area of at least 0.5 m2/g and containing a synthetic polymer having a thermally and chemically stable aromatic ring in the main chain, a crosslinkable elastomer composition comprising a crosslinkable elastomer and nonoxide ceramics and a crosslinkable elastomer composition wherein the decrease in weight by NF3 plasma irradiation is at most 0.20%.
摘要翻译：本发明提供了一种可交联弹性体组合物，其中在高温条件下产生HF，在半导体制造过程中，NF3等离子体处理和O 3处理两者的重量减少很小，并且在这些中产生异物（颗粒）治疗显着抑制。具体地说，本发明涉及可交联弹性体组合物，其包含可交联弹性体和比表面积至少为0.5m 2 / g的填料，并且含有在主链中具有热和化学稳定的芳环的合成聚合物，可交联的包含可交联弹性体和非氧化物陶瓷的弹性体组合物和可交联弹性体组合物，其中NF 3等离子体照射的重量减少至多0.20％。

4. 发明申请

US20050070637A1 Crosslinkable elastomer composition and formed product comprising the same 有权
标题翻译：可交联弹性体组合物和包含其的成型体
公开(公告)号：US20050070637A1
公开(公告)日：2005-03-31
申请号：US10498939
申请日：2002-12-13
申请人： Hirofumi Nishibayashi , Takafumi Yamato , Katsuhiko Higashino , Hiroyuki Tanaka , Tsuyoshi Noguchi
发明人： Hirofumi Nishibayashi , Takafumi Yamato , Katsuhiko Higashino , Hiroyuki Tanaka , Tsuyoshi Noguchi
IPC分类号： C08G73/10 , C08L79/08 , C08L101/00 , C08L1/00
CPC分类号： C08L27/18 , C08G73/101 , C08L79/08 , C08L101/00 , C08L2666/14 , C08L2666/02
摘要： The present invention provides a crosslinkable elastomer composition, in which generation of HF under high temperature conditions is reduced, the decrease in weight to both NF3 plasma treatment and O3 treatment in the semiconductor manufacturing process is small and generation of foreign substances (particles) in these treatments is suppressed significantly. Specifically, the present invention relates to a crosslinkable elastomer composition comprising a crosslinkable elastomer and a filler having a specific surface area of at least 0.5 m2/g and containing a synthetic polymer having a thermally and chemically stable aromatic ring in the main chain, a crosslinkable elastomer composition comprising a crosslinkable elastomer and nonoxide ceramics and a crosslinkable elastomer composition wherein the decrease in weight by NF3 plasma irradiation is at most 0.20%.
摘要翻译：本发明提供了一种可交联弹性体组合物，其中在高温条件下产生HF，在半导体制造过程中，NF3等离子体处理和O 3处理两者的重量减少很小，并且在这些中产生异物（颗粒）治疗显着抑制。具体地说，本发明涉及包含交联性弹性体和比表面积至少为0.5m 2 / g的填料的交联性弹性体组合物，其含有在主链中具有热和化学稳定的芳环的合成聚合物包含可交联弹性体和非氧化物陶瓷的可交联弹性体组合物和可交联弹性体组合物，其中NF 3等离子体照射的重量减少至多0.20％。

