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1. 发明专利

DE102004042056A1 未知
公开(公告)号：DE102004042056A1
公开(公告)日：2005-07-14
申请号：DE102004042056
申请日：2004-08-31
申请人： HITACHI VIA MECHANICS LTD
发明人： TOYAMA SOUICHI , OTSUKI HARUAKI , SAKAMOTO ATSUSHI , SEKI KENTA , OKUBO YAICHI
IPC分类号： G02B26/10 , H05K3/00
摘要： A scanner system includes a servo control unit. A rotation angle of a rotating shaft supporting a mirror is detected, and an error of the detected value with respect to a commanded value is integrated by an integral compensator so that the detected value is able to track the commanded value. A tracking error proportional compensator is disposed in parallel with the integral compensator so as to add a correction value proportional to the error to the integrated value of the error. A plurality of gains are prepared for each of the integral compensator, the tracking error proportional compensator, a detected value proportional compensator and a detected value differential compensator of the servo control unit. Each gain is changed in accordance with a travel angle of the commanded value. Thus, the mirror can be positioned quickly so that the machining speed can be improved.

2. 发明专利

HK1074885A1 Scanner system 未知
公开(公告)号：HK1074885A1
公开(公告)日：2005-11-25
申请号：HK05106979
申请日：2005-08-12
申请人： HITACHI VIA MECHANICS LTD
发明人： TOYAMA SOUICHI , OTSUKI HARUAKI , SAKAMOTO ATSUSHI , SEKI KENTA , OKUBO YAICHI
IPC分类号： G02B20060101 , G02B26/10 , H01S20060101 , H05K3/00
摘要： A scanner system includes a servo control unit. A rotation angle of a rotating shaft supporting a mirror is detected, and an error of the detected value with respect to a commanded value is integrated by an integral compensator so that the detected value is able to track the commanded value. A tracking error proportional compensator is disposed in parallel with the integral compensator so as to add a correction value proportional to the error to the integrated value of the error. A plurality of gains are prepared for each of the integral compensator, the tracking error proportional compensator, a detected value proportional compensator and a detected value differential compensator of the servo control unit. Each gain is changed in accordance with a travel angle of the commanded value. Thus, the mirror can be positioned quickly so that the machining speed can be improved.

3. 发明专利

DE102007037183A1 未知
公开(公告)号：DE102007037183A1
公开(公告)日：2008-02-14
申请号：DE102007037183
申请日：2007-08-07
申请人： HITACHI VIA MECHANICS LTD , NAT UNIV CORP NAGOYA INST TECH
发明人： TOYAMA SOUICHI , KITAMURA KOUNOSUKE , DOI AKIRA , HIRAI HIROMU , SEKI KENTA , YOSHIAKI KANO
IPC分类号： H01F7/14 , G02B26/08 , G02B26/10 , H02K1/22 , H02K1/27 , H02K9/19 , H02K9/22
摘要： A rocking actuator and a laser machining apparatus which can suppress a temperature rise of a permanent magnet in a moving-magnet actuator. Even when a steerable mirror is positioned by rapid and continuous motions, highly reliable machining can be performed without degrading machining throughput or hole position accuracy. A cooling jacket for cooling a casing and heat transfer units brought into contact with a coil and the casing are provided. Heat generated in the coil is introduced to the casing through the heat transfer bypass units. Thus, the temperature rise of the coil is suppressed. Radial grooves are provided in the permanent magnet opposed to the coil so as to prevent an eddy current from appearing therein. Groove depth is made not smaller than skin depth expressed by a function of volume resistivity and permeability of the permanent magnet and a fundamental frequency of a current applied to the coil.

