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    • 10. 发明申请
    • MULTI-VARIABLE REGRESSION FOR METROLOGY
    • 多变量回归计量学
    • US20090258445A1
    • 2009-10-15
    • US12103690
    • 2008-04-15
    • Wen Zhan ZHOUZheng ZOUJasper GOHMei Sheng ZHOU
    • Wen Zhan ZHOUZheng ZOUJasper GOHMei Sheng ZHOU
    • G01R35/00H01L21/66
    • H01L22/12G01B21/045G01B2210/56H01L22/20
    • A method for assessing metrology tool accuracy is described. Multi-variable regression is used to define the accuracy of a metrology tool such that the interaction between different measurement parameters is taken into account. A metrology tool under test (MTUT) and a reference metrology tool (RMT) are used to measure a set of test profiles. The MTUT measures the test profiles to generate a MTUT data set for a first measurement parameter. The RMT measures the test profiles to generate RMT data sets for the first measurement parameter, and at least a second measurement parameter. Multi-variable regression is then performed to generate a best-fit plane for the data sets. The coefficient of determination (R2 value) represents the accuracy index of the MTUT.
    • 描述了一种评估测量工具精度的方法。 多变量回归用于定义计量工具的准确性,以便考虑不同测量参数之间的相互作用。 被测量的测量工具(MTUT)和参考计量工具(RMT)用于测量一组测试曲线。 MTUT测量测试配置文件,以生成第一个测量参数的MTUT数据集。 RMT测量测试配置文件以生成用于第一测量参数的RMT数据集和至少第二测量参数。 然后执行多变量回归以为数据集生成最佳拟合平面。 测定系数(R2值)表示MTUT的精度指标。