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1. 发明专利

JP2010109304A Material gas concentration control system 有权
标题翻译：材料气体浓度控制系统
公开(公告)号：JP2010109304A
公开(公告)日：2010-05-13
申请号：JP2008282624
申请日：2008-10-31
申请人： Horiba Ltd , Horiba Stec Co Ltd , 株式会社堀場エステック , 株式会社堀場製作所
发明人： MINAMI MASAKAZU , HAYASHI DAISUKE , SAKAGUCHI YUHEI , NISHIMURA KATSUMI , INOUE MASANORI , TAKIJIRI KOTARO
IPC分类号： H01L21/304 , C23C16/52 , H01L21/205 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To provide a material gas concentration control system capable of keeping the concentration of a material gas in a mixed gas constant even if the partial pressure of the material gas varies and having favorable responsiveness. SOLUTION: The material gas concentration control system is used for a material gasifying system 1 including a tank 13 for housing a material L, a lead-in pipe 11 for leading a carrier gas for gasifying the housed material L into the tank 13, and a lead-out pipe 12 for leading a mixed gas of the gasified material gas and the carrier gas from the tank 13. The control system includes a first valve 23 provided on the lead-out pipe 12, a concentration measurement section CS for measuring the concentration of the material gas in the mixed gas, and a concentration control section CC for controlling the opening degree of the first valve 23 so that the measurement concentration of the material gas measured by the concentration measurement section CS may become a set concentration which is previously set. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够使材料气体在混合气体中的浓度保持恒定的材料气体浓度控制系统，即使材料气体的分压变化并具有良好的响应性。解决方案：原料气体浓度控制系统用于包括用于容纳材料L的罐13的材料气化系统1，用于引导载气以将容纳材料L气化到罐13中的导入管11 以及用于引导来自罐13的气化材料气体和载气的混合气体的引出管12.控制系统包括设置在引出管12上的第一阀23，用于测量混合气体中的原料气体的浓度;以及浓度控制部分CC，用于控制第一阀23的开度，使得由浓度测量部分CS测量的原料气体的测量浓度可以变为设定浓度以前设置。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2010109302A Material gas concentration control system 有权
标题翻译：材料气体浓度控制系统
公开(公告)号：JP2010109302A
公开(公告)日：2010-05-13
申请号：JP2008282622
申请日：2008-10-31
申请人： Horiba Ltd , Horiba Stec Co Ltd , 株式会社堀場エステック , 株式会社堀場製作所
发明人： MINAMI MASAKAZU , HAYASHI DAISUKE , SAKAGUCHI YUHEI , NISHIMURA KATSUMI , INOUE MASANORI
IPC分类号： H01L21/304 , C23C16/448 , H01L21/205 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To provide a material gas concentration control system capable of preventing a malfunction that it takes a long time to stabilize a material in a tank to a newly set concentration by estimating an effect that the material in the tank decreases without using a detector such as a material liquid measure.
SOLUTION: The material gas concentration control system includes: a first valve 23 provided on a lead-out pipe 12; a concentration measurement section 21 for measuring the concentration of a material gas in a mixed gas; a pressure measurement section 22 for measuring pressure in the tank; a concentration control section CC for controlling an opening degree of the first valve 23 so that the measured concentration of the material gas measured by the concentration measurement section 22 may become a set concentration which is previously set; and a material liquid amount estimating section 245 for estimating a reserved amount of the material liquid. The concentration control section CC includes: a set pressure setting section 243 for changing the set pressure previously set so as to be changed in a tendency that deviation between the measured concentration and the set concentration becomes small; and a first valve control section 242 for controlling the opening degree of the first valve 23 so that the measured pressure measured by the pressure measurement section 22 may become the set pressure.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够通过估计罐中的材料减少的效果来防止长时间将罐中的材料稳定到新设定浓度的故障的材料气体浓度控制系统而不使用诸如材料液体测量的检测器。解决方案：原料气体浓度控制系统包括：设置在引出管12上的第一阀23; 用于测量混合气体中原料气体浓度的浓度测量部分21; 用于测量罐中的压力的压力测量部分22; 用于控制第一阀23的开度的浓度控制部CC，使得由浓度测量部22测量的材料气体的测量浓度可以成为预先设定的设定浓度; 以及用于估计原料液体的保留量的原料液量估计部245。浓度控制部CC包括：设定压力设定部243，用于改变预先设定的设定压力，使其变化，使得测量浓度和设定浓度之间的偏差变小; 以及第一阀控制部242，用于控制第一阀23的开度，使得由压力测量部22测量的测量压力可以变为设定压力。版权所有（C）2010，JPO＆INPIT

