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1. 发明授权

US08349087B2 Semiconductor device manufacturing method, wafer treatment system, and recording medium 有权
标题翻译：半导体器件制造方法，晶片处理系统和记录介质
公开(公告)号：US08349087B2
公开(公告)日：2013-01-08
申请号：US12654987
申请日：2010-01-12
申请人： Hidetaka Nambu , Nobuo Hironaga , Futoshi Ota , Toru Yokoyama , Osamu Sugawara , Ryo Satou , Masato Tamura
发明人： Hidetaka Nambu , Nobuo Hironaga , Futoshi Ota , Toru Yokoyama , Osamu Sugawara , Ryo Satou , Masato Tamura
IPC分类号： B08B3/12 , B08B6/00 , B08B7/00 , B08B7/02 , C25F1/00 , C25F3/30 , C25F5/00
CPC分类号： H01L21/67389
摘要： A semiconductor device manufacturing method includes loading plural dry-etched wafers one by one in a container having a side door so as to be disposed substantially horizontally and in layers vertically therein; and blowing out a purge gas horizontally to those wafers loaded in the container for 30 sec or more after all the subject wafers are loaded in the container while the side door is open.
摘要翻译：半导体器件制造方法包括：将多个干蚀刻晶片一个接一个地装载在具有侧门的容器中，以便基本上水平布置并且在其中垂直地设置; 并且在侧门打开时将所有的被摄体晶片装载到容器中之后，将装载在容器中的那些晶片水平地吹扫吹扫气体30秒以上。

2. 发明申请

US20100184296A1 Semiconductor device manufacturing method, wafer treatment system, and recording medium 有权
标题翻译：半导体器件制造方法，晶片处理系统和记录介质
公开(公告)号：US20100184296A1
公开(公告)日：2010-07-22
申请号：US12654987
申请日：2010-01-12
申请人： Hidetaka Nambu , Nobuo Hironaga , Futoshi Ota , Toru Yokoyama , Osamu Sugawara , Ryo Satou , Masato Tamura
发明人： Hidetaka Nambu , Nobuo Hironaga , Futoshi Ota , Toru Yokoyama , Osamu Sugawara , Ryo Satou , Masato Tamura
IPC分类号： H01L21/306 , H01L21/3065
CPC分类号： H01L21/67389
摘要： A semiconductor device manufacturing method includes loading plural dry-etched wafers one by one in a container having a side door so as to be disposed substantially horizontally and in layers vertically therein; and blowing out a purge gas horizontally to those wafers loaded in the container for 30 sec or more after all the subject wafers are loaded in the container while the side door is open.
摘要翻译：半导体器件制造方法包括：将多个干蚀刻晶片一个接一个地装载在具有侧门的容器中，以便基本上水平布置并且在其中垂直地设置; 并且在侧门打开时将所有的被摄体晶片装载到容器中之后，将装载在容器中的那些晶片水平地吹扫吹扫气体30秒以上。

3. 发明申请

US20130305968A1 BURNER DEVICE FOR HIGH-TEMPERATURE AIR COMBUSTION 有权
标题翻译：用于高温空气燃烧的燃烧器装置
公开(公告)号：US20130305968A1
公开(公告)日：2013-11-21
申请号：US13981848
申请日：2012-01-27
申请人： Masato Tamura , Takahiro Kozaki
发明人： Masato Tamura , Takahiro Kozaki
IPC分类号： F23D1/00 , F23L9/02 , F23D17/00 , F23C1/10 , F23L1/00
CPC分类号： F23D1/00 , F23C1/10 , F23C6/045 , F23C9/08 , F23C2202/30 , F23C2900/06041 , F23D17/00 , F23L9/02
摘要： The burner device for high-temperature air combustion according to the present invention is equipped with a thermal insulation portion (5) that is provided facing a furnace (1) and has a throat (6); a burner nozzle (9) that is provided at the axial center of this throat and that injects a pulverized coal mixed flow (38) into the furnace through the throat; a windbox (8) that is provided so as to house this burner nozzle; an air register (16) that is provided at the distal end of the burner nozzle and that injects low-temperature secondary air from the windbox to the throat; a high-temperature air nozzle (23), one end of which opens into the furnace through the heat insulation portion; and a combustion air switching means (16, 24) that switches between injecting low-temperature secondary air to the throat through the air register and injecting high-temperature secondary air to the furnace interior through the high-temperature air nozzle, in which in steady combustion, low-temperature secondary air is injected to the throat through the air register by the combustion air switching means and a pulverized coal mixed flow is injected from the burner nozzle, and in high-temperature air combustion, high-temperature secondary air is injected to the furnace interior through the high-temperature air nozzle by the combustion air switching means and a pulverized coal mixed flow is injected from the burner nozzle.
摘要翻译：根据本发明的用于高温空气燃烧的燃烧器装置配备有面向炉（1）设置并具有喉部（6）的绝热部分（5）; 燃烧器喷嘴（9），其设置在该喉部的轴向中心处，并且通过喉部将粉煤混合流（38）喷射到炉中; 设置为容纳该燃烧器喷嘴的风箱（8）; 设置在燃烧器喷嘴的远端并将低温二次空气从风箱喷射到喉部的空气对准装置（16）高温空气喷嘴（23），其一端通过隔热部分通入炉中; 以及燃烧空气切换装置（16,24），其在通过所述空气限位器向所述喉部喷射低温二次空气之间切换，并且通过所述高温空气喷嘴向所述炉内部喷射高温二次空气，燃烧，低温二次空气通过燃烧空气切换装置通过空气限位器注入到喉部，并且从燃烧器喷嘴喷射粉煤混合流，并且在高温空气燃烧中，注入高温二次空气通过燃烧空气切换装置通过高温空气喷嘴连接到炉内部，并且从燃烧器喷嘴喷射粉煤混合流。

