会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 9. 发明申请
    • Workpiece processing apparatus
    • 工件加工装置
    • US20080289577A1
    • 2008-11-27
    • US12152039
    • 2008-05-12
    • Ryuichi IwasakiHirofumi MankawaShigeru MasudaHirofumi HayashiMasaaki Mike
    • Ryuichi IwasakiHirofumi MankawaShigeru MasudaHirofumi HayashiMasaaki Mike
    • C23C16/00
    • H01L21/67069
    • A workpiece processing apparatus S, which comprises: a plasma generator unit 6 including a plasma generation section 18 operable to plasmatize a given gas supplied thereto, and emit the plasmatized gas therefrom; and a transport mechanism 2 adapted to support a target workpiece W in a position beneath the plasma generation section 18, wherein the plasmatized gas is emitted onto the workpiece W to carry out a given processing. The workpiece processing apparatus S further includes a setup frame 4 adapted to set up the plasma generator unit 6 to allow the plasma generation section 18 to be located over the workpiece. The plasma generator unit 6 is mounted to the setup frame 4 in a manner capable of being drawn out of a setup position where the plasma generation section 18 is positioned over the workpiece W, in a horizontal direction.
    • 工件处理装置S,其包括:等离子体发生器单元6,其包括等离子体产生部分18,其可操作以等离子体化供给的给定气体,并从其中排出等离子体化气体; 以及适于将目标工件W支撑在等离子体产生部18下方的输送机构2,其中等离子体化气体被发射到工件W上以进行给定的处理。 工件处理装置S还包括适于建立等离子体发生器单元6以允许等离子体产生部分18位于工件上方的安装框架4。 等离子体发生器单元6以能够从等离子体产生部分18在水平方向上位于工件W上方的设置位置被拉出的方式安装到安装框架4上。