3. 发明专利

JP2012202918A Spectrophotometer and calibration method for the same 有权
标题翻译：分光光度计及其相同的校准方法
公开(公告)号：JP2012202918A
公开(公告)日：2012-10-22
申请号：JP2011069808
申请日：2011-03-28
申请人： Horiba Stec Co Ltd , 株式会社堀場エステック
发明人： HAYASHI DAISUKE , NISHIMURA KATSUMI
IPC分类号： G01N21/27 , G01N21/35 , G01N21/3504
CPC分类号： G01J3/42 , G01J3/28 , G01N21/274 , G01N21/276 , G01N21/3504
摘要： PROBLEM TO BE SOLVED: To provide a spectrophotometer capable of canceling instrumental errors in each instrument and to provide a calibration method of the spectrophotometer.SOLUTION: A spectrophotometer 1 includes: a light source 2 for emitting light to sample gas; photodetectors 51, 52 for detecting light transmitted through the sample gas; an optical filter 4 arranged between the light source 2 and the photodetectors 51, 52; and an arithmetic unit 6 for calculating the concentration of real gas to be measured in the sample gas based on detection signal values obtained by the photodetectors 51, 52. In the spectrophotometer 1, the concentration of the real gas is calculated based on a function α for relating a substitutive gas concentration obtained in a reference instrument to be one reference instrument body to the real gas concentration, a function β for relating the relation of light absorption rates between the real gas and the substitutive gas in the reference instrument to the relation of light absorption rates between the real gas and the substitutive gas in a calibration instrument to be one instrument body to be calibrated and a function expressing relation between the concentration of the substitutive gas in the calibration instrument and the detection signal values.
摘要翻译：要解决的问题：提供能够消除每个仪器中仪器误差的分光光度计，并提供分光光度计的校准方法。分光光度计1包括：用于发光以取样气体的光源2; 用于检测透过样品气体的光的光电检测器51,52; 布置在光源2和光电检测器51,52之间的滤光器4; 以及算术单元6，用于根据由光电检测器51,52获得的检测信号值来计算待测气体的浓度。在分光光度计1中，基于函数α计算真实气体的浓度将参考仪器中获得的替代气体浓度作为一个参考仪器主体与实际气体浓度相关联的函数β，用于将参考仪器中的真实气体和替代气体之间的光吸收率的关系与校准仪器中的真实气体和替代气体之间的光吸收率为要校准的一个仪器主体和表示校准仪器中的替代气体浓度与检测信号值之间的关系的函数。版权所有（C）2013，JPO＆INPIT

4. 发明专利

JP2006029836A Gas analyzer and its calibration method 审中-公开
标题翻译：气体分析仪及其校准方法
公开(公告)号：JP2006029836A
公开(公告)日：2006-02-02
申请号：JP2004205374
申请日：2004-07-13
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： MINAMI MASAKAZU , NISHIMURA KATSUMI
IPC分类号： G01N21/35 , G01N21/3504 , G01N21/61
摘要： PROBLEM TO BE SOLVED: To provide a calibration method of a gas analyzer capable of easily checking the lowering of sensitivity caused by the change of the analyzer with the elapse of time in a line not allowing a span calibration gas to flow, and the gas analyzer. SOLUTION: In the calibration method of the non-dispersion type gas analyzer having a cell 1, a light source 2 for irradiating the inside of the cell 1 with light, a main detector 4 for detecting the transmitted light from the cell 1 to detect the light of an absorbance wavelength region of a component to be measured and a comparison detector 5 for detecting the transmitted light to detect light of a wavelength region reduced in absorption due to a sample gas, an optical filter 10, which is constituted so that the transmissivity of the light in the detection wavelength region of the main detector 4 is different from that of the light in the detection wavelength region of the comparison detector 5 is arranged in the light path from the main detector 4 to the main detector 4 and the comparison detector 5 to perform span calibration without allowing a span calibration gas to flow into the cell 1. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种气体分析仪的校准方法，其能够在不允许跨度校准气体流动的管线中随时间流逝，容易地检查由分析仪的变化引起的灵敏度降低，以及气体分析仪。解决方案：在具有单元1的非分散型气体分析仪的校准方法中，用于用光照射单元1内部的光源2，用于检测来自单元1的透射光的主检测器4 检测要测量的成分的吸光度波长区域的光和用于检测透射光的比较检测器5，以检测由于样品气体而导致的吸收减小的波长区域的光;滤光器10，被构造成在主检测器4的检测波长区域中的光的透射率与比较检测器5的检测波长区域中的光的透射率不同于从主检测器4到主检测器4的光路中，比较检测器5进行量程校准，而不允许跨度校准气体流入电池1.版权所有：（C）2006，JPO＆NCIPI