5. 发明授权

US06946513B2 Polymer composition containing clean filler incorporated therein 有权
标题翻译：含有其中掺入清洁填料的聚合物组合物
公开(公告)号：US06946513B2
公开(公告)日：2005-09-20
申请号：US10275685
申请日：2001-04-27
申请人： Katsuhiko Higashino , Hiroyuki Tanaka , Takafumi Yamato , Tsuyoshi Noguchi
发明人： Katsuhiko Higashino , Hiroyuki Tanaka , Takafumi Yamato , Tsuyoshi Noguchi
IPC分类号： C08F214/18 , H01L23/29 , C08L27/12 , C08K9/00 , C08K9/06 , C08L27/18 , C08L27/20
CPC分类号： C08F214/18 , H01L23/293 , H01L2924/0002 , H01L2924/12044 , H01L2924/00
摘要： There is provided an elastomer composition which is prepared by using a very clean filler reduced in both of an amount of moisture generation and an amount of organic outgas generation and is suitable as a molding material for semiconductor production apparatuses and there is provided a molded article. The composition is a crosslinkable composition comprising a high molecular weight polymer, particularly a crosslinkable fluorine-containing elastomer and a filler which has a weight reduction ratio per unit surface area of not more than 2.5×10−5% by weight/m2 when heating at 200° C. for two hours and a total amount of organic gas generated of not more than 2.5 ppm when heating at 200° C. for 15 minutes. The molded article is produced from the crosslinkable composition.
摘要翻译：提供一种弹性体组合物，其通过使用在水分产生量和有机废气产生量中减少的非常干净的填料制备，并且适合作为半导体制造装置的成型材料，并且提供了模制品。该组合物是包含高分子量聚合物，特别是可交联的含氟弹性体和填料的交联组合物，其每单位表面积的重量减少率不超过2.5×10 -5％在200℃下加热2小时，并且在200℃下加热15分钟时产生的有机气体总量不超过2.5ppm的总重量/ m 2。模制品由可交联组合物制备。

6. 发明授权

US07125598B2 Molded fluoroelastomer with excellent detachability and process for producing the same 有权
公开(公告)号：US07125598B2
公开(公告)日：2006-10-24
申请号：US10258066
申请日：2001-04-19
申请人： Takafumi Yamato , Katsuhiko Higashino , Hiroyuki Tanaka , Tsuyoshi Noguchi , Mitsuru Kishine
发明人： Takafumi Yamato , Katsuhiko Higashino , Hiroyuki Tanaka , Tsuyoshi Noguchi , Mitsuru Kishine
IPC分类号： D06N7/04
CPC分类号： C08J7/123 , C08J2327/12 , Y10T428/24355 , Y10T428/24802
摘要： There is provided a fluorine-containing elastomer molded article which is obtained by irradiating the fluorine-containing elastomer molded article with a plasma and has a center line average roughness of not less than 0.65 μm or a fluorine-containing elastomer molded article which is obtained by applying a resin coating layer on a fluorine-containing elastomer substrate, has a small peeling strength and a small etching rate at the irradiation of plasma and is excellent in detachability and whiteness. There is provided particularly a molded article suitable as various sealing materials for semiconductor production apparatuses.

7. 发明授权

US06440511B1 Thermoplastic resin laminate 失效
标题翻译：热塑性树脂层压板
公开(公告)号：US06440511B1
公开(公告)日：2002-08-27
申请号：US08913484
申请日：1997-09-17
申请人： Tetsuo Shimizu , Hirofumi Nishibayashi , Takeshi Inaba , Yoshihisa Yamamoto , Takafumi Yamato , Masakatsu Kitano
发明人： Tetsuo Shimizu , Hirofumi Nishibayashi , Takeshi Inaba , Yoshihisa Yamamoto , Takafumi Yamato , Masakatsu Kitano
IPC分类号： B29C4706
CPC分类号： B32B27/08 , B32B1/08 , B32B7/10 , B32B27/30 , B32B27/304 , B32B27/322 , B32B27/34 , B32B37/0076 , B32B2597/00 , F16L9/12 , Y10T428/139 , Y10T428/31536 , Y10T428/3154
摘要： In a thermoplastic resin laminate having at least three thermoplastic resin layers, wherein an intermediate layer interposed between a first layer of a thermoplastic resin A1 and a second layer of a thermoplastic resin B1, which are not bonded each other, is a thermoplastic resin composition which contains as a main component a thermoplastic resin A2 having a bonding property to the thermoplastic resin A1 and a thermoplastic resin B2 having a bonding property to the thermoplastic resin B1 and forms a dispersion structure, wherein the thermoplastic resin A2 forms a continuous phase and the thermoplastic resin B2 forms a dispersed phase in the intermediate layer at the vicinity of the interface between the intermediate layer and the first layer, and wherein the thermoplastic resin B2 forms the continuous phase and the thermoplastic resin A2 forms the dispersed phase in the intermediate layer at the vicinity of the interface between the intermediate layer and the second layer, the first layer and the second layer are firmly bonded by the intermediate layer.
摘要翻译：在具有至少三个热塑性树脂层的热塑性树脂层压体中，其中插入在热塑性树脂A1的第一层和热塑性树脂B1的第二层之间的中间层不是彼此结合的是热塑性树脂组合物，含有与热塑性树脂A1具有接合性的热塑性树脂A2和与热塑性树脂B1具有粘合性的热塑性树脂B2并形成分散结构，其中热塑性树脂A2形成连续相，热塑性树脂树脂B2在中间层和第一层之间的界面附近的中间层中形成分散相，并且其中热塑性树脂B2形成连续相，并且热塑性树脂A2在中间层中形成分散相中间层和第二层之间的界面附近，第一层并且第二层被中间层牢固地粘合。

