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1. 发明专利

DE102006028306A1 未知
公开(公告)号：DE102006028306A1
公开(公告)日：2007-01-04
申请号：DE102006028306
申请日：2006-06-20
申请人： HITACHI VIA MECHANICS LTD
发明人： DOI AKIRA , OTSUKI HARUAKI , SAKAMOTO ATSUSHI , TOYAMA SOUICHI , OKUBO YAICHI
IPC分类号： H02K21/14 , H02K19/06
摘要： A scanner has a rotor, and a stator disposed in the outside of the rotor. The rotor includes a shaft, and a permanent magnet mounted on the outer circumferential side of the shaft. The stator includes a casing, a yoke held in the inner circumferential side of the casing, and coils disposed in the inner circumferential side of the yoke. The permanent magnet of the rotor has radially depressed grooves formed in its outer circumferential portion. The torque constant of the scanner is circumferentially equalized by the grooves.

2. 发明专利

DE102004042056A1 未知
公开(公告)号：DE102004042056A1
公开(公告)日：2005-07-14
申请号：DE102004042056
申请日：2004-08-31
申请人： HITACHI VIA MECHANICS LTD
发明人： TOYAMA SOUICHI , OTSUKI HARUAKI , SAKAMOTO ATSUSHI , SEKI KENTA , OKUBO YAICHI
IPC分类号： G02B26/10 , H05K3/00
摘要： A scanner system includes a servo control unit. A rotation angle of a rotating shaft supporting a mirror is detected, and an error of the detected value with respect to a commanded value is integrated by an integral compensator so that the detected value is able to track the commanded value. A tracking error proportional compensator is disposed in parallel with the integral compensator so as to add a correction value proportional to the error to the integrated value of the error. A plurality of gains are prepared for each of the integral compensator, the tracking error proportional compensator, a detected value proportional compensator and a detected value differential compensator of the servo control unit. Each gain is changed in accordance with a travel angle of the commanded value. Thus, the mirror can be positioned quickly so that the machining speed can be improved.

3. 发明专利

DE102004042031A1 未知
公开(公告)号：DE102004042031A1
公开(公告)日：2005-09-08
申请号：DE102004042031
申请日：2004-08-31
申请人： HITACHI VIA MECHANICS LTD
发明人： OTSUKI HARUAKI , TOYAMA SOUICHI , SEKI KENTA , OKUBO YAICHI , KITAMURA DAISUKE
IPC分类号： B23K26/00 , G02B5/08 , G02B7/182 , G02B26/00 , G02B26/10 , G02B26/12 , G06K7/10 , G06K7/14 , H05K3/00
摘要： A optical scanner control method and a optical scanner capable of positioning a mirror at a high speed independently of a rocking angle, and a laser machining apparatus for irradiating a printed circuit board with a laser beam by use of the optical scanner to thereby perforate the printed circuit board. In order to operate an actuator for rocking the mirror based on a deviation of a current position from an commanded value, a change in gain of the actuator is measured in accordance with each rocking angle in advance, and the manipulated variable of the actuator is corrected to cancel the change in gain. Thus, the influence of the alteration of a torque constant in accordance with the rocking angle can be suppressed so that the response characteristic becomes uniform all over a scanning region, and the positioning speed can be improved.

4. 发明专利

HK1074885A1 Scanner system 未知
公开(公告)号：HK1074885A1
公开(公告)日：2005-11-25
申请号：HK05106979
申请日：2005-08-12
申请人： HITACHI VIA MECHANICS LTD
发明人： TOYAMA SOUICHI , OTSUKI HARUAKI , SAKAMOTO ATSUSHI , SEKI KENTA , OKUBO YAICHI
IPC分类号： G02B20060101 , G02B26/10 , H01S20060101 , H05K3/00
摘要： A scanner system includes a servo control unit. A rotation angle of a rotating shaft supporting a mirror is detected, and an error of the detected value with respect to a commanded value is integrated by an integral compensator so that the detected value is able to track the commanded value. A tracking error proportional compensator is disposed in parallel with the integral compensator so as to add a correction value proportional to the error to the integrated value of the error. A plurality of gains are prepared for each of the integral compensator, the tracking error proportional compensator, a detected value proportional compensator and a detected value differential compensator of the servo control unit. Each gain is changed in accordance with a travel angle of the commanded value. Thus, the mirror can be positioned quickly so that the machining speed can be improved.

