专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US08163185B1 Method and apparatus for lifting off photoresist beneath an overlayer 有权
标题翻译：用于剥离覆盖层下面的光致抗蚀剂的方法和装置
公开(公告)号：US08163185B1
公开(公告)日：2012-04-24
申请号：US12059903
申请日：2008-03-31
申请人： Hai Sun , Liubo Hong , Rowena Schmidt , Lijie Zhao , Winnie Yu , Hongping Yuan
发明人： Hai Sun , Liubo Hong , Rowena Schmidt , Lijie Zhao , Winnie Yu , Hongping Yuan
IPC分类号： B44C1/22
CPC分类号： G11B5/3163 , Y10T29/49032
摘要： A method of lifting off photoresist beneath an overlayer includes providing a structure including photoresist and depositing an overlayer impenetrable to a liftoff solution over the photoresist and a field region around the structure. The method also includes forming a mask over the structure and ion milling to remove the overlayer in the field region not covered by the mask. The method then includes lifting off the photoresist using the liftoff solution.
摘要翻译：提供覆盖层下面的光致抗蚀剂的方法包括提供包括光致抗蚀剂的结构，以及沉积在光致抗蚀剂上的不透气的覆盖层和围绕结构的场区域的覆盖层。该方法还包括在结构上形成掩模和离子研磨以去除未被掩模覆盖的场区域中的覆盖层。该方法然后包括使用提升溶液提取光致抗蚀剂。

2. 发明授权

US07785666B1 Methods for fabricating a magnetic recording device 有权
标题翻译：制造磁记录装置的方法
公开(公告)号：US07785666B1
公开(公告)日：2010-08-31
申请号：US11955266
申请日：2007-12-12
申请人： Hai Sun , Liubo Hong , Hongping Yuan , Yizhong Wang , Winnie Yu , Xianzhong Zeng
发明人： Hai Sun , Liubo Hong , Hongping Yuan , Yizhong Wang , Winnie Yu , Xianzhong Zeng
IPC分类号： B05D1/32
CPC分类号： G11B5/855 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： A method and system for fabricating a magnetic recording device are described. The method and system include providing a mask layer on the magnetic recording device and imprinting a pattern in the mask layer to form a mask. The method and system also include transferring the pattern from the mask to the magnetic recording device. In another aspect, the method and system include providing a malleable mask layer on the magnetic recording device. In this aspect, the method and system also include depressing an imprint mask into the mask layer and curing the mask layer while the imprint mask is depressed into the mask layer to provide a mask having a pattern. The pattern may correspond to a read sensor and/or a perpendicular magnetic recording pole. The method and system also include transferring the pattern from the mask to the magnetic recording device.
摘要翻译：描述了用于制造磁记录装置的方法和系统。所述方法和系统包括在磁记录装置上设置掩模层并在掩模层中印刷图案以形成掩模。该方法和系统还包括将图案从掩模转移到磁记录装置。在另一方面，该方法和系统包括在磁记录装置上提供可延展的掩模层。在这方面，该方法和系统还包括将印模掩模压入掩模层中并固化掩模层，同时将印模掩模压入掩模层中以提供具有图案的掩模。图案可以对应于读取传感器和/或垂直磁记录极。该方法和系统还包括将图案从掩模转移到磁记录装置。