8. 发明申请

US20080287627A1 Perfluoroelastomer compositions and methods of preparing same 有权
标题翻译：全氟弹性体组合物及其制备方法
公开(公告)号：US20080287627A1
公开(公告)日：2008-11-20
申请号：US12148014
申请日：2008-04-16
申请人： Tsuyoshi Noguchi , Jiazhong Luo , Tatsuya Morikawa , Hirokazu Komori , Takafumi Yamato , Meiten Koh
发明人： Tsuyoshi Noguchi , Jiazhong Luo , Tatsuya Morikawa , Hirokazu Komori , Takafumi Yamato , Meiten Koh
IPC分类号： C08F16/24
CPC分类号： C08L27/18 , C08K5/18 , C08L2205/02 , Y10T428/3154 , C08L2666/04
摘要： The present invention includes crosslinked perfluoroelastomeric compositions and molded articles formed from a cross-linkable perfluoroelastomeric composition having a first curable perfluoropolymer having a cure site monomer and a second perfluoropolymer having a cure site monomer. The molar ratio of the tetrafluoroethylene monomer to perfluoroalkylvinyl ether in one perfluoropolymer is about 0 to 100 to about 65 to 35 in the perfluoropolymer. The molar ratio of the tetrafluoroethylene monomer to the perfluoroalkylvinyl ether monomer in the second polymer is about 65:35 to about 95:5 in the second perfluoropolymer. The composition further includes a curative. One fluorine-containing elastomer composition herein, having a short crosslinking time, has perfluoroelastomers (A) having a tetrafluoroethylene unit, a perfluoralkylvinyl ether unit (a) and a monomer unit (b) having at least one kind selected from the group consisting of a nitrile group, a carboxyl group and an alkoxycarbonyl group, wherein the composition has two or more kinds of perfluoroelastomers (A) having differing contents of perfluoroalkylvinyl ether unit (a).
摘要翻译：本发明包括交联的全氟弹性体组合物和由可交联的全氟弹性体组合物形成的模塑制品，其具有具有固化部位单体的第一可固化全氟聚合物和具有固化部位单体的第二全氟聚合物。全氟聚合物中四氟乙烯单体与全氟烷基乙烯基醚的摩尔比在全氟聚合物中为约0至约100至约65至35。第二聚合物中四氟乙烯单体与全氟烷基乙烯基醚单体的摩尔比在第二全氟聚合物中为约65:35至约95:5。组合物还包括治疗剂。具有交联时间短的一种含氟弹性体组合物具有全氟弹性体（A），其具有四氟乙烯单元，全氟烷基乙烯基醚单元（a）和单体单元（b），所述单体单元具有选自以下的至少一种：腈基，羧基和烷氧基羰基，其中所述组合物具有两种或更多种具有不同全氟烷基乙烯基醚单元（a）含量的全氟弹性体（A）。

