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3. 发明专利

JP2012177193A Liquid material vaporizer 有权
标题翻译：液体物质蒸发器
公开(公告)号：JP2012177193A
公开(公告)日：2012-09-13
申请号：JP2012054917
申请日：2012-03-12
申请人： Horiba Stec Co Ltd , 株式会社堀場エステック
发明人： NISHIKAWA ICHIRO , KONO TAKESHI
IPC分类号： C23C16/448 , B01J7/00 , H01L21/205 , H01L21/31
CPC分类号： C23C16/4481
摘要： PROBLEM TO BE SOLVED: To provide a liquid material vaporizer which performs suitable vaporization by preventing residue from being generated even in the case of vaporizing a liquid material composed of a plurality of materials having different boiling points.SOLUTION: The liquid material vaporizer includes: a gas-liquid mixing section 1 for mixing the liquid material LM and a carrier gas CG to generate a gas-liquid mixture GL; a heating type vaporizing section 2 for vaporizing the gas-liquid mixture GL from the gas-liquid mixing section 1 and exhausting outside with an assistance of the carrier gas CG a gas generated by the vaporization; a connecting section 3 for making a connection between the gas-liquid mixing section 1 and the vaporizing section 2, the connecting section 3 having inside a flow path for the gas-liquid mixture GL; and a connecting section cooling section 4 for cooling the connecting section 3.
摘要翻译：要解决的问题：提供即使在由多种沸点不同的材料组成的液体材料蒸发的情况下也能防止残留物产生适当蒸发的液体蒸发器。液体蒸发器包括：用于混合液体材料LM和载气CG以产生气液混合物GL的气液混合部分1; 用于从气液混合部1蒸发气液混合物GL并借助载气CG排出外部的加热型气化部分2，通过汽化产生的气体; 连接部分3，用于在气液混合部分1和气化部分2之间形成连接;连接部分3在气液混合物GL的流路内部; 以及用于冷却连接部3的连接部冷却部4。版权所有（C）2012，JPO＆INPIT

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