4. 外观设计

USD774397S1 Water bottle 有权
公开(公告)号：USD774397S1
公开(公告)日：2016-12-20
申请号：US29510262
申请日：2014-11-26
申请人： Masato Tamura
设计人： Masato Tamura

5. 发明授权

US07926755B2 Biomass mill 有权
标题翻译：生物质磨机
公开(公告)号：US07926755B2
公开(公告)日：2011-04-19
申请号：US12590702
申请日：2009-11-12
申请人： Masato Tamura , Ryunosuke Itokazu
发明人： Masato Tamura , Ryunosuke Itokazu
IPC分类号： B02C15/00
CPC分类号： B02C15/003 , Y02E50/30
摘要： The invention provides a biomass mill, comprising a rotatable pulverizing table 5, a recessed groove 6 which is provided in form of ring on an upper surface of the pulverizing table and has an arcuate cross-section, a pressure roller 9 pressed into the recessed groove, a blowout hole 16 for blowing out the air from around the pulverizing table, and a chute 18 for supplying a wooden biomass toward a center of the pulverizing table, wherein the wooden biomass is supplied via the chute, the wooden biomass is pulverized between the pulverizing table and the pressure roller, and the pulverized wooden biomass is carried by blowing the air through the blowout hole, wherein a surface from an outer peripheral of the recessed groove to the blowout hole is flat surface.
摘要翻译：本发明提供了一种生物质粉碎机，其包括可旋转的粉碎台5，在粉碎台的上表面上设置为环形的凹槽6，并且具有弓形横截面，压入压入辊9的凹槽，用于从粉碎台周围吹出空气的吹出孔16和用于向研磨台的中心供应木质生物质的滑槽18，其中通过滑槽供应木质生物质，将木质生物质在粉碎台和加压辊，通过吹出空气吹送粉碎的木质生物质，其中从凹槽的外周到喷孔的表面是平坦表面。

6. 发明申请

US20090308292A1 COAL BURNING BOILER APPARATUS 审中-公开
标题翻译：燃煤锅炉设备
公开(公告)号：US20090308292A1
公开(公告)日：2009-12-17
申请号：US12514826
申请日：2007-11-06
申请人： Toshiro Fujimori , Masato Tamura , Toshiyuki Suko , Toshihiko Yamada
发明人： Toshiro Fujimori , Masato Tamura , Toshiyuki Suko , Toshihiko Yamada
IPC分类号： F23N5/02 , F23D1/00
CPC分类号： F23L15/04 , F23K1/04 , F23K2201/103 , F23K2203/201 , F23N3/002 , F23N2021/08 , F23N2021/10 , Y02E20/348
摘要： In a coal burning boiler apparatus, temperature of the pulverized coal to be fed to the boiler can be set depending on the property of the combustion coal, so that stable ignition and combustion can be made regardless of the property of the combustion coal fed.Provided are a coal burning boiler 1, a coal pulverizer 2 for pulverizing massive coal 6 into fine powder, a temperature sensor 18 for detecting temperature of the primary air 35 for entraining the pulverized coal to the coal burning boiler, regulators 9, 12, 13 and 14 for regulating the temperature of the primary air and a controller for controlling the primary air temperature regulators on the basis of detected result of the temperature sensor so as to make the primary air have a given temperature.
摘要翻译：在燃煤锅炉装置中，可以根据燃煤的特性来设定供给到锅炉的粉煤的温度，能够进行稳定的点火和燃烧，而与供给的燃煤的性质无关。本发明提供一种燃煤锅炉1，将大量煤6粉碎为细粉的煤粉碎机2，用于检测用于将煤粉夹入燃煤锅炉的一次空气35的温度的温度传感器18，调节器9,12,13 和14，用于调节一次空气的温度;以及控制器，其基于温度传感器的检测结果来控制一次空气温度调节器，以使一次空气具有给定的温度。