4. 发明专利

DE102004042031A1 未知
公开(公告)号：DE102004042031A1
公开(公告)日：2005-09-08
申请号：DE102004042031
申请日：2004-08-31
申请人： HITACHI VIA MECHANICS LTD
发明人： OTSUKI HARUAKI , TOYAMA SOUICHI , SEKI KENTA , OKUBO YAICHI , KITAMURA DAISUKE
IPC分类号： B23K26/00 , G02B5/08 , G02B7/182 , G02B26/00 , G02B26/10 , G02B26/12 , G06K7/10 , G06K7/14 , H05K3/00
摘要： A optical scanner control method and a optical scanner capable of positioning a mirror at a high speed independently of a rocking angle, and a laser machining apparatus for irradiating a printed circuit board with a laser beam by use of the optical scanner to thereby perforate the printed circuit board. In order to operate an actuator for rocking the mirror based on a deviation of a current position from an commanded value, a change in gain of the actuator is measured in accordance with each rocking angle in advance, and the manipulated variable of the actuator is corrected to cancel the change in gain. Thus, the influence of the alteration of a torque constant in accordance with the rocking angle can be suppressed so that the response characteristic becomes uniform all over a scanning region, and the positioning speed can be improved.

5. 发明专利

JP2011154196A Galvano scanner and laser beam machining device 审中-公开
标题翻译： GALVANO扫描仪和激光束加工设备
公开(公告)号：JP2011154196A
公开(公告)日：2011-08-11
申请号：JP2010015735
申请日：2010-01-27
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： TOYAMA SOICHI , SEKI KENTA
IPC分类号： G02B26/10 , B23K26/08 , G02B21/06
摘要： PROBLEM TO BE SOLVED: To make a mirror face flat for positioning a mirror by certainly suppressing a plane tilt oscillation and/or a torsional oscillation.
SOLUTION: A galvano scanner 1 includes a mirror 2 supported by a rotary shaft 4 and an actuator 5 which performs the rocking drive of the rotary shaft 4, and reflects a light beam with the mirror 2 to irradiate a desired position. Piezoelectric elements 6a and 6b are laminated and disposed on the same face of the mirror 2, one of the piezoelectric elements functions as a deformation quantity detector which detects the deformation quantity of the mirror 2, and the other functions as a deformation force applicator which applies deformation force on the mirror 2. Also the deformation force is applied on the mirror 2 on the basis of the detected deformation quantity of the mirror 2, the oscillation of the mirror is suppressed, and the plane tilt oscillation and/or the torsional oscillation are certainly suppressed.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了通过肯定地抑制平面倾斜振荡和/或扭转振荡来使得用于定位反射镜的镜面平坦。电动扫描仪1包括由旋转轴4支撑的反射镜2和执行旋转轴4的摇摆驱动的致动器5，并且将反射镜2的光束反射以照射期望的位置。压电元件6a和6b层叠并设置在反射镜2的同一面上，其中一个压电元件用作检测反射镜2的变形量的变形量检测器，另一个作为变形力施加器起作用反射镜2上的变形力也是基于检测到的反射镜2的变形量而施加到反射镜2上的变形力，反射镜的摆动被抑制，平面倾斜振动和/或扭转振动肯定压制版权所有（C）2011，JPO＆INPIT