5. 发明专利

JP2011110589A Laser beam machining method 审中-公开
标题翻译：激光束加工方法
公开(公告)号：JP2011110589A
公开(公告)日：2011-06-09
申请号：JP2009270186
申请日：2009-11-27
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： MATSUKA DAISUKE , OTSUKI HARUAKI , SUGAWARA HIROYUKI , KITAMURA DAISUKE
IPC分类号： B23K26/38 , B23K26/00 , B23K26/04 , H05K3/00
摘要： PROBLEM TO BE SOLVED: To provide a trepanning machining method which can improve a machining efficiency. SOLUTION: A reference trepanning coordinate sequence, of which the start point is previously determined from a diameter D of a previously specified circular orbit C, a frequency, and the number of irradiation positions located on the circuit of the circular orbit C, is previously determined before the start of machining. After a moving target coordinate on a line AB from a start point A to a center point B of the circular orbit C is determined, a contact point Ps of a tangential line on the circular orbit C passed through the start point A is determined. A machining point of the reference trepanning coordinate sequence closest to the contact point Ps determined in the tangential direction is replaced by the start point P0. The x, y coordinate values at the machining point of the reference trepanning coordinate sequence obtained by reversely returning the reference trepanning coordinate sequence by a predetermined number from the start point P0 are respectively added to the x, y coordinate values of a moving target which is located at a predetermined number before the center point B, and the values are regarded as the moving target at the position in question. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供可以提高加工效率的切割加工方法。
解决方案：参考翻转坐标序列，其起始点预先由先前指定的圆轨道C的直径D，频率以及位于圆形轨道C的电路上的照射位置的数量确定，在加工开始之前是先前确定的。在从起始点A到圆轨道C的中心点B的线AB上的移动目标坐标被确定之后，确定通过起始点A的圆弧轨道C上的切线的接触点Ps。在切线方向上确定的接触点Ps最接近的参考横切坐标序列的加工点被起始点P0替换。在从起始点P0反向返回预定数量的基准百慕达坐标序列而获得的参考百慕达坐标序列的加工点的x，y坐标值分别与移动目标的x，y坐标值相加位于中心点B之前的预定数量，并且将这些值视为所讨论的位置处的移动目标。版权所有（C）2011，JPO＆INPIT

6. 发明专利

JP2008245464A Elecromagnetic actuator, and laser machining equipment 有权
标题翻译：电动执行器和激光加工设备
公开(公告)号：JP2008245464A
公开(公告)日：2008-10-09
申请号：JP2007084944
申请日：2007-03-28
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： OTSUKI HARUAKI , DOI AKIRA , KITAMURA KONOSUKE , OKUBO YAICHI , TOYAMA SOICHI
IPC分类号： H02K9/08 , G02B26/08 , G02B26/10
摘要： PROBLEM TO BE SOLVED: To provide an electromagnetic actuator and laser machining equipment capable of improving the operation rate by preventing the temperature rise.
SOLUTION: In the electromagnetic actuator in which a rotation angle of a rocking shaft 1 is detected by supporting the rocking shaft 1 having a rotor held at the central part in the shaft direction with a pair of bearings 5a, 5b disposed on both sides of the rotor, by allowing the bearings 5a, 5b to be supported with a cylindrical housing which holds the rotor, by covering the motor with the housing composed of an outer cylinder 4 and brackets 2, 3, and by disposing an angle detecting means at one shaft end of the rocking shaft 1, a gas inflow port 18 and a gas exhaust port 19 are provided which connects the outside and the inside of the outer cylinder 4. In this case, a cover 13 is provided in which the angle detecting means is airtightly covered with an O-ring 25 and a barrier rib 22 against the outside of the housing, and this cover 13 can be connected to the housing.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供能够通过防止温度升高来提高运行速度的电磁致动器和激光加工设备。解决方案：在电磁致动器中，通过在轴向上支撑具有保持在中心部分的转子的摆动轴1，通过一对轴承5a，5b来设置摆动轴1的旋转角度通过使轴承5a，5b由保持转子的圆筒形壳体支撑，通过用由外筒4和托架2,3组成的壳体覆盖电动机，并且通过设置角度检测装置在摆动轴1的一个轴端设置有连接外筒4的外侧和内侧的气体流入口18和排气口19.在这种情况下，设置盖13，其中角度检测装置通过O形环25和隔离肋22气密地覆盖住壳体的外部，并且该盖13可以连接到壳体。版权所有（C）2009，JPO＆INPIT

