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1. 发明公开

KR20200130131A 흡광 분석 시스템, 흡광 분석 시스템용 프로그램 기억 매체, 흡광 분석 장치, 및 흡광도 측정 방법 审中-公开
公开(公告)号：KR20200130131A
公开(公告)日：2020-11-18
申请号：KR20200051309
申请日：2020-04-28
申请人： HORIBA STEC CO LTD
发明人： SHIMIZU TORU , SAKAGUCHI YUHEI , MINAMI MASAKAZU
IPC分类号： G01N21/35
摘要： 가스를투과한광의강도를검출하는검출기와, 상기가스의전압을측정하는전압센서와, 상기가스중에측정대상가스와함께포함되는간섭가스의분압과흡광도의관계를나타내는간섭가스분압-흡광도관계데이터를기억하는간섭가스분압-흡광도관계기억부와, 상기전압센서로측정된전압에기초하여, 상기간섭가스의분압을추정하는간섭가스분압추정부와, 상기간섭가스분압추정부에서추정된간섭가스추정분압을, 상기간섭가스분압-흡광도관계데이터에기초하여상기간섭가스의흡광도로변환하는간섭가스흡광도변환부와, 상기검출기의출력값과상기간섭가스흡광도변환부에서변환된간섭가스흡광도에기초하여, 상기측정대상가스의흡광도를산출하는측정대상가스흡광도산출부를구비한다.

2. 发明公开

KR20200125427A 흡광 분석 장치, 및 흡광 분석 장치용 프로그램이 기록된 프로그램 기록 매체 审中-公开
公开(公告)号：KR20200125427A
公开(公告)日：2020-11-04
申请号：KR20200032686
申请日：2020-03-17
申请人： HORIBA STEC CO LTD
发明人： SHIMIZU TORU , SAKAGUCHI YUHEI , MINAMI MASAKAZU
IPC分类号： G01N21/31 , G01N21/59 , G01N33/00
摘要： 흡광분석장치에있어서, 검출기의측정영역에간섭가스가존재하고있더라도, 제로교정할수 있도록하기위해서, 가스를투과한광의강도를검출하는검출기와, 상기가스의전압을측정하는전압센서와, 상기검출기의출력치와미리설정된제로기준치에기초하여흡광도를산출하는흡광도산출부와, 제로교정시에상기검출기의측정영역에존재하는간섭가스의분압과상기흡광도산출부에서산출되는흡광도의관계를나타내는분압-흡광도관계데이터를기억하는분압-흡광도관계기억부와, 상기측정영역에이미알고있는농도의상기간섭가스가존재하는기지농도상태에있어서, 상기전압센서로측정된전압과상기농도에기초하여, 상기간섭가스의분압인간섭가스분압을산출하는분압산출부와, 상기간섭가스분압과상기분압-흡광도관계데이터에기초하여, 상기간섭가스의흡광도인간섭가스흡광도를추정하는흡광도추정부와, 상기간섭가스흡광도와상기기지농도상태에있어서의상기검출기의출력치에기초하여, 상기제로기준치를갱신하는제로교정을행하는교정부를구비했다.