6. 发明专利

JP2009271417A Galvanoscanner apparatus and laser machining apparatus equipped with galvanoscanner apparatus 有权
标题翻译： GALVANOSCANNER装置和装有GALVANOSCANNER装置的激光加工装置
公开(公告)号：JP2009271417A
公开(公告)日：2009-11-19
申请号：JP2008123380
申请日：2008-05-09
申请人： Hitachi Via Mechanics Ltd , Nagoya Institute Of Technology , 国立大学法人名古屋工業大学 , 日立ビアメカニクス株式会社
发明人： SEKI KENTA , HIROSE NORIAKI , HIRAI HIROTAKE , TOYAMA SOICHI
IPC分类号： G02B26/10 , B23K26/06 , B23K26/08
摘要： PROBLEM TO BE SOLVED: To provide a galvanoscanner apparatus in which a mirror which reflects a light beam such as laser light is positioned accurately at a high speed, and to provide a laser machining apparatus equipped with the galvanoscanner apparatus. SOLUTION: The galvanoscanner apparatus comprises: a mirror 2 supported on a turning shaft 5; an angle detection means composed of an encoder plate 7 supported on the turning shaft 5 and a sensor head 8 fixed on a frame 12b; and a servo control unit which allows the mirror 2 to follow a target angular value by using an angular detection value 14 detected by the angular detection means, wherein a strain sensor 10 is provided on the mirror 2 to detect the deformation of the mirror 2 and the mirror 2 is positioned on the basis of the output signal 20 of the strain sensor 10 and output signal 14 of the angular detection means. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种其中反射激光等光束的反射镜高精度地定位的反光镜装置，并提供配备有电流扫描仪装置的激光加工装置。解决方案：电流扫描仪装置包括：支撑在转动轴5上的反射镜2; 由支承在转动轴5上的编码器板7和固定在框架12b上的传感器头8构成的角度检测装置; 以及伺服控制单元，其允许反射镜2通过使用由角度检测装置检测的角度检测值14跟随目标角度值，其中应变传感器10设置在反射镜2上以检测反射镜2的变形，反射镜2基于应变传感器10的输出信号20和角度检测装置的输出信号14定位。版权所有（C）2010，JPO＆INPIT

7. 发明专利

JP2008043133A Rocking actuator device and laser machining device 审中-公开
标题翻译：摇动执行器装置和激光加工装置
公开(公告)号：JP2008043133A
公开(公告)日：2008-02-21
申请号：JP2006216988
申请日：2006-08-09
申请人： Hitachi Via Mechanics Ltd , Nagoya Institute Of Technology , 国立大学法人名古屋工業大学 , 日立ビアメカニクス株式会社
发明人： TOYAMA SOICHI , KITAMURA KONOSUKE , DOI AKIRA , HIRAI HIROTAKE , SEKI KENTA , KANO YOSHIAKI
IPC分类号： H02K9/22 , G02B26/08 , G02B26/10 , H02K1/22 , H02K1/27 , H02K9/19
CPC分类号： H02K26/00 , H02K33/16
摘要： PROBLEM TO BE SOLVED: To provide a rocking actuator device and a laser machining device, with which a temperature rise of a permanent magnet in a moving magnet-type rocking actuator is controlled and highly reliable processing is realized without deterioration of a processing throughput and hole position precision even if a positioning operation of a galvanometer mirror is continuously performed at high speed, for example.
SOLUTION: A cooling jacket 43 cooling a case 41 and heat transmission bypassing means 50 and 51 which are brought into contact with a coil 33 and the case 41 are arranged. The heat transmission bypassing means 50 and 51 guide heat generated in the coil 33 to the case 41, and the temperature rise of the coil 33 is controlled. Grooves 300 to 302 in a radial direction are arranged in the permanent magnet 30 confronted with the coil 33, and occurrence of eddy current in the permanent magnet 30 is prevented. Depth of the grooves is set to be not less than skin depth shown by a function of a volume resistivity and permeability of the permanent magnet 30, and a fundamental frequency of current flowing to the coil 33.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种摆动致动器装置和激光加工装置，通过该摆动致动器装置和激光加工装置，可以控制移动磁体式摆动致动器中的永久磁铁的温度上升，并且可以实现高度可靠的处理，而不会使处理恶化即使以高速连续地进行电动反射镜的定位操作，也能够提高吞吐量和孔位精度。解决方案：布置冷却壳体41的冷却套43和与线圈33和壳体41接触的热传递旁路装置50和51。热传递旁路装置50和51将线圈33中产生的热引导到壳体41，并且控制线圈33的温度升高。在与线圈33相对的永磁体30中配置有径向的槽部300〜302，并且防止永磁体30的涡电流的产生。凹槽的深度被设定为不小于永磁体30的体积电阻率和磁导率的函数所示的趋肤深度以及流过线圈33的电流的基频。（C）2008 ，JPO＆INPIT

