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    • 5. 发明申请
    • Exposure apparatus and exposure method
    • 曝光装置和曝光方法
    • US20110207035A1
    • 2011-08-25
    • US12932033
    • 2011-02-16
    • Akiya SaitoAkitoshi SuzukiToru AidaShinobu Hayashi
    • Akiya SaitoAkitoshi SuzukiToru AidaShinobu Hayashi
    • G03F7/20G03B27/52
    • G03B27/52G11B7/1267G11B7/261G11B7/263
    • An exposure apparatus includes an exposure unit selectively performing exposure on a resist layer with a first laser beam, focused by a lens system, in a pattern including pits and lands arranged in a scanning direction; a detecting unit detecting a reflection of a second laser beam applied through the lens system to the resist layer selectively exposed to the first laser beam, the second laser beam being produced by changing a focal length of the lens system such that the resist layer is prevented from responding thereto; a calculating unit calculating, from a result of the detection, a displacement between center axes of signal waveforms representing beams reflected from first and second portions of the pattern having a smallest width and a larger width, respectively; a setting unit setting the focal length of the lens system to such a value that the displacement is maximal; and a control unit controlling the exposure unit to expose the resist layer to the first laser beam focused with the focal length set by the setting unit.
    • 曝光装置包括曝光单元,其以包括沿扫描方向布置的凹坑和平台的图案以由透镜系统聚焦的第一激光束选择性地对抗蚀剂层进行曝光; 检测单元,其检测通过透镜系统施加的第二激光束对选择性地暴露于第一激光束的抗蚀剂层的反射,第二激光束是通过改变透镜系统的焦距而产生的,以防止抗蚀剂层 从响应; 计算单元,从所述检测结果计算分别表示从具有最小宽度和较大宽度的图案的第一和第二部分反射的光束的信号波形的中心轴之间的位移; 设置单元,将透镜系统的焦距设定为位移最大的值; 以及控制单元,其控制所述曝光单元将所述抗蚀剂层暴露于由所述设定单元设定的所述焦距聚焦的所述第一激光束。
    • 7. 发明授权
    • Disk device and manufacturing method therefor
    • 磁盘装置及其制造方法
    • US07656618B2
    • 2010-02-02
    • US11699459
    • 2007-01-30
    • Akitoshi Suzuki
    • Akitoshi Suzuki
    • G11B5/54
    • G11B5/54G11B21/22
    • According to one embodiment, a disk device includes a case having a bottom wall, a disk-shaped recording medium located in the case, a drive motor which is located in the case and supports and rotates the recording medium, a head which performs information processing for the recording medium, a head actuator, and an inertial latch mechanism which latches and holds the head actuator in a retracted position when an external force is subjected. The inertial latch mechanism is modularized and includes a base plate, a first pivot and a second pivot set up on the base plate, a latch arm supported for rocking motion around the first pivot, an inertial arm which is rockably supported on the second pivot, and a stopper portion which prevents the latch arm and the inertial arm from slipping off the first and second pivots.
    • 根据一个实施例,盘装置包括具有底壁,位于壳体中的盘形记录介质的壳体,位于壳体中并支撑并旋转记录介质的驱动马达,执行信息处理的磁头 用于记录介质,头部致动器和惯性闩锁机构,其在外力受到时将头致动器锁定并保持在缩回位置。 惯性闭锁机构是模块化的,包括基板,第一枢轴和设置在基板上的第二枢轴,支撑在第一枢轴周围的摆动运动的锁臂,可旋转地支撑在第二枢轴上的惯性臂, 以及阻止所述闩锁臂和所述惯性臂从所述第一枢轴和所述第二枢轴滑落的止动部。