7. 发明专利

JP2007268576A Laser beam machining method 审中-公开
标题翻译：激光束加工方法
公开(公告)号：JP2007268576A
公开(公告)日：2007-10-18
申请号：JP2006098649
申请日：2006-03-31
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： KITAMURA DAISUKE , TOYAMA SOICHI , OKUBO YAICHI , SUGAWARA HIROYUKI , OTSUKI HARUAKI
IPC分类号： B23K26/38 , B23K26/08 , H05K3/00
摘要： PROBLEM TO BE SOLVED: To provide a laser beam machining method that excels in machining quality and machining efficiency.
SOLUTION: In drilling a hole by a laser beam having a smaller diameter than the target hole, for example, when the same place is irradiated by a laser beam three times for the purpose of obtaining a hole depth, the optical axis of the laser beam is moved on spiral trajectories K1, K2, K3 connecting the center O deviated 120° with respect to the center O of the hole and the outer edge. In this way, rut-like machining traces frequently generated on the bottom of the hole and a machining traces produced in the starting point can be prevented; thus, a machined part with a flat bottom can be obtained.
COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供在加工质量和加工效率方面优异的激光束加工方法。
解决方案：例如，当通过激光束照射相同的位置三次以获得孔深时，在通过具有比目标孔小的激光束钻孔时，光轴激光束在连接中心O相对于孔的中心O和外边缘偏离120°的螺旋轨迹K1，K2，K3上移动。以这种方式，可以防止在孔的底部经常产生的车辙状加工痕迹和起始点产生的加工痕迹; 因此，可以获得具有平坦底部的加工部分。版权所有（C）2008，JPO＆INPIT

8. 发明专利

JP2006235414A Laser scanner and laser beam machine using the same 审中-公开
标题翻译：激光扫描仪和激光光束机使用相同
公开(公告)号：JP2006235414A
公开(公告)日：2006-09-07
申请号：JP2005052239
申请日：2005-02-28
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： OTSUKI HARUAKI , SAKAMOTO ATSUSHI , DOI AKIRA , SUGAWARA HIROYUKI , TOYAMA SOICHI , OKUBO YAICHI , ONO TAKASHI
IPC分类号： G02B26/10 , B23K26/08 , B23K26/38
摘要： PROBLEM TO BE SOLVED: To improve positioning accuracy of a laser scanner.
SOLUTION: The laser scanner includes an electromagnetic actuator for rocking a mirror attached to the shaft end part of a rocking shaft to change the emission direction of a laser beam, a detector 120 for detecting the angle of rocking of the rocking shaft, and a controller for controlling the rocking shaft and the emission direction of the laser beam. The controller constitutes a servo mechanism which feeds back the angle of rocking to position the mirror. The electromagnetic actuator has a coil. A voltage applied to the coil and a current flowing in the coil are detected, and the applied voltage and the current which are sampled in the same time are filtered by filters 244a and 244b of the same characteristics. A resultant signal is processed by a digital processor, and a temperature estimation means 310 estimates the temperature of the coil on the basis of the processed signal, and torsional natural vibration of the rocking shaft are suppressed on the basis of the estimated temperature.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提高激光扫描仪的定位精度。解决方案：激光扫描仪包括用于摇摆安装在摇轴的轴端部的反射镜以改变激光束的发射方向的电磁致动器，用于检测摇摆轴的摆动角度的检测器120，以及用于控制摇轴和激光束的发射方向的控制器。控制器构成伺服机构，其反馈摆动角度以定位反射镜。电磁致动器具有线圈。检测施加到线圈的电压和在线圈中流动的电流，并且通过具有相同特性的滤波器244a和244b对施加的电压和同时采样的电流进行滤波。结果信号由数字处理器处理，温度估计装置310基于处理的信号估计线圈的温度，并且基于估计的温度来抑制摆动轴的扭转自然振动。版权所有（C）2006，JPO＆NCIPI