3. 发明专利

DE102009051285A1 Vorrichtung zum Steuern der Konzentration eines Materialgases 未知
公开(公告)号：DE102009051285A1
公开(公告)日：2010-09-02
申请号：DE102009051285
申请日：2009-10-29
申请人： HORIBA LTD , HORIBA STEC CO LTD
发明人： MINAMI MASAKAZU , HAYASHI DAISUKE , SAKAGUCHI YUHEI , NISHIMURA KATSUMI , INOUE MASAKI , TAKIJIRI KOTARO
IPC分类号： G01L11/00 , G05D11/02
摘要： Materialgaskonzentrationssteuersystem (100) zum Konstanthalten einer Konzentration eines Materialgases und eines Mischgases selbst dann, wenn der Partialdruck des Materialgases fluktuiert, welches ein gutes Ansprechverhalten aufweist. Das Materialgaskonzentrationssteuersystem (100) wird bei einem Materialverdampfungssystem (1) verwendet mit einem Behälter (13) zum Aufnehmen eines Materials (L), einer Einlassleitung (11) zum Eingeben eines Trägergases zum Verdampfen des im Behälter (14) aufgenommenen Materials und mit einer Auslassleitung (12) zum Ausgeben des Mischgases, welches besteht aus dem Materialgas, welches im Behälter (13) verdampft wurde und dem Trägergas, wobei des Weiteren ein erstes Ventil (23) in der Einlassleitung (11), ein Konzentrationsmessabschnitt (CS) zum Messen der Konzentration des Materialgases im Mischgas und ein Konzentrationssteuerabschnitt (CC) zum Steuern eines Öffnungsgrads des ersten Ventils (23) vorgesehen sind zum Bewirken, dass die gemessene Konzentration des Materialgases, die gemessen wurde vom Konzentrationsmessabschnitt (CS) den Wert einer vorab bestimmten Einstellkonzentration annimmt.

4. 发明专利

DE102009051284A1 未知
公开(公告)号：DE102009051284A1
公开(公告)日：2010-06-02
申请号：DE102009051284
申请日：2009-10-29
申请人： HORIBA LTD , HORIBA STEC CO LTD
发明人： MINAMI MASAKAZU , INOUE MASAKI
IPC分类号： G05D11/02 , G01L11/00
摘要： An object of this invention is to provide a responsive material gas concentration control system that can be mounted on a bubbling system and that can control a concentration of a material gas in a mixed gas at a constant value even though a partial pressure of the material gas fluctuates. The material gas concentration control system is used for a material evaporation system, and comprises a body that is connected to an outlet line and that has an internal flow channel for flowing the mixed gas, a concentration measuring part that measures the concentration of the material gas in the mixed gas, and a first valve that is arranged downstream of the concentration measuring part and that adjusts the measured concentration measured by the concentration measuring part at a previously determined set concentration, wherein the concentration measuring part and the first valve are mounted on the body.

5. 发明专利

JP2011134916A Material gas concentration control system 有权
标题翻译：材料气体浓度控制系统
公开(公告)号：JP2011134916A
公开(公告)日：2011-07-07
申请号：JP2009293533
申请日：2009-12-24
申请人： Horiba Ltd , Horiba Stec Co Ltd , 株式会社堀場エステック , 株式会社堀場製作所
发明人： MINAMI MASAKAZU , INOUE MASANORI
IPC分类号： H01L21/205 , C23C16/448 , C23C16/52 , H01L21/304 , H01L21/31
CPC分类号： G05D11/138 , Y10T137/0396 , Y10T137/2509 , Y10T137/2708 , Y10T137/7736
摘要： PROBLEM TO BE SOLVED: To provide a material gas concentration control system capable of preventing the occurrence of a state such that when a concentration of a material gas is held in a constant state by a certain set concentration, partial pressure of the material gas becomes extremely low, thereby, total pressure corresponding to the partial pressure of the material gas cannot be achieved within a movable range of a valve, and the concentration of the material gas cannot be held constant at the set concentration. SOLUTION: The material gas concentration control system is used for a material vaporization system 100, and includes: a first valve 23 provided on a lead-out pipe 12; a concentration measuring unit CS which measures the concentration of the material gas in a mixed gas; a concentration control unit CC which controls the degree of opening of the first valve 23 so that the measured concentration of the material gas measured by the concentration measuring unit CS reaches the predetermined set concentration; a temperature controller 41 which controls the temperature in a tank so as to be the set temperature; and a temperature setting unit 42 which sets the set temperature of the temperature controller. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够防止发生状态的材料气体浓度控制系统，使得当原料气体的浓度以一定的浓度保持在恒定状态时，材料的分压气体变得非常低，因此在阀的可移动范围内不能实现与原料气体的分压相当的总压力，并且材料气体的浓度不能保持恒定在设定浓度。材料气体浓度控制系统用于材料蒸发系统100，并且包括：设置在引出管12上的第一阀23; 浓度测量单元CS，其测量混合气体中的原料气体的浓度; 浓度控制单元CC，其控制第一阀23的开度，使得由浓度测量单元CS测量的材料气体的测量浓度达到预定设定浓度; 温度控制器41，其将罐中的温度控制为设定温度; 以及设定温度控制器的设定温度的温度设定单元42。版权所有（C）2011，JPO＆INPIT