7. 发明申请

US20070028522A1 Fuel reformer 审中-公开
标题翻译：燃油重整器
公开(公告)号：US20070028522A1
公开(公告)日：2007-02-08
申请号：US10556682
申请日：2004-02-12
申请人： Minoru Mizusawa , Sakae Chijiiwa , Masato Tamura
发明人： Minoru Mizusawa , Sakae Chijiiwa , Masato Tamura
IPC分类号： B01J8/00
CPC分类号： B01J8/0469 , B01J8/0496 , B01J8/067 , B01J2208/00194 , B01J2208/00221 , B01J2208/00486 , B01J2208/00504 , B01J2208/0053 , C01B3/323 , C01B3/384 , C01B2203/0205 , C01B2203/066 , C01B2203/0811 , C01B2203/0822 , C01B2203/0827 , H01M8/0631 , Y02P20/128
摘要： Provided is a fuel reforming apparatus wherein vacuum reforming tubes (13) are accommodated in a flow path (12) between an inner cylinder (9a) of a heat-insulating vessel (9) and a furnace flue (11) arranged in the inner cylinder (9a). Formed between the furnace flue (11) and a guide cylinder (21) accommodated in the furnace flue (11) is a gap though which combustion gas (28) generated in a combustor (10) is raised. A helical plate (22) is arranged in the flow path (12) such that the combustion gas (28) lowered in the flow path (12) flows across the reforming tubes (13). Thus, red heating of the furnace flue can be sufficiently conducted to sufficiently heat the reforming tubes through radiation heat transfer. As a result, heat transfer areas of the reforming tubes may be made smaller to reduce in size the reforming tubes. Since upper ends of the reforming tubes are not exposed to high temperature and the combustion gas lowered between the inner cylinder of the vessel and the furnace flue has no deflections in flow, heat inputs to the respective reforming tubes become uniform, leading to improvement in performance of and reduction in size of the reformer.
摘要翻译：提供了一种燃料重整装置，其中真空重整管（13）容纳在绝热容器（9）的内筒（9a）和布置在内绝热容器（9）的炉烟道（11）之间的流路（12）气缸（9a）。在炉烟道（11）和容纳在炉烟道（11）中的引导筒（21）之间形成的间隙是在燃烧器（10）中产生的燃烧气体（28）升高的间隙。螺旋板（22）布置在流动路径（12）中，使得在流动路径（12）中降低的燃烧气体（28）流过重整管（13）。因此，可以充分地进行炉烟道的红色加热，以通过辐射热传递来充分地加热重整管。结果，可以使重整管的传热面积更小以减小重整管的尺寸。由于重整管的上端不暴露于高温，并且在容器内筒与炉烟道之间降低的燃烧气体没有流动偏转，所以对各重整管的热输入变得均匀，导致性能的提高的改革者的规模。

