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    • 5. 发明申请
    • METHOD AND LINE FOR MANUFACTURING SEMICONDUCTOR DEVICE
    • 用于制造半导体器件的方法和线路
    • US20090130782A1
    • 2009-05-21
    • US12266725
    • 2008-11-07
    • Masatsugu ItahashiKouhei HashimotoNobuhiko SatoSeiichi TamuraHiroshi Yuzurihara
    • Masatsugu ItahashiKouhei HashimotoNobuhiko SatoSeiichi TamuraHiroshi Yuzurihara
    • H01L21/66H01L21/67
    • H01L22/12H01L22/20H01L2924/0002H01L2924/00
    • A method is provided for manufacturing a semiconductor device that includes a multilayer wiring structure in which insulating layers and wiring layers each with a plurality of conductor lines are alternately stacked on each other. The method includes steps of forming a first wiring layer on a first insulating layer, detecting a defect in the first wiring layer on the first insulating layer, and determining whether or not the defect is to be irradiated with a focused ion beam, according to a detection result. If it is determined that the defect is to be irradiated, the defect is irradiated with a focused ion beam and then a second insulating layer is formed on the first wiring layer disposed on the first insulating layer. If it is determined that the defect is not to be irradiated with a focused ion beam, the second insulating layer is formed on the first wiring layer disposed on the first insulating layer without irradiating the defect.
    • 提供一种用于制造半导体器件的方法,该半导体器件包括多层布线结构,其中每个具有多条导体线的绝缘层和布线层彼此交替堆叠。 该方法包括以下步骤:在第一绝缘层上形成第一布线层,检测第一绝缘层上的第一布线层中的缺陷,以及确定是否要用聚焦离子束照射缺陷,根据 检测结果。 如果确定要照射缺陷,则用聚焦离子束照射缺陷,然后在布置在第一绝缘层上的第一布线层上形成第二绝缘层。 如果确定不用聚焦离子束照射缺陷,则在不照射缺陷的情况下,在布置在第一绝缘层上的第一布线层上形成第二绝缘层。
    • 6. 发明授权
    • Method of manufacturing an organic electroluminescence display device
    • 制造有机电致发光显示装置的方法
    • US08871537B2
    • 2014-10-28
    • US13613812
    • 2012-09-13
    • Daisuke YoshitokuNobuhiko Sato
    • Daisuke YoshitokuNobuhiko Sato
    • H01L21/00H01L31/036H01L29/04H01L27/32H01L51/00
    • H01L27/3211H01L51/0018
    • Provided is a method of manufacturing an organic electroluminescence display device which enables production of a high-resolution organic electroluminescence display device in which display failure is suppressed. The method of manufacturing an organic electroluminescence display device includes multiple organic electroluminescence elements each including an organic compound layer that includes at least an emission layer, the method including: forming the organic compound layer on a substrate; sequentially forming an intermediate layer and a resist layer on the organic compound layer; removing a part of the resist layer by a photolithography method; and selectively removing, by dry etching, the intermediate layer and the organic compound layer in a region in which the part of the resist layer is removed, the light shielding layer having a function of blocking light having a wavelength of 190 nm or more and 360 nm or less.
    • 提供一种制造有机电致发光显示装置的方法,其能够制造抑制显示不良的高分辨率有机电致发光显示装置。 制造有机电致发光显示装置的方法包括多个有机电致发光元件,每个有机电致发光元件包括至少包含发射层的有机化合物层,该方法包括:在基板上形成有机化合物层; 在有机化合物层上依次形成中间层和抗蚀剂层; 通过光刻法去除一部分抗蚀剂层; 并且通过干蚀刻在去除抗蚀剂层的一部分的区域中通过干蚀刻选择性地除去具有阻挡波长为190nm以上的光的功能的遮光层和360nm nm以下。