3. 发明授权

US08349195B1 Method and system for providing a magnetoresistive structure using undercut free mask 有权
标题翻译：使用无切削掩模提供磁阻结构的方法和系统
公开(公告)号：US08349195B1
公开(公告)日：2013-01-08
申请号：US12163865
申请日：2008-06-27
申请人： Weimin Si , Liubo Hong , Honglin Zhu , Winnie Yu , Rowena Schmidt
发明人： Weimin Si , Liubo Hong , Honglin Zhu , Winnie Yu , Rowena Schmidt
IPC分类号： B44C1/22 , G11B5/127
CPC分类号： G11B5/3912 , B82Y10/00 , G11B5/3163 , G11B5/398 , G11B2005/3996 , Y10T29/49043 , Y10T29/49046 , Y10T29/49052
摘要： A method and system provide a magnetoresistive structure from a magnetoresistive stack that includes a plurality of layers. The method and system include providing a mask that exposes a portion of the magnetoresistive stack. The mask has at least one side, a top, and a base at least as wide as the top. The method and system also include removing the portion of the magnetoresistive stack to define the magnetoresistive structure. The method and system further include providing an insulating layer. A portion of the insulating layer resides on the at least one side of the mask. The method and system further include removing the portion of the insulating layer on the at least one side of the mask and removing the mask.
摘要翻译：一种方法和系统从包括多个层的磁阻堆叠提供磁阻结构。该方法和系统包括提供暴露磁阻堆叠的一部分的掩模。掩模至少具有一个侧面，顶部和至少与顶部一样宽的基部。该方法和系统还包括去除磁阻堆叠的部分以限定磁阻结构。所述方法和系统还包括提供绝缘层。绝缘层的一部分位于掩模的至少一侧。所述方法和系统还包括去除掩模的至少一侧的绝缘层的部分并去除掩模。

4. 发明授权

US08284517B1 Perpendicular magnetic recording head 有权
标题翻译：垂直磁记录头
公开(公告)号：US08284517B1
公开(公告)日：2012-10-09
申请号：US13372775
申请日：2012-02-14
申请人： Hai Sun , Jinqiu Zhang , Hongping Yuan , Donghong Li , Liubo Hong , Yong Shen
发明人： Hai Sun , Jinqiu Zhang , Hongping Yuan , Donghong Li , Liubo Hong , Yong Shen
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49041
摘要： A perpendicular magnetic recording (PMR) head comprises a PMR pole having at least one side, a bottom, and a top wider than the bottom, a first portion of the at least one side being substantially vertical, a second portion of the at least one side being nonvertical, the top portion having a width not greater than one hundred fifty nanometers. The PMR head further comprises a nonmagnetic layer surrounding the bottom and the at least one side of the PMR pole, an intermediate layer substantially surrounding at least the second portion of the at least one side of the PMR pole, and a planarization stop layer adjacent to the first portion of the at least one side of the PMR pole.
摘要翻译：垂直磁记录（PMR）头包括具有至少一个侧面，底部和顶部宽于底部的PMR极，所述至少一个侧面的第一部分基本上垂直，所述至少一个的第二部分侧面是非垂直的，顶部具有不大于一百五十纳米的宽度。 PMR头还包括围绕PMR极的底部和至少一侧的非磁性层，基本上围绕PMR极的至少一个侧面的至少第二部分的中间层和与PMR极的相邻的平坦化停止层 PMR极点的至少一侧的第一部分。

5. 发明授权

US08136224B1 Method and system for providing a perpendicular magnetic recording head utilizing a mask having an undercut line 有权
标题翻译：用于使用具有底切线的掩模来提供垂直磁记录头的方法和系统
公开(公告)号：US08136224B1
公开(公告)日：2012-03-20
申请号：US12121540
申请日：2008-05-15
申请人： Hai Sun , Jinqiu Zhang , Hongping Yuan , Donghong Li , Liubo Hong , Yong Shen
发明人： Hai Sun , Jinqiu Zhang , Hongping Yuan , Donghong Li , Liubo Hong , Yong Shen
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , Y10T29/49041
摘要： A method and system for providing a PMR pole in a magnetic recording transducer including an intermediate layer are disclosed. The method and system include providing a mask including a line on the intermediate layer. The line has at least one side, a top, and a bottom. The side(s) have an undercut such that the top of the line is wider than the bottom. The method further include providing a hard mask on the PMR transducer. The hard mask includes an aperture corresponding to the line. Thus, an aperture in the hard mask corresponding to the line is provided. The method and system also include forming a trench in the intermediate layer under the aperture. The trench has a bottom and a top wider than the bottom. The method further includes providing a PMR pole, at least a portion of which resides in the trench.
摘要翻译：公开了一种用于在包括中间层的磁记录换能器中提供PMR极的方法和系统。该方法和系统包括在中间层上提供包括线的掩模。该线至少有一边，顶部和底部。侧面具有底切，使得线的顶部比底部更宽。该方法还包括在PMR传感器上提供硬掩模。硬掩模包括对应于该线的孔。因此，提供了对应于该线的硬掩模中的孔。该方法和系统还包括在孔下方的中间层中形成沟槽。沟槽的底部和顶部宽于底部。该方法还包括提供PMR极，其至少一部分位于沟槽中。