9. 发明授权

US09068069B2 Perfluoroelastomer compositions and methods of preparing same 有权
标题翻译：全氟弹性体组合物及其制备方法
公开(公告)号：US09068069B2
公开(公告)日：2015-06-30
申请号：US12969463
申请日：2010-12-15
申请人： Tsuyoshi Noguchi , Jiazhong Luo , Tatsuya Morikawa , Hirokazu Komori , Takafumi Yamato , Meiten Koh
发明人： Tsuyoshi Noguchi , Jiazhong Luo , Tatsuya Morikawa , Hirokazu Komori , Takafumi Yamato , Meiten Koh
IPC分类号： C08L27/18 , C08K5/18
CPC分类号： C08L27/18 , C08K5/18 , C08L2205/02 , Y10T428/3154 , C08L2666/04
摘要： The present invention includes crosslinked perfluoroelastomeric compositions and molded articles formed from a cross-linkable perfluoroelastomeric composition having a first curable perfluoropolymer having a cure site monomer and a second perfluoropolymer having a cure site monomer. The molar ratio of the tetrafluoroethylene monomer to perfluoroalkylvinyl ether in one perfluoropolymer is about 0 to 100 to about 65 to 35 in the perfluoropolymer. The molar ratio of the tetrafluoroethylene monomer to the perfluoroalkylvinyl ether monomer in the second polymer is about 65:35 to about 95:5 in the second perfluoropolymer. The composition further includes a curative. One fluorine-containing elastomer composition herein, having a short crosslinking time, has perfluoroelastomers (A) having a tetrafluoroethylene unit, a perfluoralkylvinyl ether unit (a) and a monomer unit (b) having at least one kind selected from the group consisting of a nitrile group, a carboxyl group and an alkoxycarbonyl group, wherein the composition has two or more kinds of perfluoroelastomers (A) having differing contents of perfluoroalkylvinyl ether unit (a).
摘要翻译：本发明包括交联的全氟弹性体组合物和由可交联的全氟弹性体组合物形成的模塑制品，其具有具有固化部位单体的第一可固化全氟聚合物和具有固化部位单体的第二全氟聚合物。全氟聚合物中四氟乙烯单体与全氟烷基乙烯基醚的摩尔比在全氟聚合物中为约0至约100至约65至35。第二聚合物中四氟乙烯单体与全氟烷基乙烯基醚单体的摩尔比在第二全氟聚合物中为约65:35至约95:5。组合物还包括治疗剂。具有交联时间短的一种含氟弹性体组合物具有全氟弹性体（A），其具有四氟乙烯单元，全氟烷基乙烯基醚单元（a）和单体单元（b），所述单体单元具有选自以下的至少一种：腈基，羧基和烷氧基羰基，其中所述组合物具有两种或更多种具有不同全氟烷基乙烯基醚单元（a）含量的全氟弹性体（A）。

10. 发明授权

US07309743B2 Fluorine-containing elastomer and composition thereof for crosslinking 有权
标题翻译：含氟弹性体及其组合物用于交联
公开(公告)号：US07309743B2
公开(公告)日：2007-12-18
申请号：US10726604
申请日：2003-12-04
申请人： Kazuyoshi Kawasaki , Masaki Irie , Katsuhiko Iseki , Tsuyoshi Itagaki , Tsuyoshi Noguchi , Takafumi Yamato , Mitsuru Kishine
发明人： Kazuyoshi Kawasaki , Masaki Irie , Katsuhiko Iseki , Tsuyoshi Itagaki , Tsuyoshi Noguchi , Takafumi Yamato , Mitsuru Kishine
IPC分类号： C08L27/12 , C08F8/00
CPC分类号： C08L27/12 , C08F8/00 , C08F8/30 , C08F2800/10 , C08F2810/20 , C08K5/18 , C08K5/29 , C08K5/32 , C08F216/1408
摘要： To provide a novel crosslinking system of fluorine-containing elastomer giving a crosslinked product particularly having improved mechanical strength and compression set at high temperature. A fluorine-containing rubber composition comprising a fluorine-containing elastomer having carboxyl group and/or alkoxycarbonyl group at an end of a trunk chain and/or branched chain as a crosslinkable group.
摘要翻译：提供一种含氟弹性体的新型交联体系，得到交联产物，特别是在高温下具有改进的机械强度和压缩永久变形。一种含氟橡胶组合物，其包含在作为可交联基团的树脂链和/或支链末端具有羧基和/或烷氧基羰基的含氟弹性体。

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