5. 发明专利

JP2009128029A Exhaust gas analyzer and monitor device of gas treatment device 审中-公开
标题翻译：排气分析仪和气体处理装置的监测装置
公开(公告)号：JP2009128029A
公开(公告)日：2009-06-11
申请号：JP2007300253
申请日：2007-11-20
申请人： Horiba Ltd , Taiyo Nippon Sanso Corp , 大陽日酸株式会社 , 株式会社堀場製作所
发明人： ISAKI RYUICHIRO , NISHIMURA KATSUMI
IPC分类号： G01N21/27 , B01D53/70 , G01N21/35 , G01N21/3504
摘要： PROBLEM TO BE SOLVED: To accurately determine the detoxification efficiency of a fluorescent gas by gas treatment devices at low cost by performing analysis of high precision by monitoring the detoxification efficiency in a plurality of the gas treatment devices under an actual use condition and excluding the effect of moisture and dust present in the gas in large quantities. SOLUTION: The monitor device of the gas treatment devices includes a plurality of the gas treatment devices 1A for subjecting the harmful component in an exhaust gas to detoxification treatment to discharge the same and leading out the exhaust gases before treatment as gases A to be measured and the gases after treatment as gases B to be measured, a first gas analyzer 3, a sampling device 2 for selectively sampling a kind of the gas from a plurality of the gases A to be measured or the gases B to be measured from a plurality of the gas treatment devices to supply the same to the first gas analyzer, a calibration gas supply device 4 for supplying the calibration gas for the first gas analyzer, a control part 5 for controlling the selective sampling of a plurality of the gases A to be measured and the gases B to be measured in the sampling device and an arithmetic part 6 for determining the detoxification efficiency in the gas treatment devices on the basis of the measured value from the gas analyzer. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：为了通过在实际使用条件下监测多个气体处理装置的解毒效率，通过高精度的分析，以低成本精确地确定气体处理装置的荧光气体的解毒效率，排除大量存在于气体中的水分和灰尘的影响。解决方案：气体处理装置的监视装置包括多个气体处理装置1A，用于对废气中的有害成分进行排毒处理，以排出废气，并将其作为气体A至被测量的气体和被测量的气体B，第一气体分析器3，用于从待测量的多个气体A或要测量的气体B中选择性地取样一种气体的取样装置2 将多个气体处理装置供给到第一气体分析装置，用于供给第一气体分析装置用的校准气体的校准用气体供给装置4，用于控制多个气体A的选择取样的控制部5 待测量的气体B和采样装置中要测量的气体B以及运算部分6，用于根据测量值测定气体处理装置的解毒效率气体分析仪。版权所有（C）2009，JPO＆INPIT