6. 发明授权

US08310785B1 Perpendicular magnetic recording head 有权
标题翻译：垂直磁记录头
公开(公告)号：US08310785B1
公开(公告)日：2012-11-13
申请号：US13372316
申请日：2012-02-13
申请人： Jinqiu Zhang , Liubo Hong , Yong Shen , Hongping Yuan , Tsung Yuan Chen , Honglin Zhu
发明人： Jinqiu Zhang , Liubo Hong , Yong Shen , Hongping Yuan , Tsung Yuan Chen , Honglin Zhu
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49041
摘要： A perpendicular magnetic recording (PMR) head comprises a PMR pole having at least one side, a bottom, and a top wider than the bottom, a first portion of the at least one side being substantially vertical, a second portion of the at least one side being nonvertical, the top portion having a width not greater than one hundred fifty nanometers. The PRM head further comprises a nonmagnetic layer surrounding the bottom and the at least one side of the PMR pole, an intermediate layer substantially surrounding at least the second portion of the at least one side of the PMR pole, and a hard mask layer adjacent to the first portion of the at least one side of the PMR pole.
摘要翻译：垂直磁记录（PMR）头包括具有至少一个侧面，底部和顶部宽于底部的PMR极，所述至少一个侧面的第一部分基本上垂直，所述至少一个的第二部分侧面是非垂直的，顶部具有不大于一百五十纳米的宽度。 PRM头还包括围绕PMR极的底部和至少一个侧面的非磁性层，基本上围绕PMR极的至少一个侧面的至少第二部分的中间层以及邻近PMR极的硬掩模层 PMR极点的至少一侧的第一部分。

7. 发明授权

US08136225B1 Method and system for providing a perpendicular magnetic recording head 有权
标题翻译：用于提供垂直磁记录头的方法和系统
公开(公告)号：US08136225B1
公开(公告)日：2012-03-20
申请号：US12121624
申请日：2008-05-15
申请人： Jinqiu Zhang , Liubo Hong , Yong Shen , Hongping Yuan , Tsung Yuan Chen , Honglin Zhu
发明人： Jinqiu Zhang , Liubo Hong , Yong Shen , Hongping Yuan , Tsung Yuan Chen , Honglin Zhu
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163 , Y10T29/49041
摘要： A method and system for providing a PMR pole in a magnetic recording transducer including an intermediate layer are disclosed. The method and system include providing a mask including a line on the intermediate layer. The method further include providing a hard mask layer on the mask and removing the line. Thus, an aperture in the hard mask corresponding to the line is provided. The method and system also include forming a trench in the intermediate layer under the aperture. The trench has a bottom and a top wider than the bottom. The method further includes providing a PMR pole, at least a portion of which resides in the trench.
摘要翻译：公开了一种用于在包括中间层的磁记录换能器中提供PMR极的方法和系统。该方法和系统包括在中间层上提供包括线的掩模。该方法还包括在掩模上提供硬掩模层并去除线。因此，提供了对应于该线的硬掩模中的孔。该方法和系统还包括在孔下方的中间层中形成沟槽。沟槽的底部和顶部宽于底部。该方法还包括提供PMR极，其至少一部分位于沟槽中。

