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    • 2. 发明授权
    • Semiconductor device test board and method for evaluating semiconductor
devices
    • 半导体器件测试板和半导体器件评估方法
    • US6114866A
    • 2000-09-05
    • US18445
    • 1998-02-04
    • Masaaki MatsuoTsuyoshi SaitohTakekazu YamashitaMichio NakajimaAkira KitaguchiHideki Toki
    • Masaaki MatsuoTsuyoshi SaitohTakekazu YamashitaMichio NakajimaAkira KitaguchiHideki Toki
    • G01R31/26G01R31/28H01L21/66G01R35/00G01R31/02
    • G01R31/2863H01L2924/0002
    • A semiconductor device test board solves a problem with conventional test boards in that test results obtained through a burn-in procedure could be identified only before the test board is taken out of a burn-in oven. Hence, conventional test boards required additional steps for checking the test results after removing the test boards from the burn-in oven. This extra step prevents the efficiency of the test from being improved. One embodiment of the present test board has indicator arms, each rotatably mounted on a pivot on the test board, for indicating, in response to a signal on a signal line, the test result of the semiconductor device associated with it. Each of the indicator arms maintains its rest position when no failure has occurred in the semiconductor device associated with it during the test. Each indicator arm changes its position if a failure has occurred in the semiconductor device during the test, and retains one of the two positions until after the test board is taken out of the burn-in oven. Thus, the test result can be determined after taking out the test board from the burn-in oven.
    • 半导体器件测试板解决了常规测试板的问题,因为只有在将测试板从老化炉中取出之前,才能识别通过烧录程序获得的测试结果。 因此,常规测试板需要额外的步骤,以便在从老化炉中取出测试板后检查测试结果。 这个额外的步骤可以防止测试的效率得到改善。 本测试板的一个实施例具有指示臂,每个指示臂可旋转地安装在测试板上的枢轴上,用于响应于信号线上的信号,指示与其相关联的半导体器件的测试结果。 当在测试期间与其相关联的半导体器件中没有发生故障时,每个指示器臂保持其静止位置。 如果在测试期间在半导体器件中发生故障,则每个指示臂改变其位置,并且保持两个位置中的一个,直到将测试板从老化炉中取出。 因此,可以在从老化炉中取出测试板之后确定测试结果。