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    • 3. 发明申请
    • VAPORIZABLE METALORGANIC COMPOUNDS FOR DEPOSITION OF METALS AND METAL-CONTAINING THIN FILMS
    • 用于金属沉积和含金属薄膜的可蒸发金属化合物
    • WO2007005088A3
    • 2007-05-18
    • PCT/US2006014752
    • 2006-04-17
    • HONEYWELL INT INCTHENAPPAN ALAGAPPANLAO JINGYUNAIR HARIDASAN KDEVI ANJANABHAKTA RAGHUNANDANMILANOV ANDRIAN
    • THENAPPAN ALAGAPPANLAO JINGYUNAIR HARIDASAN KDEVI ANJANABHAKTA RAGHUNANDANMILANOV ANDRIAN
    • C07F7/00C07F9/00C23C16/00H01L21/00
    • C23C16/45553C07F7/006C07F9/005C23C16/405
    • A new class of metalorganic vaporizable compounds with mixed ligands is described herein, along with their use for the deposition of thin films of metals and metal- containing oxides, nitrides, oxynitrides, silicates, suicides, metal containing materials, and combinations thereof. . The metalorganic vaporizable compounds comprise amides in combination with malonates and guanidinates as donor-functionalized bidentate chelating ligands. The use of a metalorganic vaporizable compounds with mixed ligands to deposit and modify thin films of Hf, Zr, Ti, Ta, Al, Sn, Zn, Ca, Mg, Ga, In, Tl, Sc, Bi, Rh, Ir, La, Pr, Eu, Gd, Ba, Sr, and other lanthanide metal oxides, nitrides, oxynitrides, silicates, suicides, and composites, and further use of metalorganic vaporizable compounds with mixed ligands to deposit thin films of Ru, Cu, Co, Ag, Au, Pd, Pt, Ni, Fe, Mn, Cr, V, Nb, Pb, W, Si, Ge and Mo metals, metal oxides, nitrides, oxynitrides, silicates, suicides and combinations thereof are also described herein. A process for the preparation of metalorganic vaporizable compounds comprising amides in combination with donor-functionalized bidentate chelating ligands as a mixed ligand system is described herein. In addition, the use of metalorganic vaporizable compounds in various vapor phase deposition processes such as metal organic chemical vapor deposition (MOCVD) and atomic layer deposition (ALD) of metals and metal-containing oxide thin films is described herein.
    • 本文描述了一类新的具有混合配体的金属有机气化化合物,以及它们用于沉积金属和含金属氧化物,氮化物,氮氧化物,硅酸盐,硅化物,含金属材料及其组合的薄膜的用途。 。 金属有机可汽化化合物包含与丙二酸盐和胍盐组合的酰胺作为供体官能化的二齿螯合配体。 使用具有混合配体的金属有机可汽化化合物沉积和修饰Hf,Zr,Ti,Ta,Al,Sn,Zn,Ca,Mg,Ga,In,Tl,Sc,Bi,Rh,Ir,La中的薄膜 ,Pr,Eu,Gd,Ba,Sr和其他镧系元素金属氧化物,氮化物,氮氧化物,硅酸盐,硅化物和复合材料,并进一步使用具有混合配体的金属有机可汽化化合物沉积Ru,Cu,Co,Ag 本文还描述了Au,Pd,Pt,Ni,Fe,Mn,Cr,V,Nb,Pb,W,Si,Ge和Mo金属,金属氧化物,氮化物,氮氧化物,硅酸盐,硅化物及其组合。 本文描述了一种制备包含与供体官能化的二齿螯合配体作为混合配体体系的酰胺的金属有机可汽化化合物的方法。 另外,本文描述了在金属有机化学气相沉积(MOCVD)和金属和含金属的氧化物薄膜的原子层沉积(ALD)的各种气相沉积工艺中使用金属有机可汽化化合物。
    • 5. 发明公开
    • SYNTHESIS OF CHLOROTRIFLUOROETHYLENE-BASED BLOCK COPOLYMERS BY IODINE TRANSFER POLYMERIZATION
    • 合成二氯乙烯苯乙烯嵌段共聚物去离子水
    • EP3052536A4
    • 2017-05-17
    • EP14848121
    • 2014-09-12
    • HONEYWELL INT INCCENTRE NAT RECH SCIENT
    • THENAPPAN ALAGAPPANAMADURI BRUNOLOPEZ GERALD
    • C08F293/00C08F2/38C08F214/24
    • C08F214/242C08F2/38C08F214/24C08F293/005C08F2438/00
    • Methods for the synthesis of CTFE-based block copolymers through iodine transfer polymerization are disclosed. In an exemplary embodiment, a method includes reacting a fluoromonomer “M” with a chain transfer agent of the formula X—Y or Y—X—Y, wherein X represents a C1-C3 hydrocarbon, a C1-C6 hydrofluorocarbon, C1-C6 hydrochlorofluorocarbon, or C1-C6 fluorocarbon and Y represents iodine or bromine, in the presence of a radical initiator, to form a macro-initiator of the formula: X-poly(M)-Y or Y-poly(M)-X-poly(M)-Y, wherein poly(M) represents a polymer of the fluoromonomer. The method further includes reacting the macro-initiator with chlorotrifluoroethylene (CTFE) in the presence of a radical initiator to form a diblock or a triblock CTFE-based block copolymer of the formula: X-poly(M)-block-poly(CTFE) or PCTFE-block-poly(M)-X-poly(M)-block-PCTFE.
    • 公开了通过碘转移聚合合成CTFE基嵌段共聚物的方法。 在一个示例性实施方案中,一种方法包括使含氟单体“M”与式X-Y或Y-X-Y的链转移剂反应,其中X表示C1-C3烃,C1-C6氢氟烃,C1-C6 氯代氟代烃或C1-C6碳氟化合物,Y代表碘或溴,在自由基引发剂的存在下形成下式的大分子引发剂:X-聚(M)-Y或Y-聚(M)-X- 聚(M)-Y,其中聚(M)表示所述含氟单体的聚合物。 该方法还包括在自由基引发剂存在下使大分子引发剂与氯三氟乙烯(CTFE)反应以形成下式的二嵌段或三嵌段CTFE基嵌段共聚物:X-聚(M) - 嵌段 - 聚(CTFE) 或PCTFE-嵌段 - 聚(M)-X-聚(M) - 嵌段-PCPFE。