8. 发明授权

US08793866B1 Method for providing a perpendicular magnetic recording head 有权
标题翻译：提供垂直磁记录头的方法
公开(公告)号：US08793866B1
公开(公告)日：2014-08-05
申请号：US11960596
申请日：2007-12-19
申请人： Jinqiu Zhang , Liubo Hong , Yong Shen , Yizhong Wang , Hai Sun , Li He
发明人： Jinqiu Zhang , Liubo Hong , Yong Shen , Yizhong Wang , Hai Sun , Li He
IPC分类号： G11B5/187 , C23C14/22
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116
摘要： A method provides a PMR transducer. In one aspect, the method includes forming a trench in an intermediate layer using reactive ion etch(es). The trench top is wider than its bottom. In this aspect, the method also includes providing a seed layer using atomic layer deposition and providing a PMR pole on the seed layer. Portion(s) of the seed layer and PMR pole reside in the trench. In another aspect, the method includes providing a mask including a trench having a top wider than its bottom. In this aspect, the method includes providing mask material in the trench, providing an intermediate layer on the mask material and removing the mask material to provide another trench in the intermediate layer. In this aspect, the method also includes providing a PMR pole in the additional trench.
摘要翻译：一种方法提供PMR换能器。一方面，该方法包括使用反应离子蚀刻在中间层中形成沟槽。沟槽顶部比底部宽。在这方面，该方法还包括使用原子层沉积提供种子层并在种子层上提供PMR极点。种子层和PMR极的部分位于沟槽中。在另一方面，该方法包括提供一种掩模，该掩模包括具有比其底部更宽的顶部的沟槽。在这方面，该方法包括在沟槽中提供掩模材料，在掩模材料上提供中间层并去除掩模材料以在中间层中提供另一个沟槽。在这方面，该方法还包括在附加沟槽中提供PMR极点。

9. 发明授权

US08553360B2 Magnetic recording head having write pole with higher magnetic moment towards trailing edge 有权
标题翻译：磁记录头具有朝向后缘的较高磁矩的写极
公开(公告)号：US08553360B2
公开(公告)日：2013-10-08
申请号：US12634547
申请日：2009-12-09
申请人： Liubo Hong
发明人： Liubo Hong
IPC分类号： G11B5/147 , G11B5/187
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3146 , G11B5/315 , G11B5/3163
摘要： Embodiments of the invention provide a magnetic recording head including a write pole having increasing magnetic moment from a leading edge of the write pole to a trailing edge of the write pole, and methods for manufacturing the same. The write pole may be formed with a plurality of different magnetic material layers having different magnetic moments. A first magnetic layer may be formed with a first magnetic material adjacent a leading edge of the write pole. A second magnetic layer having a greater moment may be formed on the first magnetic layer, thereby increasing the magnetic moment from the leading edge of the write pole to the trailing edge of the write pole.
摘要翻译：本发明的实施例提供了一种磁记录头，其包括具有从写入极的前沿到写入极的后沿的磁矩增加的写入极及其制造方法。写极可以形成有具有不同磁矩的多个不同的磁性材料层。第一磁性层可以形成有与写入极的前沿相邻的第一磁性材料。可以在第一磁性层上形成具有更大力矩的第二磁性层，从而增加从写入极的前沿到写入极的后沿的磁矩。

10. 发明授权

US08524095B2 Process to make PMR writer with leading edge shield (LES) and leading edge taper (LET) 失效
公开(公告)号：US08524095B2
公开(公告)日：2013-09-03
申请号：US12954485
申请日：2010-11-24
申请人： Liubo Hong , Fenglin Liu , Qiping Zhong , Honglin Zhu
发明人： Liubo Hong , Fenglin Liu , Qiping Zhong , Honglin Zhu
IPC分类号： B44C1/22
CPC分类号： G11B5/315 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/3163
摘要： Methods for fabrication of leading edge shields and tapered magnetic poles with a tapered leading edge are provided. The leading edge shield may be formed by utilizing a CMP stop layer. The CMP stop layer may aid in preventing over polishing of the magnetic material. For the tapered magnetic poles with a tapered leading edge, a magnetic material is deposited on a planarized surface, a patterned resist material is formed, and exposed magnetic material is etched to form at least one tapered surface of the magnetic material.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式