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    • 1. 发明专利
    • Clean room facility
    • 清洁厅设施
    • JP2000074438A
    • 2000-03-14
    • JP26399398
    • 1998-09-01
    • Hitachi Plant Eng & Constr Co Ltd日立プラント建設株式会社
    • YOSHIDA HANHAKUKONISHI SHUNICHIFUKUI ITSUSHIMIYAJIMA YUJI
    • F24F7/06
    • PROBLEM TO BE SOLVED: To hold clean a necessary partially working space for a maintenance or the like by providing a fan filter unit for injecting clean air to an underfloor space of a grating via a grating floor.
      SOLUTION: The clean room facility has a grating floor 20. A fan filter unit 26 is installed on a ceiling 24 for forming a clean room 22. The air sucked from a garret space 28 is purified by the unit 26, injected into the room 22, and the room 22 is maintained in a clean atmosphere. Further, the air in the room 22 is guided to an underfloor space 30 via the floor 20, circulated to the space 28 via a circulating passage space 34 at an outside of a sidewall 32 of the room 22, and again supplied to the room 22 via the unit 26.
      COPYRIGHT: (C)2000,JPO
    • 要解决的问题:通过提供用于通过格栅地板将清洁空气喷射到格栅的地板下空间的风扇过滤器单元来保持用于维护等的必要的部分工作空间。 解决方案:洁净室设施具有光栅底板20.风扇过滤器单元26安装在用于形成洁净室22的天花板24上。从阁楼空间28吸入的空气被单元26净化,注入房间22 ,并且房间22保持在清洁的气氛中。 此外,房间22中的空气经由地板20被引导到底板20,通过在房间22的侧壁32的外部的循环通道空间34循环到空间28,并再次供应到房间22 通过单元26。
    • 2. 发明专利
    • MULTILAYER PIEZOELECTRIC ACTUATOR
    • JPH07183586A
    • 1995-07-21
    • JP34808793
    • 1993-12-24
    • HITACHI PLANT ENG & CONSTR CO
    • KAJIWARA KOICHIHAYATSU MASAKIFUKUI ITSUSHI
    • F03G7/00H01L41/083
    • PURPOSE:To prevent breakdown of a multilayer piezoelectric element even when an offset load or a force of rotation in the horizontal direction is applied to a pressure top plate, by a construction wherein at least either the side of the multilayer piezoelectric element and the pressure top plate or the side of the multilayer piezoelectric element and a bottom plate is put in spherical joining with each other. CONSTITUTION:The upper surface of a lower support member 26 interposed between the lower end of a multilayer piezoelectric element 18 and a bottom plate 12 is fixed on the lower end face of the multilayer piezoelectric element 18, while a spherical recession 26A is formed in the central part of the lower surface of the member and put in spherical joining with a spherical projection 12A formed in the central part of the bottom plate 12. A spherical recession 24A is formed in the central part of the upper surface of an upper support member 24 and put in spherical joining with a spherical projection 20A formed in the central part of the lower surface of a pressure top plate 20. In the case when the load of an object 36 is not applied uniformly to the pressure top plate 20, but becomes an offset load, the offset load is transmitted to the multilayer piezoelectric element 18 through the part of the spherical joining of the pressure top plate 20 with the upper support member 24. Thereby the offset load acts as a uniform load in the direction of lamination of layers.
    • 9. 发明专利
    • VIBRATION ABSORBING UNIT
    • JPH02173433A
    • 1990-07-04
    • JP32831888
    • 1988-12-26
    • HITACHI PLANT ENG & CONSTR CO
    • FUKUI ITSUSHITSURUTA AKIRAYUGAWA TAKAO
    • F16M7/00F16F15/02F16F15/023
    • PURPOSE:To enable damage to be prevented of vibration converting by shear resistance into slow oscillation the vibration applied to a mounting equipment by immersing a movable plate, suspended by a rope, in a viscous material housed in a unit casing. CONSTITUTION:A vibration absorbing unit 15 is formed by a casing 16, viscous material 17 housed in the casing 16 and a movable plate 19 hung down so as to be movable in the viscous material 17 from an upper part of the casing 16 through a wire rope 18. This rope 18 is connected in its both upper and lower end parts fixed by a stopper pin 20, and the movable plate 19 secures a supporting strut 21 while securing to its upper end part a mounting plate 22. Since a natural vibrative frequency can be changed by changing a length of the rope 18, the movable plate 19 hung thereby oscillates by the natural vibration frequency in no relation to a horizontal vibration from a foundation floor serving as the base part. Then in order to suppress amplitude of the oscillation, the movable plate 19 is constituted, being immersed in the viscous material 17 housed in the casing 16.