8. 发明专利

JP2005234215A Method of controlling galvanoscanner, galvanoscanner and laser machining apparatus 有权
标题翻译：控制糖蛋白酶，糖蛋白激酶和激光加工装置的方法
公开(公告)号：JP2005234215A
公开(公告)日：2005-09-02
申请号：JP2004043050
申请日：2004-02-19
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： OTSUKI HARUAKI , TOYAMA SOICHI , SEKI KENTA , OKUBO YAICHI , KITAMURA DAISUKE
IPC分类号： B23K26/00 , B23K26/08 , G02B5/08 , G02B7/182 , G02B26/00 , G02B26/10 , G02B26/12 , G06K7/10 , G06K7/14 , H05K3/00
CPC分类号： G02B26/105 , G02B7/1821
摘要： PROBLEM TO BE SOLVED: To provide a method of controlling a galvanoscanner with which a mirror is positioned at a high speed at any rocking angle, a galvanoscanner and a laser machining apparatus in which a hole is drilled on a printed substrate irradiated with a laser beam by using the galvanoscanner.
SOLUTION: An actuator 110 which rocks the mirror is operated on the basis of the deviation between a command signal 215 and a present position 242, and the operation amount of the actuator 110 is so corrected to eliminate a gain variation by preliminarily measuring the gain variation of the actuator 110 corresponding to the rocking angle. Thus, the influence of the variation in a torque constant corresponding to the rocking angle is suppressed, a response characteristic is uniformized over a whole scanning region and the positioning speed is increased.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种控制反射镜以任何摆动角度高速定位的电流扫描器的方法，电扫描仪和激光加工设备，其中在被照射的印刷基板上钻孔使用电流扫描仪的激光束。解决方案：基于命令信号215和当前位置242之间的偏差来操作摇动反射镜的致动器110，并且致动器110的操作量被校正以通过预先测量来消除增益变化致动器110的增益变化对应于摆动角度。因此，抑制与摆动角度相对应的转矩常数的变化的影响，使整个扫描区域的响应特性均匀化，并且定位速度提高。版权所有（C）2005，JPO＆NCIPI

9. 发明专利

JP2005173377A Scanner device 有权
标题翻译：扫描仪
公开(公告)号：JP2005173377A
公开(公告)日：2005-06-30
申请号：JP2003415247
申请日：2003-12-12
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： TOYAMA SOICHI , OTSUKI HARUAKI , SAKAMOTO ATSUSHI , SEKI KENTA , OKUBO YAICHI
IPC分类号： B23K26/08 , G02B26/10 , H05K3/00
CPC分类号： G02B26/105 , B23K26/08 , B23K26/082 , H05K3/0026
摘要： PROBLEM TO BE SOLVED: To provide a scanner device which quickly conducts positioning for a mirror and increases a processing speed.
SOLUTION: In the scanner device, a servo controller 2 is provided, a rotational angle of a rotary shaft 13 which supports a mirror 12 is detected and a deviation of the detected detection value with respect to a command value is integrated by an integral compensator 24 so that the detected value follows up the command value. A follow-up error proportional compensator 25 is arranged in parallel with the integral compensator 24 so as to add a correction value proportional to the deviation of the integrated value of the deviation. Moreover, a plurality of the gains for the integral compensator 24, the follow-up error proportional compensator 25, a detected value proportional compensator 27 and a detected value differential compensator 28 of the servo controller 2 are beforehand prepared and the respective gains are changed in accordance with the moving stroke of the angular command for the mirror 12.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种快速进行反射镜定位并提高处理速度的扫描仪装置。解决方案：在扫描仪装置中，设置有伺服控制器2，检测到支撑反射镜12的旋转轴13的旋转角度，并且检测到的检测值相对于指令值的偏差通过积分补偿器24，使得检测值跟随命令值。随机误差比例补偿器25与积分补偿器24并联布置，以便增加与偏差的积分值的偏差成比例的校正值。此外，预先准备积分补偿器24，跟踪误差比例补偿器25，检测值比例补偿器27和检测值差分补偿器28的多个增益，并且各自的增益被改变根据反射镜12的角度指令的移动行程。（C）2005年，JPO和NCIPI

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