8. 发明授权

US08646394B2 Burner 有权
标题翻译：刻录机
公开(公告)号：US08646394B2
公开(公告)日：2014-02-11
申请号：US12786865
申请日：2010-05-25
申请人： Masato Tamura , Shinji Watanabe
发明人： Masato Tamura , Shinji Watanabe
IPC分类号： F23C1/10
CPC分类号： F23C7/006 , F23C7/004 , F23C7/008 , F23D1/00 , F23D1/005 , F23D1/02
摘要： A burner 15 where a secondary air regulator 36 is provided on a forward end of a nozzle main unit 16 to be installed along the central axis of a burner throat 13 being installed on a furnace wall 12 and to be accommodated in a wind box 14, wherein the secondary air regulator has an end plate 37 having a bored hole 38 penetrating in an axial direction and for forming a cylindrical space 48 with peripheral surface opened in a space with the furnace core side surface of the wind box, a rotary damper 42 having a bored hole 45 penetrating in an axial direction and being capable to open or close the hole on the end plate by rotating in a peripheral direction, a sliding damper 52 for surrounding the cylindrical space and being slidable in an axial direction, air vanes 46 and 47 installed at a predetermined distance along circumference of the cylindrical space and for giving swirling to the secondary air 34, first driving means 54, 56 and 44 for rotating the rotary sliding damper, and second driving means 53 and 55 for sliding the sliding damper.
摘要翻译：燃烧器15，其中二次空气调节器36设置在喷嘴主体16的前端，沿燃烧器喉部13的中心轴线安装，安装在炉壁12上，并容纳在风箱14中，其中二次空气调节器具有端板37，该端板37具有沿轴向贯通的钻孔38，并形成圆周空间48，圆周空间48的外表面与风箱的炉芯侧表面在空间中敞开，旋转阻尼器42具有钻孔45沿轴向穿透，能够通过沿圆周方向旋转而打开或关闭端板上的孔;滑动阻尼器52，用于围绕圆柱形空间并沿轴向滑动;空气叶片46和 47沿着圆柱形空间的圆周以预定距离安装并且用于向第二空气34提供旋转，用于旋转旋转滑动阻尼器的第一驱动装置54,56和44，以及第二d 用于滑动滑动阻尼器的分段装置53和55。

9. 发明申请

US20100307391A1 PULVERIZED FUEL BURNER 审中-公开
标题翻译：燃油燃烧器
公开(公告)号：US20100307391A1
公开(公告)日：2010-12-09
申请号：US12864741
申请日：2009-02-09
申请人： Masato Tamura , Toshiyuki Suko
发明人： Masato Tamura , Toshiyuki Suko
IPC分类号： F23C1/12
CPC分类号： F23D1/00 , F23C7/006 , F23C7/008
摘要： The invention provides a pulverized fuel burner including a nozzle body 6 open to a furnace 1 to inject pulverized fuel together with primary combustion air, flow passages for secondary combustion air formed coaxially around the nozzle body and shutters arranged circumferentially along the flow passages and spaced apart from each other at specified intervals. Non-flow portions are formed by the shutters for the flow passages for the secondary combustion air to bring about backflow of hot flue gas. As a result, ignition performance can be improved with pulverized fuel containing less volatile matter and the flame can be continuously kept stably.
摘要翻译：本发明提供了一种粉碎燃料燃烧器，其包括与炉1相通的喷嘴体6，用于将一次燃烧空气与粉煤燃料一起喷射，同时在喷嘴体周围形成的用于二次燃烧空气的流路和沿流动通道周向布置的百叶窗，以指定的间隔相互间。非流动部分由用于二次燃烧空气的流动通道的快门形成以引起热烟道气的回流。结果，可以通过含有较少挥发性物质的粉碎燃料来提高点火性能，并且能够连续稳定地保持火焰。

10. 发明授权

US09869468B2 Burner device for high-temperature air combustion 有权
公开(公告)号：US09869468B2
公开(公告)日：2018-01-16
申请号：US13981848
申请日：2012-01-27
申请人： Masato Tamura , Takahiro Kozaki
发明人： Masato Tamura , Takahiro Kozaki
IPC分类号： F23D1/00 , F23L9/02 , F23C6/04 , F23C9/08 , F23C1/10 , F23D17/00
CPC分类号： F23D1/00 , F23C1/10 , F23C6/045 , F23C9/08 , F23C2202/30 , F23C2900/06041 , F23D17/00 , F23L9/02
摘要： The burner device for high-temperature air combustion according to the present invention is equipped with a thermal insulation portion (5) that is provided facing a furnace (1) and has a throat (6); a burner nozzle (9) that is provided at the axial center of this throat and that injects a pulverized coal mixed flow (38) into the furnace through the throat; a windbox (8) that is provided so as to house this burner nozzle; an air register (16) that is provided at the distal end of the burner nozzle and that injects low-temperature secondary air from the windbox to the throat; a high-temperature air nozzle (23), one end of which opens into the furnace through the heat insulation portion; and a combustion air switching means (16, 24) that switches between injecting low-temperature secondary air to the throat through the air register and injecting high-temperature secondary air to the furnace interior through the high-temperature air nozzle, in which in steady combustion, low-temperature secondary air is injected to the throat through the air register by the combustion air switching means and a pulverized coal mixed flow is injected from the burner nozzle, and in high-temperature air combustion, high-temperature secondary air is injected to the furnace interior through the high-temperature air nozzle by the combustion air switching means and a pulverized coal mixed flow is injected from the burner nozzle.

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