6. 发明专利

JP2010109305A Material gas concentration control system 有权
标题翻译：材料气体浓度控制系统
公开(公告)号：JP2010109305A
公开(公告)日：2010-05-13
申请号：JP2008282625
申请日：2008-10-31
申请人： Horiba Ltd , Horiba Stec Co Ltd , 株式会社堀場エステック , 株式会社堀場製作所
发明人： MINAMI MASAKAZU , INOUE MASANORI , TAKIJIRI KOTARO
IPC分类号： H01L21/304 , C23C16/448 , H01L21/205
摘要： PROBLEM TO BE SOLVED: To provide a material gas concentration control system capable of stabilizing a measured concentration at a set concentration in a short time even if the set concentration is changed when a material liquid is reduced in a tank or when the response speed of a concentration measurement section is low.
SOLUTION: The concentration control section CC includes: a full pressure calculating section 244 for calculating in-tank pressure for making a material gas as the set concentration based on a measurement temperature measured by a temperature measuring section T; a set pressure setting section 243 for setting the set pressure at the in-tank pressure calculated by the full pressure calculating section 244 during a predetermined period after the change of the set concentration, and changing the set pressure in a tendency that deviation between the measured concentration and the set concentration becomes small during the other period; and a first valve control section 242 for controlling the degree of the opening of the first valve 23 so that the measured pressure measured by the pressure measuring section 22 may be the set pressure.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种材料气体浓度控制系统，其能够在短时间内将设定浓度的测量浓度稳定化，即使当在罐中减少材料液体时设定浓度变化时，或者当响应浓度测定部的速度低。浓度控制部CC包括：全压计算部244，用于基于由温度测量部T测量的测量温度，计算用于使材料气体成为设定浓度的罐内压力; 设定压力设定部243，其在设定浓度变化之后的规定期间内，设定由全压计算部244计算出的车内压力的设定压力，并且以设定压力的变化浓度和浓度在其他时期变小; 以及第一阀控制部242，用于控制第一阀23的打开程度，使得由压力测量部22测量的测量压力可以是设定压力。版权所有（C）2010，JPO＆INPIT