6. 发明专利

JP2007225386A Gas analyzer and semiconductor manufacturing apparatus 有权
标题翻译：气体分析仪和半导体制造设备
公开(公告)号：JP2007225386A
公开(公告)日：2007-09-06
申请号：JP2006045552
申请日：2006-02-22
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： NISHIMURA KATSUMI
IPC分类号： G01N21/61
摘要： PROBLEM TO BE SOLVED: To provide an excellent gas analyzer capable of performing a stable measurement even if the temperature of a high-temperature heating type cell changes or the temperature of the sample gas SG in the cell changes.
SOLUTION: The gas analyzer is equipped with the high-temperature heating type cell 1 which houses the sample gas SG containing a substance to be measured, a light source 2 for irradiating the inside of the cell 1 with measuring light L1 and reference light L2 through a light introducing window 11, a light source holding structure 6 for housing and holding the light source 2, the chopping part 5 provided to the light source 2 itself or on the side of the light source 2 and chopping the respective beams of light L1 and L2, a separation means 3 for separating the respective beams of light L1 and L2 led out of a light leading-out window 12 through the cell 1, the photodetectors 41 and 42 provided on the opposite side of the light source 2 of the cell 1 to detect the respective beams of light L1 and L2 separated by the separation means 3 and a photodetector holding structure 7 provided separately from the light source holding structure 6 with the cell 1 in between and housing and holding the photodetectors 41 and 42.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供即使高温加热型电池的温度改变或电池中的样品气体SG的温度变化也能够进行稳定测量的优异的气体分析仪。气体分析仪配备有容纳包含待测物质的样品气体SG的高温加热型电池1，用于用测量光L1照射电池1的内部的光源2和参考通过光引入窗口11的光L2，用于容纳和保持光源2的光源保持结构6，设置在光源2本身或光源2一侧的斩波部分5，并且将各个光束光L1和L2，分离装置3，用于将从光导出窗12引出的各个光束L1和L2分离通过单元1，设置在光源2的相反侧的光电检测器41和42 单元1检测由分离装置3分离的各个光束L1和L2以及与光源保持结构6分开设置的光电检测器保持结构7，单元1在其间并且保持和保持光电探测器41和42。（C）2007，JPO＆INPIT

7. 发明专利

JP2007101433A Gas analyzer 审中-公开
标题翻译：气体分析仪
公开(公告)号：JP2007101433A
公开(公告)日：2007-04-19
申请号：JP2005293411
申请日：2005-10-06
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： MINAMI MASAKAZU , NISHIMURA KATSUMI
IPC分类号： G01N21/61 , G01N21/01 , G01N21/03 , G01N21/05 , G01N21/35 , G01N21/3504
摘要： PROBLEM TO BE SOLVED: To provide structure suitable for gas analysis in line, to secure measuring precision even when an ambient temperature is varied, and to compactify a size, in a gas analyzer capable of irradiating a sample gas containing a measuring objective substance, with a prescribed wavelength (for example, infrared ray) of measuring light having a transmittance attenuated when impinged to the measuring objective substance, and another wavelength of nonattenuated reference light, and capable of measuring a concentration of the measuring objective substance in the sample gas, based on an attenuation amount of the measuring light in comparison with the reference light. SOLUTION: This gas analyzer is provided with a light source holding structure 6 for storage-holding a light source 2, a photodetector holding structure 7 provided as a separate body separated from the light source holding structure 6 with a cell 1 therebetween, and for storage-holding photodetectors 41, 42, and a light source side temperature regulation mechanism 8 capable of temperature-regulating independently the photodetector holding structure 7. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供适合于气体分析的结构，即使在环境温度变化时也能确保测量精度，并且在能够照射含有测量目标的样品气体的气体分析仪中来压缩尺寸具有预定的波长（例如，红外线）的测量光，其具有在撞击到测量对象物质时衰减的透射率，以及另一波长的非衰减参考光，并且能够测量样品中的测量目标物质的浓度气体，与基准光相比，基于测量光的衰减量。解决方案：该气体分析仪设置有用于保存光源2的光源保持结构6，设置为与光源保持结构6分离的独立主体的光电检测器保持结构7，其间具有单元1，以及能够独立地对光电检测器保持结构7进行温度调节的存储保持用光电检测器41,42以及光源侧温度调节机构8.（C）2007，JPO＆INPIT