9. 发明专利

JP2005234215A Method of controlling galvanoscanner, galvanoscanner and laser machining apparatus 有权
标题翻译：控制糖蛋白酶，糖蛋白激酶和激光加工装置的方法
公开(公告)号：JP2005234215A
公开(公告)日：2005-09-02
申请号：JP2004043050
申请日：2004-02-19
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： OTSUKI HARUAKI , TOYAMA SOICHI , SEKI KENTA , OKUBO YAICHI , KITAMURA DAISUKE
IPC分类号： B23K26/00 , B23K26/08 , G02B5/08 , G02B7/182 , G02B26/00 , G02B26/10 , G02B26/12 , G06K7/10 , G06K7/14 , H05K3/00
CPC分类号： G02B26/105 , G02B7/1821
摘要： PROBLEM TO BE SOLVED: To provide a method of controlling a galvanoscanner with which a mirror is positioned at a high speed at any rocking angle, a galvanoscanner and a laser machining apparatus in which a hole is drilled on a printed substrate irradiated with a laser beam by using the galvanoscanner.
SOLUTION: An actuator 110 which rocks the mirror is operated on the basis of the deviation between a command signal 215 and a present position 242, and the operation amount of the actuator 110 is so corrected to eliminate a gain variation by preliminarily measuring the gain variation of the actuator 110 corresponding to the rocking angle. Thus, the influence of the variation in a torque constant corresponding to the rocking angle is suppressed, a response characteristic is uniformized over a whole scanning region and the positioning speed is increased.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种控制反射镜以任何摆动角度高速定位的电流扫描器的方法，电扫描仪和激光加工设备，其中在被照射的印刷基板上钻孔使用电流扫描仪的激光束。解决方案：基于命令信号215和当前位置242之间的偏差来操作摇动反射镜的致动器110，并且致动器110的操作量被校正以通过预先测量来消除增益变化致动器110的增益变化对应于摆动角度。因此，抑制与摆动角度相对应的转矩常数的变化的影响，使整个扫描区域的响应特性均匀化，并且定位速度提高。版权所有（C）2005，JPO＆NCIPI

10. 发明专利

JP2005173377A Scanner device 有权
标题翻译：扫描仪
公开(公告)号：JP2005173377A
公开(公告)日：2005-06-30
申请号：JP2003415247
申请日：2003-12-12
申请人： Hitachi Via Mechanics Ltd , 日立ビアメカニクス株式会社
发明人： TOYAMA SOICHI , OTSUKI HARUAKI , SAKAMOTO ATSUSHI , SEKI KENTA , OKUBO YAICHI
IPC分类号： B23K26/08 , G02B26/10 , H05K3/00
CPC分类号： G02B26/105 , B23K26/08 , B23K26/082 , H05K3/0026
摘要： PROBLEM TO BE SOLVED: To provide a scanner device which quickly conducts positioning for a mirror and increases a processing speed.
SOLUTION: In the scanner device, a servo controller 2 is provided, a rotational angle of a rotary shaft 13 which supports a mirror 12 is detected and a deviation of the detected detection value with respect to a command value is integrated by an integral compensator 24 so that the detected value follows up the command value. A follow-up error proportional compensator 25 is arranged in parallel with the integral compensator 24 so as to add a correction value proportional to the deviation of the integrated value of the deviation. Moreover, a plurality of the gains for the integral compensator 24, the follow-up error proportional compensator 25, a detected value proportional compensator 27 and a detected value differential compensator 28 of the servo controller 2 are beforehand prepared and the respective gains are changed in accordance with the moving stroke of the angular command for the mirror 12.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种快速进行反射镜定位并提高处理速度的扫描仪装置。解决方案：在扫描仪装置中，设置有伺服控制器2，检测到支撑反射镜12的旋转轴13的旋转角度，并且检测到的检测值相对于指令值的偏差通过积分补偿器24，使得检测值跟随命令值。随机误差比例补偿器25与积分补偿器24并联布置，以便增加与偏差的积分值的偏差成比例的校正值。此外，预先准备积分补偿器24，跟踪误差比例补偿器25，检测值比例补偿器27和检测值差分补偿器28的多个增益，并且各自的增益被改变根据反射镜12的角度指令的移动行程。（C）2005年，JPO和NCIPI

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