7. 发明专利

JP2013145887A Material gas concentration controller 有权
标题翻译：材料气体浓度控制器
公开(公告)号：JP2013145887A
公开(公告)日：2013-07-25
申请号：JP2013020788
申请日：2013-02-05
申请人： Horiba Ltd , 株式会社堀場製作所 , Horiba Stec Co Ltd , 株式会社堀場エステック
发明人： MINAMI MASAKAZU , INOUE MASANORI
IPC分类号： H01L21/205 , C23C16/455 , H01L21/304 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To provide a material gas concentration controller which achieves good responsiveness and is easily attached to a bubbling system to perform concentration control.SOLUTION: A material gas concentration controller is used for a material vaporization system 1 which includes: a tank 13 housing a material L; an introduction pipe 11 introducing a carrier gas, vaporizing a housed material, into a tank; and a lead out pipe 12 leading out a mixed gas of a material gas generated by the material being vaporized and the carrier gas from the tank 13. The material gas concentration controller includes: a substrate B having an internal flow passage B1 connected with the lead out pipe 12 and used for flowing the mixed gas; a concentration measurement part CS measuring a concentration of the material gas in the mixed gas flowing in the internal passage B1; and a first bulb 23 provided at the downstream relative to the concentration measurement part CS in the internal passage B1 and adjusting the measurement concentration measured by the concentration measurement part CS. The concentration measurement part CS and the first bulb 23 are attached to the substrate B.
摘要翻译：要解决的问题：提供一种能够实现良好的响应性并易于附着于鼓泡系统进行浓度控制的原料气体浓度控制器。解决方案：材料气体浓度控制器用于材料蒸发系统1，其包括：罐13 容纳材料L; 导入管11，引入载气，将容纳物料蒸发到罐中; 以及引出管12，其引出由被蒸发的材料产生的原料气体和来自罐13的载气的混合气体。原料气体浓度控制器包括：具有与引线连接的内部流路B1的基板B 输出管12，用于使混合气体流动; 浓度测量部CS，测量在内部通道B1中流动的混合气体中的原料气体的浓度; 以及设置在内部通路B1中相对于浓度测量部CS的下游的第一灯泡23，并且调节由浓度测量部CS测量的测量浓度。浓度测量部CS和第一灯泡23附接到基板B.

8. 发明专利

JP2012138407A Material gas concentration control system 有权
标题翻译：材料气体浓度控制系统
公开(公告)号：JP2012138407A
公开(公告)日：2012-07-19
申请号：JP2010288187
申请日：2010-12-24
申请人： Horiba Stec Co Ltd , 株式会社堀場エステック
发明人： MINAMI MASAKAZU
IPC分类号： H01L21/304
摘要： PROBLEM TO BE SOLVED: To provide a material gas concentration control system that can improve control response in decreasing or increasing a concentration even if a pressure in a storage chamber is difficult to increase or decrease, for example, because the volume of the storage chamber is large relative to the flow rate of a carrier gas.SOLUTION: An inlet pipe 20 for leading a carrier gas into a storage chamber 10 is provided with a flow controller 50, and an outlet pipe 30 for leading out a mixture gas comprising a material gas and the carrier gas is provided with a concentration controller 40. The flow controller 50 includes a second valve control section 54 for regulating the travel of a second regulation valve 52 such that a measured flow rate measured by a flowmeter 51 becomes a predetermined reference value, in a first state in which the absolute value of a deviation of a measured concentration index value measured by a measuring unit 41 from a set point is a predetermined value or less, and regulating the travel of the second regulation valve 52 such that the measured flow rate exceeds the reference value, in a second state in which the absolute value of the deviation is greater than the predetermined value and the measured concentration index value is greater than the set point.
摘要翻译：要解决的问题：提供一种材料气体浓度控制系统，其即使在储存室中的压力难以增加或减少时也可以提高浓度的降低或增加的控制响应，例如，因为容积储存室相对于载气的流量大。解决方案：用于将载气引导到储存室10中的入口管20设置有流量控制器50，并且用于引出包括原料气体和载气的混合气体的出口管30设置有浓度控制器40.流量控制器50包括用于调节第二调节阀52的行程的第二阀控制部分54，使得由流量计51测量的测量流量变为预定的参考值，其中绝对由测量单元41从设定点测量的测量浓度指数值的偏差值为预定值或更小，并且调节第二调节阀52的行程使得测量流量超过参考值，第二状态，其中偏差的绝对值大于预定值，并且测量的浓度指数值大于设定点。版权所有（C）2012，JPO＆INPIT