8. 发明专利

JP2007248369A Gas analyzer and analysis method 审中-公开
标题翻译：气体分析仪和分析方法
公开(公告)号：JP2007248369A
公开(公告)日：2007-09-27
申请号：JP2006074785
申请日：2006-03-17
申请人： Horiba Ltd , 株式会社堀場製作所
发明人： MINAMI MASAKAZU , NISHIMURA KATSUMI , YOSHIDA MAKOTO , SAKAGUCHI YUUHEI
IPC分类号： G01N21/61 , G01N21/35 , G01N21/3504
摘要： PROBLEM TO BE SOLVED: To improve measurement accuracy by preventing dew formation without having to require heating temperature control and measure a high concentration of a component to be measured exceeding a concentration range detectable by an apparatus. SOLUTION: A gas analyzer includes a circulating tube 2 for circulating a sample gas SG; a measuring cell 3 provided for the circulating tube 2 for measuring the component to be measured in the sample gas SG; an analysis part 4 for irradiating light L to the measuring cell 3, detecting light L transmitted through the measuring cell 3, and analyzing the component to be measured on the basis of its light intensity signal; a pressure regulating mechanism 5 for regulating the pressure in the circulating tube 2 and in the measuring cell 3; and a control part 75 of the pressure regulating mechanism 5 for reducing the partial pressure of the component to be measured in the sample gas SG to the vapor pressure P MAX of the component to be measured by controlling the pressure regulating mechanism 5 and regulating the pressure in the circulating tube 2 and in the measuring cell 3. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：通过防止结露而不需要加热温度控制并且测量超过被设备可检测的浓度范围的待测量的组分的高浓度来提高测量精度。气体分析仪包括用于循环样品气体SG的循环管2; 设置在循环管2中的测量单元3，用于测量样品气体SG中待测量的成分; 用于将光L照射到测量单元3的分析部分4，检测通过测量单元3传输的光L，并且基于其光强度信号分析待测量的分量; 用于调节循环管2和测量单元3中的压力的压力调节机构5; 以及压力调节机构5的控制部75，用于通过控制压力来将待测部件的分压降低到要测量的部件的蒸气压P MAX 调节机构5并调节循环管2和测量单元3中的压力。版权所有（C）2007，JPO＆INPIT

9. 发明专利

DE102009051285A1 Vorrichtung zum Steuern der Konzentration eines Materialgases 未知
公开(公告)号：DE102009051285A1
公开(公告)日：2010-09-02
申请号：DE102009051285
申请日：2009-10-29
申请人： HORIBA LTD , HORIBA STEC CO LTD
发明人： MINAMI MASAKAZU , HAYASHI DAISUKE , SAKAGUCHI YUHEI , NISHIMURA KATSUMI , INOUE MASAKI , TAKIJIRI KOTARO
IPC分类号： G01L11/00 , G05D11/02
摘要： Materialgaskonzentrationssteuersystem (100) zum Konstanthalten einer Konzentration eines Materialgases und eines Mischgases selbst dann, wenn der Partialdruck des Materialgases fluktuiert, welches ein gutes Ansprechverhalten aufweist. Das Materialgaskonzentrationssteuersystem (100) wird bei einem Materialverdampfungssystem (1) verwendet mit einem Behälter (13) zum Aufnehmen eines Materials (L), einer Einlassleitung (11) zum Eingeben eines Trägergases zum Verdampfen des im Behälter (14) aufgenommenen Materials und mit einer Auslassleitung (12) zum Ausgeben des Mischgases, welches besteht aus dem Materialgas, welches im Behälter (13) verdampft wurde und dem Trägergas, wobei des Weiteren ein erstes Ventil (23) in der Einlassleitung (11), ein Konzentrationsmessabschnitt (CS) zum Messen der Konzentration des Materialgases im Mischgas und ein Konzentrationssteuerabschnitt (CC) zum Steuern eines Öffnungsgrads des ersten Ventils (23) vorgesehen sind zum Bewirken, dass die gemessene Konzentration des Materialgases, die gemessen wurde vom Konzentrationsmessabschnitt (CS) den Wert einer vorab bestimmten Einstellkonzentration annimmt.

10. 发明专利

JP2000002656A GAS ANALYZER 失效
公开(公告)号：JP2000002656A
公开(公告)日：2000-01-07
申请号：JP18164598
申请日：1998-06-12
申请人： HORIBA LTD
发明人： NISHIMURA KATSUMI , IKEMOTO KAZUYUKI , NAKAJIMA YOSHIYUKI
IPC分类号： G01N21/3504 , G01N21/35
摘要： PROBLEM TO BE SOLVED: To obtain a gas analyzer in which the temperature of a sample gas in a gas introduction pipe is held to be constant without separately installing the heater of a cell for gas measurement and the gas introduction pipe, which is not restricted in terms of a space and which is low in cost. SOLUTION: The gas analyzer is provided with a heater 7 which is placed on the circumferential face of a cell 1 for gas measurement, a temperature regulator 14 which controls the temperature of the heater 7, a gas introduction pipe 9 which is heated by the heater 7, and one end of which is connected to a gas introduction hole 10 in the cell 1 and the other end of which is connected to a sample gas line, and a heat insulating material 15 with which the cell 1, the heater 7 and the gas introduction pipe 9 are covered.

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