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    • 1. 发明申请
    • HIGH FREQUENCY CIRCUIT MODULE
    • 高频电路模块
    • US20100124390A1
    • 2010-05-20
    • US12535176
    • 2009-08-04
    • Hayato KondoKenji Maeda
    • Hayato KondoKenji Maeda
    • G02B6/12
    • H01P5/12G01R31/2822H05K1/0243
    • The invention provides a high frequency circuit module according to the present invention includes: a circuit component having a plurality of terminals arranged on an outer side thereof, and a circuit board of a multilayered construction or a single-layered construction. A first outer face of the circuit board serves as a component mounting face for mounting the circuit component. The circuit board includes a ground conductor layer; a plurality of electrode pads provided on the component mounting face, the electrode pads being configured for connection with the associated terminals of the circuit component; and a plurality of waveguides provided on the first outer face or a second outer face, or in an inner portion of the circuit board. The waveguides are electrically connected with the associated electrode pads. Routing directions of all or some of adjacent waveguides are opposite from each other.
    • 本发明提供一种根据本发明的高频电路模块,包括:具有设置在其外侧的多个端子的电路部件和多层结构或单层结构的电路板。 电路板的第一外表面用作用于安装电路部件的部件安装面。 电路板包括接地导体层; 设置在所述部件安装面上的多个电极焊盘,所述电极焊盘被配置为与所述电路部件的相关联的端子连接; 以及设置在电路板的第一外表面或第二外表面或内部的多个波导。 波导与相关联的电极焊盘电连接。 所有或一些相邻波导的布线方向彼此相反。
    • 2. 发明授权
    • High frequency circuit module
    • 高频电路模块
    • US08120450B2
    • 2012-02-21
    • US12535176
    • 2009-08-04
    • Hayato KondoKenji Maeda
    • Hayato KondoKenji Maeda
    • H01P1/00G02B6/12
    • H01P5/12G01R31/2822H05K1/0243
    • The invention provides a high frequency circuit module according to the present invention includes: a circuit component having a plurality of terminals arranged on an outer side thereof, and a circuit board of a multilayered construction or a single-layered construction. A first outer face of the circuit board serves as a component mounting face for mounting the circuit component. The circuit board includes a ground conductor layer; a plurality of electrode pads provided on the component mounting face, the electrode pads being configured for connection with the associated terminals of the circuit component; and a plurality of waveguides provided on the first outer face or a second outer face, or in an inner portion of the circuit board. The waveguides are electrically connected with the associated electrode pads. Routing directions of all or some of adjacent waveguides are opposite from each other.
    • 本发明提供一种根据本发明的高频电路模块,包括:具有设置在其外侧的多个端子的电路部件和多层结构或单层结构的电路板。 电路板的第一外表面用作用于安装电路部件的部件安装面。 电路板包括接地导体层; 设置在所述部件安装面上的多个电极焊盘,所述电极焊盘被配置为与所述电路部件的相关联的端子连接; 以及设置在电路板的第一外表面或第二外表面或内部的多个波导。 波导与相关联的电极焊盘电连接。 所有或一些相邻波导的布线方向彼此相反。
    • 6. 发明授权
    • Plasma processing apparatus
    • 等离子体处理装置
    • US08496781B2
    • 2013-07-30
    • US11182793
    • 2005-07-18
    • Kenetsu YokogawaKenji MaedaMasaru Izawa
    • Kenetsu YokogawaKenji MaedaMasaru Izawa
    • C23C16/00C23F1/00H01L21/306H05B31/26
    • H01J37/32174H01J37/32082
    • The invention provides a plasma processing apparatus which is based upon a dry etching apparatus and which can inhibit the contamination of a work piece caused by sputtering onto a wall of a vacuum chamber, the occurrence of a foreign matter, the increase of a running cost for replacing the walls of the vacuum chamber and the deterioration of a rate of operation. The plasma processing apparatus according to the invention is based upon the dry etching apparatus having parallel plate structure and is characterized in that a low-pass filter having high impedance to a frequency of a high frequency power source for generating discharge, having small resistance to direct current and grounded is connected to an electrode for generating discharge which is arranged in a position opposite to the work piece and to which the high frequency power source for generating discharge is connected or a low-pass filter having small resistance to direct current and grounded and a direct-current power source connected in series with it are connected to the electrode for generating discharge.
    • 本发明提供了一种基于干蚀刻装置的等离子体处理装置,其可以抑制由溅射引起的工件对真空室的壁的污染,异物的发生,运行成本的增加 更换真空室的壁和操作速度的恶化。 根据本发明的等离子体处理装置基于具有平行板结构的干式蚀刻装置,其特征在于,具有高阻抗频率的低通滤波器,用于产生放电的高频电源的频率,具有较小的直接阻抗 电流和接地连接到用于产生放电的电极,其布置在与工件相对的位置,并且用于产生放电的高频电源被连接到该电极上,或者具有对直流电阻和接地电阻小的低通滤波器, 与其串联连接的直流电源连接到用于产生放电的电极。