9. 发明专利

JP2012138406A Material gas control system 有权
标题翻译：材料气体控制系统
公开(公告)号：JP2012138406A
公开(公告)日：2012-07-19
申请号：JP2010288183
申请日：2010-12-24
申请人： Horiba Stec Co Ltd , 株式会社堀場エステック
发明人： MINAMI MASAKAZU
IPC分类号： H01L21/205 , C23C16/448 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To provide a material gas control system capable of diagnosing whether a control state of concentration and flow rate of material gas is abnormal even if a concentration value and a flow rate value of the material gas when a regulating valve is fully opened or closed nearly match set values.SOLUTION: A material gas control system comprises: a housing chamber 10; an introduction pipe 20 which introduces carrier gas; a lead-out pipe 30 which leads out mixed gas composed of material gas and the carrier gas; a first regulating valve 45; a meter which measures concentration and flow rate of the material gas; a first valve control unit 46 which outputs an opening control signal to the first regulating valve 45 so that the concentration value or the flow rate value measured by the meter matches the set value set in advance; a pressure gauge 44 which measures pressure in the housing chamber 10; and a diagnosis unit 47 which diagnoses that the control state of the concentration or the flow rate of the material gas is abnormal when a time change amount of the opening control signal value and a time change amount of the pressure value measured by the pressure gauge 44 meet predetermined conditions.
摘要翻译：要解决的问题：提供一种能够诊断材料气体的浓度和流量的控制状态是否异常的原料气体控制系统，即使调节阀的材料气体的浓度值和流量值完全打开或关闭几乎匹配设定值。气体控制系统包括：容纳室10; 引入载气的导入管20; 引出由材料气体和载气组成的混合气体的引出管30; 第一调节阀45; 测量材料气体的浓度和流量的仪表; 第一阀控制单元46，其将开启控制信号输出到第一调节阀45，使得由仪表测量的浓度值或流量值与预先设定的设定值相匹配; 测量容纳室10中的压力的压力计44; 以及诊断单元47，其在打开控制信号值的时间变化量和由压力计44测量的压力值的时间变化量时，诊断材料气体的浓度或流量的控制状态异常满足预定条件。版权所有（C）2012，JPO＆INPIT

10. 发明专利

JP2010109304A Material gas concentration control system 有权
标题翻译：材料气体浓度控制系统
公开(公告)号：JP2010109304A
公开(公告)日：2010-05-13
申请号：JP2008282624
申请日：2008-10-31
申请人： Horiba Ltd , Horiba Stec Co Ltd , 株式会社堀場エステック , 株式会社堀場製作所
发明人： MINAMI MASAKAZU , HAYASHI DAISUKE , SAKAGUCHI YUHEI , NISHIMURA KATSUMI , INOUE MASANORI , TAKIJIRI KOTARO
IPC分类号： H01L21/304 , C23C16/52 , H01L21/205 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To provide a material gas concentration control system capable of keeping the concentration of a material gas in a mixed gas constant even if the partial pressure of the material gas varies and having favorable responsiveness. SOLUTION: The material gas concentration control system is used for a material gasifying system 1 including a tank 13 for housing a material L, a lead-in pipe 11 for leading a carrier gas for gasifying the housed material L into the tank 13, and a lead-out pipe 12 for leading a mixed gas of the gasified material gas and the carrier gas from the tank 13. The control system includes a first valve 23 provided on the lead-out pipe 12, a concentration measurement section CS for measuring the concentration of the material gas in the mixed gas, and a concentration control section CC for controlling the opening degree of the first valve 23 so that the measurement concentration of the material gas measured by the concentration measurement section CS may become a set concentration which is previously set. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够使材料气体在混合气体中的浓度保持恒定的材料气体浓度控制系统，即使材料气体的分压变化并具有良好的响应性。解决方案：原料气体浓度控制系统用于包括用于容纳材料L的罐13的材料气化系统1，用于引导载气以将容纳材料L气化到罐13中的导入管11 以及用于引导来自罐13的气化材料气体和载气的混合气体的引出管12.控制系统包括设置在引出管12上的第一阀23，用于测量混合气体中的原料气体的浓度;以及浓度控制部分CC，用于控制第一阀23的开度，使得由浓度测量部分CS测量的原料气体的测量浓度可以变为设定浓度以前设置。版权所有（C）2010，JPO＆INPIT

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